KR890004972B1 - 이질접합 바이폴라 트랜지스터 및 그의 제조방법 - Google Patents
이질접합 바이폴라 트랜지스터 및 그의 제조방법 Download PDFInfo
- Publication number
- KR890004972B1 KR890004972B1 KR1019860001376A KR860001376A KR890004972B1 KR 890004972 B1 KR890004972 B1 KR 890004972B1 KR 1019860001376 A KR1019860001376 A KR 1019860001376A KR 860001376 A KR860001376 A KR 860001376A KR 890004972 B1 KR890004972 B1 KR 890004972B1
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor layer
- type
- semiconductor
- layer
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
- H10D64/281—Base electrodes for bipolar transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D10/00—Bipolar junction transistors [BJT]
- H10D10/80—Heterojunction BJTs
- H10D10/821—Vertical heterojunction BJTs
Landscapes
- Bipolar Transistors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60039120A JPS61198776A (ja) | 1985-02-28 | 1985-02-28 | ヘテロ接合バイポ−ラトランジスタおよびその製造方法 |
| JP60-039120 | 1985-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR860006842A KR860006842A (ko) | 1986-09-15 |
| KR890004972B1 true KR890004972B1 (ko) | 1989-12-02 |
Family
ID=12544229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019860001376A Expired KR890004972B1 (ko) | 1985-02-28 | 1986-02-27 | 이질접합 바이폴라 트랜지스터 및 그의 제조방법 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US4924283A (enExample) |
| EP (1) | EP0194197B1 (enExample) |
| JP (1) | JPS61198776A (enExample) |
| KR (1) | KR890004972B1 (enExample) |
| DE (1) | DE3676099D1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61198776A (ja) * | 1985-02-28 | 1986-09-03 | Fujitsu Ltd | ヘテロ接合バイポ−ラトランジスタおよびその製造方法 |
| EP0387010A3 (en) * | 1989-03-08 | 1990-10-10 | Matsushita Electric Industrial Co., Ltd. | Hetero-junction bipolar transistor |
| US5212103A (en) * | 1989-05-11 | 1993-05-18 | Mitsubishi Denki Kabushiki Kaisha | Method of making a heterojunction bipolar transistor |
| JPH02297942A (ja) * | 1989-05-11 | 1990-12-10 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
| JP2804095B2 (ja) * | 1989-07-10 | 1998-09-24 | 株式会社東芝 | ヘテロ接合バイボーラトランジスタ |
| US5187110A (en) * | 1990-10-05 | 1993-02-16 | Allied-Signal Inc. | Field effect transistor-bipolar transistor darlington pair |
| US5352911A (en) * | 1991-10-28 | 1994-10-04 | Trw Inc. | Dual base HBT |
| EP0562272A3 (en) * | 1992-03-23 | 1994-05-25 | Texas Instruments Inc | Microwave heterojunction bipolar transistors with emitters designed for high power applications and method for fabricating same |
| JP2971246B2 (ja) * | 1992-04-15 | 1999-11-02 | 株式会社東芝 | ヘテロバイポーラトランジスタの製造方法 |
| US5448087A (en) * | 1992-04-30 | 1995-09-05 | Trw Inc. | Heterojunction bipolar transistor with graded base doping |
| US5365089A (en) * | 1992-12-23 | 1994-11-15 | International Business Machines Corporation | Double heterojunction bipolar transistor and the method of manufacture therefor |
| US5330932A (en) * | 1992-12-31 | 1994-07-19 | Texas Instruments Incorporated | Method for fabricating GaInP/GaAs structures |
| FR2736468B1 (fr) * | 1995-07-07 | 1997-08-14 | Thomson Csf | Transistor bipolaire a structure optimisee |
| JP3087671B2 (ja) * | 1996-12-12 | 2000-09-11 | 日本電気株式会社 | バイポーラトランジスタおよびその製造方法 |
| DE19718624A1 (de) * | 1997-05-02 | 1998-11-05 | Daimler Benz Ag | Heterobipolartransistor mit Mehrschicht-Emitterstruktur |
| US6563145B1 (en) * | 1999-04-19 | 2003-05-13 | Chang Charles E | Methods and apparatus for a composite collector double heterojunction bipolar transistor |
| JP3565274B2 (ja) * | 2002-02-25 | 2004-09-15 | 住友電気工業株式会社 | バイポーラトランジスタ |
| US8530933B2 (en) * | 2008-10-10 | 2013-09-10 | National Institute Of Advanced Industrial Science And Technology | Photo transistor |
| KR101106062B1 (ko) * | 2009-09-03 | 2012-01-18 | (주)삼진제이엠씨 | 정밀한 유량 제어가 가능한 볼밸브 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4484211A (en) * | 1981-02-04 | 1984-11-20 | Matsushita Electric Industrial Co., Ltd. | Oxide walled emitter |
| US4573064A (en) * | 1981-11-02 | 1986-02-25 | Texas Instruments Incorporated | GaAs/GaAlAs Heterojunction bipolar integrated circuit devices |
| US4672404A (en) * | 1982-09-17 | 1987-06-09 | Cornell Research Foundation, Inc. | Ballistic heterojunction bipolar transistor |
| US4593305A (en) * | 1983-05-17 | 1986-06-03 | Kabushiki Kaisha Toshiba | Heterostructure bipolar transistor |
| FR2547677B1 (fr) * | 1983-06-17 | 1986-10-31 | Ankri David | Transistor bipolaire a double heterojonction compatible avec des composants optoelectroniques pour l'integration monolithique |
| JPS6010776A (ja) * | 1983-06-30 | 1985-01-19 | Fujitsu Ltd | バイポーラトランジスタの製造方法 |
| JPS6035570A (ja) * | 1984-04-13 | 1985-02-23 | Hitachi Ltd | ワイドギヤツプエミツタトランジスタ |
| JPS6158268A (ja) * | 1984-08-30 | 1986-03-25 | Fujitsu Ltd | 高速半導体装置 |
| DE3564518D1 (en) * | 1984-09-29 | 1988-09-22 | Toshiba Kk | Heterojunction bipolar transistor and method of manufacturing the same |
| JPS6182474A (ja) * | 1984-09-29 | 1986-04-26 | Toshiba Corp | ヘテロ接合バイポ−ラトランジスタの製造方法 |
| JPS61123175A (ja) * | 1984-11-20 | 1986-06-11 | Toshiba Corp | ヘテロ接合パイポ−ラトランジスタの製造方法 |
| JPS61137364A (ja) * | 1984-12-10 | 1986-06-25 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| JPS61187271A (ja) * | 1985-02-14 | 1986-08-20 | Sony Corp | ヘテロ接合型バイポ−ラトランジスタ |
| JPS61198776A (ja) * | 1985-02-28 | 1986-09-03 | Fujitsu Ltd | ヘテロ接合バイポ−ラトランジスタおよびその製造方法 |
| JPS6249659A (ja) * | 1985-08-29 | 1987-03-04 | Matsushita Electric Ind Co Ltd | ヘテロ接合バイポ−ラトランジスタおよびその製造方法 |
| US4716445A (en) * | 1986-01-17 | 1987-12-29 | Nec Corporation | Heterojunction bipolar transistor having a base region of germanium |
| US4872040A (en) * | 1987-04-23 | 1989-10-03 | International Business Machines Corporation | Self-aligned heterojunction transistor |
| US4839303A (en) * | 1987-10-13 | 1989-06-13 | Northrop Corporation | Planar bipolar transistors including heterojunction transistors and method |
| US4839702A (en) * | 1987-11-20 | 1989-06-13 | Bell Communications Research, Inc. | Semiconductor device based on charge emission from a quantum well |
-
1985
- 1985-02-28 JP JP60039120A patent/JPS61198776A/ja active Granted
-
1986
- 1986-02-27 KR KR1019860001376A patent/KR890004972B1/ko not_active Expired
- 1986-02-27 EP EP86400418A patent/EP0194197B1/en not_active Expired - Lifetime
- 1986-02-27 DE DE8686400418T patent/DE3676099D1/de not_active Expired - Lifetime
-
1988
- 1988-10-20 US US07/262,241 patent/US4924283A/en not_active Expired - Lifetime
-
1990
- 1990-01-17 US US07/466,646 patent/US4996166A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0458703B2 (enExample) | 1992-09-18 |
| KR860006842A (ko) | 1986-09-15 |
| EP0194197B1 (en) | 1990-12-12 |
| US4924283A (en) | 1990-05-08 |
| JPS61198776A (ja) | 1986-09-03 |
| EP0194197A1 (en) | 1986-09-10 |
| DE3676099D1 (de) | 1991-01-24 |
| US4996166A (en) | 1991-02-26 |
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| EP0177246B1 (en) | Heterojunction bipolar transistor and method of manufacturing the same | |
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| US4837178A (en) | Method for producing a semiconductor integrated circuit having an improved isolation structure | |
| EP0130774B1 (en) | Process for fabricating bipolar transistor | |
| EP0092645B1 (en) | Transistor and circuit including a transistor | |
| EP0229672B1 (en) | A heterojunction bipolar transistor having a base region of germanium | |
| JPS61147577A (ja) | 相補型半導体装置 | |
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| KR910006751B1 (ko) | 반도체 집적회로장치 및 그의 제조방법 | |
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| JPH0210747A (ja) | 半導体集積装置及びその製造方法 |
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