KR870008175A - 적외선 검출기 - Google Patents

적외선 검출기 Download PDF

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Publication number
KR870008175A
KR870008175A KR870000959A KR870000959A KR870008175A KR 870008175 A KR870008175 A KR 870008175A KR 870000959 A KR870000959 A KR 870000959A KR 870000959 A KR870000959 A KR 870000959A KR 870008175 A KR870008175 A KR 870008175A
Authority
KR
South Korea
Prior art keywords
infrared
dielectric layer
substrate
layer
infrared detector
Prior art date
Application number
KR870000959A
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English (en)
Other versions
KR900005916B1 (ko
Inventor
도오루 마에까와
사또시 우에다
히로시 다끼가와
데쯔야 고찌이
쥰지로 고또
Original Assignee
야마모도 다꾸마
후지쓰 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 야마모도 다꾸마, 후지쓰 가부시끼가이샤 filed Critical 야마모도 다꾸마
Publication of KR870008175A publication Critical patent/KR870008175A/ko
Application granted granted Critical
Publication of KR900005916B1 publication Critical patent/KR900005916B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0805—Means for chopping radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H01L31/02164—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers, cold shields for infrared detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

내용 없음

Description

적외선 검출기
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 3 도는 본 발명에 따른 실시예의 개략단면도. 제 4 도는 제 3 도의 저온차폐의 단면도. 제 5 도는 본 발명에 따른 검출기 배열에 제공된 저온차폐의 평면도.

Claims (8)

  1. 적외선 투과물질로 되어 있는 기판, 기판의 한쪽 표면위에 형성되는 적외선 흡수층, 적외선 흡수층위에 구성되는 유전층 및 유전층위에 형성되는 적외선 반사층으로 구성되는 광차폐부와, 적외선 투과물질로 되어 있는 상기 기판 및 적외선 흡수층과 같은 쪽의 표면위에 형성된 상기 유전층으로 구성되는 개구부로 구성되는 저온차폐 ; 및
    상기 저온차폐의 개구부 바로 아래 검출부를 갖고 있는 적외선 검출기 배열로 구성되는 것을 특징으로 하는 적외선 검출기.
  2. 제 1 항에 있어서, 적외선 흡수층, 유전층 및 적외선 반사층이 형성된 것에 유전층이 상기 기판의 반대쪽 표면위에 다시 형성되는 것을 특징으로 하는 적외선 검출기.
  3. 제 1 항에 있어서, 다음의 식n3=및 n3×d1=λ/4, 식중 λ는 상기 개구부(b)에 충돌하는 바람직한 적외선의 파장, n1은 상기 기판의 굴절율, n3는 상기 유전층의 굴절율 및 d1은 상기 유전층의 두께, 을 만족하는 것을 특징으로 하는 적외선 검출기.
  4. 제 1 항에 있어서, 적외선의 유전층 굴절율이 기판의 굴절율보다 작고, 동시에 1보다 큰 것을 특징으로 하는 적외선 검출기.
  5. 제 1 항에 있어서, 적외선 흡수층이 Cr 또는 Ni로 되어 있는 것을 특징으로 하는 적외선 검출기.
  6. 제 1 항에 있어서, 유전층이 CeF3또는 PbF2로 되어 있는 것을 특징으로 하는 적외선 검출기.
  7. 제 1 항에 있어서, 적외선 흡수층 표면에서 반사된 적외선 및 적외선 반사층에서 반사된 적외선은 상호 광학적 간섭효과로 인해 제거되는 것을 특징으로 하는 적외선 검출기.
  8. 제 1 항에 있어서, 상기 광차폐부의 유전층이 상기 개구부의 유전층과 같은 것을 특징으로 하는 적외선 검출기.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019870000959A 1986-02-07 1987-02-06 적외선 검출기 KR900005916B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25019 1986-02-07
JP61025019A JPS62201325A (ja) 1986-02-07 1986-02-07 赤外線検知器

Publications (2)

Publication Number Publication Date
KR870008175A true KR870008175A (ko) 1987-09-24
KR900005916B1 KR900005916B1 (ko) 1990-08-16

Family

ID=12154193

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870000959A KR900005916B1 (ko) 1986-02-07 1987-02-06 적외선 검출기

Country Status (5)

Country Link
US (1) US4795907A (ko)
EP (1) EP0232184B1 (ko)
JP (1) JPS62201325A (ko)
KR (1) KR900005916B1 (ko)
DE (1) DE3783144T2 (ko)

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JPH01164073A (ja) * 1987-09-11 1989-06-28 Canon Inc 光電変換装置
US4812653A (en) * 1987-12-01 1989-03-14 Honeywell Inc. Sharp edge for thick coatings
US4814620A (en) * 1987-12-01 1989-03-21 Honeywell Inc. Tilted array with parallel cold shield
US4812655A (en) * 1987-12-09 1989-03-14 Honeywell Inc. Prism cold shield
FR2651315B1 (fr) * 1989-08-22 1991-11-15 Detecteurs Infra Rouges Ste Fs Dispositif de detection infra-rouge.
US5089705A (en) * 1990-02-16 1992-02-18 Fujitsu Limited Infrared detector having dewar with film coatings to suppress reflections
US5277782A (en) * 1991-12-13 1994-01-11 Optical Radiation Corporation Baffled cold shields for infrared detector
JP2783238B2 (ja) * 1996-02-09 1998-08-06 日本電気株式会社 Ｉｒ信号通信装置
US6374255B1 (en) * 1996-05-21 2002-04-16 Immersion Corporation Haptic authoring
US6256011B1 (en) * 1997-12-03 2001-07-03 Immersion Corporation Multi-function control device with force feedback
DE19842403B4 (de) * 1998-09-16 2004-05-06 Braun Gmbh Strahlungssensor mit mehreren Sensorelementen
US6693626B1 (en) * 1999-12-07 2004-02-17 Immersion Corporation Haptic feedback using a keyboard device
US6904823B2 (en) * 2002-04-03 2005-06-14 Immersion Corporation Haptic shifting devices
AU2003285886A1 (en) 2002-10-15 2004-05-04 Immersion Corporation Products and processes for providing force sensations in a user interface
US8992322B2 (en) * 2003-06-09 2015-03-31 Immersion Corporation Interactive gaming systems with haptic feedback
JP5368847B2 (ja) * 2009-03-26 2013-12-18 パナソニック株式会社 赤外線放射素子
US8692172B2 (en) * 2009-04-21 2014-04-08 Raytheon Company Cold shield apparatus and methods
US9104791B2 (en) * 2009-05-28 2015-08-11 Immersion Corporation Systems and methods for editing a model of a physical system for a simulation
US9190115B2 (en) * 2011-04-28 2015-11-17 Entrotech, Inc. Method of assembling a disk drive
US9466335B2 (en) 2011-04-28 2016-10-11 Entrotech, Inc. Hermetic hard disk drives comprising integrally molded filters and related methods
JP6003605B2 (ja) * 2012-12-12 2016-10-05 Tdk株式会社 赤外線検知装置
US9866924B2 (en) 2013-03-14 2018-01-09 Immersion Corporation Systems and methods for enhanced television interaction
US10079043B2 (en) 2014-04-22 2018-09-18 Entrotech, Inc. Method of sealing a re-workable hard disk drive
WO2015191479A1 (en) 2014-06-09 2015-12-17 Entrotech, Inc. Laminate-wrapped hard disk drives and related methods
US9601161B2 (en) 2015-04-15 2017-03-21 entroteech, inc. Metallically sealed, wrapped hard disk drives and related methods
US20230250292A1 (en) * 2020-07-29 2023-08-10 Dow Global Technologies Llc Aromatic hydrocarbon-soluble anthraquinone

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3963926A (en) * 1975-01-09 1976-06-15 Texas Instruments Incorporated Detector cold shield
US4179181A (en) * 1978-04-03 1979-12-18 American Optical Corporation Infrared reflecting articles
FR2487512A1 (fr) * 1980-07-22 1982-01-29 Thomson Csf Dispositif detecteur de rayonnement infrarouge
US4431918A (en) * 1981-03-27 1984-02-14 Honeywell Inc. Etchable glass cold shield for background limited detectors
US4446372A (en) * 1981-07-01 1984-05-01 Honeywell Inc. Detector cold shield
JPS60195502A (ja) * 1984-03-19 1985-10-04 Canon Inc 金属回転多面鏡
JPS60198774A (ja) * 1984-03-22 1985-10-08 Fujitsu Ltd 赤外線検知素子
FR2577073B1 (fr) * 1985-02-06 1987-09-25 Commissariat Energie Atomique Dispositif matriciel de detection d'un rayonnement lumineux a ecrans froids individuels integres dans un substrat et son procede de fabrication

Also Published As

Publication number Publication date
EP0232184B1 (en) 1992-12-23
DE3783144D1 (de) 1993-02-04
JPS62201325A (ja) 1987-09-05
US4795907A (en) 1989-01-03
JPH0453369B2 (ko) 1992-08-26
EP0232184A3 (en) 1989-06-07
EP0232184A2 (en) 1987-08-12
KR900005916B1 (ko) 1990-08-16
DE3783144T2 (de) 1993-04-22

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