KR20100017827A - 전자부품 시험장치 - Google Patents

전자부품 시험장치 Download PDF

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Publication number
KR20100017827A
KR20100017827A KR1020097026216A KR20097026216A KR20100017827A KR 20100017827 A KR20100017827 A KR 20100017827A KR 1020097026216 A KR1020097026216 A KR 1020097026216A KR 20097026216 A KR20097026216 A KR 20097026216A KR 20100017827 A KR20100017827 A KR 20100017827A
Authority
KR
South Korea
Prior art keywords
test
electronic component
tray
under test
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020097026216A
Other languages
English (en)
Korean (ko)
Inventor
마코토 사가와
Original Assignee
가부시키가이샤 아드반테스트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아드반테스트 filed Critical 가부시키가이샤 아드반테스트
Publication of KR20100017827A publication Critical patent/KR20100017827A/ko
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Packaging Frangible Articles (AREA)
KR1020097026216A 2006-10-04 2006-10-04 전자부품 시험장치 Withdrawn KR20100017827A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/319870 WO2008041334A1 (en) 2006-10-04 2006-10-04 Electronic component testing apparatus

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020077024582A Division KR100942527B1 (ko) 2006-10-04 2006-10-04 전자부품 시험장치

Publications (1)

Publication Number Publication Date
KR20100017827A true KR20100017827A (ko) 2010-02-16

Family

ID=39268202

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020097026216A Withdrawn KR20100017827A (ko) 2006-10-04 2006-10-04 전자부품 시험장치
KR1020077024582A Active KR100942527B1 (ko) 2006-10-04 2006-10-04 전자부품 시험장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020077024582A Active KR100942527B1 (ko) 2006-10-04 2006-10-04 전자부품 시험장치

Country Status (5)

Country Link
JP (1) JPWO2008041334A1 (enrdf_load_stackoverflow)
KR (2) KR20100017827A (enrdf_load_stackoverflow)
CN (1) CN101258415B (enrdf_load_stackoverflow)
TW (1) TW200821599A (enrdf_load_stackoverflow)
WO (1) WO2008041334A1 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150041682A (ko) * 2013-10-08 2015-04-17 (주)테크윙 테스트핸들러
KR20190082173A (ko) * 2019-06-20 2019-07-09 (주)테크윙 테스트핸들러
KR102762417B1 (ko) * 2023-11-21 2025-02-05 한미반도체 주식회사 본딩장치
KR102779986B1 (ko) * 2023-11-21 2025-03-13 한미반도체 주식회사 본딩장치

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101499573B1 (ko) * 2010-06-16 2015-03-10 (주)테크윙 테스트핸들러에서의 반도체소자 언로딩방법
JP2013044684A (ja) * 2011-08-25 2013-03-04 Seiko Epson Corp ハンドラー、及び部品検査装置
JP2013137285A (ja) * 2011-12-28 2013-07-11 Advantest Corp ピッチ変更装置、電子部品ハンドリング装置、及び電子部品試験装置
JP2013137284A (ja) 2011-12-28 2013-07-11 Advantest Corp 電子部品移載装置、電子部品ハンドリング装置、及び電子部品試験装置
JP2014224785A (ja) * 2013-05-17 2014-12-04 セイコーエプソン株式会社 ハンドラーおよび検査装置
JP2014228297A (ja) * 2013-05-20 2014-12-08 セイコーエプソン株式会社 ハンドラーおよび検査装置
CN104133173B (zh) * 2014-08-14 2017-02-01 潍坊路加精工有限公司 一种全自动测试装置
KR20160109484A (ko) 2015-03-11 2016-09-21 가부시키가이샤 어드밴티스트 반송 캐리어, 반송 장치, 및 베이스부
CN106405369A (zh) * 2015-07-31 2017-02-15 精工爱普生株式会社 电子部件输送装置以及电子部件检查装置
CN106813888B (zh) * 2015-11-27 2019-01-04 环维电子(上海)有限公司 冲击试验模块及其测试板
KR20170078209A (ko) * 2015-12-29 2017-07-07 (주)테크윙 반도체소자 테스트용 핸들러
JP2020012748A (ja) * 2018-07-19 2020-01-23 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06302670A (ja) * 1993-04-15 1994-10-28 Hitachi Electron Eng Co Ltd 小形角型ワーク用非接触吸着ヘッド
JP2001004702A (ja) * 1999-06-22 2001-01-12 Advantest Corp 半導体試験装置のｉｃハンドラ装置
KR100349942B1 (ko) * 1999-12-06 2002-08-24 삼성전자 주식회사 램버스 핸들러
JP2001264387A (ja) * 2000-03-16 2001-09-26 Nippon Eng Kk バーンインボード用ローダアンローダ装置における吸着ヘッドおよびその制御システム
AU2003242260A1 (en) * 2003-06-06 2005-01-04 Advantest Corporation Transport device, electronic component handling device, and transporting method for electronic component handling device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150041682A (ko) * 2013-10-08 2015-04-17 (주)테크윙 테스트핸들러
KR20190082173A (ko) * 2019-06-20 2019-07-09 (주)테크윙 테스트핸들러
KR102762417B1 (ko) * 2023-11-21 2025-02-05 한미반도체 주식회사 본딩장치
KR102779986B1 (ko) * 2023-11-21 2025-03-13 한미반도체 주식회사 본딩장치

Also Published As

Publication number Publication date
TWI345063B (enrdf_load_stackoverflow) 2011-07-11
WO2008041334A1 (en) 2008-04-10
TW200821599A (en) 2008-05-16
KR100942527B1 (ko) 2010-02-12
CN101258415B (zh) 2011-01-19
JPWO2008041334A1 (ja) 2010-02-04
KR20080057206A (ko) 2008-06-24
CN101258415A (zh) 2008-09-03

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Legal Events

Date Code Title Description
A107 Divisional application of patent
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20091216

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid