KR960019128U - 웨이퍼 검출 장치 - Google Patents
웨이퍼 검출 장치Info
- Publication number
- KR960019128U KR960019128U KR2019940030201U KR19940030201U KR960019128U KR 960019128 U KR960019128 U KR 960019128U KR 2019940030201 U KR2019940030201 U KR 2019940030201U KR 19940030201 U KR19940030201 U KR 19940030201U KR 960019128 U KR960019128 U KR 960019128U
- Authority
- KR
- South Korea
- Prior art keywords
- detection device
- wafer detection
- wafer
- detection
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940030201U KR200180664Y1 (ko) | 1994-11-15 | 1994-11-15 | 웨이퍼 검출 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940030201U KR200180664Y1 (ko) | 1994-11-15 | 1994-11-15 | 웨이퍼 검출 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960019128U true KR960019128U (ko) | 1996-06-19 |
KR200180664Y1 KR200180664Y1 (ko) | 2000-05-15 |
Family
ID=19398189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940030201U KR200180664Y1 (ko) | 1994-11-15 | 1994-11-15 | 웨이퍼 검출 장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200180664Y1 (ko) |
-
1994
- 1994-11-15 KR KR2019940030201U patent/KR200180664Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200180664Y1 (ko) | 2000-05-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
LAPS | Lapse due to unpaid annual fee |