KR20180084762A - 비정질 투명 도전성 필름, 그리고, 결정질 투명 도전성 필름 및 그 제조 방법 - Google Patents

비정질 투명 도전성 필름, 그리고, 결정질 투명 도전성 필름 및 그 제조 방법 Download PDF

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KR20180084762A
KR20180084762A KR1020187012135A KR20187012135A KR20180084762A KR 20180084762 A KR20180084762 A KR 20180084762A KR 1020187012135 A KR1020187012135 A KR 1020187012135A KR 20187012135 A KR20187012135 A KR 20187012135A KR 20180084762 A KR20180084762 A KR 20180084762A
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KR
South Korea
Prior art keywords
conductive film
transparent conductive
manufacturing
same
crystalline
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KR1020187012135A
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English (en)
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KR102618669B1 (ko
Inventor
다카노부 야노
하루카 나리타
히로시 니시지마
게이타 우스이
히로유키 다카오
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닛토덴코 가부시키가이샤
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Publication of KR20180084762A publication Critical patent/KR20180084762A/ko
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Publication of KR102618669B1 publication Critical patent/KR102618669B1/ko

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0016—Apparatus or processes specially adapted for manufacturing conductors or cables for heat treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0036—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Thermal Sciences (AREA)
  • Laminated Bodies (AREA)
  • Non-Insulated Conductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
KR1020187012135A 2015-11-12 2016-10-25 비정질 투명 도전성 필름, 그리고, 결정질 투명 도전성 필름 및 그 제조 방법 KR102618669B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015221750A JP6654865B2 (ja) 2015-11-12 2015-11-12 非晶質透明導電性フィルム、ならびに、結晶質透明導電性フィルムおよびその製造方法
JPJP-P-2015-221750 2015-11-12
PCT/JP2016/081636 WO2017082046A1 (ja) 2015-11-12 2016-10-25 非晶質透明導電性フィルム、ならびに、結晶質透明導電性フィルムおよびその製造方法

Publications (2)

Publication Number Publication Date
KR20180084762A true KR20180084762A (ko) 2018-07-25
KR102618669B1 KR102618669B1 (ko) 2023-12-27

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KR1020187012135A KR102618669B1 (ko) 2015-11-12 2016-10-25 비정질 투명 도전성 필름, 그리고, 결정질 투명 도전성 필름 및 그 제조 방법

Country Status (5)

Country Link
JP (1) JP6654865B2 (ko)
KR (1) KR102618669B1 (ko)
CN (1) CN108352218B (ko)
TW (1) TWI765869B (ko)
WO (1) WO2017082046A1 (ko)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6953204B2 (ja) * 2017-07-04 2021-10-27 日東電工株式会社 透明導電性フィルム及びタッチパネル
TW201911965A (zh) * 2017-08-04 2019-03-16 日商日東電工股份有限公司 加熱器
JP7176879B2 (ja) * 2018-08-02 2022-11-22 日東電工株式会社 ヒータ
JP7162461B2 (ja) 2017-08-04 2022-10-28 日東電工株式会社 ヒータ用部材、ヒータ用テープ、及びヒータ用部材付成形体
JP7270334B2 (ja) * 2017-10-27 2023-05-10 日東電工株式会社 透明導電性フィルムおよびその製造方法
JP7162462B2 (ja) * 2018-08-02 2022-10-28 日東電工株式会社 ヒータ及びヒータ付物品
JP2020065488A (ja) 2018-10-24 2020-04-30 国立感染症研究所長 重症熱性血小板減少症候群（ｓｆｔｓ）ウイルス検出用プライマーセット
KR20210102292A (ko) * 2018-12-12 2021-08-19 닛토덴코 가부시키가이샤 전파 흡수체용 임피던스 정합막, 전파 흡수체용 임피던스 정합막 부착 필름, 전파 흡수체 및 전파 흡수체용 적층체
JP7198097B2 (ja) * 2019-01-30 2022-12-28 日東電工株式会社 透明導電性フィルム
JP7198096B2 (ja) * 2019-01-30 2022-12-28 日東電工株式会社 透明導電性フィルム
JP7378938B2 (ja) * 2019-02-22 2023-11-14 日東電工株式会社 光透過性導電フィルム
JP7378937B2 (ja) * 2019-02-22 2023-11-14 日東電工株式会社 光透過性導電フィルム
CN114040842A (zh) * 2019-06-27 2022-02-11 日东电工株式会社 结晶化铟锡复合氧化物膜、透明导电性薄膜及其制造方法
WO2021187580A1 (ja) * 2020-03-19 2021-09-23 日東電工株式会社 透明導電性フィルム
JP6970861B1 (ja) * 2020-03-19 2021-11-24 日東電工株式会社 透明導電性フィルム、および透明導電性フィルムの製造方法
JP2021186966A (ja) * 2020-05-25 2021-12-13 日東電工株式会社 光透過性導電性シート、タッチセンサ、調光素子、光電変換素子、熱線制御部材、アンテナ、電磁波シールド部材および画像表示装置

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JP2003297150A (ja) * 2002-04-08 2003-10-17 Nitto Denko Corp 透明導電積層体とその製造方法
JP2012134085A (ja) 2010-12-24 2012-07-12 Nitto Denko Corp 透明導電性フィルムおよびその製造方法
JP5767744B1 (ja) * 2014-03-31 2015-08-19 積水ナノコートテクノロジー株式会社 光透過性導電性フィルム及びそれを有するタッチパネル

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US6351068B2 (en) * 1995-12-20 2002-02-26 Mitsui Chemicals, Inc. Transparent conductive laminate and electroluminescence light-emitting element using same
WO2011043235A1 (ja) * 2009-10-06 2011-04-14 Jx日鉱日石金属株式会社 酸化インジウム焼結体、酸化インジウム透明導電膜及び該透明導電膜の製造方法
WO2011115177A1 (ja) * 2010-03-19 2011-09-22 住友金属鉱山株式会社 透明導電膜
JP2012230491A (ja) * 2011-04-25 2012-11-22 Nitto Denko Corp タッチパネル用透明導電性フィルムおよび画像表示装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003297150A (ja) * 2002-04-08 2003-10-17 Nitto Denko Corp 透明導電積層体とその製造方法
JP2012134085A (ja) 2010-12-24 2012-07-12 Nitto Denko Corp 透明導電性フィルムおよびその製造方法
JP5767744B1 (ja) * 2014-03-31 2015-08-19 積水ナノコートテクノロジー株式会社 光透過性導電性フィルム及びそれを有するタッチパネル

Also Published As

Publication number Publication date
JP6654865B2 (ja) 2020-02-26
CN108352218B (zh) 2021-07-16
TWI765869B (zh) 2022-06-01
CN108352218A (zh) 2018-07-31
KR102618669B1 (ko) 2023-12-27
TW201740395A (zh) 2017-11-16
JP2017091858A (ja) 2017-05-25
WO2017082046A1 (ja) 2017-05-18

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