JP2013193780A - Apparatus and method for producing sheet, and apparatus and method for sticking sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To peferably separate an adhesive sheet.SOLUTION: A sheet sticking apparatus 10 is configured by including: a delivering means 11 delivering an original fabric RS formed by temporarily attaching an adhesive sheet AS having an adhesive layer AD onto one surface of a band-like separating sheet RL via the adhesive layer AD; and a separating plate 21 separating the adhesive sheet AS by folding back the separating sheet RL. The apparatus 10 further includes: a separating sheet cut-in means 18 in which, in a region straddling a leading end outer edge in the delivering direction of the adhesive sheet AS, there is formed a cut-in RC for the separating sheet penetrating through the separating sheet RL from another surface side of the separating sheet RL; and an exposing means 19 separating a removed sheet JS, formed inside the cut-in RC for the separating sheet, from the adhesive layer AD of the adhesive sheet AS, and exposing the adhesive layer AD part inside the cut-in RC for the separating sheet.

Description

  The present invention relates to a sheet manufacturing apparatus and a manufacturing method, and a sheet sticking apparatus and a sticking method, and more specifically, a sheet manufacturing apparatus and a manufacturing method capable of preventing a peeling failure of an adhesive sheet from a release sheet, and The present invention relates to a sheet sticking apparatus and a sticking method.

DESCRIPTION OF RELATED ART Conventionally, the sheet sticking apparatus which sticks an adhesive sheet to the to-be-adhered body containing the semiconductor wafer (it may only be called a "wafer" hereafter) and the ring frame arrange | positioned on the outer peripheral side is used widely. (For example, refer to Patent Document 1).
The sheet sticking device of Patent Document 1 includes a notch forming means for forming a closed loop-like cut in a belt-like sheet temporarily attached to a release sheet via an adhesive layer, and an adhesive sheet formed inside the cut. A release plate that peels from the release sheet, and a press roller that can be applied by pressing the peeled adhesive sheet against the wafer and the ring frame are provided.

JP-A-2005-116929

  However, Patent Document 1 has a configuration in which the belt-like sheet is rapidly folded back with a release plate, the adhesive sheet is peeled off from the release sheet using the rigidity of the adhesive sheet, and pressed against the wafer and the ring frame with a press roller. If the sheet is thin and has low rigidity, or the adhesive layer has a strong adhesive force, the adhesive sheet will be folded back together with the release sheet without being peeled off from the release sheet even if the release sheet is folded back with the release plate. It passes through the release plate. For this reason, the inconvenience that it becomes impossible to attach the adhesive sheet occurs.

[Object of invention]
The objective of this invention is providing the sheet | seat manufacturing apparatus and manufacturing method which can perform peeling of an adhesive sheet reliably, and the sheet | seat sticking apparatus and sticking method which can stick an adhesive sheet favorably.

  In order to achieve the above object, the present invention provides a feeding means for feeding out an original fabric in which an adhesive sheet having an adhesive layer is temporarily attached to one surface of a strip-shaped release sheet via the adhesive layer, and the release sheet. And a release sheet cutting means for forming a cut across the outer edge of the adhesive sheet in the feeding direction while penetrating the release sheet from the other surface side of the adhesive sheet.

Moreover, the sheet manufacturing method of the present invention includes a step of feeding out an original fabric temporarily attached to one surface of a strip-shaped release sheet through the adhesive layer, the adhesive sheet having an adhesive layer;
A method is adopted in which a step of forming a cut in a region straddling the outer edge of the adhesive sheet in the feed-out direction while penetrating the release sheet from the other surface side of the release sheet is employed.

  Furthermore, the sheet sticking apparatus of the present invention comprises: a feeding means for feeding out an original fabric in which an adhesive sheet having an adhesive layer is temporarily attached to one surface of a strip-shaped release sheet via the adhesive layer; and the release sheet. A peeling means for folding and peeling the adhesive sheet from the release sheet, and a pressing means for pressing and sticking the adhesive sheet to an adherend, the upstream side of the peeling direction of the adhesive sheet from the peeling means, A release sheet cutting means that penetrates the release sheet from the other surface side of the release sheet and forms a cut across the outer edge of the adhesive sheet in the feeding direction, and a release sheet formed inside the cut An arrangement is adopted in which a portion is separated from the adhesive layer, and an exposing means for exposing the adhesive layer portion inside the cut is provided.

