KR970019754U - 웨이퍼 감지장치 - Google Patents

웨이퍼 감지장치

Info

Publication number
KR970019754U
KR970019754U KR2019950027571U KR19950027571U KR970019754U KR 970019754 U KR970019754 U KR 970019754U KR 2019950027571 U KR2019950027571 U KR 2019950027571U KR 19950027571 U KR19950027571 U KR 19950027571U KR 970019754 U KR970019754 U KR 970019754U
Authority
KR
South Korea
Prior art keywords
detection device
wafer detection
wafer
detection
Prior art date
Application number
KR2019950027571U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950027571U priority Critical patent/KR970019754U/ko
Publication of KR970019754U publication Critical patent/KR970019754U/ko

Links

KR2019950027571U 1995-10-02 1995-10-02 웨이퍼 감지장치 KR970019754U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950027571U KR970019754U (ko) 1995-10-02 1995-10-02 웨이퍼 감지장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950027571U KR970019754U (ko) 1995-10-02 1995-10-02 웨이퍼 감지장치

Publications (1)

Publication Number Publication Date
KR970019754U true KR970019754U (ko) 1997-05-26

Family

ID=60842122

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950027571U KR970019754U (ko) 1995-10-02 1995-10-02 웨이퍼 감지장치

Country Status (1)

Country Link
KR (1) KR970019754U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application