KR20130034591A - Apparatus and method for bonding sheet, and apparatus and method for manufacturing sheet - Google Patents

Abstract

PURPOSE: An apparatus and method for bonding a sheet and an apparatus and method for manufacturing the sheet are provided to form a cut line with a preset depth to correspond to an unbinding direction of an adhesive sheet by performing a cutting operation in a high blade part several times. CONSTITUTION: An unbinding unit unbinds a roll sheet(RS) with a band type sheet(WS) which is temporarily attached to a band type separation sheet. A cutting unit(15) forms a cut line(CU) on the band type sheet and forms an adhesive sheet(AS) in the cut line. The depth of an initial cut line corresponding to an initial separation region is deeper than the depth of the following cut line corresponding to the following separation region. The cutting unit includes a blade(40) with a height in a thickness direction of the band type sheet. The blade includes a high blade part(46) to form the cut line corresponding to a leading tip of the adhesive sheet and a low blade part(48) to form an inner side of the adhesive sheet. A separation plate separates the adhesive sheet from an initial separation region to the following separation region.

Description

Sheet attaching apparatus and attaching method, and sheet manufacturing apparatus and manufacturing method {APPARATUS AND METHOD FOR BONDING SHEET, AND APPARATUS AND METHOD FOR MANUFACTURING SHEET}

The present invention relates to a sheet sticking device and a sticking method, and a sheet manufacturing device and a manufacturing method, and more particularly, a sheet sticking device and a sticking method capable of forming an adhesive sheet by forming a cut on a strip-shaped sheet, and a sheet It relates to a manufacturing apparatus and a manufacturing method.

Conventionally, the sheet sticking apparatus which affixes an adhesive sheet to adherends, such as a semiconductor wafer (henceforth only a "wafer" may be called), became widely used, As this sheet sticking apparatus, it is patent document 1, for example. Is disclosed in. The sheet sticking apparatus of patent document 1 is an unwinding means which unwinds the roll sheet by which a strip | belt-shaped sheet is temporarily attached to a peeling sheet, the cutting blade which forms the closed loop-shaped cut | cover in the process of unwinding this roll sheet, and a cut The peeling plate which peels the adhesive sheet formed in the inside from the peeling sheet, and the press roller which can press and apply the peeled adhesive sheet to a wafer and a ring frame are provided. In the case of forming a cut with such a sheet sticking device, as shown in FIG. 4 (A), the cutting edge HC and the cutting edge HC enter the 20 μm back and forth release sheet RL. The relative spacing of the platen roller PR is adjusted. Moreover, what has a thickness of 50 micrometers normally is employ | adopted for this peeling sheet RL. In the figure, WS represents a strip | belt-shaped sheet, BS represents a base material sheet, AD represents an adhesive bond layer, and RS represents a roll sheet.

Japanese Laid-Open Patent Publication No. 2005-116928

(Summary of the Invention)

(Problems to be Solved by the Invention)

By the way, in the peeling sheet RL, in order to reduce material cost, the chance that the relatively thin thing of 25 micrometers front and back is employ | adopted is increasing. When using the roll sheet which employ | adopted such a comparatively thin peeling sheet RL by the apparatus of patent document 1, as shown to FIG. 4 (B), the edge of the cutting edge HC does not enter the peeling sheet RL. The adhesive sheet formed on the inside of the cut CU and the unnecessary sheet formed on the outside of the peel plate cannot be removed reliably, and the adhesive sheet is wound together with the unnecessary sheet, thereby affixing the adhesive sheet. The problem that it cannot be done arises.

Here, in FIG. 4 (B), the adhesive sheet is reliably readjusted by adjusting the relative distance between the cutting blade HC and the platen roller PR so that the cutting edge HC of the cutting blade HC enters the release sheet RL. It can be made to separate from the unnecessary sheet easily. By the way, in this case, since the thickness of the peeling sheet RL in the position in which the cutout CU was formed becomes too thin, the adhesive sheet and the peeling sheet part corresponding to it only receive some external force, and the roll sheet RS is carried out. When the adhesive sheet is missing from the adhesive sheet or when the adhesive sheet is peeled off with the peeling plate, the corresponding release sheet portion also comes out together with the adhesive sheet, and the adhesive sheet such that the adhesive sheet in a state where the release sheet portion is attached is stuck to the adherend. It brings about the problem that sticking defect of.

[Purpose of invention]

An object of the present invention is to provide a sheet sticking device, a sticking method, and a sheet manufacturing device and a manufacturing method which can form, peel and stick the adhesive sheet satisfactorily even when the peeling sheet becomes thin.

In order to achieve the above object, the present invention provides a release means for releasing a roll sheet in which a strip-shaped sheet having an adhesive layer on one surface of a strip-shaped base sheet is temporarily attached to a strip-shaped release sheet through the adhesive layer. And cutting means for forming a cut of a predetermined shape on the strip-shaped sheet, forming an adhesive sheet on the inside of the cut, and forming an unnecessary sheet on the outside of the cut, and the adhesion temporarily attached to the peeling sheet. A sheet sticking device comprising: peeling means for peeling the sheet from the distal direction distal end portion of the adhesive sheet toward the inner region of the adhesive sheet, and pressing means for pressing the adhesive sheet against the adherend,

The said cutting means employ | adopts the structure that the depth of the cutout corresponding to the front-end | tip part of the release direction in the said adhesive sheet is provided so that a deep cut can be formed compared with the depth of the cutout corresponding to the inner side area | region of the said adhesive sheet.

In the present invention, the cutting means includes a cutting blade having a height in the thickness direction of the strip-shaped sheet, and the cutting blade has a high blade portion capable of forming a cut corresponding to the distal end portion of the adhesive sheet. It is preferable to employ a configuration in which the lower blade portion is formed at a height lower than the high blade portion and can form an inner region of the adhesive sheet.

Moreover, the structure which said high blade part is provided in several places of a cutting blade, and each high blade part is selectively arrange | positioned at the position which can form the cut | blade corresponding to the front-end | tip part of the release direction in the said adhesive sheet is also preferable. Is adopted.

Moreover, what is necessary is just to perform the said cutting | disconnection means cut | disconnected in the said high blade part multiple times with respect to formation of one sheet of adhesive sheet in cooperation with the said cutting means.

Moreover, the structure which has an energy provision means which can heat the roll sheet of the area | region cut | disconnected by the said cutting means can be employ | adopted.

Moreover, the sheet sticking method of this invention is an unwinding process in which the strip | belt-shaped sheet which has an adhesive bond layer in one surface of a strip | belt-shaped base material sheet releases the roll sheet temporarily attached to the strip | belt-shaped peeling sheet through the said adhesive bond layer,

A cutting step of forming a cut of a predetermined shape on the strip-shaped sheet, forming an adhesive sheet inside the cut, and forming an unnecessary sheet on the outside of the cut;

A peeling step of peeling the adhesive sheet temporarily attached to the release sheet from the distal end portion of the adhesive sheet toward the inner region of the adhesive sheet;

And a pressing step of pressing the adhesive sheet against the adherend, and attaching the adhesive sheet to the adherend, and in the cutting step, the depth of the cutting marks corresponding to the distal end portions of the adhesive sheet in the adhesive sheet corresponds to the inner region of the adhesive sheet. We adopt method to form deep cut than in comparison.

Moreover, the sheet manufacturing apparatus of this invention is a release | release means which unwinds the roll sheet which the strip | belt-shaped sheet which has an adhesive bond layer in one surface of a strip | belt-shaped base material sheet adhering to the strip | belt-shaped peeling sheet through the said adhesive bond layer; ,

A sheet manufacturing apparatus comprising cutting means for forming a cut of a predetermined shape on the strip-shaped sheet, forming an adhesive sheet inside the cut, and forming an unnecessary sheet on the outside of the cut,

The cutting means is provided so that the depth of the cut corresponding to at least one of the release direction leading end and the release direction rear end of the adhesive sheet can be formed to be deeper than the depth of the cut corresponding to the inner region of the adhesive sheet. We adopt constitution to say.

Moreover, the sheet manufacturing method of this invention is an unwinding process in which the strip | belt-shaped sheet which has an adhesive bond layer in one surface of a strip | belt-shaped base material sheet releases the roll sheet temporarily attached to the strip | belt-shaped peeling sheet through the said adhesive bond layer; ,

A cutting step of forming a cut of a predetermined shape on the strip-shaped sheet, forming an adhesive sheet inside the cut, and forming an unnecessary sheet on the outside of the cut,

The said cutting process WHEREIN: The method in which the depth of the cutout corresponding to at least one of the release direction front end part and the release direction rear end part of the said adhesive sheet forms a deep cut compared with the depth of the cutout corresponding to the inner region of the said adhesive sheet. It is adopted.

According to the present invention, since the depth of the cutout corresponding to the distal end of the adhesive sheet can be formed deeper than the depth of the cutout corresponding to the inner region of the adhesive sheet, the distal end of the adhesive sheet can be reliably removed from the unnecessary sheet. I can remove it. Thereby, the problem that the adhesive sheet cannot be stuck by winding up an adhesive sheet together with an unnecessary sheet like conventionally can be solved. At this time, the depth of the cutout corresponding to the inner region of the adhesive sheet is formed shallower than the cutout corresponding to the distal end of the adhesive sheet, but if only the distal end of the adhesive sheet can be removed from the unnecessary sheet, As the peeling of the sheet progresses, the adhesive sheet is detached from the unnecessary sheet along the cutout corresponding to the inner region of the adhesive sheet.

In addition, since the depth of the cut of the peeling sheet corresponding to the inner region of the adhesive sheet is shallower than the depth of the cut of the peeling sheet corresponding to the distal end direction of the adhesive sheet, the adhesive sheet and the peeling sheet portion corresponding thereto are removed from the roll sheet. Defective adhesion of the adhesive sheet can be suppressed such that the adhesive sheet, which is missing or the release sheet portion is attached to the adherend, may be stuck. At this time, like the apparatus of Patent Literature 1, the release sheet portion corresponding to the distal end portion of the adhesive sheet may come out together with the adhesive sheet in the peel plate, but the cut of the release sheet corresponding to the inner region of the adhesive sheet Since the depth of is shallow, the peeling sheet part which fell out together with an adhesive sheet does not become larger than that, and the said peeling sheet part is pulled in the normal collection | recovery direction of a peeling sheet, and is collect | recovered.

Moreover, according to the said sheet manufacturing apparatus and a manufacturing method, it is possible to prepare the roll sheet in which the cut was formed similarly to the above, and when the said roll sheet was used for the sheet sticking apparatus or the sticking method, peeling and sticking of an adhesive sheet as mentioned above. It can be done easily.

In addition, when the cutting edge of the cutting means has a low blade portion and a high blade portion, it becomes possible to simply form a cut having a depth of cut as described above.

Further, since the plurality of high blade portions can be selectively arranged to form the leading end portion of the adhesive sheet in the unwinding direction, even if the height of one high blade portion deteriorates due to wear or the like, each of the high blade portions can be changed to use another high blade portion. Can be.

Moreover, by cutting at the high blade part a plurality of times, it becomes possible to stably set the depth of the knife mark corresponding to the front-end | tip part of the release direction of an adhesive sheet to predetermined depth.

Moreover, when it has an energy provision means, energy is given to a roll sheet, for example, a base sheet, an adhesive bond layer, etc. can be softened, it can make it easy to form a cut, and it becomes possible to avoid cutting defects favorably.

1 is a schematic front view of a sheet sticking device according to an embodiment.
2 is a schematic perspective view of cutting means;
Fig. 3A is an exploded view of the blade substrate and the cutting blade, and Fig. 3B is a sectional view of Fig. 3A.
4 (A) and 4 (B) are explanatory diagrams showing a cutting method according to a conventional example.

(Mode for carrying out the invention)

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings.

In addition, in this specification, unless otherwise indicated, "left", "right", "upper", and "lower" are used based on FIG.

1 to 3, the sheet attaching apparatus 10 includes a table 11 for adsorbing and supporting a wafer WF and a ring frame RF as an adherend, and a drive device capable of moving the table 11 in left and right directions. Unwinding means 14 capable of unscrewing the roll sheet RS composed of the linear motor 12 as a belt, " the strip-shaped release sheet RL, and the strip-shaped sheet WS attached to one surface thereof. And the cut marks CU are formed on the strip-shaped sheet WS of the roll sheet RS unwound by the unwinding means 14, and the adhesive sheet AS is formed inside the cut marks CU. In addition, the cutting means 15 which forms the unnecessary sheet US on the outer side of the said cut CU, the winding means 16 which can wind up the unnecessary sheet US, and the peeling sheet RL are turned upside down, and it adhere | attaches A ring press is used for the peeling plate 18 as a peeling means which peels the sheet AS from the peeling sheet RL, and the adhesive sheet AS peeled by this peeling plate 18. It is constructed by including a pressing roller 19 as a pressing means for pressing the patch (RF) and the wafer (WF). The strip-like sheet WS is provided with the base material sheet BS and the adhesive bond layer AD laminated | stacked on one surface of this base material sheet BS, and is attached to the peeling sheet RL via the said adhesive bond layer AD. It is attached. In addition, the protective sheet PS is affixed on the lower surface of the wafer WF.

The release means 14 is formed between the support shaft 25 for supporting the roll sheet RS and the roll sheet RS before being released from the support shaft 25 and passing through the cutting means 15. The 2nd drive roller 31 and the 2nd pinch roller 32 which pinch | interpose the 1st drive roller 27 and the 1st pinch roller 28 which pinch, and the peeling sheet RL after passing the peeling plate 18. ) And the winding shaft 34 which winds the peeling sheet RL after passing these by predetermined torque by the drive apparatus which is not shown in figure. Each drive roller 27 and 31 is rotatably provided through the rotation motors DM1 and DM2 as drive devices.

The said cutting means 15 is arrange | positioned at the strip | belt-shaped sheet WS side of the rolled-out roll sheet RS, and is provided with the die cut roller 36 rotatably centered on the rotation axis MC, and the roll sheet RS Platen roller 37 and die-cut rollers disposed on the release sheet RL side and rotatably disposed about the rotation axis PC in cooperation with the die-cut roller 36 by a mechanism (not shown). A rotation motor DM3 as a driving device for rotating the 36, and a gap adjusting means for adjusting a relative distance between the die cut roller 36 and the platen roller 37, and a driving device such as a linear motion motor (not shown). Doing.

The die cut roller 36 includes a cutting blade 40 for cutting the strip-shaped sheet WS to form a cutting mark CU, a blade substrate 41 on which the cutting blade 40 protrudes from the surface, The cylindrical magnet cylinder 43 which can wind the blade substrate 41 around the outer periphery is provided.

The cutting blade 40 is provided to protrude from the blade substrate 41 so as to have a height in the thickness direction of the strip-shaped sheet WS when forming the cutting marks CU. As shown in FIG. 3 (A), the cutting blade 40 is provided in a substantially circular shape when the blade substrate 41 is unfolded in a plane, and the ring frame (W) is formed on the strip sheet WS. A substantially circular cuticle CU, which is larger than the inner diameter of RF) and smaller than the outer dimension, is provided. The cutting blade 40 is positioned between the four high blade portions 46 and the four high blade portions 46 adjacent to each other formed at intervals of 90 ° in the circumferential direction of the circular shape, and the high blade portions 46 are respectively located. The lower blade part 48 which becomes lower than () is provided. Each high blade part 46 is formed in the angular range of 30 degrees in the circumferential direction of the cutting blade 40, respectively. In the case of this embodiment, the cutting board 40 is formed by etching the cutting board substrate 41, the height of the high blade part 46 is set to 450 micrometers, and the height of the low blade part 48 is set to 435 micrometers. It is.

The blade substrate 41 is detachably attached to the magnet cylinder 43 by a magnetic force. The blade substrate 41 is formed in a substantially square shape when deployed in a plane, and a high blade portion 46 is provided so as to follow the four sides. In addition, the length of one edge of the blade substrate 41 is set to be equal to or less than the outer circumferential length of the magnet cylinder 43, and the blade substrate 41 can be wound around the magnet cylinder 43 in a state in which two sides facing each other face each other from the deployed state. Therefore, as shown in FIG. 2, when the blade substrate 41 is attached to the magnet cylinder 43, the high blade portion 46 of the cutting blade 40 is the shaft of the magnet cylinder 43. It is located on both sides of the direction and both sides of the circumferential direction. Here, the adhesive sheet AS formed by the cutting blade 40 has a distal end of the strip-shaped sheet WS (the direction in which the roll sheet RS is directed from the support shaft 25 toward the winding shaft 34). The area is formed by the high blade portion 46. The portion of the adhesive sheet AS formed by the high blade portion 46 becomes the initial peeling region Sa as the distal direction distal end portion of the adhesive sheet first peeled from the release sheet RL by the release plate 18, The cut part CU corresponding to this initial peeling area Sa turns into initial cut part CU1. In addition, the next peeling region as the inner region of the adhesive sheet where the portion of the adhesive sheet AS formed by the lower blade portion 48 adjacent to the initial peeling region Sa is peeled off after the peeling of the initial peeling region Sa ( Sb), and the cut part CU corresponding to this next peeling area Sb turns into next cut part CU2. In addition, when the blade substrate 41 is wound around the magnet cylinder 43, the two opposite sides may be changed to the other two sides, or the direction of the magnet cylinder 43 in the axial direction may be reversed. As a result, any of the four high blade portions 46 can form the initial cuticle CU1 corresponding to the initial peeling region Sa, and any one of the four high blade portions 46 is deteriorated depending on the deterioration state of the high blade portion 46 or the like. It is possible to selectively use the blade portion 46.

Here, the cutting | disconnection means 15 is provided with the energy provision means which is not shown in figure, It is possible to form the cutting mark CU, applying energy to roll sheet RS by this energy provision means. As the energy applying means, for example, in addition to the coil heater built in at least one of the die cut roller 36 and the platen roller 37, the formation position of the cut CU from the position away from these rollers 36 and 37. Examples include a blower for blowing warm air and an irradiation device for irradiating energy rays such as ultraviolet rays, infrared rays, and microwaves.

The said winding means 16 is enclosed with the unnecessary sheet US after forming the cutting | cutting mark CU by the cutting means 15, and the peeling roller 50 which peels the said unnecessary sheet US from the peeling sheet RL. And the winding shaft 51 which winds up the unnecessary sheet US after passing the peeling roller 50, and is comprised. The winding shaft 51 is rotatably provided through the rotation motor DM4 as a drive device, and the unnecessary sheet US can be wound by a predetermined torque.

Next, the sticking method of the adhesive sheet AS in this embodiment is demonstrated.

First, the roll sheet RS supported by the support shaft 25 is placed between the first drive roller 27 and the first pinch roller 28, and between the die cut roller 36 and the platen roller 37. Pass it through. And after stripping strip | belt-shaped sheet WS from the peeling sheet RL and surrounding the strip | belt-shaped sheet WS by the peeling roller 50, the lead end is fixed to the winding shaft 51. As shown in FIG. In addition, the release sheet RL is turned over at the tip of the release plate 18 and passed between the second drive roller 31 and the second pinch roller 32 to fix the lead end to the winding shaft 34. In addition, in this embodiment, the thickness of strip | belt-shaped sheet WS was 100 micrometers, and the thickness of peeling sheet RL was 25 micrometers. Further, the cutting blade 40 is wound around the outer circumference of the magnet cylinder 43, and adjusted by a gap adjusting means (not shown) so that the relative distance between the high blade portion 46 and the platen roller 37 is 5 m. have. Thereby, the relative space | interval of the low blade part 48 and the platen roller 37 is set to 20 micrometers. In this embodiment, as shown in FIG. 1, the starting position of the die cut roller 36 is set to the center of the area | region where the cutting edge 40 in the rotation direction of the die cut roller 36 is not formed. St) and the rotation of the die cut roller 36 is stopped in the state where the start position St is reapproached to the platen roller 37.

Then, when the roll sheet RS is released by interlocking the rotation motors DM1 to DM4, the cutting edge 40 forms a cut CU from the substrate sheet BS side toward the release sheet RL side. , Strip | belt-shaped sheet WS is divided into the adhesive sheet AS of the inside of the cut CU, and the unnecessary sheet US of the outside of the cut CU. Here, the initial cutting mark CU1 is formed on the adhesive sheet AS by the high blade portion 46 to form the initial peeling region Sa, and then the next cutting mark CU2 is formed by the low blade portion 46. The next peeling region Sb is formed. As a result, the high cutting edge portion 46 enters the peeling sheet RL corresponding to the initial cutting mark CU1 by 20 µm, whereby the initial cutting mark CU1 reliably enters the separating sheet RL, and the initial peeling region ( Sa) can be easily removed from the unnecessary sheet US. In addition, since the low cutting edge portion 48 only enters 5 µm in the release sheet RL corresponding to the next cutoff CU2, the part of the release sheet RL corresponding to the next release area Sb becomes difficult to be cut. .

After the formation of the cut CU, the unrolled roll sheet RS is peeled off from the release sheet RL by the release roller 50, and the unnecessary sheet US is wound around the winding shaft 51. do. At this time, since the peeling area | region Sa is easy to peel off from the unnecessary sheet US, the adhesive sheet AS does not go up together with the unnecessary sheet US to the winding-shaft 51 direction. Subsequently, when the adhesive sheet AS of the roll sheet RS on which the unnecessary sheet US is wound is peeled out by a predetermined amount from the tip of the peeling plate 18, the tip of the adhesive sheet AS is not shown by a sensor (not shown). Is detected and stopped, and the standby state is entered. In addition, the part of the peeling sheet RL corresponding to initial stage peeling area Sa may also be taken out from the peeling plate 18 with adhesive sheet AS. However, since the part of the peeling sheet RL corresponding to the next peeling area | region Sb becomes difficult to cut | disconnect, the part of the peeling sheet which came out with the adhesive sheet AS as the roll sheet RS unfolds becomes larger than that. Instead, the pulling force in the direction of the second driving roller 31 from the tip of the peeling plate 18 acts on the peeling sheet portion drawn out together with the adhesive sheet AS, corresponding to the initial peeling region Sa. A part of release sheet RL can be reliably peeled from adhesive sheet AS. In the standby state, the die cut roller 36 is set so that the position without the cutting edge 40 is located on the platen roller 37 side, as shown in FIG. It is comprised so that the position of the die cut roller 36 and the platen roller 37 can be displaced in the up-down direction by the cutting position adjustment means which is an apparatus. According to this, although the space | interval of each adhesive sheet AS can be adjusted arbitrarily, those positions can be changed to an up-down direction according to the length in the release direction of adhesive sheet AS. Thereafter, the ring frame RF and the wafer WF are placed on the table 11 via a conveying means (not shown) and are supported by suction. Next, the table 11 conveys the lower side of the peeling plate 18 from the right side to the left side through the linear motion motor 12. When the table 11 is detected by the sensor which is not shown in a predetermined position, the 1st and 2nd drive rollers 27 and 31 rotate in synchronization with the conveyance of the table 11, and the roll sheet RS will take out. The adhesive sheet AS is peeled off at the tip of the release plate 18. Then, the peeled adhesive sheet AS is subjected to the pressure by the pressing roller 19, and affixed to each of the upper surfaces of the ring frame RF and the wafer WF, and the wafer WF and the adhesive sheet AS are attached to each other. The ring frame RF is integrated. At this time, since the peeling sheet RL part corresponding to initial stage peeling area Sa is reliably peeling from adhesive sheet AS, the adhesive sheet AS of the peeling sheet RL part accommodating state is a to-be-adhered body. There is no such thing as being attached to.

Therefore, according to this embodiment, since the initial peeling area | region Sa can make deeper the cutting depth than the next peeling area | region Sb by the cutting by the cutting blade 40, the adhesive sheet AS is unnecessary sheet US It peels together, and it becomes possible to prevent the said adhesive sheet AS from becoming affixed. Moreover, since the depth of cut of the low blade part 48 to the peeling sheet RL part corresponding to the next peeling area | region Sb is shallow, from the roll sheet RS after passing the cutting means 15, the adhesive sheet ( AS) is missing and it can prevent that the adhesion sheet AS cannot be stuck. Thus, according to the said embodiment, even if the peeling sheet RL becomes thin, in response to this, formation, peeling, and sticking of the adhesive sheet AS can be performed favorably, and responds to the request of the cost reduction by thinning. can do.

As mentioned above, although the best structure, method, etc. for implementing this invention are disclosed by the said description, this invention is not limited to this.

In other words, the present invention is mainly illustrated and described with respect to specific embodiments, but without departing from the technical spirit and the desired range of the present invention, and with respect to the embodiments, the shapes, positions, or arrangements of the embodiments described above, Many changes can be made by those skilled in the art.

Therefore, descriptions limiting the shapes and the like described above are described by way of example in order to facilitate understanding of the present invention, and are not intended to limit the present invention. The description in the name of a member deviating from is included in the present invention.

For example, the said winding means 16 is abbreviate | omitted, the peeling sheet RL is peeled off by the peeling plate 18, without peeling the unnecessary sheet US from the peeling sheet RL. And the unnecessary sheet US may be wound around the winding shaft 34. Even in this case, the initial peeling region Sa cannot be peeled off with the peeling plate 18, and the adhesive sheet AS can be prevented from being wound in the direction of the second driving roller 31 together with the unnecessary sheet US. Can be.

In the formation of the cut marks C, the rotational motors DM1 to DM4 are interlocked to reciprocate in the direction of disengaging the roll sheet RS, and the initial peeling area Sa is formed for the formation of one sheet of adhesive sheet AS. The cutting in the high blade part 46 corresponding to) may be performed multiple times.

In addition, you may comprise a sheet manufacturing apparatus by omitting the peeling plate 18 and the press roller 19 of the said sheet sticking apparatus 10. FIG. According to this apparatus, after forming the adhesive sheet AS by the cutting means 15 similarly to the said embodiment, the roll sheet RS to which the said adhesive sheet AS was temporarily attached to the peeling sheet RL is wound up. It is wound around the shaft 34. The roll sheet RS wound by the winding shaft 34 can be conveyed and stored separately, or can be used as a sheet sticking apparatus etc. which do not have a cutting means. Thus, when using the roll sheet RS wound by the winding shaft 34 in the sheet sticking apparatus etc. which do not have a cutting means as it is, the unwinding direction rear end of the unwinding means 14, such as the said sheet sticking apparatus, is used. Since it becomes an initial peeling area | region Sa, the high blade of the cutting means 15 is made so that the cutout CU of the rear end of the unwinding direction 14 of the unwinding means 14 in adhesive sheet AS may become deep compared with another area | region. What is necessary is just to install the part 46.

Further, the planar shape of the cutting blade 40 is polygonal or ellipse as long as the cutting marks CU can be formed on the strip sheet WS so that the inside of the cutting marks CU can be formed as the adhesive sheet AS. You can change the shape of the blade, the shape of the manor, the rhombus, the combination of the straight line and the curve.

In addition, in the said embodiment, you may abbreviate | omit at least one high blade part 46 other than the high blade part 46 which forms initial stage peeling area Sa.

In addition, by forming the blade substrate 41 in a circle or polygon, the number of the high blade portions 46 that can be selectively used can be increased.

Moreover, in the said embodiment, although having formed the high blade part 46 in the angular range of 30 degrees in the circumferential direction of the cutting blade 40, you may form in the angular range of 30 degrees or less, and the high blade part 46 ) May be formed in an angle range of 30 ° or more in a range not connected to the adjacent high blade portion 46.

In addition, the cutting means 15 may use other cutting means, such as a laser beam, as long as it can form the said initial cutting mark CU1 and the next cutting mark CU2.

The cutting blade 40 may be formed by an etching process, in addition to a engraving knife formed by machining, or a rotary die, a flat blade or a Thompson blade or the like having a blade formed on a flat plate.

In addition, the height of the high blade portion 46 or the low blade portion 48 can be appropriately changed in consideration of the thickness and properties of the roll sheet RS, and the height of the blade portion 48 which is lower than the high blade portion 46 and low. You may also form the intermediate blade part with a high height.

The release means 14, the release plate 18, and the pressing roller 19 can be modified in various designs. The gap adjusting means may be constituted by a so-called bearer, and the relative distance between the cutting blade 40 and the platen roller 37 by the gap adjusting means is determined by the thickness and properties of the roll sheet RS, in particular, the release sheet RS. It can change suitably in consideration of thickness, a property, etc. In addition, the thickness of the member which comprises roll sheet RS is not limited to what was illustrated by the said embodiment at all.

Moreover, in the state which installed the drive apparatus which moves the sheet sticking apparatus 10, and stopped the table 11, the sheet sticking apparatus 10 is moved to the right direction in FIG. 1, or the table 11 is moved to the left direction. In addition, the sheet sticking apparatus 10 may be moved to the right direction, and the adhesive sheet AS may be attached to an adherend.

Further, the drive device in the above embodiment may employ a motor such as a rotary motor, a linear motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, a rotary cylinder, or the like. In addition, it is also possible to employ a combination of them directly or indirectly (some overlap with those exemplified in the embodiment).

The adherend may be a glass plate, a steel plate, a resin plate, or the like instead of the wafer WF or the ring frame RF, or a frame of another shape such as a C or U shape instead of the ring frame RF. It is good also as a sticking object of an adhesive sheet AS without a ring frame RF.

10 sheet pasting device
14 Loosening means
15 cutting means
18 Peeling plate (peeling means)
19 Pressing roller (pressing means)
40 cutting blade
46 high blades
48 lower blades
AD adhesive layer
AS adhesive sheet
BS base sheet
CU cuts
CU1 initial cuts
CU2 Shooting Knife
RF ring frame (substrate)
RL peeling sheet
RS roll sheet
Sa initial peeling area (leading edge of unwinding direction of adhesive sheet)
Sb next peeling area (inner area of adhesive sheet)
US unnecessary sheet
WF semiconductor wafer (substrate)
WS strip shape sheet

Claims (8)

Unwinding means for unwinding the roll sheet attached to the strip-shaped release sheet through the adhesive layer, the strip-shaped sheet having an adhesive layer on one surface of the strip-shaped base sheet, and the strip-shaped sheet having a predetermined shape. Cutting means for forming a cut and forming an adhesive sheet on the inside of the cut, and forming an unnecessary sheet on the outside of the cut, and the adhesive sheet temporarily attached to the peeling sheet in the direction of unwinding of the adhesive sheet. A sheet sticking device comprising: peeling means for peeling from the inside toward the inner region of the adhesive sheet and pressing means for pressing the adhesive sheet against the adherend,
The cutting means is characterized in that the depth of the cutout corresponding to the distal end of the adhesive sheet in the adhesive sheet is provided so that a deep cut can be formed in comparison with the depth of the cutout corresponding to the inner region of the adhesive sheet. Sticking device. 2. The cutting device according to claim 1, wherein the cutting means includes a cutting blade having a height in the thickness direction of the strip-shaped sheet, the cutting blade having a high blade portion capable of forming a cutout corresponding to the distal end portion of the adhesive sheet. And a low blade portion formed at a lower level than the high blade portion and capable of forming an inner region of the adhesive sheet. The said high blade part is provided in several places of a cutting blade, and each high blade part is installed so that a position can be selectively arrange | positioned in the position which can form the cutting | disconnection corresponding to the front-end | tip part of the release direction in the said adhesive sheet. The sheet sticking apparatus characterized by the above-mentioned. The sheet sticking device according to claim 2 or 3, wherein the extracting means performs cutting at the high blade portion a plurality of times for forming one sheet of adhesive sheet in association with the cutting means. The sheet sticking apparatus according to any one of claims 1 to 4, wherein the sheet attaching apparatus includes an energy applying means capable of heating the roll sheet in the region to be cut by the cutting means. An unwinding step in which the strip sheet having an adhesive layer on one surface of the strip-shaped base sheet releases the roll sheet temporarily attached to the strip-shaped release sheet through the adhesive layer;
A cutting step of forming a cut of a predetermined shape on the strip-shaped sheet, forming an adhesive sheet inside the cut, and forming an unnecessary sheet on the outside of the cut;
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet from the distal end portion of the adhesive sheet toward the inner region of the adhesive sheet;
And a pressing step of pressing the adhesive sheet onto the adherend and pasting it,
The sheet sticking method of the said cutting process WHEREIN: The depth of the cut | dispair corresponding to the front-end | tip part in the release direction in the said adhesive sheet forms a deep cut with respect to the depth of the cut-out corresponding to the inner side area | region of the said adhesive sheet. Unwinding means in which a strip-shaped sheet having an adhesive layer on one surface of the strip-shaped base sheet releases the roll sheet temporarily attached to the strip-shaped release sheet through the adhesive layer;
A sheet manufacturing apparatus comprising cutting means for forming a cut sheet having a predetermined shape on the strip-shaped sheet to form an adhesive sheet inside the cut sheet, and to form an unnecessary sheet outside the cut sheet.
The cutting means is provided so that the depth of the cut corresponding to at least one of the release direction leading end and the release direction rear end of the adhesive sheet can be formed deeper than the depth of the cut corresponding to the inner region of the adhesive sheet. Sheet manufacturing apparatus characterized in that. An unwinding step in which the strip sheet having an adhesive layer on one surface of the strip-shaped base sheet releases the roll sheet temporarily attached to the strip-shaped release sheet through the adhesive layer;
A cutting step of forming a cut of a predetermined shape on the strip-shaped sheet, forming an adhesive sheet inside the cut, and forming an unnecessary sheet on the outside of the cut,
In the cutting step, the depth of the cut corresponding to at least one of the release direction leading end and the release direction rear end of the adhesive sheet forms a deep cut compared to the depth of the cut corresponding to the inner region of the adhesive sheet. Sheet production method to be used.

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