KR20150140395A - 측면 개방형 기판 캐리어 및 로드 포트 - Google Patents
측면 개방형 기판 캐리어 및 로드 포트 Download PDFInfo
- Publication number
- KR20150140395A KR20150140395A KR1020157033677A KR20157033677A KR20150140395A KR 20150140395 A KR20150140395 A KR 20150140395A KR 1020157033677 A KR1020157033677 A KR 1020157033677A KR 20157033677 A KR20157033677 A KR 20157033677A KR 20150140395 A KR20150140395 A KR 20150140395A
- Authority
- KR
- South Korea
- Prior art keywords
- carrier
- load port
- interface
- door
- substrate
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US93063407P | 2007-05-17 | 2007-05-17 | |
US60/930,634 | 2007-05-17 | ||
PCT/US2008/064163 WO2008144668A1 (en) | 2007-05-17 | 2008-05-19 | Side opening substrate carrier and load port |
US12/123,391 | 2008-05-19 | ||
US12/123,391 US9105673B2 (en) | 2007-05-09 | 2008-05-19 | Side opening unified pod |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020147020420A Division KR101613836B1 (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20150140395A true KR20150140395A (ko) | 2015-12-15 |
Family
ID=42090842
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020157033677A KR20150140395A (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
KR1020177023439A KR101932265B1 (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
KR1020097026242A KR20100020968A (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
KR1020187036800A KR102110585B1 (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
KR1020147020420A KR101613836B1 (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
KR1020167009733A KR101772600B1 (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
Family Applications After (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020177023439A KR101932265B1 (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
KR1020097026242A KR20100020968A (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
KR1020187036800A KR102110585B1 (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
KR1020147020420A KR101613836B1 (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
KR1020167009733A KR101772600B1 (ko) | 2007-05-17 | 2008-05-19 | 측면 개방형 기판 캐리어 및 로드 포트 |
Country Status (2)
Country | Link |
---|---|
JP (5) | JP6027303B2 (ja) |
KR (6) | KR20150140395A (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6526660B6 (ja) | 2013-08-12 | 2019-06-26 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | ファクトリインターフェースの環境制御を伴う基板処理のシステム、装置、及び方法 |
JP6822953B2 (ja) | 2014-11-25 | 2021-01-27 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 基板キャリア及びパージチャンバの環境制御を伴う基板処理のシステム、装置、及び方法 |
KR102319415B1 (ko) * | 2015-05-22 | 2021-10-28 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 캐리어 도어 어셈블리들, 기판 캐리어들, 및 자기 도어 시일을 포함하는 방법들 |
US10559483B2 (en) * | 2016-08-10 | 2020-02-11 | Lam Research Corporation | Platform architecture to improve system productivity |
US10763134B2 (en) | 2018-02-27 | 2020-09-01 | Applied Materials, Inc. | Substrate processing apparatus and methods with factory interface chamber filter purge |
JP7181476B2 (ja) * | 2020-10-07 | 2022-12-01 | シンフォニアテクノロジー株式会社 | Efem装置 |
Family Cites Families (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4534695A (en) * | 1983-05-23 | 1985-08-13 | Eaton Corporation | Wafer transport system |
JPH02278746A (ja) * | 1989-04-19 | 1990-11-15 | Nec Corp | ウェハー保管箱 |
JPH0479347A (ja) * | 1990-07-23 | 1992-03-12 | Seiko Epson Corp | ウェハキャリア |
JPH05326679A (ja) * | 1992-05-26 | 1993-12-10 | Hitachi Cable Ltd | 鏡面ウエハ運搬用収納容器 |
JP3364294B2 (ja) * | 1993-10-07 | 2003-01-08 | 株式会社荏原製作所 | 搬送装置および搬送方法 |
US5788304A (en) * | 1996-05-17 | 1998-08-04 | Micron Technology, Inc. | Wafer carrier having both a rigid structure and resistance to corrosive environments |
SG47226A1 (en) * | 1996-07-12 | 1998-03-20 | Motorola Inc | Method and apparatus for transporting and using a semiconductor substrate carrier |
JP3184479B2 (ja) * | 1997-05-21 | 2001-07-09 | ティーディーケイ株式会社 | 真空クリーンボックス、クリーン搬送方法及び装置 |
JP3838786B2 (ja) * | 1997-09-30 | 2006-10-25 | 信越ポリマー株式会社 | 精密基板収納容器及びその位置決め構造並びに精密基板収納容器の位置決め方法 |
JP3827021B2 (ja) * | 1997-12-01 | 2006-09-27 | 大日商事株式会社 | 基板のコンテナ及びローダ |
US6220808B1 (en) * | 1998-07-13 | 2001-04-24 | Asyst Technologies, Inc. | Ergonomic, variable size, bottom opening system compatible with a vertical interface |
JP3916342B2 (ja) * | 1999-04-20 | 2007-05-16 | 信越ポリマー株式会社 | 基板収納容器 |
