KR20130132388A - 웨이퍼의 사다리꼴 연삭용 연삭 장치 - Google Patents

웨이퍼의 사다리꼴 연삭용 연삭 장치 Download PDF

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Publication number
KR20130132388A
KR20130132388A KR1020137002424A KR20137002424A KR20130132388A KR 20130132388 A KR20130132388 A KR 20130132388A KR 1020137002424 A KR1020137002424 A KR 1020137002424A KR 20137002424 A KR20137002424 A KR 20137002424A KR 20130132388 A KR20130132388 A KR 20130132388A
Authority
KR
South Korea
Prior art keywords
wafer
groove
grinding
wheel
grooves
Prior art date
Application number
KR1020137002424A
Other languages
English (en)
Korean (ko)
Inventor
구오치앙 데이비드 장
롤란드 반다메
피터 디. 알베르히트
Original Assignee
엠이엠씨 일렉트로닉 머티리얼즈, 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엠이엠씨 일렉트로닉 머티리얼즈, 인크. filed Critical 엠이엠씨 일렉트로닉 머티리얼즈, 인크.
Publication of KR20130132388A publication Critical patent/KR20130132388A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/14—Zonally-graded wheels; Composite wheels comprising different abrasives

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
KR1020137002424A 2010-07-30 2011-07-22 웨이퍼의 사다리꼴 연삭용 연삭 장치 KR20130132388A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/847,015 2010-07-30
US12/847,015 US20120028555A1 (en) 2010-07-30 2010-07-30 Grinding Tool For Trapezoid Grinding Of A Wafer
PCT/IB2011/053282 WO2012014137A2 (fr) 2010-07-30 2011-07-22 Outil de meulage pour meulage trapézoïdal d'une tranche

Publications (1)

Publication Number Publication Date
KR20130132388A true KR20130132388A (ko) 2013-12-04

Family

ID=44674831

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137002424A KR20130132388A (ko) 2010-07-30 2011-07-22 웨이퍼의 사다리꼴 연삭용 연삭 장치

Country Status (8)

Country Link
US (1) US20120028555A1 (fr)
EP (1) EP2598286A2 (fr)
JP (1) JP2013532587A (fr)
KR (1) KR20130132388A (fr)
CN (1) CN103180098A (fr)
SG (1) SG187057A1 (fr)
TW (1) TW201212116A (fr)
WO (1) WO2012014137A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170135615A (ko) * 2016-05-31 2017-12-08 주식회사 케이엔제이 기판 가공장치
KR20200114241A (ko) * 2019-03-28 2020-10-07 주식회사 케이엔제이 기판 연마장치
KR20200136635A (ko) * 2019-05-28 2020-12-08 주식회사 케이엔제이 기판 연마장치

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5926527B2 (ja) * 2011-10-17 2016-05-25 信越化学工業株式会社 透明ｓｏｉウェーハの製造方法
CN106239306B (zh) * 2016-08-01 2018-07-31 中国电子科技集团公司第四十六研究所 一种变r值晶片边缘倒角方法
US11450578B2 (en) * 2018-04-27 2022-09-20 Tokyo Electron Limited Substrate processing system and substrate processing method
CN109571183B (zh) * 2018-11-30 2024-02-20 温州市华晖汽摩配件厂(普通合伙) 一种镜片磨边机用自出水多弧度镜片玻璃倒边磨头
CN111390713B (zh) * 2020-04-09 2020-12-11 山东广域科技有限责任公司 一种电力绝缘子加工成型工艺

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61256621A (ja) 1985-05-08 1986-11-14 Toshiba Corp 接着型半導体基板の製造方法
JP2658135B2 (ja) 1988-03-08 1997-09-30 ソニー株式会社 半導体基板
JPH0485827A (ja) 1990-07-26 1992-03-18 Fujitsu Ltd 半導体装置の製造方法
JPH11320363A (ja) * 1998-05-18 1999-11-24 Tokyo Seimitsu Co Ltd ウェーハ面取り装置
JP3635200B2 (ja) * 1998-06-04 2005-04-06 信越半導体株式会社 Ｓｏｉウェーハの製造方法
WO2001048752A1 (fr) * 1999-12-27 2001-07-05 3M Innovative Properties Company Procede pour assurer le poli optique du bord de la plaque brute d'un disque d'enregistrement
JP2001246536A (ja) * 1999-12-27 2001-09-11 Three M Innovative Properties Co 記録媒体ディスク原板の端部を鏡面仕上げする方法
US6482749B1 (en) * 2000-08-10 2002-11-19 Seh America, Inc. Method for etching a wafer edge using a potassium-based chemical oxidizer in the presence of hydrofluoric acid
JP4162892B2 (ja) * 2002-01-11 2008-10-08 日鉱金属株式会社 半導体ウェハおよびその製造方法
JP4441823B2 (ja) * 2003-11-26 2010-03-31 株式会社東京精密 面取り砥石のツルーイング方法及び面取り装置
JP4839818B2 (ja) 2005-12-16 2011-12-21 信越半導体株式会社 貼り合わせ基板の製造方法
CN201350598Y (zh) * 2008-12-30 2009-11-25 浙江水晶光电科技股份有限公司 晶片改圆加工磨轮

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170135615A (ko) * 2016-05-31 2017-12-08 주식회사 케이엔제이 기판 가공장치
KR20200114241A (ko) * 2019-03-28 2020-10-07 주식회사 케이엔제이 기판 연마장치
KR20200136635A (ko) * 2019-05-28 2020-12-08 주식회사 케이엔제이 기판 연마장치

Also Published As

Publication number Publication date
EP2598286A2 (fr) 2013-06-05
SG187057A1 (en) 2013-02-28
US20120028555A1 (en) 2012-02-02
CN103180098A (zh) 2013-06-26
JP2013532587A (ja) 2013-08-19
WO2012014137A3 (fr) 2012-03-22
WO2012014137A2 (fr) 2012-02-02
TW201212116A (en) 2012-03-16

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