KR910011649A - 순수 또는 초순수를 정제하기 위한 방법 및 시스템 - Google Patents

순수 또는 초순수를 정제하기 위한 방법 및 시스템 Download PDF

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KR910011649A
KR910011649A KR1019900021049A KR900021049A KR910011649A KR 910011649 A KR910011649 A KR 910011649A KR 1019900021049 A KR1019900021049 A KR 1019900021049A KR 900021049 A KR900021049 A KR 900021049A KR 910011649 A KR910011649 A KR 910011649A
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South Korea
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water
gas
thin film
treated water
pure
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KR1019900021049A
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English (en)
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KR0156743B1 (ko
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다까유끼 사이또
겐 나까지마
요꼬 이와세
유끼오 이께다
히로유끼 시마
Original Assignee
후지무라 히로유끼
가부시기가이샤 에바라 세이사꾸쇼
야마구지 사또시
가부시기가이샤 에바라 소오고오 겐규쇼
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0031—Degasification of liquids by filtration
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00—Multistage treatment of water, waste water or sewage
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/72—Treatment of water, waste water, or sewage by oxidation
    • C02F1/722—Oxidation by peroxides
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S210/00—Liquid purification or separation
    • Y10S210/90—Ultra pure water, e.g. conductivity water

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Water Treatments (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

내용 없음

Description

순수 또는 초순수를 정제하기 위한 방법 및 시스템
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일실시예를 나타낸 플로챠트.

Claims (3)

  1. 고순도의 초순수를 생산하기위하여 순수 또는 초순수를 처리하여 순수 또는 초순수를 정제하는 방법에 있어서, (a) 순수 또는 초순수의 오존 또는 과산화수소를 용해하고 자외선으로 완성된 물을 조사하고, 이로써 TOC성분이 분해됨과 동시에 순수 또는 초순수가 살균되는 스탭과, (b) 스탭 (a)에서 얻어진 처리된 물의 수소가스를 용해하고 자외선으로 완성되어 나온 물을 조사하고, 이로써 처리된 물에 함유된 DO와 산화제의 첨가로 유도된 DO가 H2O로 분해됨과 동시에 살균이 행해지는 스탭과 (c) 상기 물에 박막을 이용한 탈가스를 행하기 위하여 박막의 다른측을 진공상태로 유지하며 가스 투과성 박막의 일측을 통하여 스탭(b)에서 얻어진 처리된 물을 통과시키고, 이로써 남아 있는 H2가스가 제거되는 스탭과, (d) H+감산이온성 교환수지와 OH-계 강염기 음이온 교환수지의 혼합물인 이온교환수지층을 통하여 스탭(c)에서 얻어진 처리된 물을 통과시키고, 이로써 이온 및 실리카가 제거되는 스탭과, (e)초여과를 위하여 스탭(d)에서 얻어진 처리된 물을 받고, 이로써 미세입자가 제거되는 스탭으로 이루어진 것을 특징으로 하는 방법.
  2. 순수 또는 초순수를 정제하는 시스템에 있어서, (a)순수 또는 초순수에서 TOC성분을 제거하고, 상기물을 살균시키는 오존 또는 과산화수소 용해장치 및 자외선조사장치와, (b)산화제의 첨가에서 유도되어 스탭(a)에서 얻어진 처리된 물을 함유된 DO를 분해하고 물을 살균시키는 수소가스 용해장치와 자외선 조사장치와, (c) 스탭 (b)에서 얻어진 처리된 물에서 남아있는 H2가스를 제거하는 가스투과성 박막을 가진 박막 탈가스장치와, (d)스탭 (c)에서 얻어진 처리된 물에서 이온과 실리카는 제거하는 OH-계 강염기 음이온 교환수지와 H+계 강산양이온 교환수지의 혼합물인 이온교환수지층을 가진 이온교환장치와, (e) 스탭 (d)에서 얻어진 처리된 물을 제거하는 초여과장치와, (f) 이 순서로, (a) 내지 (e)를 펌프와 연결하는 배관으로 이루어진 것을 특징으로 하는 시스템.
  3. 제2항에 있어서, 가스투광성 박막이 산소, 질소, 수소, 스팀 등의 가스는, 투과되지만 물은 투과하지 않고 실리카고무계, 폴리에틸렌테트라플로라이드계, 폴리올레핀계 및 폴리우레탄계에서 선택된 다공성 소수성 박막인 것을 특징으로 하는 시스템.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900021049A 1989-12-19 1990-12-19 순수 또는 초순수를 정제하기 위한 방법 및 스시템 KR0156743B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1327135A JPH0647105B2 (ja) 1989-12-19 1989-12-19 純水又は超純水の精製方法及び装置
JP89-327135 1989-12-19

Publications (2)

Publication Number Publication Date
KR910011649A true KR910011649A (ko) 1991-08-07
KR0156743B1 KR0156743B1 (ko) 1998-10-15

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Country Status (5)

Country Link
US (1) US5073268A (ko)
EP (1) EP0433893B1 (ko)
JP (1) JPH0647105B2 (ko)
KR (1) KR0156743B1 (ko)
DE (1) DE69013653T2 (ko)

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JPH03188988A (ja) 1991-08-16
KR0156743B1 (ko) 1998-10-15
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