JP3530774B2 (ja) * | 1999-07-02 | 2004-05-24 | 東京エレクトロン株式会社 | 基板搬送装置、処理装置、基板の処理システムおよび搬送方法 |
JP4067720B2 (ja) * | 1999-09-27 | 2008-03-26 | ローツェ株式会社 | 基板移送装置 |
JP3193026B2 (ja) * | 1999-11-25 | 2001-07-30 | 株式会社半導体先端テクノロジーズ | 基板処理装置のロードポートシステム及び基板の処理方法 |
JP2001298075A (ja) * | 2000-04-11 | 2001-10-26 | Semiconductor Leading Edge Technologies Inc | Foup構造ならびに基板収納治具搬送装置 |
JP2002368075A (ja) * | 2001-06-08 | 2002-12-20 | Tdk Corp | 容器および容器の封止方法 |
US6585470B2 (en) * | 2001-06-19 | 2003-07-01 | Brooks Automation, Inc. | System for transporting substrates |
JP2003092345A (ja) * | 2001-07-13 | 2003-03-28 | Semiconductor Leading Edge Technologies Inc | 基板収納容器、基板搬送システム、保管装置及びガス置換方法 |
JP3697478B2 (ja) * | 2001-08-20 | 2005-09-21 | ソニー株式会社 | 基板の移送方法及びロードポート装置並びに基板移送システム |
JP2003068825A (ja) * | 2001-08-28 | 2003-03-07 | Shinko Electric Co Ltd | ロードポート |
US7066707B1 (en) * | 2001-08-31 | 2006-06-27 | Asyst Technologies, Inc. | Wafer engine |
JP2003168714A (ja) * | 2001-12-03 | 2003-06-13 | Kaijo Corp | ウェハー搬送容器用オープナー及びこれを備えたウェハー処理装置 |
JP4389424B2 (ja) * | 2001-12-25 | 2009-12-24 | 東京エレクトロン株式会社 | 被処理体の搬送機構及び処理システム |
JP4168642B2 (ja) * | 2002-02-28 | 2008-10-22 | 東京エレクトロン株式会社 | 被処理体収納容器体及び処理システム |
US6899765B2 (en) * | 2002-03-29 | 2005-05-31 | Applied Materials Israel, Ltd. | Chamber elements defining a movable internal chamber |
CN1759051B (zh) * | 2002-07-22 | 2014-01-08 | 布鲁克斯自动化公司 | 衬底处理装置 |
JP2004087781A (ja) * | 2002-08-27 | 2004-03-18 | Ulvac Japan Ltd | 真空処理装置及び真空処理方法 |
JP2004265894A (ja) * | 2003-01-17 | 2004-09-24 | Tokyo Electron Ltd | 基板処理装置 |
US7578647B2 (en) * | 2003-01-27 | 2009-08-25 | Applied Materials, Inc. | Load port configurations for small lot size substrate carriers |
JP2004282002A (ja) * | 2003-02-27 | 2004-10-07 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
US8888433B2 (en) * | 2004-08-19 | 2014-11-18 | Brooks Automation, Inc. | Reduced capacity carrier and method of use |
WO2006023873A2 (en) * | 2004-08-23 | 2006-03-02 | Brooks Automation, Inc. | Elevator-based tool loading and buffering system |
FR2874744B1 (fr) * | 2004-08-30 | 2006-11-24 | Cit Alcatel | Interface sous vide entre une boite de mini-environnement et un equipement |
US7410340B2 (en) * | 2005-02-24 | 2008-08-12 | Asyst Technologies, Inc. | Direct tool loading |
JP4534876B2 (ja) * | 2005-06-13 | 2010-09-01 | シンフォニアテクノロジー株式会社 | 被処理物供給装置及び被処理物供給方法 |
JP2007221042A (ja) * | 2006-02-20 | 2007-08-30 | Tdk Corp | インターフェースシール |
JP5925474B2 (ja) * | 2011-12-06 | 2016-05-25 | 株式会社日立ハイテクマニファクチャ&サービス | ウエハ処理装置 |
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2008
- 2008-05-19 JP JP2010508635A patent/JP6027303B2/ja active Active
- 2008-05-19 KR KR1020157033677A patent/KR20150140395A/ko active Search and Examination
- 2008-05-19 KR KR1020177023439A patent/KR101932265B1/ko active IP Right Grant
- 2008-05-19 KR KR1020097026242A patent/KR20100020968A/ko active Search and Examination
- 2008-05-19 KR KR1020187036800A patent/KR102110585B1/ko active IP Right Grant
- 2008-05-19 KR KR1020147020420A patent/KR101613836B1/ko active IP Right Grant
- 2008-05-19 KR KR1020167009733A patent/KR101772600B1/ko active IP Right Grant
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2014
- 2014-04-08 JP JP2014079657A patent/JP6324178B2/ja active Active
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2016
- 2016-08-05 JP JP2016154328A patent/JP6482506B2/ja active Active
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2017
- 2017-11-30 JP JP2017230940A patent/JP6568921B2/ja active Active
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2019
- 2019-08-05 JP JP2019143973A patent/JP7134928B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2019197921A (ja) | 2019-11-14 |
KR20100020968A (ko) | 2010-02-23 |
JP2011512642A (ja) | 2011-04-21 |
KR20140097594A (ko) | 2014-08-06 |
JP6568921B2 (ja) | 2019-08-28 |
KR101772600B1 (ko) | 2017-08-29 |
JP2018032880A (ja) | 2018-03-01 |
KR101932265B1 (ko) | 2018-12-24 |
KR102110585B1 (ko) | 2020-05-13 |
JP6027303B2 (ja) | 2016-11-16 |
JP6324178B2 (ja) | 2018-05-16 |
KR20160047589A (ko) | 2016-05-02 |
JP7134928B2 (ja) | 2022-09-12 |
JP2014146832A (ja) | 2014-08-14 |
JP6482506B2 (ja) | 2019-03-13 |
KR20180137047A (ko) | 2018-12-26 |
JP2016195281A (ja) | 2016-11-17 |
KR20170098991A (ko) | 2017-08-30 |
KR101613836B1 (ko) | 2016-04-21 |
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