KR20080059303A - 진공장치용 구분 밸브 - Google Patents
진공장치용 구분 밸브 Download PDFInfo
- Publication number
- KR20080059303A KR20080059303A KR1020087011463A KR20087011463A KR20080059303A KR 20080059303 A KR20080059303 A KR 20080059303A KR 1020087011463 A KR1020087011463 A KR 1020087011463A KR 20087011463 A KR20087011463 A KR 20087011463A KR 20080059303 A KR20080059303 A KR 20080059303A
- Authority
- KR
- South Korea
- Prior art keywords
- valve
- mgo
- movable shield
- opening
- chamber
- Prior art date
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Details Of Valves (AREA)
- Sliding Valves (AREA)
Abstract
Description
Claims (3)
- 진공장치의 처리실과 전자총부 사이를 구분하는 밸브에서, 서로 대향하는 측벽부에 각각 개구를 구비한 밸브박스와, 상기 개구를 개폐하는 밸브본체와, 밸브 개방시에 상기 개구의 처리실측에서 상기 밸브박스 내로 삽입되는 왕복운동자재한 통상의 가동 쉴드와, 상기 가동 쉴드의 선단부와 당접 가능하여 상기 개구의 전자총부측에 설치된 멈춤부재와, 상기 가동 쉴드를 왕복운동시키는 구동수단으로 이루어지고, 상기 가동 쉴드 선단부와 상기 멈춤부재를 상기 구동수단에 의해 근접시키는 것으로 상기 가동 쉴드 안쪽측과 상기 밸브박스내가 분위기 분리되는 것을 특징으로 하는 진공장치용 구분 밸브.
- 제1항에 있어서, 상기 가동 쉴드는 냉각하는 기구를 가지는 것을 특징으로 하는 진공장치용 구분 밸브.
- 제 1항에 있어서, 상기 가동 쉴드와 상기 멈춤부재가 당접하는 개소에 씰재가 사용되고, 그 씰재가 극연강, 연강, 순철, 동, 알루미늄, 아연, 납, 주석 중 선택되는 어느 하나인 것을 특징으로 하는 진공장치용 구분 밸브.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005351071 | 2005-12-05 | ||
JPJP-P-2005-00351071 | 2005-12-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080059303A true KR20080059303A (ko) | 2008-06-26 |
KR101014776B1 KR101014776B1 (ko) | 2011-02-14 |
Family
ID=38122685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020087011463A KR101014776B1 (ko) | 2005-12-05 | 2006-11-28 | 진공장치용 구분 밸브 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8028972B2 (ko) |
JP (1) | JP4824700B2 (ko) |
KR (1) | KR101014776B1 (ko) |
CN (1) | CN101321888B (ko) |
DE (1) | DE112006003294B4 (ko) |
RU (1) | RU2376399C1 (ko) |
TW (1) | TWI402369B (ko) |
WO (1) | WO2007066537A1 (ko) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5044366B2 (ja) * | 2007-11-02 | 2012-10-10 | 株式会社ブイテックス | 真空ゲートバルブおよびこれを使用したゲート開閉方法 |
JP5224363B2 (ja) * | 2007-11-30 | 2013-07-03 | 古河電気工業株式会社 | 連続鋳造中の溶融金属の成分調製方法及びその装置 |
JP5490435B2 (ja) * | 2009-03-31 | 2014-05-14 | 東京エレクトロン株式会社 | ゲートバルブ装置 |
US8877001B2 (en) * | 2009-05-07 | 2014-11-04 | Applied Materials, Inc. | Shuttered gate valve |
US9310016B2 (en) | 2010-04-05 | 2016-04-12 | Power Associates International, Inc. | Pig receiver assembly |
US8689384B2 (en) | 2010-04-05 | 2014-04-08 | Power Associates International, Inc. | Pig receiver assembly |
US9593794B2 (en) | 2010-04-05 | 2017-03-14 | Power Associates International, Inc. | Pig receiver assembly |
US20120168662A1 (en) * | 2010-12-30 | 2012-07-05 | Varian Semiconductor Equipment Associates, Inc. | Vacuum valve with protected sealing surface |
KR101528458B1 (ko) * | 2013-01-18 | 2015-06-18 | (주) 유앤아이솔루션 | 슬라이딩 역압 차단 밸브 |
DE102013005868A1 (de) * | 2013-04-05 | 2014-10-09 | Leybold Optics Gmbh | Vorrichtung zur Vakuumbehandlung von Substraten |
WO2019194067A1 (ja) * | 2018-04-02 | 2019-10-10 | 株式会社アルバック | 仕切弁 |
ES2746360B2 (es) * | 2018-09-05 | 2021-06-11 | Mecanizados Esferimec S L | Valvula pivotante para regular el flujo de un fluido y procedimiento para regular el flujo de un fluido |
JP6861760B2 (ja) * | 2019-06-20 | 2021-04-21 | 株式会社アルバック | 仕切りバルブ |
CN110712338B (zh) * | 2019-10-18 | 2021-08-13 | 河源联达真空镀膜有限责任公司 | 一种镀膜塑料餐具生产工艺 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
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US2109042A (en) * | 1935-06-17 | 1938-02-22 | Clifford W Bennett | Gate valve |
