KR20190024993A - 반도체 모듈 - Google Patents

반도체 모듈 Download PDF

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Publication number
KR20190024993A
KR20190024993A KR1020197002978A KR20197002978A KR20190024993A KR 20190024993 A KR20190024993 A KR 20190024993A KR 1020197002978 A KR1020197002978 A KR 1020197002978A KR 20197002978 A KR20197002978 A KR 20197002978A KR 20190024993 A KR20190024993 A KR 20190024993A
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KR
South Korea
Prior art keywords
substrate
signal
insulating member
bonded
conductive
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Abandoned
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KR1020197002978A
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English (en)
Korean (ko)
Inventor
나오키 가토
쇼고 모리
하루미츠 사토
히로키 와타나베
히로시 유구치
유리 오토베
Original Assignee
가부시키가이샤 도요다 지도숏키
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Publication of KR20190024993A publication Critical patent/KR20190024993A/ko
Abandoned legal-status Critical Current

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    • HELECTRICITY
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5386Geometry or layout of the interconnection structure
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    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
KR1020197002978A 2016-08-03 2017-05-12 반도체 모듈 Abandoned KR20190024993A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016153084A JP6717103B2 (ja) 2016-08-03 2016-08-03 半導体モジュール
JPJP-P-2016-153084 2016-08-03
PCT/JP2017/018052 WO2018025463A1 (ja) 2016-08-03 2017-05-12 半導体モジュール

Publications (1)

Publication Number Publication Date
KR20190024993A true KR20190024993A (ko) 2019-03-08

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KR1020197002978A Abandoned KR20190024993A (ko) 2016-08-03 2017-05-12 반도체 모듈

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US (1) US10770400B2 (enExample)
EP (1) EP3496141A4 (enExample)
JP (1) JP6717103B2 (enExample)
KR (1) KR20190024993A (enExample)
CN (1) CN109564912A (enExample)
WO (1) WO2018025463A1 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015080383A (ja) 2013-10-18 2015-04-23 日本精工株式会社 半導体モジュール

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
JP3614386B2 (ja) 2001-08-23 2005-01-26 株式会社ルネサステクノロジ パワーmosfet
JP3904541B2 (ja) * 2003-09-26 2007-04-11 沖電気工業株式会社 半導体装置内蔵基板の製造方法
JP2007288044A (ja) * 2006-04-19 2007-11-01 Sumitomo Electric Ind Ltd 半導体装置
JP5268786B2 (ja) * 2009-06-04 2013-08-21 三菱電機株式会社 半導体モジュール
JP5659663B2 (ja) * 2010-09-28 2015-01-28 富士電機株式会社 半導体装置及び半導体装置の製造方法
JP2012151353A (ja) * 2011-01-20 2012-08-09 Sharp Corp 半導体モジュール
CN102148215B (zh) * 2011-01-21 2012-06-06 哈尔滨理工大学 提高ccga 器件软钎焊焊点可靠性的互连结构及实现方法
JP2013004943A (ja) 2011-06-22 2013-01-07 Renesas Electronics Corp 半導体装置及びその製造方法
JP5708359B2 (ja) * 2011-08-11 2015-04-30 株式会社デンソー 半導体装置及び半導体装置の製造方法
WO2015178296A1 (ja) * 2014-05-20 2015-11-26 三菱電機株式会社 電力用半導体装置
JP6308300B2 (ja) * 2014-08-12 2018-04-11 富士電機株式会社 半導体装置
JP6361448B2 (ja) * 2014-10-15 2018-07-25 住友電気工業株式会社 半導体モジュール

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015080383A (ja) 2013-10-18 2015-04-23 日本精工株式会社 半導体モジュール

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Publication number Publication date
EP3496141A4 (en) 2019-07-17
JP6717103B2 (ja) 2020-07-01
EP3496141A1 (en) 2019-06-12
US20190172788A1 (en) 2019-06-06
JP2018022777A (ja) 2018-02-08
US10770400B2 (en) 2020-09-08
WO2018025463A1 (ja) 2018-02-08
CN109564912A (zh) 2019-04-02

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