KR20120065439A - 이산화탄소의 정화 방법 - Google Patents
이산화탄소의 정화 방법 Download PDFInfo
- Publication number
- KR20120065439A KR20120065439A KR1020127011411A KR20127011411A KR20120065439A KR 20120065439 A KR20120065439 A KR 20120065439A KR 1020127011411 A KR1020127011411 A KR 1020127011411A KR 20127011411 A KR20127011411 A KR 20127011411A KR 20120065439 A KR20120065439 A KR 20120065439A
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- KR
- South Korea
- Prior art keywords
- contaminants
- adsorbent
- oxide
- present
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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- 238000000034 method Methods 0.000 title claims abstract description 19
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims description 12
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims description 6
- 239000001569 carbon dioxide Substances 0.000 title claims description 6
- 239000000356 contaminant Substances 0.000 claims abstract description 50
- 239000003463 adsorbent Substances 0.000 claims abstract description 37
- 239000004065 semiconductor Substances 0.000 claims abstract description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 20
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 17
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 14
- 239000003344 environmental pollutant Substances 0.000 claims description 8
- 231100000719 pollutant Toxicity 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 7
- 229910003455 mixed metal oxide Inorganic materials 0.000 claims description 7
- 239000011787 zinc oxide Substances 0.000 claims description 7
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 5
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 claims description 2
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 2
- 229910001935 vanadium oxide Inorganic materials 0.000 claims description 2
- 229910000480 nickel oxide Inorganic materials 0.000 claims 4
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 1
- HBEQXAKJSGXAIQ-UHFFFAOYSA-N oxopalladium Chemical compound [Pd]=O HBEQXAKJSGXAIQ-UHFFFAOYSA-N 0.000 claims 1
- 229910003445 palladium oxide Inorganic materials 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 abstract description 41
- 239000002184 metal Substances 0.000 abstract description 41
- 238000007254 oxidation reaction Methods 0.000 abstract description 40
- 230000003647 oxidation Effects 0.000 abstract description 39
- 150000002739 metals Chemical class 0.000 abstract description 21
- 238000011069 regeneration method Methods 0.000 abstract description 17
- 230000008929 regeneration Effects 0.000 abstract description 16
- 239000012530 fluid Substances 0.000 abstract description 8
- 238000005202 decontamination Methods 0.000 abstract description 7
- 230000003588 decontaminative effect Effects 0.000 abstract description 7
- 230000000295 complement effect Effects 0.000 abstract description 3
- 230000009467 reduction Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 45
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 22
- 229910052760 oxygen Inorganic materials 0.000 description 22
- 239000001301 oxygen Substances 0.000 description 22
- 239000007789 gas Substances 0.000 description 16
- 238000006243 chemical reaction Methods 0.000 description 12
- 238000000746 purification Methods 0.000 description 11
- 238000001179 sorption measurement Methods 0.000 description 10
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 9
- 229910052717 sulfur Inorganic materials 0.000 description 9
- 239000011593 sulfur Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 8
- 238000001994 activation Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 229910001868 water Inorganic materials 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 230000004913 activation Effects 0.000 description 6
- -1 particulates Chemical class 0.000 description 6
- 229930195733 hydrocarbon Natural products 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 238000010926 purge Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910052720 vanadium Inorganic materials 0.000 description 3
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 3
- 239000010457 zeolite Substances 0.000 description 3
- IKHGUXGNUITLKF-UHFFFAOYSA-N Acetaldehyde Chemical compound CC=O IKHGUXGNUITLKF-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000005470 impregnation Methods 0.000 description 2
- 229910052809 inorganic oxide Inorganic materials 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000003446 ligand Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229910000314 transition metal oxide Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QCJQWJKKTGJDCM-UHFFFAOYSA-N [P].[S] Chemical compound [P].[S] QCJQWJKKTGJDCM-UHFFFAOYSA-N 0.000 description 1
- KSECJOPEZIAKMU-UHFFFAOYSA-N [S--].[S--].[S--].[S--].[S--].[V+5].[V+5] Chemical class [S--].[S--].[S--].[S--].[S--].[V+5].[V+5] KSECJOPEZIAKMU-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 235000013361 beverage Nutrition 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 150000004696 coordination complex Chemical class 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000007323 disproportionation reaction Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- PPNAOCWZXJOHFK-UHFFFAOYSA-N manganese(2+);oxygen(2-) Chemical class [O-2].[Mn+2] PPNAOCWZXJOHFK-UHFFFAOYSA-N 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- OIGNJSKKLXVSLS-VWUMJDOOSA-N prednisolone Chemical compound O=C1C=C[C@]2(C)[C@H]3[C@@H](O)C[C@](C)([C@@](CC4)(O)C(=O)CO)[C@@H]4[C@@H]3CCC2=C1 OIGNJSKKLXVSLS-VWUMJDOOSA-N 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- WWNBZGLDODTKEM-UHFFFAOYSA-N sulfanylidenenickel Chemical class [Ni]=S WWNBZGLDODTKEM-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/62—Carbon oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/06—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/30—Processes for preparing, regenerating, or reactivating
- B01J20/34—Regenerating or reactivating
- B01J20/3433—Regenerating or reactivating of sorbents or filter aids other than those covered by B01J20/3408 - B01J20/3425
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/30—Processes for preparing, regenerating, or reactivating
- B01J20/34—Regenerating or reactivating
- B01J20/345—Regenerating or reactivating using a particular desorbing compound or mixture
- B01J20/3458—Regenerating or reactivating using a particular desorbing compound or mixture in the gas phase
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/30—Processes for preparing, regenerating, or reactivating
- B01J20/34—Regenerating or reactivating
- B01J20/3483—Regenerating or reactivating by thermal treatment not covered by groups B01J20/3441 - B01J20/3475, e.g. by heating or cooling
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/50—Carbon dioxide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
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- B01D2253/10—Inorganic adsorbents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/22—Carbon dioxide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/104—Oxygen
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01D2257/308—Carbonoxysulfide COS
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/40—Nitrogen compounds
- B01D2257/404—Nitrogen oxides other than dinitrogen oxide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01D2257/406—Ammonia
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
- B01D2257/702—Hydrocarbons
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/80—Water
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/402—Further details for adsorption processes and devices using two beds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2220/00—Aspects relating to sorbent materials
- B01J2220/40—Aspects relating to the composition of sorbent or filter aid materials
- B01J2220/42—Materials comprising a mixture of inorganic materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/40—Capture or disposal of greenhouse gases of CO2
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Carbon And Carbon Compounds (AREA)
- Separation Of Gases By Adsorption (AREA)
- Gas Separation By Absorption (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US41939002P | 2002-10-17 | 2002-10-17 | |
| US60/419,390 | 2002-10-17 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020057006556A Division KR101263494B1 (ko) | 2002-10-17 | 2003-10-16 | 이산화탄소의 정화 방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20120065439A true KR20120065439A (ko) | 2012-06-20 |
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| KR1020057006556A Expired - Lifetime KR101263494B1 (ko) | 2002-10-17 | 2003-10-16 | 이산화탄소의 정화 방법 |
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| KR (2) | KR20120065439A (https=) |
| CN (1) | CN1705504B (https=) |
| AU (1) | AU2003286455A1 (https=) |
| TW (1) | TWI347302B (https=) |
| WO (1) | WO2004035178A1 (https=) |
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| US20070028772A1 (en) * | 2005-08-08 | 2007-02-08 | Ravi Jain | Method and system for purifying a gas |
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| JP4728837B2 (ja) * | 2006-02-24 | 2011-07-20 | 日本電信電話株式会社 | 水素供給システム |
| JP4728843B2 (ja) * | 2006-03-09 | 2011-07-20 | 日本電信電話株式会社 | 水素供給方法 |
| JP4728846B2 (ja) * | 2006-03-14 | 2011-07-20 | 日本電信電話株式会社 | 電解セル及び水素供給システム |
| ES2327457T3 (es) * | 2006-04-06 | 2009-10-29 | Linde Ag | Limpieza en baños multiples de co2. |
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| FR2945036B1 (fr) * | 2009-04-29 | 2011-07-15 | Inst Francais Du Petrole | Oxydes mixtes fer-manganese pour la production d'oxygene a haute temperature |
| US20100290977A1 (en) * | 2009-05-15 | 2010-11-18 | Bowers Charles W | Method of removing hydrocarbon impurities from a gas |
| CN102695670B (zh) | 2009-09-08 | 2016-02-24 | 俄亥俄州立大学研究基金会 | 具有集成的碳捕集的重整/水裂解和用于发电的电化学系统的集成 |
| AU2010292310B2 (en) | 2009-09-08 | 2017-01-12 | The Ohio State University Research Foundation | Synthetic fuels and chemicals production with in-situ CO2 capture |
| EP2637777A1 (en) | 2010-11-08 | 2013-09-18 | The Ohio State University | Circulating fluidized bed with moving bed downcomers and gas sealing between reactors |
| JP5713694B2 (ja) * | 2011-01-17 | 2015-05-07 | 住友精化株式会社 | メタン回収方法およびメタン回収装置 |
| CN103635673B (zh) | 2011-05-11 | 2016-05-04 | 俄亥俄州国家创新基金会 | 载氧材料 |
| WO2012155054A1 (en) | 2011-05-11 | 2012-11-15 | The Ohio State University | Systems for converting fuel |
| US20130145773A1 (en) * | 2011-12-13 | 2013-06-13 | General Electric Company | Method and system for separating co2 from n2 and o2 in a turbine engine system |
| JP6067368B2 (ja) * | 2012-12-21 | 2017-01-25 | オルガノ株式会社 | 吸着材の再生装置、吸着材の再生方法、二酸化炭素精製装置、および二酸化炭素精製方法 |
| EP2953892B1 (en) | 2013-02-05 | 2023-04-05 | Ohio State Innovation Foundation | Methods for fuel conversion |
| US20160023190A1 (en) * | 2013-03-13 | 2016-01-28 | Ohio State Innovation Foundation | Oxygen carrying materials and methods for making the same |
| US9616403B2 (en) | 2013-03-14 | 2017-04-11 | Ohio State Innovation Foundation | Systems and methods for converting carbonaceous fuels |
| EP3057684B1 (en) | 2013-10-16 | 2018-03-21 | Saudi Basic Industries Corporation | Process for the removal of chlorinated hydrocarbons from co2 |
| EP3057703A1 (en) | 2013-10-16 | 2016-08-24 | Saudi Basic Industries Corporation | Purification of carbon dioxide streams |
| US20150238915A1 (en) | 2014-02-27 | 2015-08-27 | Ohio State Innovation Foundation | Systems and methods for partial or complete oxidation of fuels |
| WO2015136416A1 (en) | 2014-03-14 | 2015-09-17 | Saes Getters S.P.A. | System and method for ultra high purity (uhp) carbon dioxide purification |
| FR3037505A1 (fr) * | 2015-06-19 | 2016-12-23 | Air Liquide | Procede et installation de recuperation d'hydrocarbures utilisant des fumees industrielles riches en co2 |
| CN109195696B (zh) | 2016-04-12 | 2022-04-26 | 俄亥俄州立创新基金会 | 从含碳燃料化学循环生产合成气 |
| WO2019027972A1 (en) | 2017-07-31 | 2019-02-07 | Ohio State Innovation Foundation | REACTOR SYSTEM WITH UNEQUAL OPERATING PRESSURE OF REACTOR ASSEMBLY |
| US10549236B2 (en) | 2018-01-29 | 2020-02-04 | Ohio State Innovation Foundation | Systems, methods and materials for NOx decomposition with metal oxide materials |
| WO2020033500A1 (en) | 2018-08-09 | 2020-02-13 | Ohio State Innovation Foundation | Systems, methods and materials for hydrogen sulfide conversion |
| CA3125491A1 (en) | 2019-01-17 | 2020-07-23 | Ohio State Innovation Foundation | Systems, methods and materials for stable phase syngas generation |
| JP7423320B2 (ja) * | 2019-02-08 | 2024-01-29 | 大阪瓦斯株式会社 | 二酸化炭素を主成分とするガス中の硫黄酸化物の除去方法 |
| US11453626B2 (en) | 2019-04-09 | 2022-09-27 | Ohio State Innovation Foundation | Alkene generation using metal sulfide particles |
| EP4010115A4 (en) | 2019-08-19 | 2023-07-19 | Ohio State Innovation Foundation | IMMOBILIZED METAL OXIDE NANOPARTICLES ON A MESOPOROUS SUPPORT |
| WO2021046156A1 (en) | 2019-09-03 | 2021-03-11 | Ohio State Innovation Foundation | Redox reaction facilitated carbon dioxide capture from flue gas and conversion to carbon monoxide |
| JP7616840B2 (ja) * | 2019-09-24 | 2025-01-17 | 積水化学工業株式会社 | ガス製造装置、ガス製造システムおよびガス製造方法 |
| EP4164786A4 (en) | 2020-06-29 | 2024-07-10 | Ohio State Innovation Foundation | SYSTEMS AND METHODS FOR HIGH REAGENT CONVERSION BY MULTIPLE SEPARATION FOR REAGENT FLOW REGULATION |
| KR102444842B1 (ko) * | 2020-07-29 | 2022-09-21 | 디아이지에어가스 주식회사 | 초고순도 전자급 이산화탄소 생산 장치 |
| KR102318490B1 (ko) * | 2021-04-13 | 2021-10-29 | 주식회사 하이퓨리티 | 이산화탄소 가스의 정제유닛 및 정제방법 |
| CN116651402B (zh) * | 2023-07-07 | 2024-04-05 | 中国矿业大学 | 一种整体式co2吸附剂及其制备方法与应用 |
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| KR20030072541A (ko) * | 2002-03-04 | 2003-09-15 | 한국화학연구원 | 이산화탄소 산화제를 사용한 알킬방향족 탄화수소의탈수소화 방법 |
| US20040076575A1 (en) * | 2002-10-17 | 2004-04-22 | Daniel Alvarez | Method of restricted purification of carbon dioxide |
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2003
- 2003-10-16 AU AU2003286455A patent/AU2003286455A1/en not_active Abandoned
- 2003-10-16 TW TW092128714A patent/TWI347302B/zh not_active IP Right Cessation
- 2003-10-16 WO PCT/US2003/033006 patent/WO2004035178A1/en not_active Ceased
- 2003-10-16 JP JP2004545470A patent/JP5191626B2/ja not_active Expired - Lifetime
- 2003-10-16 CN CN2003801016223A patent/CN1705504B/zh not_active Expired - Lifetime
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- 2003-10-16 EP EP03777652A patent/EP1551531A1/en not_active Withdrawn
- 2003-10-16 KR KR1020057006556A patent/KR101263494B1/ko not_active Expired - Lifetime
- 2003-10-16 US US10/531,512 patent/US7381243B2/en not_active Expired - Lifetime
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2011
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| EP1551531A1 (en) | 2005-07-13 |
| JP5662295B2 (ja) | 2015-01-28 |
| CN1705504A (zh) | 2005-12-07 |
| KR101263494B1 (ko) | 2013-05-13 |
| CN1705504B (zh) | 2013-10-16 |
| KR20050055766A (ko) | 2005-06-13 |
| AU2003286455A1 (en) | 2004-05-04 |
| JP2006502957A (ja) | 2006-01-26 |
| TWI347302B (en) | 2011-08-21 |
| JP5191626B2 (ja) | 2013-05-08 |
| JP2012102006A (ja) | 2012-05-31 |
| WO2004035178A1 (en) | 2004-04-29 |
| TW200417512A (en) | 2004-09-16 |
| US20050265912A1 (en) | 2005-12-01 |
| US7381243B2 (en) | 2008-06-03 |
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