KR20060006389A - Method of manufacturing surface-treated copper foil for pcb having fine-circuit pattern and surface-treated copper foil thereof - Google Patents

Method of manufacturing surface-treated copper foil for pcb having fine-circuit pattern and surface-treated copper foil thereof Download PDF

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KR20060006389A
KR20060006389A KR1020040055382A KR20040055382A KR20060006389A KR 20060006389 A KR20060006389 A KR 20060006389A KR 1020040055382 A KR1020040055382 A KR 1020040055382A KR 20040055382 A KR20040055382 A KR 20040055382A KR 20060006389 A KR20060006389 A KR 20060006389A
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copper foil
layer
treated copper
forming
adhesive strength
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KR1020040055382A
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KR100654737B1 (en
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류종호
정승량
김상범
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일진소재산업주식회사
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Priority to JP2004236952A priority patent/JP2006028635A/en
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

본 발명은 미세회로패턴을 가지는 기판의 제조에 적합한 미세회로기판용 표면처리동박의 제조방법에 관한 것으로서,The present invention relates to a method for manufacturing a surface-treated copper foil for a microcircuit board suitable for the production of a substrate having a microcircuit pattern.

Co, Ni과, 암모늄염 및 구연산을 포함하는 전해도금욕에 동박을 음극으로 배치하고, 표면조도가 0.5㎛ 이하가 되도록 상기 동박 표면상에 Co-Ni합금의 조화처리층을 석출형성하는 단계와; 상기 조화처리층 위에 순수 Zn 또는 Zn합금 피막층을 형성하는 단계와; 상기 피막층 위에 전해 크로메이트층을 형성하는 단계와; 상기 전해 크로메이트층 위에 실란커플링제처리층을 형성하는 단계와; 를 포함하여 구성되는 것을 특징으로 한다.Placing copper foil as a cathode in an electroplating bath containing Co, Ni, ammonium salt and citric acid, and depositing a roughened layer of Co—Ni alloy on the surface of the copper foil so that the surface roughness is 0.5 μm or less; Forming a pure Zn or Zn alloy coating layer on the roughened layer; Forming an electrolytic chromate layer on the coating layer; Forming a silane coupling agent treatment layer on the electrolytic chromate layer; Characterized in that comprises a.

본 발명의 제조방법에 의하여 제조된 표면처리동박은, 기판과의 접착강도 및 내열접착강도, 내약품성, 에칭성 등의 동박으로서의 요구특성이 전반적으로 우수하여, 미세회로기판용 동박으로서 아주 적합하다.The surface-treated copper foil produced by the manufacturing method of the present invention is excellent in overall required properties as a copper foil such as adhesive strength with the substrate, heat-resistant adhesive strength, chemical resistance, and etching resistance, and is very suitable as a copper foil for a microcircuit board. .

미세회로기판, 암모늄염, 구연산, 접착강도, 내약품성, 에칭성, 실란커플링제Microcircuit Board, Ammonium Salt, Citric Acid, Adhesive Strength, Chemical Resistance, Etchability, Silane Coupling Agent

Description

미세회로기판용 표면처리동박의 제조방법 및 그 동박{Method of manufacturing Surface-treated Copper Foil for PCB having fine-circuit pattern and Surface-treated Copper Foil thereof}Method for manufacturing surface-treated copper foil for PCB having fine-circuit pattern and surface-treated copper foil

본 발명은 인쇄회로기판용 표면처리동박에 관한 것으로, 특히 회로폭이 20㎛ 이하인 미세회로패턴을 가지는 기판의 제조에 적합한 미세회로기판용 표면처리동박의 제조방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to surface-treated copper foil for printed circuit boards, and more particularly, to a method for producing a surface-treated copper foil for microcircuit boards suitable for the production of a substrate having a fine circuit pattern having a circuit width of 20 µm or less.

종래부터, 표면처리동박은 전기, 전자산업의 분야에서 사용되는 인쇄회로기판의 기초재료로서 널리 사용되어 왔다. 일반적으로, 상기 표면처리동박은 열간 프레스 성형으로 유리-에폭시 기재(基材), 페놀 기재, 폴리이미드 등의 고분자 절연기재와 맞붙여 동 클래드 적층판으로 하여, 인쇄회로기판 제조에 사용된다.Background Art Conventionally, surface-treated copper foil has been widely used as a base material of printed circuit boards used in the fields of the electric and electronic industries. In general, the surface-treated copper foil is used in the manufacture of a printed circuit board by joining a polymer insulating substrate such as a glass-epoxy substrate, a phenol substrate, a polyimide, or the like by hot press molding.

이러한 동박에 요구되는 가장 기본적인 특성으로서, 동박과 절연기재 기판간의 접착강도가 우수할 것이 요구된다. 특히, 동박은 절연기재와 가열 가압하고 적층한 직후 뿐 아니라, 이후의 후처리공정에서의 다양한 처리를 거친 후에도 접착강도를 요구특성 이상으로 유지해야만 한다. 그러기 위해서는, 산이나 알칼리 등에 대한 내약품성, 내열성 등이 우수해야 한다. 또한, 동 회로패턴을 형성하여 프린트 배선판으로 하기 위한 에칭과정에 있어서, 에칭 잔류물질이 비(非)패턴부분에 잔류하지 않는 등 에칭성도 우수할 것이 요구된다. As the most basic characteristic required for such a copper foil, it is required to have excellent adhesive strength between the copper foil and the insulating base substrate. In particular, the copper foil must maintain the adhesive strength above the required characteristics not only immediately after heating and pressing and laminating with an insulating substrate, but also after various treatments in subsequent post-processing steps. To this end, the chemical resistance, heat resistance, and the like to acids, alkalis, and the like should be excellent. In addition, in the etching process for forming the circuit pattern to form a printed wiring board, it is required that the etching residual material be excellent in etching property such as not remaining in the non-pattern portion.

동박의 접착강도를 개선하기 위해서는, 동박 표면에 미세동입자를 석출시키는 이른바 조화(粗化)처리를 함으로써, 동박면의 표면적을 증대시키는 공정이 통상 사용되고 있다. 그러나, 단순한 조화처리만으로는, 접착강도를 개선시킬 수는 있다고 하더라도, 이후 공정에서 각종 화학약품이나 열에 의하여 접착강도가 열화되는 것을 막지는 못한다. 이를 극복하기 위해서, 상기 조화처리 후에 아연층 피막을 형성하고, 전해 크로메이트층 및 실란커플링제처리층의 방청처리층을 형성시키는 등 다양한 후처리공정이 행해지게 된다.In order to improve the adhesive strength of copper foil, the process of increasing the surface area of copper foil surface is normally used by performing what is called roughening process which precipitates fine copper particle on the copper foil surface. However, even if the roughening treatment alone can improve the adhesive strength, it does not prevent the adhesive strength from being degraded by various chemicals or heat in subsequent processes. In order to overcome this, various post-treatment steps are performed, such as forming a zinc film after the roughening treatment, and forming an anti-corrosive treatment layer of an electrolytic chromate layer and a silane coupling agent treatment layer.

한편, 최근 전자부품의 고밀도화, 고성능화, 소형화로 인하여 사용되는 기판회로도 고밀도화되고 이에 따라 회로폭의 미세화가 요구되고 있다. 이 때문에, 인쇄회로기판용 동박도 이러한 미세회로폭 패턴을 형성하기에 적합하도록 미세한 조도를 가질 것이 요구된다. On the other hand, in recent years, due to the high density, high performance, and miniaturization of electronic components, substrate circuits used are also high in density and accordingly, miniaturization of circuit widths is required. For this reason, copper foil for printed circuit boards is also required to have fine roughness so as to be suitable for forming such a fine circuit width pattern.

그런데, 조화처리층의 조도가 미세해지면, 동박 표면의 접착강도가 떨어질 뿐 아니라, 상기 동박에 요구되는 제반 요구특성도 달성하기 곤란하다는 모순이 발생한다.However, when the roughness of the roughened layer becomes fine, there is a contradiction that not only the adhesive strength of the surface of the copper foil is lowered, but also the required properties required for the copper foil are difficult to be achieved.

따라서, 미세조도를 가지면서도, 동박에 요구되는 제반 특성을 개선하기 위하여, 많은 연구가 행해지고 있다. 예컨대, Cu-Ni계(일본특개소 52-145769호 및 특개소 55-058502호), Cu-Co계(일본특개소 58-028893호, 특개평 2-292895호), Cu-Co-Ni계( 일본특개평 02-292894호)의 합금 조화처리층을 형성하는 기술 등이 있다.Therefore, in order to improve the various characteristics required for copper foil while having a fine roughness, much research is performed. For example, Cu-Ni (Japanese Patent Laid-Open No. 52-145769 and Japanese Patent Laid-Open No. 55-058502), Cu-Co-based (Japanese Patent Laid-Open No. 58-028893, Japanese Patent Laid-Open No. 2-292895), Cu-Co-Ni-based (Japanese Patent Application Laid-Open No. 02-292894) and the like.

그러나, 상기 개시된 종래의 기술들은, 미세한 조화처리는 가능하지만, Cu를 합금 주제로 사용하고 있으므로, 인쇄회로기판용 동박으로서 요구되는 상기와 같은 제반 특성을 부분적으로 개선할 뿐, 내산성 및 내알칼리성 등의 내약품성, 내열성 및 에칭성 등의 요구특성 전반을 고르게 개선할 수는 없었다. 그러므로, 상기 요구특성 전반을 개선하기 위해서는, 별도의 추가적인 도금공정 내지는 후처리공정이 필요하였으므로, 생산성이 저하되고 제조단가가 상승하는 단점이 있었다.However, the above-described conventional techniques, although fine roughening treatment is possible, use Cu as an alloy theme, and thus partially improve the above characteristics required as copper foil for a printed circuit board, and further improve acid resistance and alkali resistance. It was not possible to evenly improve the overall required properties such as chemical resistance, heat resistance and etching resistance. Therefore, in order to improve the overall required characteristics, a separate additional plating process or post-treatment process was required, and thus there was a disadvantage in that productivity was lowered and manufacturing cost was increased.

본 발명은 미세회로기판용으로 적합한 미세한 조도를 가지면서도, 인쇄회로기판에 요구되는 제반 특성을 전반적으로 향상시킬 수 있는 미세회로기판용 표면처리동박의 제조방법을 제공하는 것을 목적으로 한다.
An object of the present invention is to provide a method for producing a surface-treated copper foil for a microcircuit board which can improve overall the properties required for a printed circuit board while having a fine roughness suitable for a microcircuit board.

상기 목적을 달성하기 위한, 본 발명의 미세회로기판용 표면처리동박 제조방법은,In order to achieve the above object, the method for producing a surface-treated copper foil for a microcircuit board of the present invention,

Co, Ni과, 암모늄염 및 구연산을 포함하는 전해도금욕에 동박을 음극으로 배치하고, 표면조도가 0.5㎛ 이하가 되도록 상기 동박 표면상에 Co-Ni합금의 조화처리층을 석출형성하는 단계와;Placing copper foil as a cathode in an electroplating bath containing Co, Ni, ammonium salt and citric acid, and depositing a roughened layer of Co—Ni alloy on the surface of the copper foil so that the surface roughness is 0.5 μm or less;

상기 조화처리층 위에 순수 Zn 또는 Zn합금 피막층을 형성하는 단계와;Forming a pure Zn or Zn alloy coating layer on the roughened layer;

상기 피막층 위에 전해 크로메이트층을 형성하는 단계와;Forming an electrolytic chromate layer on the coating layer;

상기 전해 크로메이트층 위에 실란커플링제처리층을 형성하는 단계와;Forming a silane coupling agent treatment layer on the electrolytic chromate layer;

를 포함하여 구성되는 것을 특징으로 한다.Characterized in that comprises a.

상기 전해도금욕은, Co : 1~40 g/l, Ni : 0.1~40 g/l, 암모늄염 : 5~50 g/l, 구연산 : 5~100g/l 을 포함하는 것이 바람직하다.It is preferable that the said electroplating bath contains Co: 1-40 g / l, Ni: 0.1-40 g / l, ammonium salt: 5-50 g / l, citric acid: 5-100 g / l.

또한, 상기 전해도금욕에 Fe, Zn, Cr, Mo, W, V, Mn, Ti, Sn 중 하나 이상의 성분이 추가적으로 포함되어, Co, Ni을 필수적으로 포함하며 Fe, Zn, Cr, Mo, W, V, Mn, Ti, Sn 중 하나 이상의 성분이 추가적으로 포함된 조화처리층이 형성되는 것도 바람직하다.In addition, the electroplating bath additionally includes one or more of Fe, Zn, Cr, Mo, W, V, Mn, Ti, Sn, Co, Ni essentially include Fe, Zn, Cr, Mo, W It is also preferable to form a roughened layer that additionally contains at least one of V, Mn, Ti, and Sn.

이하에서는, 본 발명에 대하여 자세하게 설명하기로 한다.Hereinafter, the present invention will be described in detail.

본 발명은, 전해동박 또는 압연동박 등 동박의 종류에 무관하게 적용할 수 있으며, 경성 및 연성의 인쇄회로기판에 모두 적용할 수 있다. 특히, 본 발명의 제조방법에 의하면, 동박의 요구특성을 모두 만족하면서도 미세한 조도를 달성할 수 있으므로 미세회로폭이 요구되는 이른바 연성 인쇄회로기판용 동박적층필름(fccl)의 제조용으로 바람직하게 사용될 수 있다. The present invention can be applied to any type of copper foil such as electrolytic copper foil or rolled copper foil, and can be applied to both rigid and flexible printed circuit boards. In particular, according to the manufacturing method of the present invention, since the fine roughness can be achieved while satisfying all the required characteristics of the copper foil, it can be preferably used for the production of so-called copper foil laminated film (fccl) for flexible printed circuit boards requiring a fine circuit width. have.

fccl용 동박으로 사용되기 위해서는 적어도 0. 5㎛ 이하의 조도를 가지는 조화처리층이 구비될 것이 요구되는데, 이와 같이 조도가 낮아지는 경우에는 접착강도 및 내약품성, 내열성, 에칭성 등의 요구특성이 열화되는 문제가 있다.In order to use fccl copper foil, it is required to have a roughened layer having roughness of at least 0.5 μm or less. In this case, when the roughness is lowered, required characteristics such as adhesive strength, chemical resistance, heat resistance, and etching resistance are required. There is a problem of deterioration.

본 발명의 주된 특징은, 종래와 달리 조화처리층을 니켈-코발트합금이 주제로서 필수적으로 포함되도록 구성하고, 이러한 니켈-코발트 합금의 고유특성이 최 대한 발현되도록 전해반응의 매개체로서 암모늄염과 구연산을 전해도금욕에 첨가하여 전해도금함으로써, 미세 조도를 가지면서도 동박의 제반 요구특성도 만족하는 조화처리층을 형성하도록 한 것에 있다. The main feature of the present invention is that, unlike the prior art, the roughened layer is composed of nickel-cobalt alloy as essential, and the ammonium salt and citric acid are used as mediators of the electrolytic reaction so that the intrinsic properties of the nickel-cobalt alloy can be best expressed. The electrolytic plating is added to an electrolytic plating bath to provide a roughened layer having fine roughness and satisfying all the required characteristics of the copper foil.

니켈은 내약품성 및 내열성을 개선시키지만, 니켈 단독으로 조화처리층을 형성할 경우에는 미세 조도로 석출되기 곤란하며 알칼리 에칭시 잔사가 발생하는 단점이 있다. 또한, 코발트는 니켈과는 반대로 미세 조도로 석출되며 알칼리 에칭성이 양호한 장점을 가지지만, 코발트 단독으로 조화처리층을 형성할 경우에는 내약품성이 열화한다는 문제가 있다. 따라서, 니켈과 코발트를 적절한 비율로 동시에 첨가하면, 제반 요구특성을 동시에 만족할 수 있을 것이라고 예상되지만, 후술하는 바와 같이 실제로 니켈과 코발트만을 주제로 하여 조화처리층을 형성할 경우 원하는 만큼의 미세한 조화처리층이 형성되지 않았을 뿐 아니라, 예상되는 만큼 접착강도가 개선되지 않았고 또한 내약품성이나 에칭성 등에 문제가 있는 것을 발견하였다.Nickel improves chemical resistance and heat resistance, but when the roughening layer is formed of nickel alone, it is difficult to precipitate with fine roughness, and there is a disadvantage that residues are generated during alkali etching. In addition, cobalt is precipitated with fine roughness as opposed to nickel and has an advantage of good alkali etching, but there is a problem in that chemical resistance is deteriorated when cobalt is formed alone. Therefore, if nickel and cobalt are simultaneously added in an appropriate ratio, it is expected that all the required characteristics can be simultaneously satisfied. However, as described below, when a roughened layer is formed based only on nickel and cobalt, fine roughening treatments as desired can be achieved. Not only was the layer not formed, but it was found that the adhesive strength did not improve as expected, and there were problems in chemical resistance and etching resistance.

본 발명자 등은, 이의 개선을 위하여 예의연구한 결과 전해도금욕에 암모늄염과 구연산을 첨가하면, 니켈과 코발트의 효과를 최대한 발현시켜 각종 제반 특성이 현저하게 개선된 미세 조도의 조화처리층을 형성할 수 있음을 알아내었다. The present inventors have studied diligently to improve the results, and when the ammonium salt and citric acid are added to the electroplating bath, the effect of nickel and cobalt can be expressed to the maximum, thereby forming a roughened layer of fine roughness with various characteristics significantly improved. I figured it out.

