KR970019754U - 웨이퍼 감지장치 - Google Patents
웨이퍼 감지장치Info
- Publication number
- KR970019754U KR970019754U KR2019950027571U KR19950027571U KR970019754U KR 970019754 U KR970019754 U KR 970019754U KR 2019950027571 U KR2019950027571 U KR 2019950027571U KR 19950027571 U KR19950027571 U KR 19950027571U KR 970019754 U KR970019754 U KR 970019754U
- Authority
- KR
- South Korea
- Prior art keywords
- detection device
- wafer detection
- wafer
- detection
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950027571U KR970019754U (ko) | 1995-10-02 | 1995-10-02 | 웨이퍼 감지장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950027571U KR970019754U (ko) | 1995-10-02 | 1995-10-02 | 웨이퍼 감지장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970019754U true KR970019754U (ko) | 1997-05-26 |
Family
ID=60842122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950027571U KR970019754U (ko) | 1995-10-02 | 1995-10-02 | 웨이퍼 감지장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970019754U (ko) |
-
1995
- 1995-10-02 KR KR2019950027571U patent/KR970019754U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |