KR910001282A - 진동 흡수 구조체 - Google Patents

진동 흡수 구조체 Download PDF

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Publication number
KR910001282A
KR910001282A KR1019890007794A KR890007794A KR910001282A KR 910001282 A KR910001282 A KR 910001282A KR 1019890007794 A KR1019890007794 A KR 1019890007794A KR 890007794 A KR890007794 A KR 890007794A KR 910001282 A KR910001282 A KR 910001282A
Authority
KR
South Korea
Prior art keywords
support
absorbing structure
vibration absorbing
linear motor
device mounting
Prior art date
Application number
KR1019890007794A
Other languages
English (en)
Other versions
KR930006502B1 (ko
Inventor
노부요시 무라이
요시노리 다까하시
가즈요시 가다야마
Original Assignee
다께나까 도이찌
가부시끼가이샤 다께나까 고무뎅
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP14028888A external-priority patent/JP2516404B2/ja
Priority claimed from JP63140286A external-priority patent/JPH01307537A/ja
Priority claimed from JP63140287A external-priority patent/JPH01307538A/ja
Priority claimed from JP63140289A external-priority patent/JPH01307540A/ja
Application filed by 다께나까 도이찌, 가부시끼가이샤 다께나까 고무뎅 filed Critical 다께나까 도이찌
Publication of KR910001282A publication Critical patent/KR910001282A/ko
Application granted granted Critical
Publication of KR930006502B1 publication Critical patent/KR930006502B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0032—Arrangements for preventing or isolating vibrations in parts of the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • F16F15/0275—Control of stiffness
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • H05K13/0069—Holders for printed circuit boards

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

내용 없음

Description

진동 흡수 구조체
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 진동 흡수 구조의 전체 평면도,
제2도는 제1도의 전체 측면도,
제3도는 제2도의 Ⅲ-Ⅲ선 화살표 방향에서 본 도면.

Claims (5)

  1. 고정부와, 장치탑재대와, 고정부와 장치탑재대와의 사이에 끼워서 장치탑재대를 탄성지지하는 에어스프링을 갖춘 진동 흡수 구조에 있어서, 고정부에 수평 방향으로 변위 가능하게 지지대를 내려 지지하면서, 지지대에 복수단의 에어스프링을 통해서 장치탑재대를 지지하고, 고정부와, 장치탑재대를 수평 방향에서 서로 직교하는 그 방향과 연직방향과의 3차원 방향으로 작용하는 리니어 모터를 통해서 연동 연결하고, 장치 탑재대에 진동센서를 부설하여 진동센서에 의한 검출결과에 입각한 변위 신호와 속도신호로 제어력 신호를 연산하고, 연산된 제어력신호를 각 리니어 모터 각각에 부여하는 제어장치를 갖춘 진동 흡수 구조체.
  2. 제1항에 있어서, 리니어 모터의 로드에 피아노선을 연결하고, 리니어 모터 및 피아노선을 통해서 고정부와 장치 탑재대와를 연동 연결한 것을 특징으로 하는 진동흡수 구조체.
  3. 제2항에 있어서, 리니어 모터의 로드의 변위를 판스프링을 통해서 안내 지지하도록 구성되어 있는 것을 특징으로 하는 진동흡수구조체.
  4. 제2항 또는 제3항에 있어서, 지지대와 장치 탑재대와의 사이에 복수의 지지 부재를 끼워 장착하고, 지지대와 지지 부재와의 사이, 지지부재끼리의 사이, 및 지지부재와 장치탑재대와의 사이 각각에 에어 스프링을 끼우면서 그들 에어스프링의 적어도 한개를 작용상태와 비작용상태로 변환하는 고정기구를 갖춘 것을 특징으로 하는 진동흡수 구조체.
  5. 제4항에 있어서, 지지부재를 에어탱크로 구성하여 그 에어탱크와 에어 스프링을 오리피스를 통해서 연이어 접속해 있는 것을 특징으로 하는 진동흡수 구조체.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890007794A 1988-06-06 1989-06-05 진동 흡수 구조체 KR930006502B1 (ko)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP14028888A JP2516404B2 (ja) 1988-06-06 1988-06-06 制振支持構造
JP63140286A JPH01307537A (ja) 1988-06-06 1988-06-06 制振支持構造
JP63140287A JPH01307538A (ja) 1988-06-06 1988-06-06 制振支持構造
JP63-140286~9 1988-06-06
JP??63-140287 1988-06-06
JP??63-140289 1988-06-06
JP63140289A JPH01307540A (ja) 1988-06-06 1988-06-06 制振支持構造
JP??63-140286 1988-06-06
JP??63-140288 1988-06-06

Publications (2)

Publication Number Publication Date
KR910001282A true KR910001282A (ko) 1991-01-30
KR930006502B1 KR930006502B1 (ko) 1993-07-16

Family

ID=27472293

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890007794A KR930006502B1 (ko) 1988-06-06 1989-06-05 진동 흡수 구조체

Country Status (5)

Country Link
US (1) US4976415A (ko)
KR (1) KR930006502B1 (ko)
CA (1) CA1323410C (ko)
DE (1) DE3917408A1 (ko)
NL (1) NL191799C (ko)

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KR20010049101A (ko) * 1999-11-30 2001-06-15 이정수 에어 마운트와 고무받침을 이용한 기계장비용 3차원면진받침
KR100359837B1 (ko) * 2000-02-22 2002-11-07 엘지전자 주식회사 세탁기의 진동흡수장치

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KR100359837B1 (ko) * 2000-02-22 2002-11-07 엘지전자 주식회사 세탁기의 진동흡수장치

Also Published As

Publication number Publication date
DE3917408C2 (ko) 1993-02-04
KR930006502B1 (ko) 1993-07-16
DE3917408A1 (de) 1989-12-07
CA1323410C (en) 1993-10-19
NL191799B (nl) 1996-04-01
NL191799C (nl) 1996-08-02
NL8901377A (nl) 1990-01-02
US4976415A (en) 1990-12-11

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