암모늄염은 니켈과 코발트의 전해석출반응경로에 관여하여 니켈-코발트합금이 보다 미세한 노듈(nodule) 형태로 석출되도록 하며, 더욱이 노듈을 보다 균일하게 석출되게 하는 작용을 하는 것으로 생각된다. 적용될 수 있는 암모늄염의 종류로는 특별한 제한은 없으며, 예컨대 황산암모늄, 염화암모늄, 아세트산암모늄염 등 이 사용될 수 있다.The ammonium salt is thought to play a role in causing the nickel-cobalt alloy to be precipitated in the form of finer nodule by being involved in the electrolytic precipitation reaction path of nickel and cobalt, and more evenly in the nodule. The type of ammonium salt that can be applied is not particularly limited, and for example, ammonium sulfate, ammonium chloride, ammonium acetate salt and the like can be used.

또한, 구연산은 암모늄염과 니켈이나 코발트와 같은 금속이온이 안정된 착화합물을 형성하도록 하며 내열성을 향상시키는 역할을 한다. 착화제로서 구연산은, 니켈-코발트와 암모늄염의 화학반응조제로서 특별한 적합성을 가지며, 암모늄염에 의해 형성된 니켈-코발트의 노듈이 동박에 견고하게 부착되도록 도와주는 역할을 하는 것으로 판단된다. 본 발명에 적합한 구연산으로서는, 구연산 나트륨, 구연산 칼륨, 구연산 암모늄, 구연산 이 암모늄, 구연산 철 암모늄 등이 있다.In addition, citric acid is a metal ions such as ammonium salt and nickel or cobalt to form a stable complex and serves to improve the heat resistance. Citric acid as a complexing agent has particular suitability as a chemical reaction aid of nickel-cobalt and ammonium salts, and is believed to play a role in helping the nodule of nickel-cobalt formed by the ammonium salt to be firmly attached to the copper foil. Examples of citric acid suitable for the present invention include sodium citrate, potassium citrate, ammonium citrate, diammonium citrate, and ammonium ferric citrate.

한편, 에칭성 및 내약품성을 더욱 향상시키는 등 동박에 필요한 물리적특성 또는 기계적특성을 추가하거나, 투명기재와 동박과의 박리강도를 향상시키거나 하는 등의 목적을 위하여, Co, Ni 외에 Fe, Zn, Cr, Mo, W, V, Mn, Ti, Sn 중 하나 이상의 성분을 도금욕에 추가적으로 첨가할 수도 있다. 예를 들어, 흑화도금층에 Fe나 Zn가 포함되면, PET 기재와의 접착강도가 향상되며, 에칭속도도 비교적 빨라지는 이점이 있다.On the other hand, for the purpose of adding physical or mechanical properties necessary for copper foil, such as further improving the etching resistance and chemical resistance, or for improving the peel strength between the transparent substrate and the copper foil, Fe, Zn in addition to Co, Ni, etc. One or more components of Cr, Mo, W, V, Mn, Ti, Sn may be additionally added to the plating bath. For example, when Fe or Zn is included in the blackening plating layer, the adhesive strength with the PET substrate is improved, and the etching rate is also relatively fast.

본 발명에 따른 조화처리층을 형성하기 위하여 사용되는 바람직한 전해도금욕의 조성은 다음과 같지만, 특별히 한정되는 것은 아니다.The composition of the preferred electroplating bath used to form the roughened layer according to the present invention is as follows, but is not particularly limited.

Co 금속이온의 농도 : 1~40 g/lCo metal ion concentration: 1 ~ 40 g / l

Ni 금속이온의 농도 : 0.1~40 g/lNi metal ion concentration: 0.1 ~ 40 g / l

기타 금속이온의 농도 : 0.001~5 g/lConcentration of other metal ions: 0.001 ~ 5 g / l

암모늄염 ; 5~50 g/lAmmonium salts; 5-50 g / l

구연산나트륨(C6H5Na3O7ㆍ2H2O) : 5~100 g/lSodium citrate (C 6 H 5 Na 3 O 7 ㆍ 2H 2 O): 5 ~ 100 g / l

상기 조성의 도금욕을 이용하여 조화처리층을 형성하면, 보다 균일한 조화처리층이 형성되는 이점이 있다. When the roughening layer is formed using the plating bath of the above composition, there is an advantage that a more uniform roughening layer is formed.

또한, 전해조건은 조화층 형성이 가능하도록 도금욕의 한계전류밀도 근방에서 전해하되, 역시 균일한 조화처리층 형성의 관점에서 대체로 다음과 같은 범위에서 선택하는 것이 바람직하다. In addition, the electrolytic conditions are to be delivered in the vicinity of the limit current density of the plating bath so that the roughening layer can be formed, it is also preferable to select generally in the following range from the viewpoint of forming a uniform roughening treatment layer.

pH : 2~6pH: 2 ~ 6

도금액 온도 : 20~60℃Plating solution temperature: 20 ~ 60 ℃

전류밀도 : 1~50 A/dm2 Current density: 1 ~ 50 A / dm 2

처리시간 ; 1~20초Processing time; 1-20 seconds

한편, 가열변색을 방지하기 위하여, 상기 조화처리층 상에 순수 Zn 또는 Zn합금 피막층을 석출 형성시킨다. 가용한 Zn합금으로서는, Zn-Ni, Zn-Mo, Zn-Cr, Zn-CO, Zn-Ni-Co, Zn-Ni-Mo, Zn-Co-Mo 등이 있다. 피막층 형성조건은 통상 사용되는 조건에서 선택하여 사용할 수 있으며 특별히 한정되는 것은 아니지만, 예컨대 이하와 같은 조건으로 한다면 보다 바람직한 효과를 얻을 수 있다.On the other hand, in order to prevent heat discoloration, a pure Zn or Zn alloy coating layer is deposited on the roughened layer. Examples of the available Zn alloys include Zn-Ni, Zn-Mo, Zn-Cr, Zn-CO, Zn-Ni-Co, Zn-Ni-Mo, Zn-Co-Mo and the like. The coating layer formation conditions can be selected and used under conditions which are usually used, but are not particularly limited, and more preferable effects can be obtained, for example, under the following conditions.

전해욕조성;Electrolytic bath composition;

Zn 금속이온 : 0.5~15 g/l, 다른 금속이온 : 0.1 ~ 10 g/lZn metal ion: 0.5 ~ 15 g / l, other metal ion: 0.1 ~ 10 g / l

pH ; 3.0~4.0pH; 3.0-4.0

온도 ; 상온Temperature ; Room temperature

전류밀도 : 0/1 ~ 3 A/d㎡ Current Density: 0/1 ~ 3 A / dm

처리시간 : 1~4초Processing time: 1-4 seconds

또한, Zn 피막층 형성 후, 전해크로메이트층 및 실란커플링제 처리층 등의 통상의 방청처리층을 형성하면, 본 발명에 따른 미세회로기판용 표면처리동박이 완성된다.In addition, after formation of the Zn coating layer, ordinary anticorrosive treatment layers such as an electrolytic chromate layer and a silane coupling agent treatment layer are formed to complete the surface-treated copper foil for a microcircuit board according to the present invention.

크로메이트 처리조건은 통상의 처리조건에서 선택하여 사용할 수 있으며 특별히 한정되는 것은 아니지만, 예컨대 이하와 같은 조건으로 한다면 보다 바람직한 효과를 얻을 수 있다.The chromate treatment conditions can be selected and used under ordinary treatment conditions, and are not particularly limited. For example, the chromate treatment conditions can provide more preferable effects.

전해욕의 CrO3 농도 : 0.1~10 g/l,CrO 3 concentration in electrolytic bath: 0.1 ~ 10 g / l,

전해액의 pH : 4.0~5.0PH of electrolyte: 4.0 ~ 5.0

전해액온도 : 상온Electrolyte Temperature: Room Temperature

전류밀도 : 0.2 ~ 2 A/d㎡ Current Density: 0.2 ~ 2 A / dm

처리시간 : 2 ~5 초 Processing time: 2 ~ 5 seconds

크로메이트처리를 시행하면 크롬수산화물 및 크롬산화물로 된 방청층이 얇게 형성된다.When chromate treatment is performed, a rustproof layer of chromium hydroxide and chromium oxide is formed thinly.

실란커플링제처리는, 예컨대 0.005~2 wt%의 실란커플링제를 물에 희석하여 크로메이트층 상에 도포하고 건조시킴으로써 행해진다.The silane coupling agent treatment is performed by, for example, diluting 0.005 to 2 wt% of the silane coupling agent in water, applying it on a chromate layer, and drying it.

실시예Example

[실시예 1]Example 1

표면조도(Rz)가 1.0 ㎛이하이고 두께 18 ㎛인 압연동박을 사용하였다. 동박표면에 대하여 전해 알칼리 탈지를 행하고, 100 g/l 황산에서 10 초동안 침지를 하고 순수로 세척한 후, 아래의 조건으로 조화처리층을 형성하였다. 그 후 조화처리층면에 아래에 개시된 조건으로 Zn 피막층 형성, Cr 방청처리, 실란커플링처리를 순차적으로 실시하였다.A rolled copper foil having a surface roughness Rz of 1.0 µm or less and a thickness of 18 µm was used. Electrolytic alkali degreasing was performed on the copper foil surface, immersed in 100 g / l sulfuric acid for 10 seconds, washed with pure water, and a roughened layer was formed under the following conditions. Thereafter, the surface of the roughened layer was subjected to Zn coating layer formation, Cr rust prevention treatment, and silane coupling treatment sequentially.

