DE69623539T2 - Positionserfassungseinrichtung - Google Patents

Positionserfassungseinrichtung

Info

Publication number
DE69623539T2
DE69623539T2 DE69623539T DE69623539T DE69623539T2 DE 69623539 T2 DE69623539 T2 DE 69623539T2 DE 69623539 T DE69623539 T DE 69623539T DE 69623539 T DE69623539 T DE 69623539T DE 69623539 T2 DE69623539 T2 DE 69623539T2
Authority
DE
Germany
Prior art keywords
detection device
position detection
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69623539T
Other languages
English (en)
Other versions
DE69623539D1 (de
Inventor
Takaaki Yagi
Mitsuchika Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE69623539D1 publication Critical patent/DE69623539D1/de
Publication of DE69623539T2 publication Critical patent/DE69623539T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE69623539T 1995-06-12 1996-06-12 Positionserfassungseinrichtung Expired - Lifetime DE69623539T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16922595A JP3625530B2 (ja) 1995-06-12 1995-06-12 位置検出装置及び位置検出方法

Publications (2)

Publication Number Publication Date
DE69623539D1 DE69623539D1 (de) 2002-10-17
DE69623539T2 true DE69623539T2 (de) 2003-06-26

Family

ID=15882546

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69623539T Expired - Lifetime DE69623539T2 (de) 1995-06-12 1996-06-12 Positionserfassungseinrichtung

Country Status (4)

Country Link
US (1) US5896032A (de)
EP (1) EP0749002B1 (de)
JP (1) JP3625530B2 (de)
DE (1) DE69623539T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019118693A1 (de) * 2019-07-10 2021-01-14 Ewellix AB Positionssensorik, Verfahren zur Positionsermittlung und Linearaktuator

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6024526A (en) * 1995-10-20 2000-02-15 Aesop, Inc. Integrated prober, handler and tester for semiconductor components
FR2761468B1 (fr) * 1997-03-28 1999-06-11 Canon Kk Procede et dispositif pour determiner une quantite de produit consommable presente dans un reservoir et dispositif d'impression de documents mettant en oeuvre ce procede
CN1155794C (zh) 1999-12-02 2004-06-30 株式会社三丰 静电电容式变位检测装置
US7142500B2 (en) * 2002-01-11 2006-11-28 Hewlett-Packard Development Company, L.P. Sensor with varying capacitance based on relative position between objects
US7075317B2 (en) * 2004-08-06 2006-07-11 Waters Investment Limited System and method for measurement of small-angle or small-displacement
US7583006B2 (en) * 2005-07-26 2009-09-01 Siimpel Corporation MEMS digital linear actuator
JP2007093287A (ja) * 2005-09-27 2007-04-12 Tietech Co Ltd リニアモータ
KR100876912B1 (ko) * 2006-07-13 2009-01-08 부산대학교 산학협력단 변위증폭측정 메카니즘을 구비한 스테이지
WO2008007838A1 (en) * 2006-07-13 2008-01-17 Pusan National University Industry University Cooperation Foundation Stage with displacement magnification mechanism for measuring
US8922226B2 (en) * 2006-08-28 2014-12-30 Detection Systems Pty Ltd Production line detection apparatus and method
JP5171395B2 (ja) * 2007-07-31 2013-03-27 京セラ株式会社 ステージの位置変動検出装置およびこれを備えた搬送装置
US7570066B2 (en) * 2007-11-01 2009-08-04 Seagate Technology Llc Simultaneous detection of in-plane and out-of-plane position displacement with capacitive sensors
JP5153457B2 (ja) * 2008-05-29 2013-02-27 京セラ株式会社 ステージの位置変動検出装置およびこれを備えた搬送装置
WO2010023767A1 (ja) * 2008-09-01 2010-03-04 パイオニア株式会社 変位センサ
WO2010023766A1 (ja) * 2008-09-01 2010-03-04 パイオニア株式会社 変位センサ
JP2010210414A (ja) * 2009-03-10 2010-09-24 Toshiba Corp センサ装置
EP2409163A4 (de) * 2009-03-19 2012-08-29 Hewlett Packard Development Co Auf kapazität basierende dreiphasenerfassung
DE102011078077A1 (de) * 2011-06-24 2012-12-27 Ident Technology Ag Leiterplatte mit Elektrodenkonfiguration eines kapazitiven Sensors
US20130141736A1 (en) * 2011-12-01 2013-06-06 Mingwu Bai Control method and apparatus for positioning a moving object
KR20130088479A (ko) * 2012-01-31 2013-08-08 삼성전자주식회사 슬립-스틱방식 압전 구동 장치
CN104677390B (zh) * 2013-11-26 2017-09-29 林立 电容式传感器及组合电容式位移测量传感系统
JP6156747B2 (ja) * 2014-12-17 2017-07-05 オリエンタルモーター株式会社 静電エンコーダ
JP6611467B2 (ja) 2015-05-19 2019-11-27 キヤノン株式会社 変位検出装置、レンズ鏡筒、および、撮像装置
CN109916284A (zh) * 2019-03-01 2019-06-21 维沃移动通信有限公司 一种位置检测方法及终端设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3348133A (en) * 1962-10-25 1967-10-17 Sogenique Electronics Ltd Position responsive apparatus including a capacitive potentiometer
JPS568508A (en) * 1979-07-02 1981-01-28 Nippon Soken Inc Rotation detector
JPS57148262A (en) * 1981-03-09 1982-09-13 Nippon Soken Inc Detecting device for rotating direction
US4631524A (en) * 1983-05-02 1986-12-23 Computer Memories, Inc. Capacitive encoder having multiple precision outputs
JPS604801A (ja) * 1983-06-23 1985-01-11 Ryochi Kato 静電容量形変位検出器
US4566193A (en) * 1984-07-31 1986-01-28 Hewlett-Packard Company Use of an electronic vernier for evaluation of alignment in semiconductor processing
JPS62235503A (ja) * 1986-04-04 1987-10-15 Mitsutoyo Corp 容量型位置測定トランスデユ−サ
US4879508A (en) * 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
DE3854173T2 (de) * 1987-08-25 1995-11-30 Canon Kk Codiereinrichtung.
US4893071A (en) * 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control
US5012237A (en) * 1989-05-26 1991-04-30 Cummins Electronics Company, Inc. Reflected electrostatic field angle resolver
US5708367A (en) * 1995-07-10 1998-01-13 Tousson; Eliahou Digital position sensor
US5731707A (en) * 1996-04-17 1998-03-24 Mitutoyo Corporation Method and apparatus for synthesizing spatial waveforms in an electronic position encoder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019118693A1 (de) * 2019-07-10 2021-01-14 Ewellix AB Positionssensorik, Verfahren zur Positionsermittlung und Linearaktuator
US11664714B2 (en) 2019-07-10 2023-05-30 Ewellix AB Position sensor assembly, position-determining method, and linear actuator

Also Published As

Publication number Publication date
EP0749002A1 (de) 1996-12-18
US5896032A (en) 1999-04-20
DE69623539D1 (de) 2002-10-17
EP0749002B1 (de) 2002-09-11
JP3625530B2 (ja) 2005-03-02
JPH095111A (ja) 1997-01-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE