JP2013074105A - Sheet sticking apparatus and sticking method, and sheet manufacturing apparatus and manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow an adhesive sheet to be successfully formed, peeled and stuck even if a peeling sheet is thinned.SOLUTION: A sheet sticking apparatus 10 comprises: delivery means 14 for delivering a master roll RS in which a belt-like sheet WS is tentatively adhered to a belt-like peeling sheet RL; cutting means 15 for forming a notch CU in the belt-like sheet WS to form an adhesive sheet AS inside the notch CU; and a peeling plate 18 for peeling the adhesive sheet AS tentatively adhered to the belt-like peeling sheet RL. The cutting means 15 includes a die cut roller 36, a platen roller 37, and contact detection means 39 capable of detecting contact between the rollers 36 and 37.

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, and a sheet manufacturing apparatus and a manufacturing method, and more specifically, a sheet sticking apparatus and a sticking method capable of forming an adhesive sheet by forming a cut in a belt-like sheet, In addition, the present invention relates to a sheet manufacturing apparatus and a manufacturing method.

  Conventionally, a sheet sticking apparatus for sticking an adhesive sheet to an adherend such as a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) has been widely used. As such a sheet sticking apparatus, for example, It is disclosed in Patent Document 1. The sheet sticking device of Patent Document 1 includes a feeding unit that feeds an original fabric in which a belt-like sheet is temporarily attached to a release sheet, a cutting blade that forms a closed-loop cut in the course of feeding the original fabric, A peel plate for peeling the adhesive sheet formed on the inside from the release sheet, and a press roller capable of pressing the peeled adhesive sheet against the wafer and the ring frame for pasting. When forming a cut with such a sheet sticking device, as shown in FIG. 3A, the cutting blade HC and the platen roller PR are arranged so that the cutting edge of the cutting blade HC enters the peeling sheet RL of about 20 μm. The relative spacing of is adjusted. Such a release sheet RL usually has a thickness of about 50 μm. In the figure, WS is a belt-like sheet, BS is a base material sheet, AD is an adhesive layer, and RS is an original fabric.

JP-A-2005-116929

  By the way, in the release sheet RL, in order to reduce the material cost, a thin one having a thickness of about 25 μm is increasingly used. When the original fabric using such a thin release sheet RL is used in the apparatus of Patent Document 1, the cutting edge of the cutting blade HC does not enter the release sheet RL as shown in FIG. The adhesive sheet formed on the inside of the cut CU and the unnecessary sheet formed on the outside cannot be reliably separated, and the adhesive sheet is wound together with the unnecessary sheet. The inconvenience that sticking cannot be performed occurs.

  Here, in FIG. 3B, the adhesive sheet is reliably removed from the unnecessary sheet by readjusting the relative distance between the cutting blade HC and the platen roller PR so that the cutting edge of the cutting blade HC enters the release sheet RL. It can be separated. However, in this case, if the relative distance between the adjusting cutting blade HC and the platen roller PR is too close, sometimes the cutting CU may be caused by some influence such as vibration of the apparatus, temperature and humidity of the atmosphere, deformation of the cutting blade HC, etc. Partially or entirely penetrates the original fabric, and the adhesive sheet and the corresponding release sheet part fall off from the original fabric RS with only a slight external force, or peel off the adhesive sheet with a peel plate. Sometimes, the corresponding release sheet part with the adhesive sheet also comes off, and the adhesive sheet with the release sheet part attached to it adheres to the adherend. Inconvenience.

[Object of invention]
An object of the present invention is to provide a sheet sticking apparatus and a sticking method, and a sheet manufacturing apparatus and a manufacturing method capable of satisfactorily forming, peeling and sticking an adhesive sheet even when the release sheet is thinned. is there.

In order to achieve the above-mentioned object, the present invention feeds out a raw material in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to the belt-like release sheet via the adhesive layer. A cutting means for forming an incision in a predetermined shape in the belt-like sheet and forming an adhesive sheet inside the incision, and forming an unnecessary sheet outside the incision; and temporarily attaching to the release sheet A sheet sticking device including a peeling means for peeling the adhesive sheet, and a pressing means for pressing and sticking the adhesive sheet to an adherend,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. The pressure receiving part which receives the pressing force of and the contact detection means which can detect the contact between these cutter parts and the pressure receiving part are employed.

  In this invention, it has the adjustment means which can adjust the space | interval of the said cutter part and a pressure receiving part, and the said adjustment means is provided so that the said space | interval can be adjusted based on the detection result of the said contact detection means. It is preferable to adopt.

  Moreover, it is good to have a displacement means which can change the cutter blade area | region which displaces the said cutter part and forms the notch corresponding to the feed direction front-end | tip part of the said adhesive sheet.

  Furthermore, the feeding means may perform the formation of the notch a plurality of times for the formation of one adhesive sheet in conjunction with the cutting means.

Furthermore, the sheet sticking method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming an unnecessary sheet on the outside of the cut,
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
In the cutting step, a method of detecting contact between the cutter part and the pressure receiving part is adopted.

Further, the sheet manufacturing apparatus of the present invention is a feeding means for feeding out a raw material in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to the belt-like release sheet via the adhesive layer When,
A sheet manufacturing apparatus including a cutting means for forming an incision having a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch and forming an unnecessary sheet outside the notch,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. The pressure receiving part which receives the pressing force of and the contact detection means which can detect the contact between these cutter parts and the pressure receiving part are employed.

The sheet manufacturing method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming a unnecessary sheet on the outside of the cut,
In the cutting step, a method of detecting contact between the cutter part and the pressure receiving part is adopted.

  According to the present invention, it is possible to detect that the cut has penetrated the original fabric by detecting contact between the cutter portion and the pressure receiving portion. Even if it has penetrated the opposite side, it can be detected and, for example, the sheet sticking device or the sheet manufacturing device can be emergency stopped, or a notification means such as sound or light can be notified to the operator, etc. To prevent adhesion failure of the adhesive sheet, such as the sheet and the corresponding release sheet part falling off from the original fabric, or the adhesive sheet with the release sheet part attached to the adherend. Can do.

In addition, when an adjustment unit capable of adjusting the interval between the cutter unit and the pressure receiving unit is provided, the interval can be adjusted based on the detection result of the contact detection unit, and the sheet sticking device or the sheet manufacturing device needs to be stopped in an emergency. Disappear.
Further, when the cutter blade region that forms the cut corresponding to the leading end of the adhesive sheet in the feeding direction is configured to have a displacement means that can be changed, even if a partial region of the cutter blade deteriorates due to wear or the like, A notch corresponding to the leading end of the adhesive sheet in the feeding direction can be formed in the region.

  Moreover, it becomes possible to make the depth of a notch into a predetermined depth reliably by performing notch formation several times with respect to one adhesive sheet formation.

The schematic front view of the sheet sticking apparatus which concerns on embodiment. The schematic perspective view of the original fabric after cutting formation. (A) And (B) is explanatory drawing which shows the cutting point which concerns on a prior art example.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this specification, “left”, “right”, “upper”, and “lower” are used with reference to FIG. 1 unless otherwise specified.

  1 and 2, a sheet sticking apparatus 10 includes a table 11 that sucks and supports a wafer WF and a ring frame RF as adherends, and a linear motion motor 12 as a drive device that can move the table 11 in the left-right direction. A stripping sheet RL and a strip-shaped sheet WS temporarily attached to one surface of the strip-shaped sheet WS. The cut sheet CU is formed in the belt-like sheet WS, the adhesive sheet AS is formed inside the cut CU, and the unnecessary sheet US is formed outside the cut CU, and the unnecessary sheet US is wound up. The possible winding means 16, the peeling plate 18 as a peeling means for folding the release sheet RL and peeling the adhesive sheet AS from the release sheet RL, and the peeling plate 18 It is constituted by a pressing roller 19 as a pressing means for sticking an adhesive sheet AS which is to press the ring frame RF and the wafer WF. The belt-like sheet WS includes a base sheet BS and an adhesive layer AD laminated on one surface of the base sheet BS, and is temporarily attached to the release sheet RL via the adhesive layer AD. A protective sheet PS is stuck on the lower surface of the wafer WF.

  The feeding means 14 includes a support shaft 25 that supports the original fabric RS, and a first drive roller 27 and a first pinch roller 28 that sandwich the original fabric RS that is fed from the support shaft 25 and passes through the cutting means 15. The second drive roller 31 and the second pinch roller 32 that sandwich the release sheet RL after passing through the release plate 18, and the winding shaft that winds the release sheet RL after passing through the release sheet RL with a predetermined torque by a drive device (not shown). 34. The drive rollers 27 and 31 are rotatably provided via rotation motors DM1 and DM2 as drive devices.

  The cutting means 15 is disposed on the belt-like sheet WS side of the raw fabric RS to be fed out, and the die cut roller 36 as a cutter portion provided rotatably by a rotation motor DM3 as a driving device, and the raw fabric RS in between. A platen roller 37 serving as a pressure receiving portion that receives the pressing force of the die cut roller 36 and is opposed to the die cut roller 36, and the die cut roller 36 is moved in the left-right direction so that the relative distance between the die cut roller 36 and the platen roller 37 is increased. Adjustable adjustment means 38 and contact detection means 39 capable of detecting contact between the die cut roller 36 and the platen roller 37 are provided. The platen roller 37 is rotatably provided in conjunction with the die cut roller 36 by a mechanism (not shown).

  The die cut roller 36 is supported by the adjusting means 38 via the bracket 41 together with the rotation motor DM3. The die-cut roller 36 includes a closed-loop cutting blade 40 projecting from the outer peripheral surface, and is provided so that a substantially circular cut CU that is larger than the inner diameter dimension of the ring frame RF and smaller than the outer dimension dimension can be formed on the belt-like sheet WS. It has been. Further, the cutting blade 40 is provided, for example, over a range of 270 ° in the rotational direction of the die cut roller 36, the front end in the rotational direction is denoted by reference numeral 40a in FIG. 1, and the rear end is denoted by reference numeral 40b in the same figure. Show. The height of the cutting blade 40 is set to 450 μm.

  The adjusting means 38 includes an output shaft 38A connected to the bracket 41, and functions as a linear motion motor as a drive device that can move the output shaft 38A in the left-right direction, and in the direction of arrow R1 or arrow R1 in FIG. And a function as a rotation motor as a driving device capable of rotating the output shaft 38A in the opposite direction. The displacement means is constituted by a function capable of rotating the output shaft 38A in the direction of the arrow R1 in FIG. 1 or in the direction opposite to the arrow R1, and the die cut roller 36 is rotated 180 ° in the direction of the arrow R1 or in the direction opposite to the arrow R1 in FIG. By driving, the direction of the die cut roller 36 in the direction perpendicular to the paper surface in the figure can be reversed. Thereby, the region where the formation of the cutting CU is started can be changed to the rear end 40b of the cutting blade 40, and the formation of the cutting CU can be started from either the front end 40a or the rear end 40b of the cutting blade 40. Any one of them can be selectively used according to the deterioration state of the rear end 40b. Note that the displacement means may employ a rotation motor as a drive device independent of the adjustment means 38.

  The contact detection means 39 includes a sensor 45 that can detect that the platen roller 37 and the cutting blade 40 are in contact with each other by being in contact with each other. Thereby, the state where the platen roller 37 and the cutting blade 40 are insulated by the presence of the original fabric RS can be determined as a non-contact state, and the state where the platen roller 37 and the cutting blade 40 are electrically connected is in contact. It can be judged as a state.

  Here, the cutting means 15 is provided with energy applying means (not shown), and the cutting CU can be formed while applying energy to the raw fabric RS by the energy applying means. Examples of the energy applying means include a coil heater built in at least one of the die-cut roller 36 and the platen roller 37, and a blower that blows hot air from a position away from the rollers 36 and 37 to the formation position of the cut CU. An irradiation device that irradiates energy rays such as a vessel, ultraviolet rays, infrared rays, and microwaves.

  The winding means 16 is wound around the unnecessary sheet US after the cutting means 15 forms the cut CU, and peels off the unnecessary sheet US from the release sheet RL. A take-up shaft 51 for taking up the unnecessary sheet US is provided. The take-up shaft 51 is rotatably provided via a rotation motor DM4 as a drive device, and can take up the unnecessary sheet US with a predetermined torque.

  Next, a method for applying the adhesive sheet AS in the present embodiment will be described.

  First, the raw fabric RS supported by the support shaft 25 is passed between the first drive roller 27 and the first pinch roller 28 and between the die cut roller 36 and the platen roller 37. Then, the strip-like sheet WS is peeled from the release sheet RL, and the strip-like sheet WS is wound around the peeling roller 50, and then the lead end is fixed to the winding shaft 51. Further, the release sheet RL is folded at the tip of the release plate 18 to pass between the second drive roller 31 and the second pinch roller 32, and its lead end is fixed to the winding shaft 34. In the present embodiment, the belt-like sheet WS has a thickness of 100 μm, and the release sheet RL has a thickness of 25 μm. Further, the relative distance between the die cut roller 36 and the platen roller 37 is adjusted by the adjusting means 38. In this embodiment, when the cutting blade 40 forms the cutting CU, the distance between the apex of the cutting blade 40 and the outer peripheral surface of the platen roller 37 is set to 10 μm. In the present embodiment, as shown in FIG. 1, the center of the area where the cutting blade 40 is not formed in the rotation direction of the die cut roller 36 is set as the start position St of the die cut roller 36, and the start position St is set to the platen roller 37. The rotation of the die cut roller 36 is stopped in the state of approaching again.

  Then, when the raw fabric RS is fed out by interlocking the rotation motors DM1 to DM4, the cutting blade 40 forms a cut CU from the base sheet BS side to the release sheet RL side, and the strip sheet WS is cut. It is divided into an adhesive sheet AS inside the CU and an unnecessary sheet US outside the cut CU. In the process of forming the adhesive sheet AS, for example, when the cut CU partially or entirely penetrates the original fabric due to some influence, the contact detection unit 39 contacts the platen roller 37 and the cutting blade 40. And the detection signal is output to control means such as a computer or sequencer (not shown). Upon receipt of the detection signal from the contact detection means 39, the control means stops the operation of the sheet sticking apparatus 10 to an emergency stop state or notifies the operator or the like by a notification means such as sound or light. It can be carried out. Here, the control means (not shown) measures the duration of the detection signal input from the contact detection means 39 while forming one adhesive sheet AS by an internal timer, and if the duration is within a predetermined time, You may provide the time cancellation means which does not perform emergency response, such as an emergency stop. Further, a control means (not shown) counts the number of detection signals input from the contact detection means 39 while forming one adhesive sheet AS by an internal counter. If the number of inputs is within a predetermined number, an emergency stop is performed. It is also possible to provide a count canceling means that does not perform emergency response such as. The count canceling means preferably gives priority to the time canceling means.

  After the formation of the cut CU, the unrolled sheet RS is peeled off from the release sheet RL by the peeling roller 50, and the unnecessary sheet US is wound around the take-up shaft 51. At this time, since the interval between the cutting blade 40 and the platen roller 37 is set to such an extent that they do not come into contact with each other, the adhesive sheet AS is easily separated from the unnecessary sheet US, and the adhesive sheet AS together with the unnecessary sheet US is in the direction of the winding shaft 51. There is no going up together. Next, when the adhesive sheet AS of the original web RS on which the unnecessary sheet US is wound is peeled off from the front end of the release plate 18 by a predetermined amount, the front end of the adhesive sheet AS is detected by a sensor (not shown) and stopped. It becomes a state. At this time, since the cut CU surely enters the release sheet RL, the leading end of the adhesive sheet AS in the feed direction is reliably released from the release sheet RL, and is wound in the direction of the second drive roller 31 together with the release sheet RL. There is no such thing. In the standby state, as shown in FIG. 1, the die cut roller 36 has the start position St opposed to the platen roller 37, and the die cut roller 36 and The position of the platen roller 37 can be displaced in the vertical direction. According to this, the intervals between the adhesive sheets AS can be arbitrarily adjusted, and the positions thereof can be changed in the vertical direction according to the length in the feeding direction of the adhesive sheet AS. Thereafter, the ring complaint RF and the wafer WF are placed on the table 11 via a transfer means (not shown) and are sucked and held. Next, the table 11 is conveyed below the peeling plate 18 from the right side to the left side via the linear motor 12. When the table 11 is detected at a predetermined position by a sensor (not shown), the first and second drive rollers 27 and 31 are rotated in synchronism with the conveyance of the table 11 to feed out the original fabric RS, and the leading edge of the peeling plate 18 The adhesive sheet AS is peeled off. Then, the peeled adhesive sheet AS receives a pressing force by the pressing roller 19 and is attached to each upper surface of the ring claim RF and the wafer WF, and the wafer WF and the ring claim RF are integrated through the adhesive sheet AS. At this time, since the release sheet RL portion corresponding to the leading end portion in the feeding direction of the adhesive sheet AS is surely released from the adhesive sheet AS, the adhesive sheet AS with the release sheet RL portion attached thereto is affixed to the adherend. There is no such thing.

  Therefore, according to such an embodiment, since the contact between the cutting blade 40 and the platen roller 37 can be detected, even if the cutting CU partially or entirely penetrates the raw material RS. , It can be detected and emergency response such as emergency stop can be taken, and the adhesive sheet AS and the release sheet RL corresponding to the adhesive sheet AS fall off from the original RS, or the adhesive with the release sheet RL attached. It is possible to suppress the sticking failure of the adhesive sheet AS such that the sheet AS is stuck to the adherend.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

For example, the distance between the apex of the cutting blade 40 and the platen roller 37 is set to be approximately 100 μm larger than the thickness of the original fabric RS, and the tip 40 a of the cutting blade 40 is in a state of facing the platen roller 37. Then, in a state where the feeding of the raw fabric RS is stopped, the adjusting means 38 is driven, and the die cutting roller 36 is moved in the right direction to bring the cutting blade 40 and the platen roller 37 closer to each other. When the tip 40a of the cutting blade 40 and the contact portion 44 come into contact, the contact detection means 39 detects the contact and outputs a detection signal to a control means (not shown). The control means receives the detection signal from the contact detection means 39, and moves the die cut roller 36 to the adjustment means 38, for example, 10 μm leftward to send a command. From this state, it is also possible to configure the cut CU by feeding the original fabric RS in conjunction with the rotation motors DM1 to DM4.
In addition, it may be configured to perform a test cutting for forming a linear or dotted test cut TC (see FIG. 2) on the raw fabric RS before the cut CU is formed on the belt-like sheet WS. Good. In this case, similarly to the above, when the cutting blade 40 and the platen roller 37 are brought into close contact with each other in a state where the feeding of the raw fabric RS is stopped, a control means (not shown) stores the contact position. Thereafter, after the apex of the cutting blade 40 is brought into a position where it does not come into contact with the original fabric RS by the adjusting means 38, the original fabric RS is fed out by interlocking the rotation motors DM1 to DM4 to form the cut CU. When forming the cut CU, the control means performs control so that the tip 40a of the cutting blade 40 is positioned 10 μm leftward with respect to the platen roller 37 based on the previously stored contact position. The operation of forming such a test cut TC may be performed every time one adhesive sheet AS is formed, or may be performed every time a plurality of adhesive sheets AS are formed, or the die cut roller 36 or the cutting may be performed. Each time the blade 40 is replaced, it may be performed once or a plurality of times.

  Further, the contact detection means 39 can be variously modified as long as detection can be performed in the same manner as in the above embodiment. For example, a pressure sensor capable of detecting the pressing force locally applied to the platen roller 37 by the cutting blade 40 is configured, and the contact between the platen roller 37 and the cutting blade 40 is detected based on the detection result of the pressure value. Good.

  Further, the winding means 16 is omitted, the adhesive sheet AS is peeled off by the peeling plate 18 without peeling off the unnecessary sheet US from the peeling sheet RL, and the peeling sheet RL and the unnecessary sheet US are wound around the winding shaft 34. You may make it take.

  In forming the cut C, the rotation motors DM1 to DM4 are interlocked to reciprocate the original fabric RS in the feeding direction, and a plurality of cut CUs are formed for one adhesive sheet AS. You may go round.

  Furthermore, you may comprise a sheet manufacturing apparatus by abbreviate | omitting the peeling plate 18 and the press roller 19 of the said sheet sticking apparatus 10. FIG. According to the apparatus, after the adhesive sheet AS is formed by the cutting means 15 as in the above-described embodiment, the original fabric RS on which the adhesive sheet AS is temporarily attached to the release sheet RL is wound around the winding shaft 34. The raw fabric RS wound on the winding shaft 34 can be separately conveyed and stored, or used in a sheet sticking apparatus or the like that does not have a cutting means.

  Further, the planar shape of the cutting blade 40 is polygonal, oval, oval, rhombus, straight line as long as the cut CU can be formed in the belt-like sheet WS and the inside of the cut CU can be formed as the adhesive sheet AS. Various changes such as a shape combined with a curve are possible, and the height of the blade can also be arbitrarily changed.

  Further, the cutting blade 40 may use an engraving blade formed by machining, a rotary die, a flat blade having a blade formed on a flat plate, a Thomson blade, or the like in addition to etching. .

  Further, the distance between the cutting blade 40 and the platen roller 37 by the adjusting means 38 can be appropriately changed in consideration of the thickness and properties of the original fabric RS, particularly the thickness and properties of the release sheet RS.

Furthermore, various design changes can be made to the feeding means 14, the peeling plate 18, and the pressing roller 19.
Moreover, the thickness of the member which comprises original fabric RS is not limited to what was illustrated by the said embodiment at all.
In addition, a driving device for moving the sheet sticking device 10 is provided, and the sheet sticking device 10 is moved rightward in FIG. 1 or the table 11 is moved leftward while the table 11 is stopped. The apparatus 10 may be configured to stick the adhesive sheet AS to the adherend by moving the apparatus 10 in the right direction,
Further, the same adjustment means 38 as in the above embodiment is also provided on the platen roller 37 side, and with the die cut roller 36 stopped, the platen roller 37 is moved away from the die cut roller 36 or the die cut roller 36 and the platen The distance between the cutting blade 40 and the platen roller 37 may be adjusted by moving the rollers 37 apart from each other.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

  Further, the adherend may be a glass plate, a steel plate, or a resin plate instead of the wafer WF or the ring frame RF, and the semiconductor wafer may be a silicon semiconductor wafer or a compound semiconductor wafer. It may be. Further, instead of the ring frame RF, a frame having a different shape such as a C-shape or U-shape may be used, or a single adherend may be used as an attachment target of the adhesive sheet AS without the ring frame RF.

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 14 Feeding means 15 Cutting means 18 Release plate (peeling means)
19 Pressing roller (pressing means)
36 Cutter (die cut roller)
37 Pressure receiver (platen roller)
38 adjusting means 39 contact detecting means 40 cutting blade AD adhesive layer AS adhesive sheet BS base sheet CU cutting RF ring frame (adhered body)
RL Release sheet RS Original TC Cutting for test US Unnecessary sheet WF Semiconductor wafer (adhered body)
WS Strip sheet

Claims (7)

The belt-like sheet having an adhesive layer on one surface of the belt-like base material sheet is provided with a feeding means for feeding out the original fabric temporarily attached to the belt-like release sheet via the adhesive layer, and the belt-like sheet is cut into a predetermined shape. A cutting means for forming an adhesive sheet inside the cut and forming an unnecessary sheet outside the cut, and a peeling means for peeling the adhesive sheet temporarily attached to the release sheet; A sheet sticking device including a pressing means for pressing and sticking the adhesive sheet to an adherend,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. A sheet sticking device comprising: a pressure receiving portion that receives the pressing force of the pressure sensor; and contact detection means that can detect contact between the cutter portion and the pressure receiving portion.   An adjustment unit capable of adjusting an interval between the cutter unit and the pressure receiving unit is provided, and the adjustment unit is provided such that the interval can be adjusted based on a detection result of the contact detection unit. The sheet sticking apparatus according to claim 1.   The sheet sticking device according to claim 1, further comprising a displacement unit capable of changing a cutter blade region that forms a cut corresponding to a leading end portion in the feeding direction of the adhesive sheet by displacing the cutter unit.   The sheet sticking device according to claim 1 or 2, wherein the feeding means performs the cut formation a plurality of times for forming one adhesive sheet in conjunction with the cutting means. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming an unnecessary sheet on the outside of the cut,
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
In the cutting step, contact between the cutter part and the pressure receiving part is detected. A feeding means for feeding out the original fabric temporarily attached to the strip-shaped release sheet by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A sheet manufacturing apparatus including a cutting means for forming an incision having a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch and forming an unnecessary sheet outside the notch,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. A sheet manufacturing apparatus, comprising: a pressure receiving portion that receives the pressing force of the nozzle; and a contact detection means that can detect contact between the cutter portion and the pressure receiving portion. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming a unnecessary sheet on the outside of the cut,
In the cutting step, a contact between the cutter part and the pressure receiving part is detected.

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