NL191799B - Dempingsondersteuningsstelsel. - Google Patents
Dempingsondersteuningsstelsel.Info
- Publication number
- NL191799B NL191799B NL8901377A NL8901377A NL191799B NL 191799 B NL191799 B NL 191799B NL 8901377 A NL8901377 A NL 8901377A NL 8901377 A NL8901377 A NL 8901377A NL 191799 B NL191799 B NL 191799B
- Authority
- NL
- Netherlands
- Prior art keywords
- support system
- damping support
- damping
- support
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0032—Arrangements for preventing or isolating vibrations in parts of the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
- F16F15/0275—Control of stiffness
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
- H05K13/0069—Holders for printed circuit boards
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Aviation & Aerospace Engineering (AREA)
- Acoustics & Sound (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Vibration Prevention Devices (AREA)
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14028788 | 1988-06-06 | ||
JP14028888A JP2516404B2 (ja) | 1988-06-06 | 1988-06-06 | 制振支持構造 |
JP63140289A JPH01307540A (ja) | 1988-06-06 | 1988-06-06 | 制振支持構造 |
JP14028688 | 1988-06-06 | ||
JP14028988 | 1988-06-06 | ||
JP14028888 | 1988-06-06 | ||
JP63140287A JPH01307538A (ja) | 1988-06-06 | 1988-06-06 | 制振支持構造 |
JP63140286A JPH01307537A (ja) | 1988-06-06 | 1988-06-06 | 制振支持構造 |
Publications (3)
Publication Number | Publication Date |
---|---|
NL8901377A NL8901377A (nl) | 1990-01-02 |
NL191799B true NL191799B (nl) | 1996-04-01 |
NL191799C NL191799C (nl) | 1996-08-02 |
Family
ID=27472293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL8901377A NL191799C (nl) | 1988-06-06 | 1989-05-31 | Dempingsondersteuningsstelsel. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4976415A (nl) |
KR (1) | KR930006502B1 (nl) |
CA (1) | CA1323410C (nl) |
DE (1) | DE3917408A1 (nl) |
NL (1) | NL191799C (nl) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5255764A (en) * | 1989-06-06 | 1993-10-26 | Takafumi Fujita | Active/passive damping apparatus |
DE4133037C2 (de) * | 1990-10-05 | 1999-07-22 | Canon Kk | Belichtungsvorrichtung |
DE4110250C2 (de) * | 1991-03-28 | 1994-11-03 | Spectrospin Ag | Schwingungsdämpfende Halterung |
DE4233212B4 (de) * | 1992-10-02 | 2006-04-20 | Integrated Dynamics Engineering Gmbh | Federsystem |
US5433302A (en) * | 1993-02-18 | 1995-07-18 | Technical Manufacturing Corporation | Accessible variable tuned damper assembly for optical table tops |
US6959484B1 (en) * | 1994-01-27 | 2005-11-01 | Cymer, Inc. | System for vibration control |
US6791098B2 (en) | 1994-01-27 | 2004-09-14 | Cymer, Inc. | Multi-input, multi-output motion control for lithography system |
EP0701314B1 (en) * | 1994-09-06 | 2002-04-03 | Bridgestone Corporation | Vibration isolating apparatus and vibration isolating table |
US5492312A (en) * | 1995-04-17 | 1996-02-20 | Lord Corporation | Multi-degree of freedom magnetorheological devices and system for using same |
US5765800A (en) * | 1995-10-04 | 1998-06-16 | Ebara Corporation | Vibration damping apparatus |
FR2739670B1 (fr) * | 1995-10-09 | 1999-05-14 | Eurocopter France | Dispositif pour amortir les vibrations d'une structure soumise a des sollicitations dynamiques |
US6109574A (en) * | 1996-01-05 | 2000-08-29 | Cymer, Inc. | Gas laser chamber/optics support structure |
US5863017A (en) * | 1996-01-05 | 1999-01-26 | Cymer, Inc. | Stabilized laser platform and module interface |
JP3337906B2 (ja) * | 1996-04-02 | 2002-10-28 | キヤノン株式会社 | 空圧式振動絶縁除去装置、投影露光装置及びこれを用いたデバイス製造方法 |
JPH09329185A (ja) * | 1996-06-06 | 1997-12-22 | Bridgestone Corp | 制振装置 |
KR980006398A (ko) * | 1996-06-21 | 1998-03-30 | 마에다 시게루 | 진동 감쇄장치 |
US5814733A (en) * | 1996-09-12 | 1998-09-29 | Motorola, Inc. | Method of characterizing dynamics of a workpiece handling system |
JP4014271B2 (ja) * | 1998-01-09 | 2007-11-28 | 富士機械製造株式会社 | プリント基板支持方法,プリント基板支持装置の製作方法および製作用治具 |
US6241435B1 (en) | 1998-03-25 | 2001-06-05 | Vought Aircraft Industries, Inc. | Universal adaptive machining chatter control fixture |
JP3554186B2 (ja) * | 1998-04-08 | 2004-08-18 | キヤノン株式会社 | 露光装置、デバイス製造方法および反力受け方法 |
DE19818341B4 (de) * | 1998-04-23 | 2008-06-26 | Schneider Gmbh & Co. Kg | Interferometer zum Vermessen asphärischer Linsen |
JPH11315883A (ja) | 1998-04-30 | 1999-11-16 | Canon Inc | 除振装置、露光装置およびデバイス製造方法 |
US6213442B1 (en) | 1998-10-08 | 2001-04-10 | Lord Corporation | Isolation system for isolation tables and the like |
JP2002534783A (ja) * | 1998-12-29 | 2002-10-15 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 素子配置機械 |
KR20010049101A (ko) * | 1999-11-30 | 2001-06-15 | 이정수 | 에어 마운트와 고무받침을 이용한 기계장비용 3차원면진받침 |
KR100359837B1 (ko) * | 2000-02-22 | 2002-11-07 | 엘지전자 주식회사 | 세탁기의 진동흡수장치 |
JP2002286083A (ja) * | 2001-03-27 | 2002-10-03 | Canon Inc | 除振装置、デバイス製造装置、デバイス製造方法、半導体製造工場およびデバイス製造装置の保守方法 |
JP2003059797A (ja) * | 2001-08-09 | 2003-02-28 | Canon Inc | 移動装置、ステージ装置及び露光装置 |
US7506593B2 (en) * | 2002-10-23 | 2009-03-24 | Kinetics Systems, Inc. | Microfabrication tool pedestal and method of use |
DE10315287B4 (de) * | 2003-04-01 | 2005-09-22 | Eads Deutschland Gmbh | Aktive Lagerung, insbesondere für eine Avionik in einem Hochleistungsflugzeug, und pneumatisches Bauteil für eine solche aktive Lagerung |
DE20310654U1 (de) * | 2003-07-11 | 2003-09-18 | Retsch GmbH & Co. KG, 42781 Haan | Laborgerät mit Gleitfußlagerung |
US20080157609A1 (en) * | 2006-12-28 | 2008-07-03 | Hung-Lin Wang | Plate spring for voice coil motor |
CN101691032B (zh) * | 2009-09-30 | 2012-05-16 | 东莞宏威数码机械有限公司 | 平板器件承载机构 |
CN102930904B (zh) * | 2012-10-10 | 2015-03-11 | 北京航空航天大学 | 基于柔性倾斜梁的用于提高直线电机分辨率的微动平台 |
DE102012110385A1 (de) | 2012-10-30 | 2014-04-30 | Von Ardenne Gmbh | Lagerung für eine stoßempfindliche Substratbehandlungsapparatur |
US9689453B2 (en) * | 2014-02-06 | 2017-06-27 | Asm Technology Singapore Pte. Ltd. | Active vibration absorber |
CN104440836B (zh) * | 2014-10-29 | 2015-12-30 | 哈尔滨工业大学 | 基于密珠环形支承与双轴复合驱动的空间两自由度调整方法与装置 |
CN104596720B (zh) * | 2015-01-15 | 2017-08-08 | 浙江大学 | 基于簧片式解耦装置的三分量标准振动台 |
EP3208036A1 (de) * | 2016-02-16 | 2017-08-23 | Siemens Aktiengesellschaft | Schwingungsdämpfung einer werkzeugmaschine |
RU171245U1 (ru) * | 2016-05-31 | 2017-05-25 | Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Томский политехнический университет" | Виброгаситель для подвижного узла станка |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2947529A (en) * | 1957-12-03 | 1960-08-02 | Bell & Howell Co | Disc-type suspension spring |
DE2100831B2 (de) * | 1971-01-09 | 1976-12-23 | Samson Ag, 6000 Frankfurt | Scheibenfoermige einstellfeder fuer mess- und regelgeraete |
US3889936A (en) * | 1974-04-12 | 1975-06-17 | Wright Barry Corp | Combined air mounts |
US3917201A (en) * | 1974-11-07 | 1975-11-04 | Ehrenreich Photo Optical Ind | Vibration isolated table with improved mounts |
US4033541A (en) * | 1975-05-30 | 1977-07-05 | Mcdonnell Douglas Corporation | Torque rejection soft mounted platform |
US4049997A (en) * | 1976-02-27 | 1977-09-20 | E. I. Du Pont De Nemours And Company | Drive for dynamic mechanical system |
DE2640691C3 (de) * | 1976-09-07 | 1979-02-22 | Zschimmer, Gero, 8000 Muenchen | Vorrichtung zur Schwinglagerung eines ersten Körpers an einem zweiten Körper |
US4690960A (en) * | 1981-01-14 | 1987-09-01 | Nippon Electric Co., Ltd. | Vibration damping material |
US4436188A (en) * | 1981-11-18 | 1984-03-13 | Jones Cecil R | Controlled motion apparatus |
US4483425A (en) * | 1982-09-09 | 1984-11-20 | North American Philips Corporation | Vibration control system |
US4643385A (en) * | 1984-11-15 | 1987-02-17 | Rca Corporation | Anti-vibration system |
US4633982A (en) * | 1985-02-11 | 1987-01-06 | Swigert Charles J | System for wide bandwidth damping |
IL77057A (en) * | 1985-03-26 | 1990-03-19 | Wright Barry Corp | Active vibration isolation system |
JPS62238005A (ja) * | 1986-04-10 | 1987-10-19 | Sumitomo Heavy Ind Ltd | ピルガ−式圧延機の慣性力バランス装置 |
US4821205A (en) * | 1986-05-30 | 1989-04-11 | Eaton Corporation | Seismic isolation system with reaction mass |
US4730541A (en) * | 1986-06-03 | 1988-03-15 | Technical Manufacturing Corporation | Non contacting electro-pneumatic servo for vibration isolation |
US4795123A (en) * | 1987-05-14 | 1989-01-03 | The United States Of America As Represented By The Secretary Of The Air Force | Wideband electromagnetic damping of vibrating structures |
US4848525A (en) * | 1987-11-02 | 1989-07-18 | The Boeing Company | Dual mode vibration isolator |
-
1989
- 1989-05-29 DE DE3917408A patent/DE3917408A1/de active Granted
- 1989-05-31 NL NL8901377A patent/NL191799C/nl not_active IP Right Cessation
- 1989-06-01 US US07/360,238 patent/US4976415A/en not_active Expired - Lifetime
- 1989-06-05 KR KR1019890007794A patent/KR930006502B1/ko not_active IP Right Cessation
- 1989-06-05 CA CA000601760A patent/CA1323410C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
NL191799C (nl) | 1996-08-02 |
KR910001282A (ko) | 1991-01-30 |
US4976415A (en) | 1990-12-11 |
NL8901377A (nl) | 1990-01-02 |
DE3917408C2 (nl) | 1993-02-04 |
DE3917408A1 (de) | 1989-12-07 |
KR930006502B1 (ko) | 1993-07-16 |
CA1323410C (en) | 1993-10-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A1A | A request for search or an international-type search has been filed | ||
BB | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
V1 | Lapsed because of non-payment of the annual fee |
Effective date: 20071201 |