KR920005282A - 미세가공 장치 및 방법 - Google Patents
미세가공 장치 및 방법 Download PDFInfo
- Publication number
- KR920005282A KR920005282A KR1019910014769A KR910014769A KR920005282A KR 920005282 A KR920005282 A KR 920005282A KR 1019910014769 A KR1019910014769 A KR 1019910014769A KR 910014769 A KR910014769 A KR 910014769A KR 920005282 A KR920005282 A KR 920005282A
- Authority
- KR
- South Korea
- Prior art keywords
- vacuum chamber
- sample
- reactive gas
- generating means
- plasma
- Prior art date
Links
- 238000005459 micromachining Methods 0.000 title claims 2
- 238000000034 method Methods 0.000 title 1
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 238000001020 plasma etching Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Public Health (AREA)
- Epidemiology (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 이 발명의 일실시예에 의한 프라즈마에칭 장치를 표시하는 개략단면도,
제2도는 제1도에 표시한 플라즈마에칭장치에 의하여 에칭된 반도체기판의 측면단면도,
제3도는 이 발명의 일실시예 및 종래의 플라즈마에칭 장치에 있어서 플라즈마 밀도의 분포도.
Claims (2)
- 진공체임버와 이 진공체임버내에 반응성가스를 공급하는 반응성 가스 공급수단과, 상기 전공체임버내에서 상기 반응성가스의 플라즈마를 발생시키는 플라즈마 발생수단과, 상기 진공체임버내에 배치되어, 시료를 얹어놓는것과 함께 상기 플라즈마 발생수단에 접속되어 전극으로 되는 시료대겸 전극과, 상기 진공체임버의 벽부에 설치된 탄성과 발생수단과, 상기 진공체임버를 배기하는 배기수단과를 구비한것을 특징으로 하는 미세가공장치.
- 미세가공되는 시료를 진공체임버내의 시료대겸 전극강에 얹어놓고 상기 진공체임버내를 소정의 진공도까지 배기하고, 상기 진공체임버내에 반응성가스를 공급하고, 상기 시료대겸 전극 및 플라즈마 발생수단에 의하여 상기 반응성가스의 플라즈마를 상기 진공체임버내에 발생시키고, 잇따라서, 상기 진공체임버의 벽부에 설치된 탄성과 발생수단에 의하여 상기 진공체임버에 탄성파를 인가하면서 미세가공을 하는것을 특징으로하는 미세가공방법.※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2228018A JPH04111313A (ja) | 1990-08-31 | 1990-08-31 | 微細加工装置及び方法 |
JP2-228018 | 1990-08-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920005282A true KR920005282A (ko) | 1992-03-28 |
KR950001842B1 KR950001842B1 (ko) | 1995-03-03 |
Family
ID=16869904
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910014769A KR950001842B1 (ko) | 1990-08-31 | 1991-08-26 | 미세가공장치 및 방법 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPH04111313A (ko) |
KR (1) | KR950001842B1 (ko) |
DE (1) | DE4128779C2 (ko) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5228940A (en) * | 1990-10-03 | 1993-07-20 | Mitsubishi Denki Kabushiki Kaisha | Fine pattern forming apparatus |
JPH04142734A (ja) * | 1990-10-03 | 1992-05-15 | Mitsubishi Electric Corp | 微細加工装置及び方法 |
US5456796A (en) * | 1993-06-02 | 1995-10-10 | Applied Materials, Inc. | Control of particle generation within a reaction chamber |
US6121163A (en) | 1996-02-09 | 2000-09-19 | Applied Materials, Inc. | Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface |
US5902494A (en) * | 1996-02-09 | 1999-05-11 | Applied Materials, Inc. | Method and apparatus for reducing particle generation by limiting DC bias spike |
US6465043B1 (en) | 1996-02-09 | 2002-10-15 | Applied Materials, Inc. | Method and apparatus for reducing particle contamination in a substrate processing chamber |
US7288293B2 (en) | 2001-03-27 | 2007-10-30 | Apit Corp. S.A. | Process for plasma surface treatment and device for realizing the process |
CN100437883C (zh) * | 2001-03-27 | 2008-11-26 | Apit股份有限公司 | 等离子体表面处理的方法以及实现该方法的设备 |
JP2021017602A (ja) * | 2019-07-17 | 2021-02-15 | コニカミノルタ株式会社 | 微細構造体の製造方法及び微細構造体の製造装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5376755A (en) * | 1976-12-20 | 1978-07-07 | Fujitsu Ltd | Modulation method of plasma density |
JPS58200539A (ja) * | 1982-05-19 | 1983-11-22 | Hitachi Ltd | ドライプロセスにおける処理終点検出方法およびその装置 |
JPH01111333A (ja) * | 1987-10-26 | 1989-04-28 | Oki Electric Ind Co Ltd | ドライエッチング装置 |
DE3900768C1 (en) * | 1989-01-12 | 1990-02-22 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | Plasma etching device and method for operating it |
-
1990
- 1990-08-31 JP JP2228018A patent/JPH04111313A/ja active Pending
-
1991
- 1991-08-26 KR KR1019910014769A patent/KR950001842B1/ko not_active IP Right Cessation
- 1991-08-29 DE DE4128779A patent/DE4128779C2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH04111313A (ja) | 1992-04-13 |
DE4128779A1 (de) | 1992-03-05 |
DE4128779C2 (de) | 1995-02-16 |
KR950001842B1 (ko) | 1995-03-03 |
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