  In the sheet sticking device of the present invention, it is also preferable to employ a configuration in which biasing means for biasing the adhesive sheet portion in the direction of peeling from the release sheet is provided from the adhesive sheet portion where the adhesive layer is exposed. .

Further, the sheet sticking method of the present invention includes a step of feeding an original sheet temporarily attached to one surface of a strip-shaped release sheet through the adhesive layer.
A process of forming a cut across the outer edge of the adhesive sheet in the feeding direction while penetrating the release sheet from the other surface side of the release sheet;
Separating the release sheet portion formed inside the cut from the adhesive layer and exposing the adhesive layer portion inside the cut; and
Folding the release sheet and peeling the adhesive sheet from the release sheet;
And a step of pressing and adhering the adhesive sheet to an adherend.

  According to the present invention, the adhesive sheet is temporarily attached to the release sheet by forming a cut through the release sheet from the other surface side of the release sheet and straddling the outer edge of the adhesive sheet in the feeding direction. Thus, the adhesive layer of the adhesive sheet can be partially exposed in advance. While feeding the raw material with the exposed portion as the leading end side, the peeling sheet is folded back by the peeling means to peel off the adhesive sheet, thereby avoiding the folding of the leading edge of the adhesive sheet along with the peeling sheet. Is possible. Thereby, even if the rigidity of the adhesive sheet is low or the adhesive force of the adhesive sheet is strong, it is possible to prevent the peeling failure of the adhesive sheet from the release sheet, and thus the sticking failure to the adherend can be prevented. Moreover, the sheet | seat inside a notch can be pushed up with a finger | toe, and it can also be a trigger of peeling.

  Moreover, when it has an urging | biasing means, the peeling defect of an adhesive sheet can be prevented better.

(A) is a schematic side view of the sheet sticking apparatus according to the embodiment, (B) is a partial plan view of the sheet sticking apparatus, and (C) and (D) are explanatory views of biasing means according to a modification. . (A) And (B) is explanatory drawing of the cutting for release sheets which concerns on a modification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In the present embodiment, for example, when a direction such as up, down, left, right, near side, or back is shown without giving a reference figure, FIG. Based on the case of viewing, the top, bottom, left, and right directions are directions parallel to the paper surface, and the front and back directions are directions orthogonal to the paper surface.

  1 (A) and 1 (B), a sheet sticking apparatus 10 is an original in which a belt-like sheet WS having an adhesive layer AD is temporarily attached to one surface of a belt-like release sheet RL via the adhesive layer AD. The feeding means 14 for feeding out the anti-RS, and the adhesive sheet cutting SC is formed in the belt-like sheet WS of the original fabric RS fed out by the feeding means 14, and the adhesive sheet AS is formed inside the cutting SC, and The notch forming means 15 for forming the unnecessary sheet US outside the notch SC, the winding means 16 capable of winding up the unnecessary sheet US, and the release sheet RL from the other surface side of the release sheet RL, through the release sheet RL, Adhere the release sheet cutting means 18 for forming a closed loop cut RC straddling the outer edge of the leading end of the adhesive sheet AS in the feeding direction and the removal sheet JS as a release sheet portion formed inside the cut RC As the separating means for separating the adhesive sheet AS from the contact release sheet RL by folding the release sheet RL away from the layer AD and exposing the adhesive layer portion of the adhesive sheet AS inside the cut RC The peeling plate 21 and a pressing roller 22 as pressing means for pressing and adhering the adhesive sheet AS to the wafer WF and the ring frame RF as adherends are provided.

  The feeding means 14 includes a support shaft 25 that winds and supports the original fabric RS, a drive roller 27 and a pinch roller 28 that sandwich the original fabric RS that has been fed from the support shaft 25 and passed through the peeling plate 21, and these And a take-up shaft 29 that winds up the original fabric RS after passing through a predetermined torque by a driving device (not shown). The drive roller 27 is rotatably provided via a rotation motor DM1 as a drive device. The feeding means 14 is controlled by a control means (not shown) so as to intermittently feed the raw fabric RS.

  The notch forming means 15 includes a die plate 30 disposed on the side of the belt-like sheet WS of the unstretched raw material RS, a linear motor LM1 as a drive device that can move the die plate 30 in the vertical direction, A pedestal 31 is disposed to face the die plate 30 with the RS interposed therebetween and receive the pressing force of the die plate 30. The die plate 31 includes a closed-loop cutting blade 32, and is provided on the belt-like sheet WS so as to be able to form a substantially circular adhesive sheet cutting SC that is larger than the inner diameter dimension of the ring frame RF and smaller than the outer dimension. .

  The winding means 16 includes a peeling roller 34 that is wound around the unnecessary sheet US after the adhesive sheet cut SC is formed by the cut forming means 15 and peels the unnecessary sheet US from the release sheet RL. And a take-up shaft 35 that winds up the unnecessary sheet US after passing through 34. The take-up shaft 35 is rotatably provided via a rotation motor DM2 as a drive device, and can take up the unnecessary sheet US with a predetermined torque.

  The release sheet cutting means 18 includes a die plate 38 disposed on the side of the release sheet RL of the raw material RS to be fed, a linear motor LM2 as a drive device that can move the die plate 38 in the vertical direction, It is configured to include a cradle 39 that is disposed so as to face the die plate 38 with the anti-RS interposed therebetween and receives the pressing force of the die plate 38. The die plate 38 includes a closed-loop cutting blade 40, and is provided on the release sheet RL so that a substantially circular release sheet cut RC having a smaller diameter than the adhesive sheet cut SC can be formed.

  The exposing means 19 includes a support roller 42 that winds and supports the adhesive tape 44, a winding roller 43 that winds the adhesive tape 44 with a predetermined torque by a driving device (not shown), and the support roller 42 and the winding roller 43. An air cylinder 46 serving as a drive device provided between and an adhesive cylinder 44 that can be pressed to the release sheet RL side via the pressing member 48, and a pressing force of the pressing member 48 disposed on the belt-like sheet WS side of the original fabric RS. And a plate 47 for receiving it.

Next, a method for applying the adhesive sheet AS in the present embodiment will be described.
In FIG. 1B, the belt-like sheet WS has a lattice pattern and the release sheet RL has a halftone dot pattern. However, this is only given for convenience in order to easily distinguish the belt-like sheet WS and the release sheet RL. Is.

  First, the raw fabric RS supported by the support shaft 25 is passed between the die plate 30 and the cradle 31. Then, the strip-shaped sheet WS is peeled from the release sheet RL, the strip-shaped sheet WS is wound around the peeling roller 34, and then the lead end is fixed to the winding shaft 35. Further, the release sheet RL is folded back at the tip of the release plate 21 to pass between the driving roller 27 and the pinch roller 28, and the lead end thereof is fixed to the winding shaft 29.

  Then, the notch forming means 15 drives the linear motor LM1, lowers the die plate 30 toward the original fabric RS, and then raises it. Thereby, the cutting sheet 32 for the adhesive sheet that penetrates the base sheet BS by the cutting blade 32 and does not penetrate the release sheet RL is formed, and the belt-like sheet WS is separated from the adhesive sheet AS inside the cutting sheet SC for adhesive sheet, It is divided into unnecessary sheets US outside the embedded CU. Thereafter, when the feeding means 14 drives the rotation motor DM1 and feeds the raw fabric RS, the unnecessary sheet US is peeled off from the peeling sheet RL by the peeling roller 34 and wound around the winding shaft 51, and the unnecessary sheet US is wound. The wound raw fabric RS is sent in the direction of the release sheet cutting means 18.

  When the detection means (not shown) detects that the leading end (left end) of the adhesive sheet AS has reached the center of the cutting blade 40 in plan view, the supply means 14 stops driving the rotation motor DM1, The feeding of the original fabric RS is stopped, and the release sheet cutting means 18 drives the linear motion motor LM2 to raise and lower the die plate 38 toward the original fabric RS. Accordingly, the cutting blade 40 forms a release sheet notch RC that penetrates the release sheet RL through the release sheet RL in the region straddling the outer edge of the adhesive sheet AS in the feeding direction, and does not pass through the base sheet BS. The sheet RL is divided into a removal sheet JS inside the release sheet cut RC and a release sheet RL1 outside the release sheet cut RC.

  Thereafter, the feeding means 14 drives the rotation motor DM1, feeds the original fabric RS, and when the detection means (not shown) detects that the removal sheet JS has reached the lower side of the plate 47, the rotation motor DM1 is driven. Stop and stop feeding the raw material RS. Then, the exposing means 19 drives the air cylinder 46, raises the pressing member 48 and presses and adheres the adhesive tape 44 to the removal sheet JS, and then lowers the pressing member 48 to drive a driving device (not shown). By winding the adhesive tape 44 with the winding roller 43, the removal sheet JS is separated from the adhesive sheet AS, and the removal sheet JS is removed from the original fabric RS. As a result, the adhesive layer AD is exposed at the leading end of the adhesive sheet AS in the feed-out direction. Then, when the detecting means (not shown) detects that the feeding means 14 drives the rotation motor DM1, feeds the raw material RS, and the exposed adhesive layer AD reaches the tip of the peeling plate 21, the feeding means. 14 stops the driving of the rotation motor DM1.

  Next, the table 11 on which the ring claim RF and the wafer WF are supported is transported from the right side to the left side under the peeling plate 21 by the linear motion motor 12 and is detected by a detection means (not shown) to reach a predetermined position. Then, in synchronism with the transport of the table 11, the feeding means 14 drives the rotation motor DM1, feeds the original fabric RS, the release sheet RL1 is folded back at the tip of the release plate 21, and the adhesive sheet AS is released from the release sheet RL1. Is peeled off. Then, the peeled adhesive sheet AS receives a pressing force by the pressing roller 22 and is attached to each upper surface of the ring claim RF and the wafer WF, and the wafer WF and the ring claim RF are integrated through the adhesive sheet AS.

  Therefore, according to such an embodiment, the removal sheet JS is formed, and the removal sheet JS is removed before the leading end portion in the feeding direction of the adhesive sheet AS reaches the front end of the peeling plate 21. Even if the rigidity is low or the adhesive strength of the adhesive layer AD is strong, it is possible to prevent the front end portion of the adhesive sheet AS in the feeding direction from being folded back together with the release sheet RL without being peeled off by the release plate 21. It is possible to prevent the peeling failure of the AS from the peeling sheet RL and the sticking failure to the wafer WF or the like.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

For example, the sheet manufacturing apparatus may be configured by omitting the peeling plate 21 and the pressing roller 22 of the sheet sticking apparatus 10.
According to the apparatus, the release sheet cutting means 18 forms the release sheet cut RC in the release sheet RL as in the above embodiment, and the exposing means 19 forms the removal sheet formed inside the cut RC. After the JS is removed, the raw material RS, on which the adhesive sheet AS is temporarily attached to the release sheet RL by the feeding means 14, is wound around the winding shaft 29 and wound up. The raw fabric RS wound on the winding shaft 29 may be used in a sheet sticking apparatus or the like that does not have a notch forming means, or the adhesive sheet AS may be manually attached to an adherend as needed. it can. When the adhesive sheet AS is manually attached to the adherend, the adhesive sheet AS inside the release sheet notch RC can be pushed up with a finger to trigger peeling.
Further, the sheet manufacturing apparatus can omit the exposing means 19, and does not remove the removal sheet JS, but winds the raw fabric RS in which the release sheet notch RC is formed on the release sheet RL by the supply means 14. It is good also as a structure wound around the axis | shaft 29 and winding up. This prevents impurities such as dust from adhering to the adhesive layer AD of the adhesive sheet AS exposed by removing the removal sheet JS, and preventing the adhesive layer AD from adhering to the base sheet BS. can do.

  Moreover, the sheet sticking apparatus 10 and the sheet manufacturing apparatus may provide the notch forming means 15 on the downstream side in the feed-out direction of the original fabric RS with respect to the release sheet notch means 18 and the exposing means 19. The adhesive sheet cut SC may be formed after forming the cut RC or after removing the removal sheet JS. Furthermore, the sheet sticking apparatus 10 and the sheet manufacturing apparatus are formed in advance by another apparatus in which a predetermined shape of the adhesive sheet cut SC is formed in the belt-like sheet WS at a predetermined interval, and the adhesive sheet is formed inside the cut SC. When an AS is formed and a raw material in which an unnecessary sheet US is formed outside the notch SC is used, the notch forming means 15 can be omitted, and the unnecessary sheet US is peeled from the release sheet RL. In the case of using a raw material in which only the adhesive sheet AS is temporarily attached to the release sheet RL, the winding means 16 can be further omitted.

  In addition, the sheet sticking device 10 is previously formed with an adhesive sheet notch SC having a predetermined shape on the belt-like sheet WS at a predetermined interval by another device, and the adhesive sheet AS is formed inside the notch SC. In addition, the winding means 16 can be omitted even when a raw material having an unnecessary sheet US formed outside the notch SC is used, and the unnecessary sheet US is wound together with the release sheet RL1. It is good also as a structure wound around the axis | shaft 29 and winding up.

  Furthermore, as shown in FIG. 1C, an urging means 50 that can eject gas from the front end side of the peeling plate 21 toward the adhesive sheet AS may be provided. According to this urging means 50, gas can be ejected to the adhesive sheet AS through the inside of the release sheet cut RC from which the removal sheet JS has been removed, and immediately before the adhesive sheet AS is peeled off at the tip of the release plate 21. The leading end in the feeding direction can be urged in the direction of peeling from the release sheet RL. Accordingly, it is possible to better prevent the peeling failure of the adhesive sheet AS, and it is possible to prevent the adhesive layer AD exposed inside the release sheet notch RC from coming into contact with the release plate 21.

  Further, as shown in FIG. 1D, an urging means 51 including a nozzle or the like that can spray gas toward the distal end side of the peeling plate 21 may be provided. According to this urging means 51, gas is jetted to the leading end in the feeding direction of the adhesive sheet AS immediately after passing through the tip of the release plate 21 through the inside of the release sheet cut RC, and the tip is released from the release sheet RL. It can be biased in the peeling direction. Thereby, compared with the case where the removal sheet JS is not removed, the position where the urging force is applied can be brought closer to the front end of the release plate 21 by the thickness of the release sheet RL folded back at the front end of the release plate 21. Defects can be better prevented. In addition, the adhesive sheet AS can be urged along the pressing roller 22, and poor adhesion of the adhesive sheet AS to the wafer WF or the like can be avoided.

Furthermore, the planar shape of the cutting blade 32 is polygonal, oval, oval, rhombus as long as the adhesive sheet cut SC can be formed on the belt-like sheet WS and the inside of the cut SC can be formed as the adhesive sheet AS. Various changes such as a shape combining a straight line and a curved line are possible.
Further, the planar shape of the cutting blade 40 is polygonal, oval, oval, rhombus, as long as the release sheet notch RC can be formed in the release sheet RL in the region straddling the outer edge of the adhesive sheet AS in the feeding direction. The shape can be changed to various shapes such as a combination of a straight line and a curve. In addition to the closed loop shape, various changes such as a C shape, a U shape, an M shape, a W shape, and a V shape are possible as shown in FIGS. is there. In this case, the exposing means 19 may be configured to bend a straight line portion connecting the end portions of the U shape, for example, without removing the removal sheet JS as in the above embodiment. Moreover, you may comprise so that multiple cut | notch RC for release sheets may be formed.

  In addition, a driving device for moving the sheet sticking device 10 is provided, and with the table 11 stopped, the sheet sticking device 10 is moved in the right direction or the table 11 is moved in the left direction. The adhesive sheet AS may be attached to the adherend by moving it in the right direction.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

  Further, the adherend may be a glass plate, a steel plate, or a resin plate instead of the wafer WF or the ring frame RF, and the semiconductor wafer may be a silicon semiconductor wafer or a compound semiconductor wafer. It may be. Further, instead of the ring frame RF, a frame having a different shape such as a C-shape or U-shape may be used, or a single adherend may be used as an attachment target of the adhesive sheet AS without the ring frame RF.

  Further, the type and material of the adhesive sheet AS are not particularly limited. For example, the adhesive sheet AS has three or more layers such as an intermediate layer provided between the base sheet BS and the adhesive layer AD, or other layers. The adhesive layer AD which does not have the base material sheet BS may be used.

  Further, the cutting means may be constituted by a rotary cutter, a laser cutter or the like.

  In addition, when the timing of stopping at the notch forming means 15, the release sheet notch means 18, the exposing means 19, and the release plate 21 is different, it is driven upstream or downstream in the feeding direction, for example, in the vertical direction. You may provide the buffer means which can pay out raw material RS and stop it simultaneously.

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 14 Feeding means 15 Notch forming means 18 Peeling sheet cutting means 19 Exposing means 21 Peeling plate (peeling means)
22 Pressing roller (pressing means)
50, 51 Energizing means AD Adhesive layer AS Adhesive sheet BS Base sheet JS Removal sheet RC Release sheet notch RF Ring frame (Substrate)
RL, RL1 Release sheet RS Original fabric SC Adhesive sheet cut WF Semiconductor wafer (Substrate)
WS Strip sheet

Claims (5)

  An adhesive sheet having an adhesive layer passes through the release sheet from the other surface side of the release sheet, and a feeding means for feeding the original fabric temporarily attached to one surface of the strip-shaped release sheet via the adhesive layer And a release sheet cutting means for forming a cut across the outer edge of the adhesive sheet in the feeding direction. A step of feeding out an original fabric temporarily attached to one surface of a strip-shaped release sheet via the adhesive layer, the adhesive sheet having an adhesive layer;
And a step of forming a cut in a region straddling the outer edge of the adhesive sheet in the feeding direction while penetrating the release sheet from the other surface side of the release sheet.   An adhesive sheet having an adhesive layer feeds out the original fabric temporarily attached to one surface of the strip-shaped release sheet via the adhesive layer; and the adhesive sheet is folded from the release sheet by folding the release sheet. A peeling means for peeling, and a pressing means for pressing and adhering the adhesive sheet to an adherend, and the peeling from the other surface side of the release sheet upstream of the peeling means in the feeding direction of the adhesive sheet. While peeling through the sheet, the release sheet cutting means for forming a cut across the outer edge of the adhesive sheet in the feeding direction, and the release sheet portion formed on the inside of the cut away from the adhesive layer, A sheet sticking device comprising: an exposing means for exposing the adhesive layer portion inside the cut.   4. The sheet sticking apparatus according to claim 3, further comprising a biasing unit that biases the adhesive sheet portion in a direction of peeling from the release sheet from the adhesive sheet portion exposed by the adhesive layer. A step of feeding out an original fabric temporarily attached to one surface of a strip-shaped release sheet via the adhesive layer, the adhesive sheet having an adhesive layer;
A process of forming a cut across the outer edge of the adhesive sheet in the feeding direction while penetrating the release sheet from the other surface side of the release sheet;
Separating the release sheet portion formed inside the cut from the adhesive layer and exposing the adhesive layer portion inside the cut; and
Folding the release sheet and peeling the adhesive sheet from the release sheet;
And a step of affixing the adhesive sheet by pressing it onto an adherend.

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