WO2001048752A1 - Procede pour assurer le poli optique du bord de la plaque brute d'un disque d'enregistrement - Google Patents

Procede pour assurer le poli optique du bord de la plaque brute d'un disque d'enregistrement Download PDF

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Publication number
WO2001048752A1
WO2001048752A1 PCT/US2000/035286 US0035286W WO0148752A1 WO 2001048752 A1 WO2001048752 A1 WO 2001048752A1 US 0035286 W US0035286 W US 0035286W WO 0148752 A1 WO0148752 A1 WO 0148752A1
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WO
WIPO (PCT)
Prior art keywords
grinding
edge
grinding wheel
raw plate
disk raw
Prior art date
Application number
PCT/US2000/035286
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English (en)
Inventor
Michihiro Yamahara
Original Assignee
3M Innovative Properties Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Company filed Critical 3M Innovative Properties Company
Publication of WO2001048752A1 publication Critical patent/WO2001048752A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/14—Zonally-graded wheels; Composite wheels comprising different abrasives
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers

Definitions

  • the present invention relates to a method for mirror-finishing a recording disk raw plate with a resin bonded grinding wheel. More particularly, this invention concerns a method for mirror-finishing the edge of a recording disk raw plate, which is cut or punched out from a glass plate into a predetermined shape.
  • the glass plate When a glass plate is machined into a disk substrate for an information recording medium, the glass plate is punched out by a glass cutter to form a recording disk raw plate.
  • the recording disk raw plate, as punched out, has sharp edges. The sharp corners of the edge are cut off with a chamfering process. The new chamfered edge is then finished.
  • the chamfering process is conducted by grinding and shaping the edge of the recording disk raw plate with a diamond wheel to form a trapezoidal configuration on the edge.
  • a plurality of recording disk raw plates are superposed and fixed, and the edges of the plurality are polished with a brush while supplying cerium oxide slurry to the edges.
  • Japanese Patent Kokai Publication No. 01-005759 (1989) discloses a method for grinding the edge of a glass hard disk raw plate by using a grinding wheel.
  • this method needs to use the grinding wheel together with elastic members, resulting in a complex grinding operation.
  • the complex device results in high costs.
  • Japanese Patent No. 2000042889A which was filed by the same applicant of the present application, discloses a method for grinding the edge of a recording disk raw plate, which can solve the above-mentioned conventional problems.
  • the edge of a disk raw plate, as punched out is polished by using a resin bonded grinding wheel composed of a comparatively soft bonding agent.
  • a resin bonded grinding wheel composed of a comparatively soft bonding agent.
  • Japanese Patent No. 2000042889A discloses a method of independently grinding the edge from the upper face, the right slanting face and the left slanting face of the trapezoidal configuration by using three grinding wheels in an attempt to effectively eliminate the pits from the edge of a disk raw plate. For this reason, a complicated operation is required in which the three grinding wheels need to be precisely positioned and removably attached to three driving shafts. This operation tends to cause offsets in the mounting positions, resulting in deviations in the quality of the finished substrate. Additionally, the grinding wheel disclosed in the method disclosed in Japanese Patent No. 2000042889A has a short service life.
  • the present invention has been devised to provide a method of finishing the edge of a recording disk raw plate which can virtually eliminate pits on the edge of a recording medium substrate and which is easily operated without causing any deviations in the quality of the finished recording medium.
  • the present invention is to provide a process for mirror-finishing the edge of a recording disk raw plate comprising: (a) grinding the edge of a recording disk raw plate with a diamond wheel to shape the edge into a trapezoidal configuration; (b) grinding the edge of the recording disk raw plate with a resin bonded grinding wheel which contains abrasive grains having a particle size of between mesh sizes #220 to
  • the recording disk raw plate refers to a disk material used for a disk substrate of an information recording medium on and from which electronic information is written and read.
  • the term recording disk raw plate includes a hard-disk use glass substrate and a silicon wafer substrate.
  • the glass used as a recording disk raw plate may be either amorphous glass or crystalline glass.
  • the thickness of the disk raw plate is set to 0.4 to 1.4 mm, more preferably, 0.6 to 0.8 mm.
  • FIG. 1 is a schematic cross-sectional view that shows the shape of the edge of a recording disk raw plate that is ground and shaped by using a diamond wheel.
  • FIG. 2 is a schematic cross-sectional view that shows the shape of a groove that is formed in the peripheral face of a grinding wheel used in the present invention.
  • FIG. 3 is a perspective view that shows one example of a combined wheel used in the present invention.
  • FIG. 4 is a cross-sectional view that shows a process in which a dressing process is carried out on a grinding wheel used in the present invention.
  • FIG. 1 shows a schematic cross-sectional view that shows the shape of the edge 100 of a recording disk raw plate that has been ground and shaped by a diamond wheel.
  • the thickness of the disk raw plate is 0.6 mm
  • the upper side 102 of the trapezoidal configuration has a length of approximately 300 ⁇ m
  • the angle of inclination ⁇ on both sides 104 is approximately 45°.
  • pits are formed all through the ground surface.
  • the pits formed typically have a diameter of 20 to 50 ⁇ m.
  • the pits tend to fill with foreign matter such as the shavings produced by the grinding process. This foreign matter may dislodge during later processes and result in contamination on the substrate surface. In recent years, higher recording density has been desired in the recording media, and it has been demanded that contamination on the substrate surface be minimized. Therefore, minimization of the pits on the edge of the substrate is desirable.
  • the pits are minimized or eliminated by mirror- finishing the edge of the disk raw plate that has been ground and shaped into a trapezoidal configuration.
  • the method includes at least two grinding processes as described below.
  • the grinding process of the present invention requires a supply of water that is added so as to prevent scattering of glass powder generated during the grinding process. In other words, it is not necessary to provide a grinding assistant such as cerium oxide slurry. Therefore, no waste water containing a soil pollutant is generated during the grinding process, making it possible to cut costs for the corresponding treatment.
  • first grinding wheel a resin bonded grinding wheel which contains abrasive rains having a particle size of between mesh sizes #220 and #1200 (JISR6001 , published in 1987), preferably between mesh sizes #320 and #800, and more preferably between mesh sizes #400 and #600.
  • the particle size greater than a #220 mesh size sometimes results in new pits on the edge of the glass plate during the grinding process.
  • the particle size finer than a #1200 mesh size may result in a long polish time to eliminate the pits.
  • Examples of the material of abrasive grains include SiC, Al 2 O 3 , CeO , and other known and normally used polishing materials.
  • the first grinding wheel preferably has a shore D hardness of not less than 80, more preferably, between 85 and 95.
  • the shore hardness D less than 80 makes the grinding face too erodable, resulting in a short service life of the grinding wheel.
  • the density of the first grinding wheel is preferably set in the range between 1.6 and 2.5 g/cm 3 .
  • the density less than 1.6 g/cm 3 makes the grinding face too erodable, resulting in a short service life of the grinding wheel.
  • the density exceeding 2.5 g/cm 3 may form additional pits on the edge of the glass plate during the grinding process.
  • a preferred resin for the resin grinding wheel is polyurethane.
  • a preferred polyurethane includes that described in Japanese Patent Kokai Publication No. 294336/1990 (U.S. Patent No. 4,933,373), which discloses cross-linked polyurethane that has a glass transition temperature of approximately 10 °C and a glass transition temperature range of approximately higher than 70 °C.
  • the first grinding wheel is preferably manufactured by using a method disclosed in Japanese Patent Kokai Publication No. 294336/1990 (U.S. Patent No. 4,933,373).
  • a grinding wheel is generally known as a foamed elastic grinding material, and examples thereof include such wheels as the DLO WHEELTM commercially available from Sumitomo 3M Ltd.
  • the first grinding wheel may be provided with a groove on its peripheral surface corresponding to the edge shape of the disk raw plate.
  • a groove having a reversed trapezoidal configuration elongated in a direction perpendicular to the shaft, may exist on the first grinding wheel's peripheral surface.
  • FIG. 2 is a schematic cross- sectional view that shows the shape of the groove 200 formed in the peripheral surface of the grinding wheel used in the method of the present invention.
  • the upper face and right and left slanting faces of the edge of the disk raw plate are simultaneously ground by using a single grinding wheel.
  • One groove 200 or a plurality of grooves may be formed.
  • the edges of a plurality of disk raw plates, for example superposed and fixed together, may be simultaneously ground by using a grinding wheel with a plurality of grooves.
  • the disk raw plate may include an inner circumferential portion defining a center hole.
  • the first grinding wheel may be formed into a cylinder shape. In this case, the grinding wheel can be used to finishing the inner circumferential portion of the disk raw plate.
  • the disk raw plate is then subjected to a grinding process.
  • the grinding wheel and a disk raw plate are respectively counter-rotated and a load is applied to the edges thereof so as to allow them to come into contact with each other.
  • the grinding conditions are properly adjusted depending on the level of the finishing required.
  • the peripheral surface velocity of the grinding wheel is set in the range of approximately 1000 to 3000 m/min
  • the peripheral surface velocity of the disk raw plate is set in the range of 20 to 500 m/min.
  • the load applied to the edges is set in the range of approximately 0.2 to 5 kg
  • the grinding time is in the range of 5 to 60 seconds, more preferably, 10 to 30 seconds.
  • the second grinding process is carried out by using a resin bonded grinding wheel (hereinafter, referred to as "second grinding wheel") containing abrasive grains having a particle size of between mesh sizes #5000 and #20000, preferably between
  • #6000 and #15000 are preferably between #8000 and #10000.
  • the abrasive grains having a particle size greater than #5000 tends to cause an insufficient pit removing process.
  • the abrasive grains having a particle size finer than #20000 makes the amount of polishing too small, taking a long time in eliminating pits.
  • the density of the second grinding wheel is preferably set in the range of 1.6 to
  • the second grinding wheel has the same structure as the first grinding wheel. Therefore, the second grinding wheel can be manufactured in the same manner as the first grinding wheel.
  • the grinding method of a disk raw plate is the same as that of the first grinding process.
  • the grinding conditions are properly adjusted depending on the level of the finishing required.
  • the peripheral surface velocity of the grinding wheel is set in the range of approximately 100 to 3000 m/min
  • the peripheral velocity of the disk raw plate is set in the range of 20 to 500 m/min.
  • the load applied to the edges is set in the range of approximately 0.2 to 5 kg
  • the grinding time is in the range of 5 to 60 seconds, more preferably, 10 to 30 seconds.
  • An additional embodiment may include three grinding processes.
  • grinding is carried out by using a resin bonded grinding wheel containing abrasive grains having a particle size of between mesh sizes #120 and #220
  • grinding is carried out by using a resin bonded grinding wheel containing abrasive grains having a particle size of between mesh sizes #220 and #1000, more preferably between mesh sizes #400 and #600.
  • the third grinding process is carried out by using a resin bonded grinding wheel containing abrasive grains having a particle size of between mesh sizes #1000 and #20000, more preferably between mesh sizes #8000 and #10000.
  • the grinding wheels used in the grinding processes of the present invention may be used as an independent device in each of the grinding processes. Moreover, the first grinding wheel and the second grinding wheel may be joined to form a combined grinding wheel, and this may be used in the respective grinding processes.
  • FIG. 3 shows a perspective view that shows one example of the combined grinding wheel to be used in the method of the present invention.
  • a first grinding wheel 301 and a second grinding wheel 302 are laminated and joined to each other coaxially.
  • the coaxially laminated and joined structure makes it possible to minimize the grinding face of the first grinding wheel 301 and the second grinding wheel 302, and consequently to further uniformly finish of the edge of the substrate.
  • attaching or detaching the grinding wheels may cause an error in the mounting position. For this reason, each time the grinding wheel is attached or detached in a grinding process for the edge of a disk raw plate, offsets occur in the circularity and concentricity of the disk raw plate. This may result in deviations in the dimensional precision and quality in the recording medium substrate.
  • the combined grinding wheel requires neither attaching nor detaching when shifting from the first grinding process to the second grinding process, so no deviation occurs in the quality of the finished recording medium substrate.
  • the first grinding wheel 301 and the second grinding wheel 302 may be bonded together with a double sided tape, a bonding agent, or fastened with bolts.
  • the width lj of the first grinding wheel 301 and the width 1 of the second grinding wheel 302 are not necessarily the same, and may be appropriately changed. In the case when one grinding wheel is more erodable, it is preferable to increase the thickness of the more erodable grinding wheel. Thus, the service lives of the two wheels are made coincident with each other. More preferably, the widths of the respective grinding wheels are changed in proportion to the amounts of erosion of the wheels as they are used on the same object for the same period of time.
  • the combined grinding wheel may be provided with a groove on its peripheral surface corresponding to the edge shape of the disk raw plate. (Not shown)
  • a groove having an inverted trapezoidal configuration may exist on the combined grinding wheel's peripheral surface, as shown in FIG. 2 (not shown in FIG. 3).
  • One groove or a plurality of grooves may be formed.
  • the gap between the grooves is preferably set to be constant all over the entire combined grinding wheel.
  • the respective grinding wheels constituting the combined grinding wheel have the numbers of grooves in proportion to their respective widths.
  • a structure in which a plurality of the first grinding wheels are coaxially laminated and a structure in which a plurality of the second grinding wheels are coaxially laminated may be further laminated and combined coaxially to form another combined grinding wheel.
  • three kinds of grinding wheels may be laminated and combined coaxially to form a combined wheel.
  • a grinding wheel needs to be subjected to a dressing process so as to recover its grinding strength after a predetermined service time.
  • the dressing process is generally carried out by first removing the grinding wheel from the driving shaft of a grinding device, and attaching it to a driving device. Next, a dresser is pressed onto the peripheral surface of the grinding wheel so as to grind it to a flat face. Thereafter, another dresser having the same shape as the object to be ground is pressed onto the peripheral surface of the grinding wheel so as to form a groove corresponding to the shape of the object to be ground.
  • the grinding wheel may have a groove on its peripheral portion corresponding to the shape of the edge of a disk raw plate.
  • FIG. 4 shows a cross-sectional view that shows the method for carrying out the dressing process on a grinding wheel used in the method of the present invention.
  • FIG. 4(a) shows a cross-sectional shape of a peripheral face of a grinding wheel at the initial stage of a grinding process.
  • a disk raw plate 401 is ground by a groove 402 having an inverted trapezoidal configuration.
  • FIG. 4(b) shows a cross-sectional shape of the peripheral face of the grinding wheel that has been used for a predetermined time.
  • the groove 402 becomes deeper due to abrasion, and a protrusion 403 between grooves is formed. Since the protrusion 403 between grooves wears the surface 404 of the disk raw plate out, it is necessary to remove this through a dressing process.
  • FIG. 4(c) schematically shows a dressing method.
  • This dressing method features that a dresser 405, which has the same outer diameter and the same edge shape as a disk raw plate and also has a thickness m that is not less than the groove pitch n of the grinding wheel, is used.
  • the application of the dresser having the above-mentioned specific dimensions makes it possible to carry out a dressing process on the grinding wheel without the need for preliminarily carrying out a grinding process to make the grinding face of the grinding wheel flat.
  • the operation is simplified since it is not necessary to remove the grinding wheel from the driving shaft of the grinding device.
  • the outer diameter of the dresser is the same as the disk raw plate, the dressing operation is carried out in the same manner as the grinding operation with the exception that the disk raw plate is changed to a dresser.
  • the edge of this disk raw plate was ground and shaped to a trapezoidal configuration as illustrated in FIG. 1 by using a #500 diamond grinding wheel ("MED 500" made by Mitsubishi Material k.k. diameter 63.5 mm, hole diameter 20 mm).
  • the length of the upper side 102 (as shown in Fig. 1) of the trapezoidal configuration was approximately 400 ⁇ m, and the angle of inclination ⁇ on both of the ends was approximately 45°.
  • pits were formed all over the faces.
  • a #600 aluminum oxide grinding wheel (“DLO WHEEL” commercially available from Sumitomo 3M Ltd. diameter 160 mm, density 1.8 g/cm 3 . shore D hardness 90) and a #10000 cerium oxide grinding wheel (“DLO WHEEL” commercially available from Sumitomo 3M Ltd. diameter 160 mm, density 2.0 g/cm 3 , shore D hardness 95) were prepared.
  • a groove having a shape corresponding to the shape of the edge of the disk raw plate was formed on each of the grinding wheels by using a dresser.
  • the edge of the disk raw plate was ground by using the #600 aluminum grinding wheel.
  • the following grinding method was used.
  • the #600 aluminum grinding wheel and the disk raw plate were respectively counter rotated, and a load was applied so as to allow them to contact each other.
  • the grinding conditions were: a peripheral velocity of 2000 m/min. of the grinding wheel, a peripheral velocity of 46 R. P. M of the disk raw plate, a load of 2 to 5 Kg, and a grinding time of 10 sec.
  • the #600 aluminum grinding wheel was replaced by the #10000 cerium oxide grinding wheel, and the same method was carried out so as to grind the edge of the disk raw plate.
  • the grinding conditions were: a peripheral velocity of 2000 m/min. of the grinding wheel, a peripheral velocity of 46 R. P. M of the disk raw plate, a load of 2 to 5 Kg, and a grinding time of 10 sec.
  • the edge of the recording disk raw plate was ground and shaped into a trapezoidal configuration in the same manner as Example 1.
  • a #600 aluminum oxide grinding wheel (“DLO WHEEL” commercially available from Sumitomo 3M Ltd. diameter 160 mm, density 1.8 g/cm 3 , shore D hardness 90) and a #10000 cerium oxide grinding wheel (“DLO WHEEL” commercially available from Sumitomo 3M Ltd. diameter 160 mm, density 2.0 g/cm " , shore D hardness 95) were prepared. These two members were bonded to each other with their axes being coincident with each other by using a bonding agent ("Scotch- Weld DP-420" made by Sumitomo 3M Ltd.). A groove having a shape corresponding to the shape of the edge of the disk raw plate was formed on each of the grinding wheels by using a dresser.
  • the portion of the #600 aluminum oxide grinding wheel was used so as to grind the edge of the disk raw plate.
  • grinding wheel and the disk raw plate were respectively counter rotated, and a load was applied so as to allow them to contact each other.
  • the grinding conditions were: a peripheral velocity of 2000 m/min. of the grinding wheel, a peripheral velocity of 46 R. P. M of the disk raw plate, a load of 2 to 5 Kg, and a grinding time of 10 sec.
  • the disk raw plate was shifted toward the axial direction, and the portion of the #10000 cerium oxide grinding wheel was used so as to grind the edge of the disk raw plate.
  • the grinding conditions were: a peripheral velocity of 2000 m/min.
  • Example 2 no exchanging process of grinding wheels was made upon making a shift from the first grinding process to the second grinding process, no error occurred in the mounting position of the grinding wheel. Therefore, the upper side
  • Example 1 The edge of the same recording disk raw plate as used in Example 1 was ground and shaped into a trapezoidal configuration in the same manner as Example 1.
  • the edge of the disk raw plate was ground with grinding brush.
  • the grinding method was as follows: The grinding brush and the disk raw plate were respectively rotated reversely, and while supplying a water slurry containing 10 to 20 % of cerium oxide as a grinding assistant at a rate of 10 liter/min, the edge of the disk raw plate and the brush were allowed to contact each other.
  • the grinding conditions were: a peripheral velocity of 1000 m/min. of the grinding brush, a peripheral velocity of 46 R. P. M of the disk raw plate and periods of grinding time of 60 seconds and 3600 seconds.
  • the pit removing rate of the ground face and the curvature of the angle of the end face were calculated in the same manner as Example 1. The results are shown in Table 1.
  • Example 1 The edge of the same recording disk raw plate as used in Example 1 was ground and shaped into a trapezoidal configuration in the same manner as Example 1.
  • a #220 aluminum oxide grinding wheel (“DLO WHEEL” commercially available from Sumitomo 3M Ltd., diameter 160 mm, density 1.0 g/cm 3 , shore D hardness 35) was prepared. A groove having a shape corresponding to the shape of the edge of the disk raw plate was formed on this grinding wheel by using a dresser.
  • the edge of the disk raw plate was ground by using this grinding wheel.
  • the following grinding method was used.
  • the grinding wheel and the disk raw plate were respectively counter rotated, and a load was applied so as to allow them to contact each other.
  • the grinding conditions were: a peripheral velocity of 2000 m/min. of the grinding wheel, a peripheral velocity of 46 R. P. M of the disk raw plate, a load of 2 to 5 Kg, and a grinding time of 10 sec.
  • Example 2 in the specification of Japanese Patent No. 2000042889A.
  • the edge of the same recording disk raw plate as used in Example 1 was ground and shaped into a trapezoidal configuration in the same manner as Example 1.
  • Three #220 aluminum oxide grinding wheels (“DLO WHEEL” commercially available from Sumitomo 3M Ltd., diameter 50 mm, density 1.5 g/cm 3 , shore D hardness 35) were prepared.
  • the three grinding wheels were set to a grinding device (a hard disk end-face grinding device made by Shonan Engineering k.k.) capable of simultaneously grinding the upper face and the right and left slanting faces of the edge of the disk raw plate, and a grinding process was carried out under the conditions of a peripheral velocity of 500 mm/sec. and a grinding time of 30 seconds.
  • a grinding device a hard disk end-face grinding device made by Shonan Engineering k.k.
  • the polishing method of the edge of a recording disk raw plate of the present invention makes it possible to virtually eliminate pits in the edge of a recording medium substrate, to provide an easy operation, and also to prevent deviations from occurring in the quality of the finished recording medium substrate.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

L'invention concerne un procédé pour assurer le poli optique de la plaque brute d'un disque d'enregistrement. Ce procédé consiste à (a) rectifier le bord de la plaque brute du disque à l'aide d'une meule diamant pour donner au bord la forme d'une configuration trapézoïdale; (b) rectifier le bord de cette même plaque à l'aide d'une meule liée à de la résine qui contient des grains abrasifs dont les particules présentent un calibre compris entre #220 et #1200 et (c) rectifier ce bord à l'aide d'une meule liée à de la résine qui contient des grains abrasifs dont les particules présentent un calibre compris entre #5000 et #20000.
PCT/US2000/035286 1999-12-27 2000-12-27 Procede pour assurer le poli optique du bord de la plaque brute d'un disque d'enregistrement WO2001048752A1 (fr)

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JP36995799 1999-12-27
JP11/369957 1999-12-27

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012014137A3 (fr) * 2010-07-30 2012-03-22 Memc Electronic Materials, Inc. Outil de meulage pour meulage trapézoïdal d'une tranche

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Publication number Priority date Publication date Assignee Title
DE2931695A1 (de) * 1979-08-04 1981-02-05 Lippert H Gmbh Schleifkoerper zum vor- und nachschleifen
JPS6322259A (ja) * 1986-07-10 1988-01-29 Hitachi Cable Ltd 半導体ウエハ加工方法および加工装置
JPS645759A (en) * 1987-06-26 1989-01-10 Nippon Sheet Glass Co Ltd Chamfering method for glass disc
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PATENT ABSTRACTS OF JAPAN vol. 2000, no. 05 14 September 2000 (2000-09-14) *

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WO2012014137A3 (fr) * 2010-07-30 2012-03-22 Memc Electronic Materials, Inc. Outil de meulage pour meulage trapézoïdal d'une tranche

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