<조화처리층 형성조건><Condition Formation Conditions>

전해욕 조성 :Electrolytic bath composition:

Co 금속이온(CoS04ㆍ7H2O)의 농도 : 5 g/l, Ni 금속이온(NiS04ㆍ6H2 O)의 농도 : 2 g/l, 구연산나트륨(C6H5Na3O7 ㆍ 2H2O) : 25 g/l, 황산암모늄((NH4)2SO4): 15 g/lCo metal ion (CoS0 4 ㆍ 7H 2 O) concentration: 5 g / l, Ni metal ion (NiS0 4 ㆍ 6H 2 O) concentration: 2 g / l, sodium citrate (C 6 H 5 Na 3 O 7 ㆍ 2H 2 O): 25 g / l, ammonium sulfate ((NH 4 ) 2 SO 4 ): 15 g / l

pH : 5.4pH: 5.4

전해액의 온도 : 25 ℃Temperature of electrolyte: 25 ℃

전류밀도 : 25 A/dm2 Current density: 25 A / dm 2

도금시간 : 8 초Plating time: 8 seconds

<Zn피막층 형성조건><Zn film layer formation condition>

ZnSO4 ㆍ H2O : 5 g/lZnSO 4 ㆍ H 2 O: 5 g / l

pH : 3.0pH: 3.0

온도 : 상온Temperature: Room temperature

전류밀도 : 1 A/d㎡Current density: 1 A / dm

처리시간 : 4 초Processing time: 4 seconds

<크로메이트 방청처리조건><Chromate Antirust Treatment Condition>

CrO3 농도 : 5 g/lCrO 3 concentration: 5 g / l

pH : 5.0pH: 5.0

온도 : 상온Temperature: Room temperature

전류밀도 : 0.5 A/d㎡Current density: 0.5 A / dm

처리시간 : 4 초Processing time: 4 seconds

<실란커플링 처리조건><Silane coupling process conditions>

크로메이트 방청처리를 한 후 3-글리시독시 프로필트리메톡시 실란 0.1 wt% 수용액을 스프레이에 의해 도포한 후 150oC 건조로에서 30초간 건조하였다.After chromate rust treatment, a 3-glycidoxy propyltrimethoxy silane 0.1 wt% aqueous solution was applied by spraying and then dried in a 150 ° C. drying furnace for 30 seconds.

[실시예 2]Example 2

아래에 개시된 조화처리층 형성조건 외에는, 사용동박의 종류, 탈지, 산세 및 수세 등의 전처리조건 및 기타 표면처리조건(Zn피막층형성, 크로메이트처리 및 실란커플링제처리조건)은 실시예 1과 동일하다.Except the conditions for forming the roughened layer described below, the type of copper foil used, pretreatment conditions such as degreasing, pickling and washing and other surface treatment conditions (Zn film layer formation, chromate treatment and silane coupling agent treatment conditions) are the same as in Example 1. .

<조화처리층 형성조건><Condition Formation Conditions>

전해욕 조성 :Electrolytic bath composition:

Co 금속이온(CoS04ㆍ7H2O)의 농도 : 6 g/l, Ni 금속이온(NiS04ㆍ6H2 O)의 농도 : 0.5 g/l, 구연산 나트륨(C6H5Na3O7 ㆍ 2H2O) : 25 g/l, 황산암모늄((NH4)2SO4): 15 g/lCo metal ion (CoS0 4 ㆍ 7H 2 O) concentration: 6 g / l, Ni metal ion (NiS0 4 ㆍ 6H 2 O) concentration: 0.5 g / l, sodium citrate (C 6 H 5 Na 3 O 7 ㆍ 2H 2 O): 25 g / l, ammonium sulfate ((NH 4 ) 2 SO 4 ): 15 g / l

pH : 5.4pH: 5.4

전해액의 온도 : 25 ℃Temperature of electrolyte: 25 ℃

전류밀도 : 20 A/dm2 Current density: 20 A / dm 2

도금시간 : 10 초Plating time: 10 seconds

[실시예 3]Example 3

아래에 개시된 조화처리층 형성조건 외에는, 사용동박의 종류, 탈지, 산세 및 수세 등의 전처리조건 및 기타 표면처리조건(Zn피막층형성, 크로메이트처리 및 실란커플링제처리조건)은 실시예 1과 동일하다.Except the conditions for forming the roughened layer described below, the type of copper foil used, pretreatment conditions such as degreasing, pickling and washing and other surface treatment conditions (Zn film layer formation, chromate treatment and silane coupling agent treatment conditions) are the same as in Example 1. .

