KR960025409U - 웨이퍼 플랫 존 감지 장치 - Google Patents

웨이퍼 플랫 존 감지 장치

Info

Publication number
KR960025409U
KR960025409U KR2019940033478U KR19940033478U KR960025409U KR 960025409 U KR960025409 U KR 960025409U KR 2019940033478 U KR2019940033478 U KR 2019940033478U KR 19940033478 U KR19940033478 U KR 19940033478U KR 960025409 U KR960025409 U KR 960025409U
Authority
KR
South Korea
Prior art keywords
detection device
flat zone
zone detection
wafer flat
wafer
Prior art date
Application number
KR2019940033478U
Other languages
English (en)
Other versions
KR0130135Y1 (ko
Inventor
여태현
정창열
이영철
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940033478U priority Critical patent/KR0130135Y1/ko
Publication of KR960025409U publication Critical patent/KR960025409U/ko
Application granted granted Critical
Publication of KR0130135Y1 publication Critical patent/KR0130135Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940033478U 1994-12-09 1994-12-09 웨이퍼 플랫 존 감지 장치 KR0130135Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940033478U KR0130135Y1 (ko) 1994-12-09 1994-12-09 웨이퍼 플랫 존 감지 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940033478U KR0130135Y1 (ko) 1994-12-09 1994-12-09 웨이퍼 플랫 존 감지 장치

Publications (2)

Publication Number Publication Date
KR960025409U true KR960025409U (ko) 1996-07-22
KR0130135Y1 KR0130135Y1 (ko) 1999-02-01

Family

ID=19400863

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940033478U KR0130135Y1 (ko) 1994-12-09 1994-12-09 웨이퍼 플랫 존 감지 장치

Country Status (1)

Country Link
KR (1) KR0130135Y1 (ko)

Also Published As

Publication number Publication date
KR0130135Y1 (ko) 1999-02-01

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Legal Events

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