KR900000064B1 - 캐패시터의 제조방법 - Google Patents

캐패시터의 제조방법 Download PDF

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Publication number
KR900000064B1
KR900000064B1 KR1019860004247A KR860004247A KR900000064B1 KR 900000064 B1 KR900000064 B1 KR 900000064B1 KR 1019860004247 A KR1019860004247 A KR 1019860004247A KR 860004247 A KR860004247 A KR 860004247A KR 900000064 B1 KR900000064 B1 KR 900000064B1
Authority
KR
South Korea
Prior art keywords
capacitor
forming
water vapor
manufacturing
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019860004247A
Other languages
English (en)
Korean (ko)
Other versions
KR860009494A (ko
Inventor
기꾸오 야마베
게이따로 이마이
Original Assignee
가부시끼가이샤도오시바
와타리 수기이찌로
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60118101A external-priority patent/JPH0618248B2/ja
Priority claimed from JP60116384A external-priority patent/JPS61276226A/ja
Priority claimed from JP61003104A external-priority patent/JPS62160731A/ja
Priority claimed from JP61008959A external-priority patent/JP2602808B2/ja
Application filed by 가부시끼가이샤도오시바, 와타리 수기이찌로 filed Critical 가부시끼가이샤도오시바
Publication of KR860009494A publication Critical patent/KR860009494A/ko
Application granted granted Critical
Publication of KR900000064B1 publication Critical patent/KR900000064B1/ko
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/013—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator
    • H10D64/01302—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H10D64/01332—Making the insulator
    • H10D64/01336—Making the insulator on single crystalline silicon, e.g. chemical oxidation using a liquid
    • H10D64/01346—Making the insulator on single crystalline silicon, e.g. chemical oxidation using a liquid in a gaseous ambient using an oxygen or a water vapour, e.g. oxidation through a layer

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
KR1019860004247A 1985-05-31 1986-05-29 캐패시터의 제조방법 Expired KR900000064B1 (ko)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP60-116384 1985-05-31
JP60-118101 1985-05-31
JP60118101A JPH0618248B2 (ja) 1985-05-31 1985-05-31 半導体装置の製造方法
JP60116384A JPS61276226A (ja) 1985-05-31 1985-05-31 半導体装置の製造方法
JP61-3104 1986-01-10
JP61003104A JPS62160731A (ja) 1986-01-10 1986-01-10 半導体装置の製造方法
JP61-8959 1986-01-21
JP61008959A JP2602808B2 (ja) 1986-01-21 1986-01-21 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
KR860009494A KR860009494A (ko) 1986-12-23
KR900000064B1 true KR900000064B1 (ko) 1990-01-19

Family

ID=27453783

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860004247A Expired KR900000064B1 (ko) 1985-05-31 1986-05-29 캐패시터의 제조방법

Country Status (3)

Country Link
US (1) US4735824A (https=)
KR (1) KR900000064B1 (https=)
DE (1) DE3618128A1 (https=)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5258332A (en) * 1987-08-28 1993-11-02 Kabushiki Kaisha Toshiba Method of manufacturing semiconductor devices including rounding of corner portions by etching
KR940003218B1 (ko) * 1988-03-24 1994-04-16 세이꼬 엡슨 가부시끼가이샤 반도체 장치 및 그 제조방법
US5612260A (en) * 1992-06-05 1997-03-18 Cree Research, Inc. Method of obtaining high quality silicon dioxide passivation on silicon carbide and resulting passivated structures
JP3396553B2 (ja) * 1994-02-04 2003-04-14 三菱電機株式会社 半導体装置の製造方法及び半導体装置
US5780324A (en) * 1994-03-30 1998-07-14 Denso Corporation Method of manufacturing a vertical semiconductor device
EP0675529A3 (en) * 1994-03-30 1998-06-03 Denso Corporation Process for manufacturing vertical MOS transistors
KR100246975B1 (ko) * 1994-03-31 2000-03-15 오카메 히로무 반도체 장치의 제조방법
US6478263B1 (en) * 1997-01-17 2002-11-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and its manufacturing method
US5985740A (en) 1996-01-19 1999-11-16 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device including reduction of a catalyst
JP3645379B2 (ja) * 1996-01-19 2005-05-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3645380B2 (ja) 1996-01-19 2005-05-11 株式会社半導体エネルギー研究所 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、ナビゲーションシステム、携帯電話、ビデオカメラ、投射型表示装置
JP3645378B2 (ja) 1996-01-19 2005-05-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3729955B2 (ja) 1996-01-19 2005-12-21 株式会社半導体エネルギー研究所 半導体装置の作製方法
US5888858A (en) 1996-01-20 1999-03-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and fabrication method thereof
US7056381B1 (en) 1996-01-26 2006-06-06 Semiconductor Energy Laboratory Co., Ltd. Fabrication method of semiconductor device
US6180439B1 (en) * 1996-01-26 2001-01-30 Semiconductor Energy Laboratory Co., Ltd. Method for fabricating a semiconductor device
US6465287B1 (en) 1996-01-27 2002-10-15 Semiconductor Energy Laboratory Co., Ltd. Method for fabricating a semiconductor device using a metal catalyst and high temperature crystallization
US6063654A (en) * 1996-02-20 2000-05-16 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a thin film transistor involving laser treatment
US6100562A (en) 1996-03-17 2000-08-08 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
KR19990003490A (ko) * 1997-06-25 1999-01-15 김영환 반도체 소자의 산화막 형성방법
JP3917327B2 (ja) * 1999-06-01 2007-05-23 株式会社ルネサステクノロジ 半導体装置の製造方法及び装置
US6150234A (en) * 1999-12-16 2000-11-21 Vlsi Technology, Inc. Trench-diffusion corner rounding in a shallow-trench (STI) process
JP2003179148A (ja) * 2001-10-04 2003-06-27 Denso Corp 半導体基板およびその製造方法
TW200409230A (en) * 2002-11-28 2004-06-01 Au Optronics Corp Method for avoiding non-uniform etching of silicon layer
US8859389B2 (en) * 2011-01-28 2014-10-14 Kabushiki Kaisha Toshiba Methods of making fins and fin field effect transistors (FinFETs)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3947299A (en) * 1971-05-22 1976-03-30 U.S. Philips Corporation Method of manufacturing semiconductor devices
US4139785A (en) * 1977-05-31 1979-02-13 Texas Instruments Incorporated Static memory cell with inverted field effect transistor
DE2967704D1 (de) * 1978-06-14 1991-06-13 Fujitsu Ltd Verfahren zur herstellung einer halbleiteranordnung mit einer isolierschicht.
US4234362A (en) * 1978-11-03 1980-11-18 International Business Machines Corporation Method for forming an insulator between layers of conductive material
JPS5583268A (en) * 1978-12-19 1980-06-23 Nec Corp Complementary mos semiconductor device and method of fabricating the same
KR920010461B1 (ko) * 1983-09-28 1992-11-28 가부시끼가이샤 히다찌세이사꾸쇼 반도체 메모리와 그 제조 방법
JPS60111436A (ja) * 1983-11-22 1985-06-17 Toshiba Corp 半導体装置の製造方法
JPH073858B2 (ja) * 1984-04-11 1995-01-18 株式会社日立製作所 半導体装置の製造方法
JPS60223153A (ja) * 1984-04-19 1985-11-07 Nippon Telegr & Teleph Corp <Ntt> Ｍｉｓ型キャパシタを有する半導体装置の製法

Also Published As

Publication number Publication date
US4735824A (en) 1988-04-05
DE3618128C2 (https=) 1992-07-02
KR860009494A (ko) 1986-12-23
DE3618128A1 (de) 1986-12-04

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