KR910012328A - 플라즈마 처리장치 - Google Patents

플라즈마 처리장치 Download PDF

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Publication number
KR910012328A
KR910012328A KR1019900022373A KR900022373A KR910012328A KR 910012328 A KR910012328 A KR 910012328A KR 1019900022373 A KR1019900022373 A KR 1019900022373A KR 900022373 A KR900022373 A KR 900022373A KR 910012328 A KR910012328 A KR 910012328A
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KR
South Korea
Prior art keywords
plasma processing
pair
reaction chamber
electrodes
electrode
Prior art date
Application number
KR1019900022373A
Other languages
English (en)
Other versions
KR940000498B1 (ko
Inventor
유이찌로 야마다
요시나리 마쯔시다
유지 쯔쯔이
Original Assignee
다니이 아끼오
마쯔시다덴기산교 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다니이 아끼오, 마쯔시다덴기산교 가부시기가이샤 filed Critical 다니이 아끼오
Publication of KR910012328A publication Critical patent/KR910012328A/ko
Application granted granted Critical
Publication of KR940000498B1 publication Critical patent/KR940000498B1/ko

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Classifications

    • H01L21/205—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

내용 없음.

Description

플라즈마 처리장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제 1 실시예의 개략 구성도.
제2도는 동 가스도입수단의 사시도.
제3도는 본 발명의 제 2 실시예의 개략 구성도.

Claims (3)

  1. 반응실과, 반응실내를 진공배기하는 배기수단과, 반응실내로 반응가스를 도입하는 가스도입수단과, 반응실내에 서로 대향해서 배설된 1쌍의 전극과, 1쌍의 전극간에 고주파전압을 공급하는 고주파전원을 구비하고, 또한 적어도 한쪽의 전극과 가스도입수단의 가스토출구를 전극의 대향방향으로 이동가능하게 구성한 것을 특징으로 하는 플라즈마 처리장치.
  2. 제1항에 있어서, 배기수단의 흡입구를 전극의 대향방향으로 이동가능하게 구성한 것을 특징으로 하는 플라즈마 처리장치.
  3. 제1항 또는 제2항에 있어서, 1쌍의 전극에 대한 고주파전압의 인가방향을 절환하는 절환수단을 배설하는 동시에 1쌍의 전극을 함께 그 대향방향으로 이동가능하게 구성한 것을 특징으로 하는 플라즈마 처리장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900022373A 1989-12-29 1990-12-29 플라즈마 처리장치 KR940000498B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1341532A JPH03203317A (ja) 1989-12-29 1989-12-29 プラズマ処理装置
JP1-341532 1989-12-29

Publications (2)

Publication Number Publication Date
KR910012328A true KR910012328A (ko) 1991-08-07
KR940000498B1 KR940000498B1 (ko) 1994-01-21

Family

ID=18346799

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900022373A KR940000498B1 (ko) 1989-12-29 1990-12-29 플라즈마 처리장치

Country Status (3)

Country Link
US (1) US5110437A (ko)
JP (1) JPH03203317A (ko)
KR (1) KR940000498B1 (ko)

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Also Published As

Publication number Publication date
US5110437A (en) 1992-05-05
JPH03203317A (ja) 1991-09-05
KR940000498B1 (ko) 1994-01-21

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