KR880003026A - 타겟트의 제조방법 - Google Patents

타겟트의 제조방법 Download PDF

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Publication number
KR880003026A
KR880003026A KR1019870008337A KR870008337A KR880003026A KR 880003026 A KR880003026 A KR 880003026A KR 1019870008337 A KR1019870008337 A KR 1019870008337A KR 870008337 A KR870008337 A KR 870008337A KR 880003026 A KR880003026 A KR 880003026A
Authority
KR
South Korea
Prior art keywords
impregnating
composition
melting point
target
porous material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1019870008337A
Other languages
English (en)
Korean (ko)
Inventor
하우쎌트 위르겐
우·쉬트니 스테판
카우프만 디터
Original Assignee
토마스 네세, 귄터 쉬람프
데메트론, 게젤샤프트 퓌르 엘렉트로닉-베르크 스토페엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 토마스 네세, 귄터 쉬람프, 데메트론, 게젤샤프트 퓌르 엘렉트로닉-베르크 스토페엠베하 filed Critical 토마스 네세, 귄터 쉬람프
Publication of KR880003026A publication Critical patent/KR880003026A/ko
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0475—Impregnated alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24—After-treatment of workpieces or articles
    • B22F3/26—Impregnating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
KR1019870008337A 1986-08-16 1987-07-30 타겟트의 제조방법 Ceased KR880003026A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3627775.4 1986-08-16
DE19863627775 DE3627775A1 (de) 1986-08-16 1986-08-16 Verfahren zur herstellung von targets

Publications (1)

Publication Number Publication Date
KR880003026A true KR880003026A (ko) 1988-05-13

Family

ID=6307493

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870008337A Ceased KR880003026A (ko) 1986-08-16 1987-07-30 타겟트의 제조방법

Country Status (5)

Country Link
US (1) US4803046A (en:Method)
EP (1) EP0257463A3 (en:Method)
JP (1) JPS6350471A (en:Method)
KR (1) KR880003026A (en:Method)
DE (1) DE3627775A1 (en:Method)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3716852C1 (de) * 1987-05-20 1988-07-14 Demetron Sputtertarget zur Erzeugung optisch transparenter Schichten und Verfahren zur Herstellung dieser Targets
JPS6431966A (en) * 1987-07-25 1989-02-02 Tokin Corp Alloy target material and its production
US5052448A (en) * 1989-02-10 1991-10-01 Huyck Corporation Self stitching multilayer papermaking fabric
JP2950436B2 (ja) * 1990-03-15 1999-09-20 株式会社東芝 複合化材料の製造方法
US5126102A (en) * 1990-03-15 1992-06-30 Kabushiki Kaisha Toshiba Fabricating method of composite material
US5096661A (en) * 1990-10-22 1992-03-17 Raybestos Products Company Resilient metallic friction facing material and method
DE69428672T2 (de) * 1993-07-27 2002-07-11 Kabushiki Kaisha Toshiba, Kawasaki Verfahren zur herstellung eines hochschmelzenden metallischen silizidtargets
US5439500A (en) * 1993-12-02 1995-08-08 Materials Research Corporation Magneto-optical alloy sputter targets
US6521173B2 (en) * 1999-08-19 2003-02-18 H.C. Starck, Inc. Low oxygen refractory metal powder for powder metallurgy

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2946700A (en) * 1957-12-24 1960-07-26 Crucible Steel Co America Production of infiltrated composites
DE2536153B2 (de) * 1975-08-13 1977-06-08 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen mehrschichtiger kontaktstuecke fuer vakuummittelspannungsleistungsschalter
CA1110421A (en) * 1978-11-09 1981-10-13 Horst E. Hirsch Cadmium mercury telluride sputtering targets
DE3103509C2 (de) * 1981-02-03 1986-11-20 Günter Dr. Dipl.-Phys. 7801 Buchenbach Kleer Target zum Herstellen dünner Schichten, Verfahren zum Erzeugen des Targets und Verwendung des Targets
DE3300525A1 (de) * 1983-01-10 1984-07-12 Merck Patent Gmbh, 6100 Darmstadt Targets fuer die kathodenzerstaeubung
JPS6029431A (ja) * 1983-07-28 1985-02-14 Toyota Motor Corp 合金の製造方法
JPS60177110A (ja) * 1984-02-24 1985-09-11 Mazda Motor Corp 多孔質鉄系焼結部材表面の封孔方法
JPS60211069A (ja) * 1984-04-06 1985-10-23 Hitachi Ltd スパツタリング用タ−ゲツト
JPS60218819A (ja) * 1984-04-13 1985-11-01 Yaskawa Electric Mfg Co Ltd スパツタ方法
US4619697A (en) * 1984-08-30 1986-10-28 Mitsubishi Kinzoku Kabushiki Kaisha Sputtering target material and process for producing the same
JPS6158866A (ja) * 1984-08-30 1986-03-26 三菱マテリアル株式会社 高融点金属珪化物基複合材料の製造法
US4620872A (en) * 1984-10-18 1986-11-04 Mitsubishi Kinzoku Kabushiki Kaisha Composite target material and process for producing the same
US4612047A (en) * 1985-10-28 1986-09-16 The United States Of America As Represented By The United States Department Of Energy Preparations of rare earth-iron alloys by thermite reduction

Also Published As

Publication number Publication date
JPS6350471A (ja) 1988-03-03
JPH057461B2 (en:Method) 1993-01-28
EP0257463A2 (de) 1988-03-02
DE3627775C2 (en:Method) 1989-05-18
US4803046A (en) 1989-02-07
DE3627775A1 (de) 1988-02-18
EP0257463A3 (de) 1989-06-14

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Patent event date: 19870730

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Patent event date: 19920212

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Patent event date: 19940401

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