KR930023746A - 공간 광 변조기 패키지 및 그 패키지 방법 - Google Patents

공간 광 변조기 패키지 및 그 패키지 방법 Download PDF

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Publication number
KR930023746A
KR930023746A KR1019930008532A KR930008532A KR930023746A KR 930023746 A KR930023746 A KR 930023746A KR 1019930008532 A KR1019930008532 A KR 1019930008532A KR 930008532 A KR930008532 A KR 930008532A KR 930023746 A KR930023746 A KR 930023746A
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South Korea
Prior art keywords
spatial light
light modulator
superstrate
package
buffer memory
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KR1019930008532A
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English (en)
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비. 샘프셀 제프리
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윌리엄 이. 힐러
텍사스 인스트루먼츠 인코포레이티드
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Publication of KR930023746A publication Critical patent/KR930023746A/ko

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

변조기 패키지(10)는 두 가지 다른 데이타 속도로 동작시키는 변조기에 인접하여 장착된 메모리를 구비한다. 하나의 속도는 처리기로부터 어레이까지 최소의 와이어(16a-d)수를 필요로 하는 정상상태의 데이타 속도이다. 다른 속도는 서로 다른 입력과 출력 속도를 갖는 메모리 버퍼와 비교적 높은 핀 카운트를 갖는 능력으로서 가능해진다. 상기 다른 속도는 변조기가 새로운 데이타를 갱신하는 데 걸리는 시간이 버스트 데이타 속도이다.

Description

공간 광 변조기 패키지 및 그 패키지 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 데이타 처리 방법의 개략도, 제2도는 공간 광 변조기 패키지의 개략도, 제3도는 패키지 공정의 한 실시예.

Claims (20)

  1. 공간 광 변조기 패키지에 있어서 슈퍼스트레이트, 상기 슈퍼스트레이트 상의 한 개 이상의 데이타 버스, 상기 버스에 전기적으로 접속되어 있는 상기 슈퍼스트레이트 상의 한 개 이상의 접속부, 상기 버스로부터 제1속도로 데이타를 수신할 수 있도록 동작가능한 상기 버스에 접속된 상기 슈퍼스트레이트 상의 한 개 이상의 버퍼 메모리, 상기 버퍼 메모리부터 제2의 속도로 데이타를 수신하기 위해 어드레스 회로가 전기적으로 접속된 상기 슈퍼스트레이트 상의 공간 광 변조기 어레이, 상기 변조기 어레이 근처에 있는 상기 슈퍼스트레이트 상의 링, 및 상기 변조기로 부터 광이 통과하는 것을 가능케하는 상기 슈퍼스트레이트 상의 윈도우를 포함하는 것을 특징으로 하는 공간 광 변조기 패키지.
  2. 제1항에 있어서, 상기 슈퍼스트레이트 세라믹(ceramic)인 것을 특징으로 하는 공간 광 변조기 패키지.
  3. 제1항에 있어서, 상기 슈퍼스트레이트가 복수의 데이타 버스를 수용하는 것을 특징으로 하는 공간 광 변조기 패키지.
  4. 제1항에 있어서, 특징으로 하는 공간 광 변조기 패키지.
  5. 제1항에 있어서, 특징으로 하는 공간 광 변조기 패키지.
  6. 제1항에 있어서, 특징으로 하는 공간 광 변조기 패키지.
  7. 제1항에 있어서, 특징으로 하는 공간 광 변조기 패키지.
  8. 제7항에 있어서 상기 반사형 변조기는 디지탈 마이크로미러 소자(DMD)인 것을 특징으로 하는 공간 광 변조기 패키지.
  9. 제1항에 있어서 상기 공간 광 변조기는 전송형 변조기인 것을 특징으로 하는 공간 광 변조기 패키지.
  10. 공간 광 변조기의 패키지 방법에 있어서, 슈퍼스트레이트의 준비단계, 상기 슈퍼스트레이트 위의 버스선과 접착패드를 한정하는 단계, 상기 슈퍼스트레이트에 버퍼 메모리를 부착하는 단계, 상기 접착패드에 상기 버퍼 메모리를 전기적으로 접속하는 단계, 상기 버퍼 메모리를 검사하는 단계, 공간 광 변조기를 상기 슈퍼스트레이트에 부착하는 단계, 상기 공간 광 변조기를 상기 접착 패드에 전기적으로 접속하는 단계, 슈퍼스트레이트의 적어도 일부를 윈도우로 덮는 단계 및 상기 슈퍼스트레이트상의 상기 접속을 검사하는 단계를 구비하는 것을 특징으로 하는 공간 광 변조기 패키지 방법.
  11. 제10항에 있어서, 상기 준비단계는 더욱 부착시키기 위해 구멍뚫는 단계를 포함하는 것을 특징으로 하는 공간 광 변조기 패키지 방법.
  12. 제10항에 있어서 상기 준비단계는 상기 슈퍼스트레이트를 금속화시키는 단계를 포함하는 것을 특징으로 하는 공간 광 변조기 패키지 방법.
  13. 제10항에 있어서, 상기 버퍼 메모리는 FIFO인 것을 특징으로 하는 공간 광 변조기 패키지 방법.
  14. 제10항에 있어서, 상기 버퍼 메모리는 VRAM인 것을 특징으로 하는 공간 광 변조기 패키지 방법.
  15. 제10항에 있어서, 상기 버퍼 메모리는 커스텀 메모리 회로인 것을 특징으로 하는 공간 광 변조기 패키지 방법.
  16. 제10항에 있어서, 상기 버퍼 메모리 부착 단게는 상기 버퍼 메모리를 고착시키는 단계를 구비하는 것을 특징으로 하는 공간 광 변조기 패키지 방법.
  17. 제10항에 있어서, 상기 버퍼 메모리를 전기적으로 접속하는 단계는 상기 메모리에서 나오는 와이어를 상기 접착 패드에 접속시키는 단계를 구비하는 것을 특징으로 하는 공간 광 변조기 패키지 방법.
  18. 제10항에 있어서, 상기 공간 광 변조리를 부착하는 단계는 상기 변조기를 고착시키는 단계를 구비하는 것을 특징으로 하는 공간 광 변조기 패키지 방법.
  19. 제10항에 있어서, 상기 공간 광 변조기를 전기적으로 접속시키는 단계는 상기 변조기에서 나오는 와이어를 상기 접착 패드에 접속시키는 단계를 구비하는 것을 특징으로 하는 공간 광 변조기 패키지 방법.
  20. 제10항에 있어서, 상기 윈도우는 상기 변조기를 둘러싸는 링위에 놓여있는 것을 특징으로 하는 공간 광 변조기 패키지 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930008532A 1992-05-20 1993-05-19 공간 광 변조기 패키지 및 그 패키지 방법 KR930023746A (ko)

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US88607792A 1992-05-20 1992-05-20
US7/886,077 1992-05-20

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US (1) US5610625A (ko)
EP (1) EP0570960B1 (ko)
JP (1) JPH0651250A (ko)
KR (1) KR930023746A (ko)
DE (1) DE69312165T2 (ko)
TW (1) TW271007B (ko)

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DE69312165D1 (de) 1997-08-21
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US5610625A (en) 1997-03-11
EP0570960A1 (en) 1993-11-24

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