DE69526164T2 - Schwingungsisolierungsgerät und von Schwingungen isolierter Tisch - Google Patents

Schwingungsisolierungsgerät und von Schwingungen isolierter Tisch

Info

Publication number
DE69526164T2
DE69526164T2 DE69526164T DE69526164T DE69526164T2 DE 69526164 T2 DE69526164 T2 DE 69526164T2 DE 69526164 T DE69526164 T DE 69526164T DE 69526164 T DE69526164 T DE 69526164T DE 69526164 T2 DE69526164 T2 DE 69526164T2
Authority
DE
Germany
Prior art keywords
vibrations
vibration isolation
isolation device
table isolated
isolated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69526164T
Other languages
English (en)
Other versions
DE69526164D1 (de
Inventor
Toshihiro Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bridgestone Corp
Original Assignee
Bridgestone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP21264794A external-priority patent/JPH0874928A/ja
Application filed by Bridgestone Corp filed Critical Bridgestone Corp
Publication of DE69526164D1 publication Critical patent/DE69526164D1/de
Application granted granted Critical
Publication of DE69526164T2 publication Critical patent/DE69526164T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/035—DC motors; Unipolar motors
    • H02K41/0352—Unipolar motors
    • H02K41/0354—Lorentz force motors, e.g. voice coil motors
    • H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Power Engineering (AREA)
  • Vibration Prevention Devices (AREA)
DE69526164T 1994-09-06 1995-09-05 Schwingungsisolierungsgerät und von Schwingungen isolierter Tisch Expired - Fee Related DE69526164T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21264794A JPH0874928A (ja) 1994-07-08 1994-09-06 制振装置及び除振台

Publications (2)

Publication Number Publication Date
DE69526164D1 DE69526164D1 (de) 2002-05-08
DE69526164T2 true DE69526164T2 (de) 2002-08-14

Family

ID=16626099

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69526164T Expired - Fee Related DE69526164T2 (de) 1994-09-06 1995-09-05 Schwingungsisolierungsgerät und von Schwingungen isolierter Tisch

Country Status (3)

Country Link
US (1) US5693990A (de)
EP (1) EP0701314B1 (de)
DE (1) DE69526164T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022109175A1 (de) 2022-04-14 2023-10-19 Ilmenauer Mechatronik GmbH Arbeitstisch und Verfahren zu dessen Ausrichtung

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09326362A (ja) * 1996-04-05 1997-12-16 Nikon Corp 除振装置及び露光装置
JPH09329185A (ja) * 1996-06-06 1997-12-22 Bridgestone Corp 制振装置
JPH10288618A (ja) * 1997-04-16 1998-10-27 Seiko Instr Inc 表面分析装置
US6089525A (en) * 1997-10-07 2000-07-18 Ultratech Stepper, Inc. Six axis active vibration isolation and payload reaction force compensation system
WO1999027540A1 (fr) * 1997-11-25 1999-06-03 Ebara Corporation Dispositif de positionnement d'une plaquette
US6078114A (en) * 1998-04-08 2000-06-20 Universal Instruments Corporation Method and apparatus for vibration reduction/control in a variable reluctance linear motor
FR2781938B1 (fr) * 1998-07-30 2003-09-19 Hutchinson Moteur electromagnetique et dispositif de controle actif des vibrations comportant au moins un tel moteur
US6213442B1 (en) 1998-10-08 2001-04-10 Lord Corporation Isolation system for isolation tables and the like
US6355994B1 (en) * 1999-11-05 2002-03-12 Multibeam Systems, Inc. Precision stage
US6654185B1 (en) * 2000-11-14 2003-11-25 Acute Applied Technologies Inc. Electromagnetic actuator having specific coil arrangement for improving utilization rate of magnetic circuit thereof
KR100865635B1 (ko) * 2001-02-27 2008-10-29 베이 테크놀러지스, 인크. 비례 솔레노이드형 특성을 갖는 긴 스트로크 선형 음성 코일 작동기
US6501203B2 (en) * 2001-06-01 2002-12-31 Canadian Space Agency Vibration control apparatus
AU2002311128A1 (en) * 2002-06-10 2003-12-22 Canadian Space Agency Vibration control apparatus
US6895870B1 (en) 2002-11-04 2005-05-24 F. Peter Bizlewicz Apparatus and method for stacking plural electronic and electro-acoustic components
KR100620147B1 (ko) 2004-10-29 2006-09-13 김성배 진동형 운동 장치
WO2008089175A1 (en) * 2007-01-17 2008-07-24 Brookstone Purchasing, Inc. Vibration apparatus and motor assembly therefore
EP2143409A1 (de) 2008-07-10 2010-01-13 Leao Wang Elektromagnetischer Vibrationsmechanismus
KR101206560B1 (ko) * 2010-01-05 2012-11-29 엘지이노텍 주식회사 보이스 코일 모터
DE102012220418A1 (de) * 2012-11-09 2014-05-15 Zf Friedrichshafen Ag Induktionsgenerator und Verfahren zum Generieren eines elektrischen Stroms unter Verwendung eines Induktionsgenerators
CN104656479B (zh) * 2014-12-31 2017-08-22 刘远芳 触摸产生指令及自供电的控制器
JP6633986B2 (ja) * 2016-07-20 2020-01-22 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US11028898B2 (en) * 2019-01-11 2021-06-08 The Boeing Company Couplings that actively stabilize vibrations
CN114598123B (zh) * 2022-02-28 2023-11-24 复旦大学 一种基于磁阻电机的主动磁浮减振装置
CN114857194A (zh) * 2022-03-22 2022-08-05 中国人民解放军海军工程大学 一种电磁式负刚度装置
CN114658783A (zh) * 2022-03-22 2022-06-24 中国人民解放军海军工程大学 一种正负刚度均可调节的准零刚度刚度隔振器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1267619B (de) * 1962-08-22 1968-05-02 Manuf Des Montres Universal Torsionsoszillator fuer elektronische Uhren
GB1202526A (en) * 1966-09-29 1970-08-19 Derritron Electronic Vibrators Improvements relating to electro magnetic vibrators
US4060003A (en) * 1976-10-18 1977-11-29 Ransburg Corporation Imbalance determining apparatus and method
SU1222933A1 (ru) * 1983-05-04 1986-04-07 Всесоюзный научно-исследовательский институт охраны труда и техники безопасности черной металлургии Регулируемый электродинамический виброизол тор
JPS6223357A (ja) * 1985-07-19 1987-01-31 Showa Electric Wire & Cable Co Ltd リニアモ−タｘ−ｙテ−ブル
DE3917408A1 (de) * 1988-06-06 1989-12-07 Takenaka Corp Daempfungssockel
JPH0366952A (ja) * 1989-08-02 1991-03-22 Hitachi Ltd 振動防止懸垂装置
JPH07111215B2 (ja) * 1992-08-26 1995-11-29 鹿島建設株式会社 除振装置
DE4301845C1 (de) * 1993-01-23 1994-03-31 Freudenberg Carl Fa Aktiver Schwingungstilger

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022109175A1 (de) 2022-04-14 2023-10-19 Ilmenauer Mechatronik GmbH Arbeitstisch und Verfahren zu dessen Ausrichtung

Also Published As

Publication number Publication date
EP0701314B1 (de) 2002-04-03
US5693990A (en) 1997-12-02
DE69526164D1 (de) 2002-05-08
EP0701314A3 (de) 1996-10-30
EP0701314A2 (de) 1996-03-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee