KR930001371A - 반도체 제조용 기판 및 그 형성방법 - Google Patents
반도체 제조용 기판 및 그 형성방법 Download PDFInfo
- Publication number
- KR930001371A KR930001371A KR1019910010829A KR910010829A KR930001371A KR 930001371 A KR930001371 A KR 930001371A KR 1019910010829 A KR1019910010829 A KR 1019910010829A KR 910010829 A KR910010829 A KR 910010829A KR 930001371 A KR930001371 A KR 930001371A
- Authority
- KR
- South Korea
- Prior art keywords
- films
- substrate
- film
- scribe line
- length
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/312—Organic layers, e.g. photoresist
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3043—Making grooves, e.g. cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 이 발명의 계단식 단차 형성을 보인 한 실시예의 단면도.
제3도 내지 제5도는 이 발명의 다른 실시예를 보인 단면도.
Claims (7)
- 기판 위에 다수의 막이 적층된 구조의 반도체 장치에 있어서, 기판 위에 적층된 다수의 막의 스크라이브 라인에서의 길이를 달리하여 계단식 단차를 갖게 한 반도체 장치 제조용 기판.
- 반도체 장치의 소자 형성에 사용되는 다수의 막이 기판의 스크라이브 라인상에서 이루는 단차 형성방법에 있어서, 기판의 스크리이브 라인 상에 다수의 막질이 적층되는 순서에 따라 먼저 형성되는 하부막과 그보다 나중에 형성되는 상부막의 연장길이를 달리하여 적층된 다수의 막질이 상기 기판과 계단식 경사각을 갖도록 하는 것을 특징으로 하는 계단식 단차 형성방법.
- 제2항에 있어서, 상기 하부막은 절연막이고, 상기 상부막은 금속배선막인 것을 특징으로 하는 계단식 단차형성방법.
- 제2항에 있어서, 상기 하부막은 금속배선막이고, 상기 상부막은 절연막인 것을 특징으로 하는 계단식 단차형성방법.
- 제2항에 있어서, 상기 계단식 단차의 경사각은 스크라이브 라인폭을 감안하여 적층되는 막질의 연장길이를 달리함으로써 그의 경사각을 다르게 형성하는 것을 특징으로 하는 계단식 단차 형성방법.
- 제2항에 있어서, 먼저 형성되는 막의 연장길이보다 나중에 차례로 형성되는 막의 연장길이가 소정의 길이만큼 짧게 형성되는 것을 특징으로 하는 계단식 단차 형성방법.
- 제2항에 있어서, 먼저 형성되는 막의 연장길이보다 나중에 차례로 형성되는 막의 연장길이가 소정의 길이만큼 길게 형성되는 것을 특징으로 하는 계단식 단차 형성방법.※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910010829A KR930001371A (ko) | 1991-06-27 | 1991-06-27 | 반도체 제조용 기판 및 그 형성방법 |
DE4220721A DE4220721A1 (de) | 1991-06-27 | 1992-06-24 | Halbleiterwafer |
ITMI921562A IT1255174B (it) | 1991-06-27 | 1992-06-25 | Wafer semiconduttore e suo procedimento di fabbricazione |
GB9213586A GB2257298A (en) | 1991-06-27 | 1992-06-26 | Semiconductor wafer with multilayer structure |
JP4169127A JPH06204401A (ja) | 1991-06-27 | 1992-06-26 | 半導体ウェーハ |
US07/904,613 US5300816A (en) | 1991-06-27 | 1992-06-26 | Semiconductor wafer with improved step coverage along scribe lines |
FR9207980A FR2678427A1 (fr) | 1991-06-27 | 1992-06-29 | Pastille semiconductrice. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910010829A KR930001371A (ko) | 1991-06-27 | 1991-06-27 | 반도체 제조용 기판 및 그 형성방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR930001371A true KR930001371A (ko) | 1993-01-16 |
Family
ID=19316427
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910010829A KR930001371A (ko) | 1991-06-27 | 1991-06-27 | 반도체 제조용 기판 및 그 형성방법 |
Country Status (7)
Country | Link |
---|---|
US (1) | US5300816A (ko) |
JP (1) | JPH06204401A (ko) |
KR (1) | KR930001371A (ko) |
DE (1) | DE4220721A1 (ko) |
FR (1) | FR2678427A1 (ko) |
GB (1) | GB2257298A (ko) |
IT (1) | IT1255174B (ko) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2894165B2 (ja) * | 1993-07-24 | 1999-05-24 | ヤマハ株式会社 | 半導体装置 |
JP2755131B2 (ja) * | 1993-10-27 | 1998-05-20 | 日本電気株式会社 | 半導体装置 |
US5686171A (en) * | 1993-12-30 | 1997-11-11 | Vlsi Technology, Inc. | Integrated circuit scribe line structures and methods for making same |
US5861660A (en) * | 1995-08-21 | 1999-01-19 | Stmicroelectronics, Inc. | Integrated-circuit die suitable for wafer-level testing and method for forming the same |
US5700732A (en) * | 1996-08-02 | 1997-12-23 | Micron Technology, Inc. | Semiconductor wafer, wafer alignment patterns and method of forming wafer alignment patterns |
US6197645B1 (en) | 1997-04-21 | 2001-03-06 | Advanced Micro Devices, Inc. | Method of making an IGFET with elevated source/drain regions in close proximity to gate with sloped sidewalls |
JP3132451B2 (ja) * | 1998-01-21 | 2001-02-05 | 日本電気株式会社 | 半導体装置およびその製造方法 |
US6441465B2 (en) | 1999-02-09 | 2002-08-27 | Winbond Electronics Corp. | Scribe line structure for preventing from damages thereof induced during fabrication |
JP2000294771A (ja) * | 1999-04-02 | 2000-10-20 | Fuji Electric Co Ltd | プレーナ型半導体装置 |
KR100509651B1 (ko) * | 2001-10-31 | 2005-08-23 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | 반도체 웨이퍼의 스크라이브 라인의 형성방법 및스크라이브 라인의 형성장치 |
US7829462B2 (en) * | 2007-05-03 | 2010-11-09 | Teledyne Licensing, Llc | Through-wafer vias |
US8263496B1 (en) * | 2011-04-12 | 2012-09-11 | Tokyo Electron Limited | Etching method for preparing a stepped structure |
TWI467757B (zh) * | 2013-08-02 | 2015-01-01 | Chipbond Technology Corp | 半導體結構 |
TWI467711B (zh) * | 2013-09-10 | 2015-01-01 | Chipbond Technology Corp | 半導體結構 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3707760A (en) * | 1971-05-19 | 1973-01-02 | Sieburg Ind Inc | Method and device for article working such as fracturing of semiconductor slices and separating semiconductor chips |
JPS5467370A (en) * | 1977-11-09 | 1979-05-30 | Hitachi Ltd | Mos semiconductor device |
US4381201A (en) * | 1980-03-11 | 1983-04-26 | Fujitsu Limited | Method for production of semiconductor devices |
US4835592A (en) * | 1986-03-05 | 1989-05-30 | Ixys Corporation | Semiconductor wafer with dice having briding metal structure and method of manufacturing same |
JPS6428827A (en) * | 1987-07-24 | 1989-01-31 | Hitachi Ltd | Manufacture of semiconductor device |
JPH01120029A (ja) * | 1987-11-02 | 1989-05-12 | Seiko Epson Corp | 半導体製造装置のスクライブ構造 |
JPH0821559B2 (ja) * | 1988-02-12 | 1996-03-04 | 三菱電機株式会社 | 半導体集積回路装置の製造方法 |
JPH027431A (ja) * | 1988-06-27 | 1990-01-11 | Oki Electric Ind Co Ltd | 半導体装置 |
JPH0237747A (ja) * | 1988-07-28 | 1990-02-07 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
US5053836A (en) * | 1989-11-21 | 1991-10-01 | Eastman Kodak Company | Cleaving of diode arrays with scribing channels |
JPH03185750A (ja) * | 1989-12-14 | 1991-08-13 | Victor Co Of Japan Ltd | 半導体装置 |
JPH1028827A (ja) * | 1996-07-19 | 1998-02-03 | Mitsubishi Heavy Ind Ltd | 除塵装置 |
-
1991
- 1991-06-27 KR KR1019910010829A patent/KR930001371A/ko not_active Application Discontinuation
-
1992
- 1992-06-24 DE DE4220721A patent/DE4220721A1/de not_active Ceased
- 1992-06-25 IT ITMI921562A patent/IT1255174B/it active IP Right Grant
- 1992-06-26 US US07/904,613 patent/US5300816A/en not_active Expired - Lifetime
- 1992-06-26 JP JP4169127A patent/JPH06204401A/ja active Pending
- 1992-06-26 GB GB9213586A patent/GB2257298A/en not_active Withdrawn
- 1992-06-29 FR FR9207980A patent/FR2678427A1/fr active Pending
Also Published As
Publication number | Publication date |
---|---|
JPH06204401A (ja) | 1994-07-22 |
US5300816A (en) | 1994-04-05 |
ITMI921562A1 (it) | 1993-12-25 |
IT1255174B (it) | 1995-10-20 |
GB9213586D0 (en) | 1992-08-12 |
FR2678427A1 (fr) | 1992-12-31 |
ITMI921562A0 (it) | 1992-06-25 |
GB2257298A (en) | 1993-01-06 |
DE4220721A1 (de) | 1993-01-14 |
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E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |