KR950031892A - 수소가스의 정제방법 - Google Patents

수소가스의 정제방법 Download PDF

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Publication number
KR950031892A
KR950031892A KR1019950004315A KR19950004315A KR950031892A KR 950031892 A KR950031892 A KR 950031892A KR 1019950004315 A KR1019950004315 A KR 1019950004315A KR 19950004315 A KR19950004315 A KR 19950004315A KR 950031892 A KR950031892 A KR 950031892A
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hydrogen gas
purifying
zirconium alloy
raw material
zirconium
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KR1019950004315A
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KR100357293B1 (ko
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켄지 오쓰카
노보루 타케마사
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야마자키 로이치
니뽄 파이오닉스 가부시끼가이샤
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/56—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/56—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
    • C01B3/58—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids including a catalytic reaction
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/042—Purification by adsorption on solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465—Composition of the impurity
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465—Composition of the impurity
    • C01B2203/047—Composition of the impurity the impurity being carbon monoxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465—Composition of the impurity
    • C01B2203/0475—Composition of the impurity the impurity being carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465—Composition of the impurity
    • C01B2203/048—Composition of the impurity the impurity being an organic compound

Abstract

1. 청구범위에 기재된 발명이 속한 기술분야
본 발명은 수소가스의 정제방법에 관하여 보다 상세히는 수소가스를 가열하여 특정의 정제재와 접촉시켜 수소가스 중의 불순물을 제거하는 것에 의해 수소가스를 정제하는 방법이다.
2. 발명이 해결하려고 하는 기술적 과제
본 발명은 수소가스 중에 ppm상태로 존재하는 질소, 탄화수소, 일산화탄소, 이산화탄소, 산소 및 수중기등의 불순물을 제거하여 ppb상태 또는 그 이하로 정제하려 한다.
3. 발명의 해결방법의 요지
본 발명은 불순물을 함유하는 원료수소가스를 지르코늄 합금의 수소화물과 가열하에서 접촉시키고 원료수소 가스중에 함유된 불순물을 제거하는 것을 특징으로 하는 수소가스의 정제방법.
4. 발명의 중요한 용도
본 발명은 반도체 제조 공업에서 각 공정중의 분위기 가스로 쓰이는 수소가스의 순도향상으로 반도체의 집적도 향상을 이룬다.

Description

수소가스의 정제방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 방법에 이용하는 수소가스 정제장치의 작업공정도의 일예이다.

Claims (11)

  1. 분순물을 함유하는 원료수소 가스를 지르코늄 합금의 수소화믈과 가열하에서 접촉시키고, 그 원료수소가스 중에 함유된 불순물을 제거하는 것을 특징으로 하는 수소가스의 정제방법.
  2. 제1항에 있어서, 지르코늄 합금의 수소화물이 지르코늄 합금과 수소가스의 접촉에 의한 수소화반응으로 얻어진 것을 특징으로 하는 수소가스의 정제방법.
  3. 제2항에 있어서, 수소화반응용의 수소가스기 희가스에서 1~40VO1%로 희석된 수소가스인 것을 특징으로 하는 수소가스의 정제방법.
  4. 제3항에 있어서, 희가스가 아르곤 또는 헬륨인 것을 특징으로 하는 수소가스의 정제방법.
  5. 제1항에 있어서, 지르코늄 합금이 바나듐 5~50중량% 및 잔여부분이 지르코늄으로 된 2원합금인 것을 특징으로 하느 수소가스의 정제방법.
  6. 제1항에 있어서, 지르코늄 합금이, 바나듐 5~50중량%, 니켈, 트롬 및 코발트로 선택된 원소중 적어도 한종에 있어서, 그 합계함유량이 0.5~30중량% 및 잔여부분의 지르코늄으로 된 다원합금인 것을 특징으로 하는 수소가스의 정제방법.
  7. 제1항에 있어서, 원료수소 가스와, 지르코늄 합금의 수소화물의 접촉온도가 400~600℃인 것을 특징으로 하는 수소가스의 정제방법.
  8. 제1항에 있어서, 원료수소 가스와, 지르코늄 합금의 수소화물의 접촉이 정제통 내에서 행해지는 것을 특징으로 하는 수소가스의 정제방법.
  9. 제2항에 있어서, 지르코늄합금과 수소가스의 접촉에 의한 수소화반응이, 그 원료수소가스의 정제통 내에서 행해지는 것을 특징으로 하는 수소가스의 정제방법.
  10. 제8항에 있어서, 정제통의 재질이 SUS 361L, SUS304L, SUS321, SUS347 또는 지르코늄합금인 것을 특징으로 하는 수소가스의 정제방법.
  11. 제1항에 있어서, 원료수소가스가 니켈촉매, 동촉매, 합성제올라이트, 활성탄, 분자체탄소, 실리카겔로 선택된 1종 또는 2종 이상의 충진된 상온식 흡착통으로 전처리가 행해진 가스인 것을 특징으로 하는 수소가스의 정제방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950004315A 1994-03-04 1995-03-03 수소가스의정제방법 KR100357293B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP94-58353 1994-03-04
JP05835394A JP3462560B2 (ja) 1994-03-04 1994-03-04 水素ガスの精製方法

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KR950031892A true KR950031892A (ko) 1995-12-20
KR100357293B1 KR100357293B1 (ko) 2003-01-24

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US (1) US5489327A (ko)
EP (1) EP0670285B1 (ko)
JP (1) JP3462560B2 (ko)
KR (1) KR100357293B1 (ko)
DE (1) DE69504381T2 (ko)
TW (1) TW282446B (ko)

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US5489327A (en) 1996-02-06
EP0670285B1 (en) 1998-09-02
DE69504381T2 (de) 1999-02-18
KR100357293B1 (ko) 2003-01-24
JP3462560B2 (ja) 2003-11-05
DE69504381D1 (de) 1998-10-08
TW282446B (ko) 1996-08-01
JPH07242401A (ja) 1995-09-19
EP0670285A1 (en) 1995-09-06

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