DE69523800T2 - Festpunktdetektionsvorrichtung - Google Patents

Festpunktdetektionsvorrichtung

Info

Publication number
DE69523800T2
DE69523800T2 DE69523800T DE69523800T DE69523800T2 DE 69523800 T2 DE69523800 T2 DE 69523800T2 DE 69523800 T DE69523800 T DE 69523800T DE 69523800 T DE69523800 T DE 69523800T DE 69523800 T2 DE69523800 T2 DE 69523800T2
Authority
DE
Germany
Prior art keywords
detection device
fixed point
point detection
fixed
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69523800T
Other languages
English (en)
Other versions
DE69523800D1 (de
Inventor
Hideaki Tamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Magnescale Co Ltd
Original Assignee
Sony Precision Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Precision Technology Inc filed Critical Sony Precision Technology Inc
Publication of DE69523800D1 publication Critical patent/DE69523800D1/de
Application granted granted Critical
Publication of DE69523800T2 publication Critical patent/DE69523800T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
DE69523800T 1994-03-31 1995-03-30 Festpunktdetektionsvorrichtung Expired - Lifetime DE69523800T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06390194A JP3395339B2 (ja) 1994-03-31 1994-03-31 定点検出装置

Publications (2)

Publication Number Publication Date
DE69523800D1 DE69523800D1 (de) 2001-12-20
DE69523800T2 true DE69523800T2 (de) 2002-05-16

Family

ID=13242690

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69523800T Expired - Lifetime DE69523800T2 (de) 1994-03-31 1995-03-30 Festpunktdetektionsvorrichtung

Country Status (4)

Country Link
US (1) US5637868A (de)
EP (1) EP0675343B1 (de)
JP (1) JP3395339B2 (de)
DE (1) DE69523800T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW333615B (en) 1996-06-05 1998-06-11 Toppan Printing Co Ltd Holographic reflector and reflective liquid crystal display using the same
DE19921309A1 (de) * 1999-05-07 2000-11-09 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmeßeinrichtung
WO2003021185A1 (de) 2001-09-04 2003-03-13 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und verfahren zum betrieb einer positionsmesseinrichtung
EP1649564A4 (de) 2003-07-03 2007-09-05 Pd Ld Inc Verwendung von volumen-bragg-gittern zur aufbereitung von laseremissionskenngrössen
JP4751032B2 (ja) * 2004-04-22 2011-08-17 株式会社森精機製作所 変位検出装置
JP4810949B2 (ja) * 2005-09-29 2011-11-09 ソニー株式会社 光学装置及び画像表示装置
JP5066401B2 (ja) * 2007-07-24 2012-11-07 株式会社森精機製作所 定点検出装置及び変位測定装置
TWI364566B (en) * 2008-02-18 2012-05-21 Univ Nat Chiao Tung Long-length fiber bragg gratings sequential uv writing by probing phase mask
CN102162719B (zh) * 2010-12-20 2012-12-19 昆明理工大学 一种截面积是矩形的木材体积的自动计量方法
JP6161870B2 (ja) * 2012-03-12 2017-07-12 Dmg森精機株式会社 位置検出装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61153501A (ja) * 1984-12-26 1986-07-12 Nippon Kogaku Kk <Nikon> 位置検出装置
JP2586120B2 (ja) * 1988-09-22 1997-02-26 キヤノン株式会社 エンコーダー
EP0425726B1 (de) * 1989-11-02 1993-05-12 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
JPH05232318A (ja) * 1991-02-19 1993-09-10 Sony Magnescale Inc 反射形ホログラムスケール
JP3030905B2 (ja) * 1991-04-24 2000-04-10 ソニー・プレシジョン・テクノロジー株式会社 定点検出装置
US5430561A (en) * 1991-07-17 1995-07-04 Fujitsu Limited Optical space switch employing 2 parallel diffraction gratings and a polarization rotating element
JP3478567B2 (ja) * 1992-09-25 2003-12-15 キヤノン株式会社 回転情報検出装置
JPH06194123A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置

Also Published As

Publication number Publication date
US5637868A (en) 1997-06-10
EP0675343B1 (de) 2001-11-14
EP0675343A2 (de) 1995-10-04
EP0675343A3 (de) 1997-06-04
DE69523800D1 (de) 2001-12-20
JPH07270189A (ja) 1995-10-20
JP3395339B2 (ja) 2003-04-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MAGNESCALE CO., LTD., TOKYO, JP