KR20220105131A - 하이브리드 벌크 음향파 필터 - Google Patents

하이브리드 벌크 음향파 필터 Download PDF

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Publication number
KR20220105131A
KR20220105131A KR1020220005116A KR20220005116A KR20220105131A KR 20220105131 A KR20220105131 A KR 20220105131A KR 1020220005116 A KR1020220005116 A KR 1020220005116A KR 20220005116 A KR20220005116 A KR 20220005116A KR 20220105131 A KR20220105131 A KR 20220105131A
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South Korea
Prior art keywords
acoustic
resonator
resonators
piezoelectric material
acoustic resonator
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KR1020220005116A
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Korean (ko)
Inventor
알프레드 기메네즈
울프강 히렌
게르노트 패팅거
무다르 알-조우마일리
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코르보 유에스, 인크.
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Publication of KR20220105131A publication Critical patent/KR20220105131A/ko
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/0004—Impedance-matching networks
    • H03H9/0014—Impedance-matching networks using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H03H9/605—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices
    • H03H9/706—Duplexers

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Filters And Equalizers (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
KR1020220005116A 2021-01-19 2022-01-13 하이브리드 벌크 음향파 필터 Pending KR20220105131A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/152,110 US11575363B2 (en) 2021-01-19 2021-01-19 Hybrid bulk acoustic wave filter
US17/152,110 2021-01-19

Publications (1)

Publication Number Publication Date
KR20220105131A true KR20220105131A (ko) 2022-07-26

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KR1020220005116A Pending KR20220105131A (ko) 2021-01-19 2022-01-13 하이브리드 벌크 음향파 필터

Country Status (5)

Country Link
US (1) US11575363B2 (enExample)
EP (1) EP4030620A1 (enExample)
JP (1) JP2022111108A (enExample)
KR (1) KR20220105131A (enExample)
TW (1) TW202243400A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12445109B2 (en) * 2019-07-31 2025-10-14 QXONIX Inc. Structures, acoustic wave resonators, layers, devices and systems

Family Cites Families (135)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3731230A (en) 1971-12-17 1973-05-01 Motorola Inc Broadband circuit for minimizing the effects of crystal shunt capacitance
US3875533A (en) 1973-10-15 1975-04-01 Motorola Inc Crystal controlled overtone oscillator having a rejection circuit for preventing oscillation at undesired overtones
DK147560C (da) 1980-03-13 1985-07-22 Bang & Olufsen As Modtagerantenne for magnetiske signaler, f.eks. ferritantenne
US4577168A (en) 1984-12-03 1986-03-18 R. F. Monolithics, Inc. Notch filter
US5291159A (en) 1992-07-20 1994-03-01 Westinghouse Electric Corp. Acoustic resonator filter with electrically variable center frequency and bandwidth
US5821833A (en) 1995-12-26 1998-10-13 Tfr Technologies, Inc. Stacked crystal filter device and method of making
US6246153B1 (en) 1998-07-16 2001-06-12 Face International Corp. Positive feedback resonant transducer circuit
US6067391A (en) 1998-09-02 2000-05-23 The United States Of America As Represented By The Secretary Of The Air Force Multiply periodic refractive index modulated optical filters
KR100301854B1 (ko) 1999-06-02 2001-09-29 구본준, 론 위라하디락사 투과 및 반사형 겸용 액정표시장치
US6496085B2 (en) 2001-01-02 2002-12-17 Nokia Mobile Phones Ltd Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror
TW488044B (en) 2001-02-09 2002-05-21 Asia Pacific Microsystems Inc Bulk acoustic filter and its package
JP3973915B2 (ja) 2001-03-30 2007-09-12 株式会社日立メディアエレクトロニクス 高周波フィルタ、高周波回路、アンテナ共用器及び無線端末
WO2002087081A1 (en) 2001-04-25 2002-10-31 Koninklijke Philips Electronics N.V. Arrangement with two piezoelectric layers, and method of operating a filter device
DE10134987A1 (de) 2001-07-18 2003-02-06 Epcos Ag Reaktanzfilter mit verbesserter Flankensteilheit
DE10149542A1 (de) 2001-10-08 2003-04-17 Infineon Technologies Ag BAW-Resonator
US6720844B1 (en) 2001-11-16 2004-04-13 Tfr Technologies, Inc. Coupled resonator bulk acoustic wave filter
US6670866B2 (en) 2002-01-09 2003-12-30 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers
DE10225202B4 (de) 2002-06-06 2017-06-01 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement mit einem Anpassnetzwerk
JP3963824B2 (ja) 2002-11-22 2007-08-22 富士通メディアデバイス株式会社 フィルタ素子、それを有するフィルタ装置、分波器及び高周波回路
JP2004304490A (ja) 2003-03-31 2004-10-28 Tdk Corp 薄膜圧電共振子の製造方法、薄膜圧電共振子の製造装置、薄膜圧電共振子および電子部品
DE10319554B4 (de) 2003-04-30 2018-05-09 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren
US6927651B2 (en) 2003-05-12 2005-08-09 Agilent Technologies, Inc. Acoustic resonator devices having multiple resonant frequencies and methods of making the same
JP4229122B2 (ja) 2003-05-26 2009-02-25 株式会社村田製作所 圧電電子部品、およびその製造方法、通信機
JP2005117641A (ja) 2003-09-17 2005-04-28 Matsushita Electric Ind Co Ltd 圧電体共振器、それを用いたフィルタ及び共用器
US6946928B2 (en) 2003-10-30 2005-09-20 Agilent Technologies, Inc. Thin-film acoustically-coupled transformer
US7362198B2 (en) 2003-10-30 2008-04-22 Avago Technologies Wireless Ip (Singapore) Pte. Ltd Pass bandwidth control in decoupled stacked bulk acoustic resonator devices
EP1528677B1 (en) 2003-10-30 2006-05-10 Agilent Technologies, Inc. Film acoustically-coupled transformer with two reverse c-axis piezoelectric elements
JP3950445B2 (ja) 2003-11-05 2007-08-01 Ｔｄｋ株式会社 デュプレクサ
JP3944161B2 (ja) 2003-12-25 2007-07-11 株式会社東芝 薄膜バルク波音響共振器及び薄膜バルク波音響共振器の製造方法
US6963257B2 (en) 2004-03-19 2005-11-08 Nokia Corporation Coupled BAW resonator based duplexers
DE102004032930A1 (de) 2004-07-07 2006-02-02 Epcos Ag Beidseitig symmetrisch betreibbares Filter mit Volumenwellenresonatoren
DE102004049499B4 (de) 2004-10-11 2017-12-21 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitende Schaltung und Bauelement mit der Schaltung
US7098758B2 (en) 2004-11-03 2006-08-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled thin-film resonators having an electrode with a tapered edge
US7333831B2 (en) 2005-02-07 2008-02-19 Nxp B.V. Interchangeable receive inputs for band and system swappability in communication systems and related methods
US7436269B2 (en) 2005-04-18 2008-10-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled resonators and method of making the same
US7535323B2 (en) 2006-07-10 2009-05-19 Skyworks Solutions, Inc. Bulk acoustic wave filter with reduced nonlinear signal distortion
US7515018B2 (en) 2006-08-31 2009-04-07 Martin Handtmann Acoustic resonator
JP5036435B2 (ja) 2006-09-01 2012-09-26 太陽誘電株式会社 弾性波デバイス、フィルタおよび分波器
JP2008172711A (ja) 2007-01-15 2008-07-24 Hitachi Media Electoronics Co Ltd 薄膜バルク弾性波共振器およびフィルタおよびそれを用いた高周波モジュール
US7804374B1 (en) 2007-02-15 2010-09-28 Discera, Inc. Feedthrough capacitance compensation for resonant devices
US7825749B2 (en) 2007-05-31 2010-11-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Integrated coupled resonator filter and bulk acoustic wave devices
US7786825B2 (en) 2007-05-31 2010-08-31 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave device with coupled resonators
US7898493B1 (en) 2007-06-13 2011-03-01 The Ohio State University Implementation of ultra wide band (UWB) electrically small antennas by means of distributed non foster loading
US8018303B2 (en) 2007-10-12 2011-09-13 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave device
US7786826B2 (en) 2007-10-12 2010-08-31 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Apparatus with acoustically coupled BAW resonators and a method for matching impedances
FR2926417B1 (fr) 2008-01-15 2010-01-08 Commissariat Energie Atomique Filtre d'amplification de puissance de signaux radiofrequence
JP5441095B2 (ja) 2008-01-31 2014-03-12 太陽誘電株式会社 弾性波デバイス、デュープレクサ、通信モジュール、および通信装置
US7855618B2 (en) 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7889024B2 (en) 2008-08-29 2011-02-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single cavity acoustic resonators and electrical filters comprising single cavity acoustic resonators
CN102273071A (zh) 2009-01-07 2011-12-07 株式会社大真空 压电振动设备的制造方法
US8373519B2 (en) 2009-01-26 2013-02-12 Resonance Semiconductor Corporation Switchable power combiner
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
JP5419617B2 (ja) 2009-09-28 2014-02-19 太陽誘電株式会社 フィルタ、通信モジュール、および通信装置
EP2493073B1 (en) 2009-10-19 2018-11-28 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JP2011109306A (ja) 2009-11-16 2011-06-02 Murata Mfg Co Ltd 弾性表面波素子
US9847768B2 (en) 2009-11-23 2017-12-19 Avago Technologies General Ip (Singapore) Pte. Ltd. Polarity determining seed layer and method of fabricating piezoelectric materials with specific C-axis
US9450561B2 (en) 2009-11-25 2016-09-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with varying amounts of dopant
US9679765B2 (en) 2010-01-22 2017-06-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating rare-earth doped piezoelectric material with various amounts of dopants and a selected C-axis orientation
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8768267B2 (en) 2010-02-03 2014-07-01 Hollinworth Fund, L.L.C. Switchless band separation for transceivers
US8576024B2 (en) 2010-02-11 2013-11-05 Hollinworth Fund, L.L.C. Electro-acoustic filter
US8508315B2 (en) 2010-02-23 2013-08-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustically coupled resonator filter with impedance transformation ratio controlled by resonant frequency difference between two coupled resonators
JP5519326B2 (ja) 2010-02-25 2014-06-11 太陽誘電株式会社 フィルタ、デュープレクサ、通信モジュール、通信装置
AT509633A1 (de) 2010-03-29 2011-10-15 Ctr Carinthian Tech Res Ag Hochtemperaturbeständige, elektrisch leitfähige dünnschichten
JP5187597B2 (ja) 2010-07-05 2013-04-24 株式会社村田製作所 弾性波素子
US8674789B2 (en) 2010-07-07 2014-03-18 Wei Pang Serially connected first and second coupled resonator filters configured to provide at least one feedback capacitor
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
JP2012257050A (ja) 2011-06-08 2012-12-27 Nippon Dempa Kogyo Co Ltd ハイパス型のノッチフィルタ及びこのフィルタを備えた電子機器
WO2013002033A1 (ja) 2011-06-28 2013-01-03 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
CN103765768B (zh) 2011-08-26 2016-06-01 株式会社村田制作所 压电器件以及压电器件的制造方法
US8923794B2 (en) 2011-11-02 2014-12-30 Triquint Semiconductor, Inc. Temperature compensation of acoustic resonators in the electrical domain
JP6017868B2 (ja) 2011-11-04 2016-11-02 太陽誘電株式会社 分波器、フィルタ及び通信モジュール
US9054671B2 (en) 2011-11-09 2015-06-09 International Business Machines Corporation Tunable filter structures and design structures
JP6116120B2 (ja) 2012-01-24 2017-04-19 太陽誘電株式会社 弾性波デバイス及び弾性波デバイスの製造方法
US9065421B2 (en) 2012-01-31 2015-06-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making
US8981627B2 (en) 2012-06-04 2015-03-17 Tdk Corporation Piezoelectric device with electrode films and electroconductive oxide film
FR2996061B1 (fr) 2012-09-27 2015-12-25 Commissariat Energie Atomique Structure acoustique comportant au moins un resonateur et au moins une capacite cointegree dans une meme couche piezoelectrique ou ferroelectrique
KR20150060881A (ko) 2012-10-24 2015-06-03 가부시키가이샤 무라타 세이사쿠쇼 필터장치
CN104854793B (zh) * 2012-12-21 2018-08-21 快速追踪有限公司 Baw部件、baw部件的叠层和用于制造baw部件的方法，所述baw部件包括两个不同的堆叠压电材料
WO2014094887A1 (en) * 2012-12-21 2014-06-26 Epcos Ag Mems component comprising aln and sc and method for manufacturing a mems component
US9512796B2 (en) 2013-02-08 2016-12-06 Toyota Jidosha Kabushiki Kaisha Exhaust purification apparatus for internal combustion engine
WO2014168162A1 (ja) 2013-04-11 2014-10-16 株式会社村田製作所 高周波モジュール
WO2014185331A1 (ja) 2013-05-14 2014-11-20 株式会社村田製作所 弾性波装置およびその製造方法
JP6315650B2 (ja) * 2013-07-31 2018-04-25 太陽誘電株式会社 電子デバイス
US9437802B2 (en) 2013-08-21 2016-09-06 Fujifilm Dimatix, Inc. Multi-layered thin film piezoelectric devices and methods of making the same
CN106031036B (zh) 2014-02-10 2018-11-16 株式会社村田制作所 滤波电路以及无线通信装置
US9548438B2 (en) 2014-03-31 2017-01-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising acoustic redistribution layers
WO2015151706A1 (ja) 2014-03-31 2015-10-08 株式会社村田製作所 弾性波装置
DE102014111912B4 (de) 2014-08-20 2024-06-13 Snaptrack, Inc. HF-Filter
JP6508920B2 (ja) 2014-11-13 2019-05-08 太陽誘電株式会社 弾性波デバイスおよび送受信デバイス
US9698756B2 (en) 2014-12-24 2017-07-04 Qorvo Us, Inc. Acoustic RF resonator parallel capacitance compensation
US9837984B2 (en) 2014-12-24 2017-12-05 Qorvo Us, Inc. RF ladder filter with simplified acoustic RF resonator parallel capacitance compensation
KR102117471B1 (ko) 2015-01-12 2020-06-01 삼성전기주식회사 음향 공진기 및 그 제조 방법
US9584076B2 (en) 2015-03-06 2017-02-28 Qorvo Us, Inc. Output matching network for differential power amplifier
US9837983B2 (en) 2015-03-13 2017-12-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic filter device with combined passband
CN107408937B (zh) 2015-03-30 2020-09-25 株式会社村田制作所 高频率滤波器、前端电路以及通信设备
US9929761B2 (en) 2015-04-17 2018-03-27 Qorvo Us, Inc. High band TDD antenna swapping method with improved receiver sensitivity
US9524881B2 (en) 2015-04-30 2016-12-20 Texas Instruments Incorporated Method for fabricating specific termination angles in titanium tungsten layers
JP6589983B2 (ja) 2015-07-02 2019-10-16 株式会社村田製作所 弾性波装置
US10097161B2 (en) 2015-09-25 2018-10-09 Qorvo Us, Inc. Compensation circuit for acoustic resonators
US9847769B2 (en) 2015-09-25 2017-12-19 Qorvo Us, Inc. Tunable compensation circuit for filter circuitry using acoustic resonators
JP6415419B2 (ja) 2015-12-02 2018-10-31 太陽誘電株式会社 弾性波フィルタ、デュプレクサ、及びモジュール
US10243537B2 (en) 2016-01-12 2019-03-26 Qorvo Us, Inc. Compensation circuit for use with acoustic resonators to provide a bandstop
US10141644B2 (en) 2016-04-18 2018-11-27 Qorvo Us, Inc. Acoustic filter for antennas
DE102016107658A1 (de) 2016-04-25 2017-10-26 Infineon Technologies Ag Abstimmbares resonatorelement, filterschaltkreis und verfahren
US10581156B2 (en) 2016-05-04 2020-03-03 Qorvo Us, Inc. Compensation circuit to mitigate antenna-to-antenna coupling
JP2017208629A (ja) 2016-05-17 2017-11-24 株式会社村田製作所 弾性波装置
US10581403B2 (en) 2016-07-11 2020-03-03 Qorvo Us, Inc. Device having a titanium-alloyed surface
KR102776288B1 (ko) 2016-08-08 2025-03-07 삼성전기주식회사 표면 탄성파 필터 장치 및 이의 제조방법
CN109690944B (zh) * 2016-09-07 2023-02-28 株式会社村田制作所 弹性波滤波器装置以及复合滤波器装置
US11050412B2 (en) 2016-09-09 2021-06-29 Qorvo Us, Inc. Acoustic filter using acoustic coupling
US10284174B2 (en) 2016-09-15 2019-05-07 Qorvo Us, Inc. Acoustic filter employing inductive coupling
US10367470B2 (en) 2016-10-19 2019-07-30 Qorvo Us, Inc. Wafer-level-packaged BAW devices with surface mount connection structures
KR101953219B1 (ko) 2016-11-24 2019-02-28 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치
JP6661521B2 (ja) 2016-12-05 2020-03-11 太陽誘電株式会社 フィルタおよびマルチプレクサ
US11165412B2 (en) 2017-01-30 2021-11-02 Qorvo Us, Inc. Zero-output coupled resonator filter and related radio frequency filter circuit
US11165413B2 (en) 2017-01-30 2021-11-02 Qorvo Us, Inc. Coupled resonator structure
JP6790907B2 (ja) 2017-02-23 2020-11-25 株式会社村田製作所 マルチプレクサ、送信装置および受信装置
US10873318B2 (en) 2017-06-08 2020-12-22 Qorvo Us, Inc. Filter circuits having acoustic wave resonators in a transversal configuration
GB2608714B (en) * 2017-07-07 2023-04-05 Skyworks Solutions Inc Substituted aluminium nitride for improved acoustic wave filters
US10361676B2 (en) 2017-09-29 2019-07-23 Qorvo Us, Inc. Baw filter structure with internal electrostatic shielding
JP6959819B2 (ja) 2017-10-02 2021-11-05 株式会社村田製作所 マルチプレクサ
KR102722507B1 (ko) 2017-12-07 2024-10-29 인피니언 테크놀로지스 아게 음향적으로 결합된 공진기 노치 및 대역 통과 필터
JP2019114986A (ja) 2017-12-25 2019-07-11 株式会社村田製作所 弾性波装置
US10700662B2 (en) 2017-12-28 2020-06-30 Taiyo Yuden Co., Ltd. Acoustic wave device, filter, and multiplexer
JP6812998B2 (ja) 2018-03-19 2021-01-13 株式会社村田製作所 弾性波装置
US11152913B2 (en) 2018-03-28 2021-10-19 Qorvo Us, Inc. Bulk acoustic wave (BAW) resonator
US10985731B2 (en) 2018-09-20 2021-04-20 Qorvo Us, Inc. Acoustic resonator structure
US11431316B2 (en) 2018-09-20 2022-08-30 Qorvo Us, Inc. Acoustic resonator structure
US11563421B2 (en) 2018-09-21 2023-01-24 Qorvo Us, Inc. Acoustic structure having tunable parallel resonance frequency
US10958244B2 (en) 2018-10-26 2021-03-23 Qorvo Us, Inc. Acoustic filter apparatus having configurable parallel resonance frequencies
US11146247B2 (en) 2019-07-25 2021-10-12 Qorvo Us, Inc. Stacked crystal filter structures
CN111010120A (zh) * 2019-09-20 2020-04-14 天津大学 具有调节层的体声波谐振器、滤波器和电子设备
CN111917392A (zh) 2020-04-14 2020-11-10 诺思(天津)微系统有限责任公司 压电滤波器及其带外抑制改善方法、多工器、通信设备
KR20220028297A (ko) * 2020-08-28 2022-03-08 삼성전기주식회사 음향 공진기 필터

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