KR840005699A - 시험 시스템용 전자 시험 헤드 포지셔너 - Google Patents
시험 시스템용 전자 시험 헤드 포지셔너 Download PDFInfo
- Publication number
- KR840005699A KR840005699A KR1019830003961A KR830003961A KR840005699A KR 840005699 A KR840005699 A KR 840005699A KR 1019830003961 A KR1019830003961 A KR 1019830003961A KR 830003961 A KR830003961 A KR 830003961A KR 840005699 A KR840005699 A KR 840005699A
- Authority
- KR
- South Korea
- Prior art keywords
- positioner
- test head
- handler
- balancing
- axis
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J1/00—Manipulators positioned in space by hand
- B25J1/12—Manipulators positioned in space by hand having means for attachment to a support stand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
- B23Q11/0017—Arrangements compensating weight or flexion on parts of the machine compensating the weight of vertically moving elements, e.g. by balancing liftable machine parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
- B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
- B23Q1/5468—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only a single rotating pair followed parallelly by a single rotating pair
- B23Q1/5475—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only a single rotating pair followed parallelly by a single rotating pair followed perpendicularly by a single rotating pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/025—Arms extensible telescopic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0008—Balancing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0008—Balancing devices
- B25J19/0012—Balancing devices using fluidic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0008—Balancing devices
- B25J19/002—Balancing devices using counterweights
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
- F16M11/10—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting around a horizontal axis
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
- F16M11/10—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting around a horizontal axis
- F16M11/105—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting around a horizontal axis the horizontal axis being the roll axis, e.g. for creating a landscape-portrait rotation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
- F16M11/12—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting in more than one direction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/20—Undercarriages with or without wheels
- F16M11/2007—Undercarriages with or without wheels comprising means allowing pivoting adjustment
- F16M11/2014—Undercarriages with or without wheels comprising means allowing pivoting adjustment around a vertical axis
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/20—Undercarriages with or without wheels
- F16M11/2007—Undercarriages with or without wheels comprising means allowing pivoting adjustment
- F16M11/2035—Undercarriages with or without wheels comprising means allowing pivoting adjustment in more than one direction
- F16M11/2071—Undercarriages with or without wheels comprising means allowing pivoting adjustment in more than one direction for panning and rolling
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/20—Undercarriages with or without wheels
- F16M11/24—Undercarriages with or without wheels changeable in height or length of legs, also for transport only, e.g. by means of tubes screwed into each other
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M2200/00—Details of stands or supports
- F16M2200/02—Locking means
- F16M2200/021—Locking means for rotational movement
- F16M2200/022—Locking means for rotational movement by friction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M2200/00—Details of stands or supports
- F16M2200/04—Balancing means
- F16M2200/048—Balancing means for balancing translational movement of the undercarriage
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 내지 3도는 본 발명에 따른 헤드 포지셔너(test head positioner)의 사시도.
Claims (8)
- 지지수단과 지지수단에 연결되고 거기에 대해 수직이동하며 6개의 자유도를 감고 수평면내의 신장이동을 제공하며 시험 헤드를 부착하기 위한 수단을 포함하는 포지서너 수단으로 구성되며, 상기 지지수단이 부착된 시험 헤드로 상기 포지셔너 수단에 실질적으로 무하중 상태를 제공하기 위해 균형잡기 수단을 포함하는 전자 장치 취급기에 대해 전자 시험 헤드의 위치를 잡기 위한 시스템.
- 제1항에 있어서, 상기 균형 잡기 수단이 그 중 하나가 견고히 고정되며 다른 것이 포지셔너 조립체를 지지하는 피스톤 봉 및 유체 실린더내의 유체 실린더 내의 유체 압력을 예정된 값으로 설정하며, 그 값을 포지셔너 수단의 모든 수직 위치를 위해 실질적으로 일정하게 유지하기 위한 수단을 포함하는 시스템.
- 제1항에 있어서, 상기 균형 잡기 수단이 시험 헤드와 포지셔너 수단과 실질적으로 동등한 중량을 가지며, 포지셔너 수단에 케이블에 의해 연결된 균형추 수단을 포함하며, 지지 수단이 포지셔너 수단을 위한 검성 감쇄를 제공하기 위한 속도감지 수단을 포함하는 시스템.
- 제2 또는 3항에 있어서, 상기 포지셔너 수단이 손목수단의 수평 운동제공하기 위해 손목 수단에 고정된 수평축을 포함하며, 크레이들 수단이 수평축에 대한 크레이들 수단의 회전을 제공하기 위해 손목 수단에 고정된 피벗 수단을 갖는 시스템.
- 제2 또는 3항에 있어서, 상기 지지 수단이 제1 수직축을 형성하는 축읖 포함하며, 상기 포지셔너 수단이 상기 축을 따른 수직 운동과 제1 수직축에 대한 회전을 제공하기 위해 상기 주 아암 수단을 위한 제1 피벗 수단을 갖는 주 아암수단을 포함하는 시스템.
- 헤드와 취급기를 함께 당기며 떨어지게 밀기 위한 캠 조립체와 그 중 하나가 시험 헤드에 고정되고 다른 것이 취급기에 고정되는 핀을 받기 위한 소켓 수단과 정렬 핀을포함하는 정렬 수단으로 구성되는 전자 장치 취급기에 대해 전자시험 헤드를 결합 및 해체하기 위한 시스템.
- 제6항에 있어서, 상기 캠 조립체가 캠 종동자 핀을 받기 위한 헬리컬 홈을 갖는 2개 이상의 캠과, 동기에 선회하도록 캠들을 함께 연결하기 위한 케이블 수단으로 구성되는 시스템.
- 제6항에 있어서, 상기 정렴 핀이 결합이 이루어질 때까지 취급기와 시험 헤드를 떼어태 유지하기 위해 거싯 수단을 포함하는 소켓수단과 정렬 핀의 위치를 조절하기 위한 수단을 포함하는 시스템.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/411,311 US4527942A (en) | 1982-08-25 | 1982-08-25 | Electronic test head positioner for test systems |
US411311 | 1982-08-25 | ||
US411,311 | 1982-08-25 | ||
US522.635 | 1983-08-11 | ||
US06522635 US4589815B1 (en) | 1982-08-25 | 1983-08-11 | Electronic test head positioner for test systems |
Publications (2)
Publication Number | Publication Date |
---|---|
KR840005699A true KR840005699A (ko) | 1984-11-15 |
KR870001754B1 KR870001754B1 (ko) | 1987-10-06 |
Family
ID=23628432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019830003961A KR870001754B1 (ko) | 1982-08-25 | 1983-08-24 | 시험 시스템용 전자 시험 헤드 포지셔너 시스템 |
Country Status (3)
Country | Link |
---|---|
US (2) | US4527942A (ko) |
JP (3) | JPS5960206A (ko) |
KR (1) | KR870001754B1 (ko) |
Families Citing this family (92)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60193407U (ja) * | 1984-06-02 | 1985-12-23 | 東陶機器株式会社 | 直角測定器 |
US4715574A (en) * | 1985-11-12 | 1987-12-29 | Intest Corporation | Safety lock for materials handling system |
DE3615941A1 (de) * | 1986-05-12 | 1987-11-19 | Willberg Hans Heinrich | Geraet zum pruefen von elektronischen bauelementen, insbesondere ic's |
DE3638430A1 (de) * | 1986-11-11 | 1988-05-19 | Multitest Elektronische Syst | Vorrichtung zum testen und sortieren von elektronischen bauelementen, insbesondere ic's |
DE3638991A1 (de) * | 1986-11-14 | 1988-05-19 | Focke & Co | Foerdereinrichtung, insbesondere palettierer |
US4884938A (en) * | 1986-12-01 | 1989-12-05 | Kawasaki Jukogyo Kabushiki Kaisha | Apparatus for handling large-sized articles |
US4840366A (en) * | 1987-08-27 | 1989-06-20 | Graham Engineering Corporation | In-mold labeling apparatus and method |
ATE54899T1 (de) * | 1987-11-30 | 1990-08-15 | Magcon Beheer B V | Lagersystem fuer paletten. |
US4893074A (en) * | 1988-05-13 | 1990-01-09 | Intest Corporation | Electronic device testing system |
DE3912589A1 (de) * | 1989-04-17 | 1990-10-25 | Ekkehard Ueberreiter | Einrichtung zum testen von elektronischen bauelementen mit einer ladestation, einer teststation und eine entladestation fuer die bauelemente |
DE4007011C2 (de) * | 1990-03-06 | 1999-11-18 | Helmuth Heigl | Positioniervorrichtung |
US5030869A (en) * | 1990-07-25 | 1991-07-09 | Intest Corporation | Device testing system with cable pivot |
US5123803A (en) * | 1990-09-11 | 1992-06-23 | Crabtree George F | Stern drive handling device |
US5241870A (en) * | 1991-07-22 | 1993-09-07 | Intest Corporation | Test head manipulator |
US5321453A (en) * | 1991-08-03 | 1994-06-14 | Tokyo Electron Limited | Probe apparatus for probing an object held above the probe card |
US5440943A (en) * | 1993-09-15 | 1995-08-15 | Intest Corporation | Electronic test head manipulator |
US6057695A (en) * | 1993-09-15 | 2000-05-02 | Intest Corporation | Method and apparatus for automated docking of a test head to a device handler |
US5600258A (en) * | 1993-09-15 | 1997-02-04 | Intest Corporation | Method and apparatus for automated docking of a test head to a device handler |
US5744974A (en) * | 1993-09-17 | 1998-04-28 | Xilinx, Inc. | Test head interface with vacuum-activated interconnection components |
US5379646A (en) * | 1993-09-20 | 1995-01-10 | General Motors Corporation | Seatback load applying device |
US5561386A (en) * | 1994-02-23 | 1996-10-01 | Fujitsu Limited | Chip tester with improvements in handling efficiency and measurement precision |
US5982182A (en) * | 1994-09-01 | 1999-11-09 | Chiu; Michael A. | Interface apparatus for automatic test equipment with positioning modules incorporating kinematic surfaces |
US5664932A (en) * | 1994-09-20 | 1997-09-09 | Long-Airdox Company | Pivoted lifting device |
KR960019641A (ko) * | 1994-11-24 | 1996-06-17 | 오우라 히로시 | 테스트·헤드 접속 장치를 장비한 반도체 시험 장치 |
JP3869465B2 (ja) * | 1995-02-23 | 2007-01-17 | テラダイン・インコーポレーテッド | 自動テスト装置のテストヘッド用マニピュレータ |
US5912555A (en) | 1995-04-10 | 1999-06-15 | Tokyo Electron Limited | Probe apparatus |
US5608334A (en) * | 1995-04-20 | 1997-03-04 | Intest Corporation | Device testing system with cable pivot and method of installation |
DE19517330C2 (de) * | 1995-05-11 | 2002-06-13 | Helmuth Heigl | Handhabungsvorrichtung |
US5606262A (en) * | 1995-06-07 | 1997-02-25 | Teradyne, Inc. | Manipulator for automatic test equipment test head |
US5656942A (en) * | 1995-07-21 | 1997-08-12 | Electroglas, Inc. | Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane |
US5765273A (en) * | 1995-09-22 | 1998-06-16 | Black & Decker Inc. | Drill press having pivotable table |
US5654631A (en) * | 1995-11-15 | 1997-08-05 | Xilinx, Inc. | Vacuum lock handler and tester interface for semiconductor devices |
US6023173A (en) * | 1997-04-30 | 2000-02-08 | Credence Systems Corporation | Manipulator with expanded range of motion |
DE19718398B4 (de) * | 1997-04-30 | 2006-02-02 | Heigl, Helmuth, Dr.-Ing. | Handhabungsvorrichtung |
DE29709122U1 (de) * | 1997-05-23 | 1998-09-24 | Upat Max Langensiepen Kg | Vorrichtung zum Einschrauben von Befestigungselementen |
JP3754540B2 (ja) * | 1997-10-17 | 2006-03-15 | 蛇の目ミシン工業株式会社 | 多関節ロボットにおけるz方向機台のバネバランス調整装置 |
US6271658B1 (en) | 1998-10-19 | 2001-08-07 | St Assembly Test Services Pte, Ltd. | Universal Docking System |
MY138984A (en) * | 2000-03-01 | 2009-08-28 | Intest Corp | Vertical counter balanced test head manipulator |
US6396257B1 (en) * | 2000-04-26 | 2002-05-28 | Credence Systems Corporation | Test head manipulator for semiconductor tester with manual assist for vertical test head movement |
US6408500B1 (en) * | 2000-09-15 | 2002-06-25 | James Orsillo | Method of retrofitting a probe station |
MY127154A (en) * | 2000-09-22 | 2006-11-30 | Intest Corp | Apparatus and method for balancing and for providing a compliant range to a test head |
EP1712923B1 (en) | 2000-09-22 | 2013-05-15 | inTEST Corporation | Apparatus and method for balancing and for providing a compliant range to a test head |
DE20114544U1 (de) | 2000-12-04 | 2002-02-21 | Cascade Microtech Inc | Wafersonde |
DE10122049B4 (de) * | 2001-05-07 | 2004-08-19 | Heigl, Helmuth, Dr.-Ing. | Vorrichtung zum Verriegeln von zwei miteinander zu koppelnden Einrichtungen, insbesondere eines Testkopfs und einer Prüfeinrichtung |
US6766996B1 (en) | 2001-07-16 | 2004-07-27 | Reid-Ashman Manufacturing, Inc. | Manipulator |
DE60238767D1 (de) * | 2001-07-16 | 2011-02-10 | Intest Corp | System und verfahren zur ankopplung eines prüfkopfs |
US6897645B2 (en) | 2001-12-29 | 2005-05-24 | Vincent Hing Chung So | Docking system and method for docking in automated testing systems |
US6646431B1 (en) | 2002-01-22 | 2003-11-11 | Elite E/M, Inc. | Test head manipulator |
US6688838B2 (en) * | 2002-03-04 | 2004-02-10 | Applied Materials, Inc. | Cleanroom lift having an articulated arm |
AU2003226352A1 (en) | 2002-04-15 | 2003-11-03 | Intest Ip Corporation | Test head positioner system |
AU2003233659A1 (en) * | 2002-05-23 | 2003-12-12 | Cascade Microtech, Inc. | Probe for testing a device under test |
JP4511354B2 (ja) * | 2002-10-02 | 2010-07-28 | インテスト コーポレイション | テストヘッドを位置決めするための位置決め装置、テストヘッドを位置決めする方法、および電子テストシステムのテストヘッドのための位置決め装置 |
DE602004030768D1 (de) * | 2003-01-28 | 2011-02-10 | Intest Corp | Handgelenk zum anbringen eines testkopfes |
US6833696B2 (en) * | 2003-03-04 | 2004-12-21 | Xandex, Inc. | Methods and apparatus for creating a high speed connection between a device under test and automatic test equipment |
US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
MY146692A (en) * | 2003-08-06 | 2012-09-14 | Intest Corp | Test head positioning system |
EP1947466B1 (en) | 2003-08-06 | 2012-07-04 | inTEST Corporation | Test head positioning system |
DE20317541U1 (de) * | 2003-10-08 | 2005-02-17 | Rotwerk Elektrowerkzeuge Und Handelsmarketing Beteiligungsgesellschaft Mbh | Klemmer |
KR100960496B1 (ko) * | 2003-10-31 | 2010-06-01 | 엘지디스플레이 주식회사 | 액정표시소자의 러빙방법 |
DE202004021093U1 (de) | 2003-12-24 | 2006-09-28 | Cascade Microtech, Inc., Beaverton | Aktiver Halbleiterscheibenmessfühler |
US7420381B2 (en) | 2004-09-13 | 2008-09-02 | Cascade Microtech, Inc. | Double sided probing structures |
US8794579B2 (en) | 2005-06-03 | 2014-08-05 | Steelcase, Inc. | Support arm assembly |
US7312604B2 (en) * | 2005-07-29 | 2007-12-25 | Nextest Systems Corporation | Portable manipulator for stackable semiconductor test system |
US8607935B2 (en) | 2005-12-20 | 2013-12-17 | Intuitive Surgical Operations, Inc. | Guide systems for laminated spring assemblies |
JP2007184374A (ja) * | 2006-01-05 | 2007-07-19 | King Yuan Electronics Co Ltd | 自動昇降操作装置 |
US20070176615A1 (en) * | 2006-01-27 | 2007-08-02 | Xandex, Inc. | Active probe contact array management |
US20070234549A1 (en) * | 2006-03-17 | 2007-10-11 | General Electric Company | Braze/weld manipulator and method of manipulating nozzles |
US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
US7403028B2 (en) * | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
EP2104862B1 (en) * | 2006-12-29 | 2012-08-08 | inTEST Corporation | Test head positioning system and method |
TWI439709B (zh) | 2006-12-29 | 2014-06-01 | Intest Corp | 用於使負載沿平移軸線平移之操縱器與負載定位系統 |
WO2008103328A1 (en) * | 2007-02-23 | 2008-08-28 | Intest Corporation | Test head manipulator |
US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
US7733081B2 (en) * | 2007-10-19 | 2010-06-08 | Teradyne, Inc. | Automated test equipment interface |
US7847570B2 (en) * | 2007-10-19 | 2010-12-07 | Teradyne, Inc. | Laser targeting mechanism |
US8212578B1 (en) | 2008-03-17 | 2012-07-03 | Intest Corporation | Test head positioner system |
CN102150055B (zh) * | 2008-07-14 | 2013-09-18 | Intest公司 | 测试头对接系统及方法 |
US8191487B2 (en) * | 2009-02-25 | 2012-06-05 | Humanscale Corporation | Wall-mounted accessory holder |
US8099184B2 (en) * | 2009-04-13 | 2012-01-17 | Rimrock Automation, Inc. | Load compensation for robotic applications |
US8981807B2 (en) | 2010-07-27 | 2015-03-17 | Intest Corporation | Positioner system and method of positioning |
CN102147270A (zh) * | 2010-12-22 | 2011-08-10 | 苏州新长光热能科技有限公司 | 工业用光电传感器安装支架 |
EP2732298A1 (en) | 2011-07-12 | 2014-05-21 | Intest Corporation | Method and apparatus for docking a test head with a peripheral |
US8702049B2 (en) * | 2012-09-10 | 2014-04-22 | Benedict Vieira | Ergonomic space-saving customizable workstation |
CN102853949A (zh) * | 2012-09-21 | 2013-01-02 | 陕西科技大学 | 一种金属件剪切力测量装置 |
CN103624776A (zh) * | 2013-12-23 | 2014-03-12 | 镇江艾科半导体有限公司 | 控制测试头在xy平面内精确运动定位的机械手臂 |
US10094854B2 (en) * | 2015-10-23 | 2018-10-09 | Teradyne, Inc. | Manipulator in automatic test equipment |
CA2923047C (en) * | 2016-03-08 | 2023-06-27 | Darcy Goossen | Device for handling tires |
FR3049040B1 (fr) * | 2016-03-18 | 2019-01-25 | Erard | Systeme support pour ecran plat et procede de mise en oeuvre |
CN106429960B (zh) * | 2016-11-09 | 2019-06-07 | 上海卫星装备研究所 | 一种新型六自由度卫星侧板安装设备 |
CN107718037B (zh) * | 2017-09-28 | 2021-05-04 | 南京双京电博特种机器人产业研究院有限公司 | 一种关节机器人的平衡装置 |
US10751888B2 (en) * | 2018-10-04 | 2020-08-25 | Advanced Intelligent Systems Inc. | Manipulator apparatus for operating on articles |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2697529A (en) * | 1951-02-27 | 1954-12-21 | John P Hubbell | Apparatus for handling frangible articles by remote control |
US3262593A (en) * | 1963-07-10 | 1966-07-26 | Gen Mills Inc | Wall-mounted support structure |
US3791052A (en) * | 1970-01-26 | 1974-02-12 | Lely Nv C Van Der | Tractor comprising a pivotable driver seat |
US3665148A (en) * | 1971-04-07 | 1972-05-23 | Gen Motors Corp | Six-axis manipulator |
DE2226407C3 (de) * | 1972-05-31 | 1978-10-12 | Industrie-Werke Karlsruhe Augsburg Ag, 7500 Karlsruhe | Gerät zur maschinellen, durch veränderbare Programme steuerbaren Handreichung |
US3873148A (en) * | 1972-12-27 | 1975-03-25 | Caterpillar Tractor Co | Vehicle frame |
JPS50120856A (ko) * | 1974-03-09 | 1975-09-22 | ||
US3884365A (en) * | 1974-03-19 | 1975-05-20 | Thomson Ind Inc | Workpiece manipulator |
SE416452B (sv) * | 1975-06-16 | 1981-01-05 | Asea Ab | Industrirobot |
FR2352640A1 (fr) * | 1976-05-24 | 1977-12-23 | Bretagne Atel Chantiers | Telemanipulateur a faible encombrement |
DE2630857A1 (de) * | 1976-07-09 | 1978-01-12 | Volkswagenwerk Ag | Handhabungsautomat |
US4062455A (en) * | 1976-11-22 | 1977-12-13 | Flatau Carl R | Remote manipulator |
US4132318A (en) * | 1976-12-30 | 1979-01-02 | International Business Machines Corporation | Asymmetric six-degree-of-freedom force-transducer system for a computer-controlled manipulator system |
EP0001686B1 (en) * | 1977-10-20 | 1981-11-04 | Imperial Chemical Industries Plc | An industrial manipulator for placing articles in close proximity to adjacent articles and a method of close packing articles therewith |
JPS571116Y2 (ko) * | 1978-01-31 | 1982-01-08 | ||
JPS6055003B2 (ja) * | 1978-05-29 | 1985-12-03 | 大阪機工株式会社 | 三次元形状測定装置 |
US4303368A (en) * | 1978-09-18 | 1981-12-01 | Westinghouse Electric Corp. | Remote docking apparatus |
FR2451807A1 (fr) * | 1979-03-22 | 1980-10-17 | Renault | Manipulateur six axes |
US4264266A (en) * | 1979-04-20 | 1981-04-28 | Tl Systems Corporation | Manipulator apparatus |
US4317560A (en) * | 1979-12-26 | 1982-03-02 | Troyer Wade E | Work manipulator |
JPS56102482U (ko) * | 1979-12-29 | 1981-08-11 | ||
GB2074337B (en) * | 1980-04-15 | 1983-11-16 | Univ Technology | Adjustable support for an optical or other instrument |
JPS575471A (en) * | 1980-06-12 | 1982-01-12 | Matsushita Electric Ind Co Ltd | Synchronism separator |
JPS5773601A (en) * | 1980-10-27 | 1982-05-08 | Mitsutoyo Mfg Co Ltd | Balance device of measuring machine |
DE3048045C2 (de) * | 1980-12-19 | 1984-12-06 | Mora Fabrik für Meßgeräte Helmut Freund GmbH, 8750 Aschaffenburg | Höhenmeß- und Anreißgerät mit einer von einem Gerätefuß aufragenden Gerätesäule |
US4389155A (en) * | 1981-05-11 | 1983-06-21 | Absher Charles A | Tractor scoop mechanism |
-
1982
- 1982-08-25 US US06/411,311 patent/US4527942A/en not_active Expired - Lifetime
-
1983
- 1983-08-11 US US06522635 patent/US4589815B1/en not_active Expired - Lifetime
- 1983-08-24 KR KR1019830003961A patent/KR870001754B1/ko not_active IP Right Cessation
- 1983-08-25 JP JP58154237A patent/JPS5960206A/ja active Granted
-
1991
- 1991-05-22 JP JP14519191A patent/JP2513362B2/ja not_active Expired - Lifetime
- 1991-05-22 JP JP14519091A patent/JPH06100634B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4589815A (en) | 1986-05-20 |
JPH05126903A (ja) | 1993-05-25 |
JPH05126902A (ja) | 1993-05-25 |
JPH06100634B2 (ja) | 1994-12-12 |
US4589815B1 (en) | 1998-04-07 |
KR870001754B1 (ko) | 1987-10-06 |
JPS5960206A (ja) | 1984-04-06 |
US4527942A (en) | 1985-07-09 |
JPH0461281B2 (ko) | 1992-09-30 |
JP2513362B2 (ja) | 1996-07-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR840005699A (ko) | 시험 시스템용 전자 시험 헤드 포지셔너 | |
US4705447A (en) | Electronic test head positioner for test systems | |
JP2546937B2 (ja) | ケーブルピボットを備えた電子装置試験システム | |
MY138984A (en) | Vertical counter balanced test head manipulator | |
CN108692925A (zh) | 弹性环刚度测量装置及测量方法 | |
DE69207083D1 (de) | Vibrationssimulator für Luftschraubenrotor eines Hubschraubers | |
ATE402794T1 (de) | Hochleistungsvorrichtung zum kraftausgleich | |
CN113460338B (zh) | 一种多功能天线重力卸载装置 | |
CN108908165A (zh) | 星模拟器适配器 | |
GB2321522A (en) | Extensometer structure | |
WO1993005371A1 (en) | Method and apparatus for measuring dynamic load, and load measuring equipment using them | |
CN110216655B (zh) | 一种并联机器人的单腿防自转装置 | |
JP2000192999A (ja) | コイルスプリングの弾撥力測定用治具 | |
CN114261533B (zh) | 一种飞机起落架气动载荷模拟装置 | |
SU1439444A1 (ru) | Силовой элемент имитатора пониженной гравитации | |
SU953518A1 (ru) | Стенд дл испытаний пружин на усталость | |
RU2195642C1 (ru) | Стенд для испытаний оболочечных конструкций | |
SU1640600A1 (ru) | Установка дл испытани на усталость образцов при сложном напр женном состо нии | |
SU943547A1 (ru) | Стенд дл испытани сильфонов | |
SU1741171A1 (ru) | Учебный прибор по сопротивлению материалов | |
SU1551871A1 (ru) | Тросовый виброизол тор | |
CN110174251A (zh) | 一种碟簧减震器的试验装置 | |
SU1200148A1 (ru) | Приспособление дл испытани резьбового соединени на самоотвинчивание под действием раст гивающей нагрузки | |
SU1315860A1 (ru) | Стенд дл статических и динамических испытаний конструкций на прочность | |
SU664059A1 (ru) | Стенд дл градуировки моментомеров |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20020930 Year of fee payment: 16 |
|
EXPY | Expiration of term |