KR910013524A - 반도체집적회로장치 - Google Patents

반도체집적회로장치 Download PDF

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Publication number
KR910013524A
KR910013524A KR1019900019524A KR900019524A KR910013524A KR 910013524 A KR910013524 A KR 910013524A KR 1019900019524 A KR1019900019524 A KR 1019900019524A KR 900019524 A KR900019524 A KR 900019524A KR 910013524 A KR910013524 A KR 910013524A
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KR
South Korea
Prior art keywords
integrated circuit
semiconductor integrated
circuit device
pads
wiring
Prior art date
Application number
KR1019900019524A
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English (en)
Other versions
KR930005493B1 (ko
Inventor
야스노리 다나카
교스케 오가와
Original Assignee
아오이 죠이치
가부시키가이샤 도시바
다케다이 마사다카
도시바 마이크로 일렉트로닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 아오이 죠이치, 가부시키가이샤 도시바, 다케다이 마사다카, 도시바 마이크로 일렉트로닉스 가부시키가이샤 filed Critical 아오이 죠이치
Publication of KR910013524A publication Critical patent/KR910013524A/ko
Application granted granted Critical
Publication of KR930005493B1 publication Critical patent/KR930005493B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
    • H01L27/118—Masterslice integrated circuits
    • H01L27/11898—Input and output buffer/driver structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/023—Redistribution layers [RDL] for bonding areas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/0555—Shape
    • H01L2224/05552—Shape in top view
    • H01L2224/05554—Shape in top view being square
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/494—Connecting portions
    • H01L2224/4943—Connecting portions the connecting portions being staggered
    • H01L2224/49431—Connecting portions the connecting portions being staggered on the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

내용 없음.

Description

반도체집적회로장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1실시예에 따른 반도체집적회로장치의 평면도,
제2도는 제1실시예 장치의 패드 근방의 확대 평면도,
제3도는 제2도의 단면 A-A′선에 따른 단면도.

Claims (5)

  1. 반도체집적회로칩(10)의 주연부에 외부단자와 전기적으로 접속되는 패드(11a, 11b, 21a∼21c, 31a∼31c)카 배치되어 있는 반도체집적 회로장치에 있어서, 상기 패드는 복수개가 칩의 테두리를 따라서 두겹 이상의 열로 나란히 배치되고, 상기 패드와 내부회로를 전기적으로 접속하는 내부배선을 구성하는 배선층(14a, 14b, 24a∼24c)이 칩두께 방향으로 적어도 2층이상 설치되어 있는 것을 특징으로 하는 반도체집적회로장치.
  2. 제1항에 있어서, 상기 내부배선중 가장 외측에 배치되는 패드에 접속되는 내부배선이 장치표면으로부터 가장 깊은 위치에 설치된 배선층(14a, 24a)에 의해 형성되고, 이것 보다 내측에 배치된 패드로 향함에 따라 접속되는 내부배선이 장치표면으로부터 순차로 얕은 위치에 설치되는 배선층(14b, 24b, 24c)에 의해 형성되는 것을 특징으로 하는 반도체집적회로장치.
  3. 제1항에 있어서, 상기 내부배선에는 슬릿(18)이 형성되어 있는 것을 특징으로 하는 반도체집척회로장치.
  4. 제1항에 있어서, 상기 패드중 가장 외측에 존재하는 열에 배치된 패드(11a, 21a, 31a)만이 외부단자와 전기적으로 접속되는 것을 특징으로 하는 반도체집적회로장치.
  5. 제1항에 있어서, 상기 가장 외측에 존재하는 열에 배치된 패드(31a)의 배치피치가 그것 보다 내측에 존재하는 패드의 배치피치보다 큰 것을 특징으로 하는 반도체집적회로장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900019524A 1989-12-02 1990-11-30 반도체집적회로장치 KR930005493B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1-312276 1989-12-02
JP312276/1 1989-12-02
JP1312276A JPH06105709B2 (ja) 1989-12-02 1989-12-02 半導体集積回路装置

Publications (2)

Publication Number Publication Date
KR910013524A true KR910013524A (ko) 1991-08-08
KR930005493B1 KR930005493B1 (ko) 1993-06-22

Family

ID=18027292

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900019524A KR930005493B1 (ko) 1989-12-02 1990-11-30 반도체집적회로장치

Country Status (4)

Country Link
EP (1) EP0431490B1 (ko)
JP (1) JPH06105709B2 (ko)
KR (1) KR930005493B1 (ko)
DE (1) DE69013646T2 (ko)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5149674A (en) * 1991-06-17 1992-09-22 Motorola, Inc. Method for making a planar multi-layer metal bonding pad
WO1993012540A1 (en) * 1991-12-10 1993-06-24 Vlsi Technology, Inc. Integrated circuit with variable pad pitch
US5691218A (en) * 1993-07-01 1997-11-25 Lsi Logic Corporation Method of fabricating a programmable polysilicon gate array base cell structure
EP0693783B1 (en) * 1994-07-13 1999-09-22 United Microelectronics Corporation Method for eliminating process antenna effect
EP0693781B1 (en) * 1994-07-13 2002-10-02 United Microelectronics Corporation Grounding method for eliminating process antenna effect
EP0693782B1 (en) * 1994-07-13 2000-11-15 United Microelectronics Corporation Method for reducing process antenna effect
US5552333A (en) * 1994-09-16 1996-09-03 Lsi Logic Corporation Method for designing low profile variable width input/output cells
US5760428A (en) * 1996-01-25 1998-06-02 Lsi Logic Corporation Variable width low profile gate array input/output architecture
JP3989038B2 (ja) * 1996-04-17 2007-10-10 株式会社ルネサステクノロジ 半導体集積回路装置
JPH10163319A (ja) * 1996-11-29 1998-06-19 Hitachi Ltd 半導体集積回路装置の製造方法
JP3472455B2 (ja) * 1997-09-12 2003-12-02 沖電気工業株式会社 半導体集積回路装置及びそのパッケージ構造
US6031258A (en) * 1998-03-06 2000-02-29 S3 Incorporated High DC current stagger power/ground pad

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211248A (en) * 1981-06-22 1982-12-25 Hitachi Ltd Semiconductor integrated circuit device

Also Published As

Publication number Publication date
EP0431490B1 (en) 1994-10-26
KR930005493B1 (ko) 1993-06-22
DE69013646T2 (de) 1995-04-13
JPH03173433A (ja) 1991-07-26
EP0431490A1 (en) 1991-06-12
JPH06105709B2 (ja) 1994-12-21
DE69013646D1 (de) 1994-12-01

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