US2134324A (en) * | 1937-12-14 | 1938-10-25 | Brackett Newell | Dry graphite lubricated fabric packing |
US3557822A (en) * | 1969-05-08 | 1971-01-26 | Clyde H Chronister | Gate valve |
US3665953A (en) * | 1971-01-22 | 1972-05-30 | Chronister Valve Co Inc | Gate valve |
JPS5134768B2 (ko) * | 1971-12-08 | 1976-09-28 | ||
US3799188A (en) * | 1973-01-26 | 1974-03-26 | Chronister Dev Inc | Valve |
GB1529234A (en) * | 1974-12-05 | 1978-10-18 | Rappold & Co Gmbh Hermann | Slide dampers |
JPS5918210Y2 (ja) * | 1979-01-26 | 1984-05-26 | 東京瓦斯株式会社 | 気密バルブ保護装置 |
JPS55109169A (en) * | 1979-02-09 | 1980-08-22 | Citizen Watch Co Ltd | Manufacture of yoke of pulse motor for watch |
JPS61272375A (ja) * | 1985-05-29 | 1986-12-02 | Hitachi Ltd | 薄膜形成装置 |
JPS6293467A (ja) * | 1985-10-21 | 1987-04-28 | Honda Motor Co Ltd | 内燃エンジンの吸入空気量制御用電磁弁のソレノイド電流制御方法 |
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JPH0274671A (ja) * | 1988-09-08 | 1990-03-14 | Kawasaki Steel Corp | 耐酸化性炭素繊維強化炭素材料およびその製造方法 |
JPH0274671U (ko) * | 1988-11-28 | 1990-06-07 | ||
US5062445A (en) * | 1990-08-24 | 1991-11-05 | Triten Corporation | Water cooled gate valve |
JPH04106583A (ja) * | 1990-08-27 | 1992-04-08 | Tokyo Electric Co Ltd | 電子機器用表示装置 |
JPH0772340B2 (ja) * | 1992-01-28 | 1995-08-02 | スタンレー電気株式会社 | 真空蒸着装置 |
JP2541116B2 (ja) * | 1993-07-31 | 1996-10-09 | 日本電気株式会社 | 真空ゲ―トバルブ |
JPH0758832A (ja) | 1993-08-17 | 1995-03-03 | Canon Inc | 電話端末 |
JPH07258832A (ja) * | 1994-03-25 | 1995-10-09 | Toppan Printing Co Ltd | 真空蒸着装置用電子銃およびそれを備えた真空蒸着装置 |
JP2000145980A (ja) | 1998-11-12 | 2000-05-26 | Shimadzu Corp | ゲート弁 |
US6448567B1 (en) * | 2000-04-25 | 2002-09-10 | Varian Semiconductor Equipment Associates, Inc. | Method and apparatus for shielding a valve gate and other valve parts |
US7064491B2 (en) * | 2000-11-30 | 2006-06-20 | Semequip, Inc. | Ion implantation system and control method |
JP4106583B2 (ja) * | 2001-02-05 | 2008-06-25 | 株式会社ケンウッド | 記録・再生システム及び方法 |
JP2003185035A (ja) * | 2001-12-12 | 2003-07-03 | Smc Corp | ゲートバルブ |
JP2004360754A (ja) | 2003-06-03 | 2004-12-24 | Nippon Valqua Ind Ltd | 真空用ゲート弁 |
JP2005133865A (ja) * | 2003-10-31 | 2005-05-26 | Ulvac Japan Ltd | 真空ゲートバルブ |
JP4038473B2 (ja) * | 2003-11-18 | 2008-01-23 | スタンレー電気株式会社 | アーク放電型真空成膜装置および成膜方法 |
-
2006
- 2006-11-28 US US12/084,714 patent/US8028972B2/en not_active Expired - Fee Related
- 2006-11-28 KR KR1020087011463A patent/KR101014776B1/ko active IP Right Grant
- 2006-11-28 DE DE112006003294.1T patent/DE112006003294B4/de active Active
- 2006-11-28 CN CN200680045212.5A patent/CN101321888B/zh active Active
- 2006-11-28 WO PCT/JP2006/323682 patent/WO2007066537A1/ja active Application Filing
- 2006-11-28 RU RU2008127410/02A patent/RU2376399C1/ru not_active IP Right Cessation
- 2006-11-28 JP JP2007549078A patent/JP4824700B2/ja not_active Expired - Fee Related
- 2006-12-05 TW TW095145093A patent/TWI402369B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US8028972B2 (en) | 2011-10-04 |
DE112006003294T5 (de) | 2008-10-23 |
DE112006003294B4 (de) | 2019-02-21 |
JP4824700B2 (ja) | 2011-11-30 |
CN101321888A (zh) | 2008-12-10 |
WO2007066537A1 (ja) | 2007-06-14 |
US20090250648A1 (en) | 2009-10-08 |
KR101014776B1 (ko) | 2011-02-14 |
CN101321888B (zh) | 2015-01-21 |
TW200728486A (en) | 2007-08-01 |
RU2376399C1 (ru) | 2009-12-20 |
TWI402369B (zh) | 2013-07-21 |
JPWO2007066537A1 (ja) | 2009-05-14 |
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