JPS5773601A - Balance device of measuring machine - Google Patents

Balance device of measuring machine

Info

Publication number
JPS5773601A
JPS5773601A JP15101080A JP15101080A JPS5773601A JP S5773601 A JPS5773601 A JP S5773601A JP 15101080 A JP15101080 A JP 15101080A JP 15101080 A JP15101080 A JP 15101080A JP S5773601 A JPS5773601 A JP S5773601A
Authority
JP
Japan
Prior art keywords
pressure
damper
room
piston
sliding shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15101080A
Other languages
Japanese (ja)
Other versions
JPH036442B2 (en
Inventor
Tetsuo Nakamura
Hisayoshi Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP15101080A priority Critical patent/JPS5773601A/en
Publication of JPS5773601A publication Critical patent/JPS5773601A/en
Publication of JPH036442B2 publication Critical patent/JPH036442B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

PURPOSE:To improve measurement precision by reducing the size of a balance device and also reducing its weight, by balancing the weight of a sliding shaft, etc., by utilizing the operation of a pressure fluid in a damper room. CONSTITUTION:A piston coupled with a sliding shaft 11 as the movable detection part of a measuring instrument and a cylinder 21 in which the piston is fitted constitute a damper room 28. In this damper room 28, the 1st vale mechanism 30 operating by a pressure difference between the room temperature and atmospheric pressure is provided to permit an internal fluid flow through the piston 24, and the 2nd valve mechanism 50 operating according to a pressure difference betwen said damper room 28 and a high pressure part coupled with a pressure fluid supply mechanism 62 is further provided to supply the pressure fluid into the damper roo, 28. The upward and downward movements of the sliding shaft 11 are balanced by the fluid in the damper room 28 having nearly constant pressure in a balance device 20 through coupling mechanism 17, 18 and 19, thus performing precise measurement by the small-sized device.
JP15101080A 1980-10-27 1980-10-27 Balance device of measuring machine Granted JPS5773601A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15101080A JPS5773601A (en) 1980-10-27 1980-10-27 Balance device of measuring machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15101080A JPS5773601A (en) 1980-10-27 1980-10-27 Balance device of measuring machine

Publications (2)

Publication Number Publication Date
JPS5773601A true JPS5773601A (en) 1982-05-08
JPH036442B2 JPH036442B2 (en) 1991-01-30

Family

ID=15509312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15101080A Granted JPS5773601A (en) 1980-10-27 1980-10-27 Balance device of measuring machine

Country Status (1)

Country Link
JP (1) JPS5773601A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5960206A (en) * 1982-08-25 1984-04-06 インテスト・コ−ポレ−シヨン Electronic test head positioning device for test set
JPS6082801A (en) * 1983-10-13 1985-05-11 Hitachi Seiki Co Ltd Screwing device for checking tapered screw
US7726036B2 (en) * 2007-07-06 2010-06-01 Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. Contour measuring probe

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5960206A (en) * 1982-08-25 1984-04-06 インテスト・コ−ポレ−シヨン Electronic test head positioning device for test set
JPH0461281B2 (en) * 1982-08-25 1992-09-30 Intesuto Corp
JPS6082801A (en) * 1983-10-13 1985-05-11 Hitachi Seiki Co Ltd Screwing device for checking tapered screw
US7726036B2 (en) * 2007-07-06 2010-06-01 Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. Contour measuring probe

Also Published As

Publication number Publication date
JPH036442B2 (en) 1991-01-30

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