<조화처리층 형성조건><Condition Formation Conditions>

전해욕 조성 :Electrolytic bath composition:

Co 금속이온(CoS04ㆍ7H2O)의 농도 : 6 g/l, Ni 금속이온(NiS04ㆍ6H2 O)의 농도 : 1 g/l, 구연산 나트륨(C6H5Na3O7 ㆍ 2H2O) : 25 g/l, 황산암모늄((NH4)2SO4): 15 g/lCo metal ion (CoS0 4 ㆍ 7H 2 O) concentration: 6 g / l, Ni metal ion (NiS0 4 ㆍ 6H 2 O) concentration: 1 g / l, sodium citrate (C 6 H 5 Na 3 O 7 ㆍ 2H 2 O): 25 g / l, ammonium sulfate ((NH 4 ) 2 SO 4 ): 15 g / l

pH : 5.4pH: 5.4

전해액의 온도 : 25 ℃Temperature of electrolyte: 25 ℃

전류밀도 : 22 A/dm2 Current density: 22 A / dm 2

도금시간 : 10 초Plating time: 10 seconds

[실시예 4]Example 4

아래에 개시된 조화처리층 형성조건 외에는, 사용동박의 종류, 탈지, 산세 및 수세 등의 전처리조건 및 기타 표면처리조건(Zn피막층형성, 크로메이트처리 및 실란커플링제처리조건)은 실시예 1과 동일하다.Except the conditions for forming the roughened layer described below, the type of copper foil used, pretreatment conditions such as degreasing, pickling and washing and other surface treatment conditions (Zn film layer formation, chromate treatment and silane coupling agent treatment conditions) are the same as in Example 1. .

<조화처리층 형성조건><Condition Formation Conditions>

전해욕 조성 :Electrolytic bath composition:

Co 금속이온(CoS04ㆍ7H2O)의 농도 : 5 g/l, Ni 금속이온(NiS04ㆍ6H2 O)의 농도 : 2 g/l, Fe 금속이온(FeS04ㆍ7H2O)의 농도 : 1 g/l, 구연산 나트륨(C6H 5Na3O7 ㆍ 2H2O) : 25 g/l, 황산암모늄((NH4)2SO4): 15 g/lConcentration of Co metal ion (CoS0 4 ㆍ 7H 2 O): 5 g / l, Concentration of Ni metal ion (NiS0 4 ㆍ 6H 2 O): 2 g / l, Fe metal ion (FeS0 4 ㆍ 7H 2 O) Concentration: 1 g / l, sodium citrate (C 6 H 5 Na 3 O 7 ㆍ 2H 2 O): 25 g / l, ammonium sulfate ((NH 4 ) 2 SO 4 ): 15 g / l

pH : 5.4pH: 5.4

전해액의 온도 : 25 ℃Temperature of electrolyte: 25 ℃

전류밀도 : 25 A/dm2 Current density: 25 A / dm 2

도금시간 : 8 초Plating time: 8 seconds

[실시예 5]Example 5

아래에 개시된 조화처리층 형성조건 외에는, 사용동박의 종류, 탈지, 산세 및 수세 등의 전처리조건 및 기타 표면처리조건(Zn피막층형성, 크로메이트처리 및 실란커플링제처리조건)은 실시예 1과 동일하다.Except the conditions for forming the roughened layer described below, the type of copper foil used, pretreatment conditions such as degreasing, pickling and washing and other surface treatment conditions (Zn film layer formation, chromate treatment and silane coupling agent treatment conditions) are the same as in Example 1. .

<조화처리층 형성조건><Condition Formation Conditions>

전해욕 조성 :Electrolytic bath composition:

Co 금속이온(CoS04ㆍ7H2O)의 농도 : 5 g/l, Ni 금속이온(NiS04ㆍ6H2 O)의 농도 : 2 g/l, Zn 금속이온(ZnS04ㆍH2O)의 농도 : 1 g/l, 구연산 나트륨(C6H 5Na3O7 ㆍ 2H2O) : 25 g/l, 황산암모늄((NH4)2SO4): 15 g/lConcentration of Co metal ion (CoS0 4 ㆍ 7H 2 O): 5 g / l, Concentration of Ni metal ion (NiS0 4 ㆍ 6H 2 O): 2 g / l, Zn metal ion (ZnS0 4 ㆍ H 2 O) Concentration: 1 g / l, sodium citrate (C 6 H 5 Na 3 O 7 ㆍ 2H 2 O): 25 g / l, ammonium sulfate ((NH 4 ) 2 SO 4 ): 15 g / l

pH : 5.4pH: 5.4

전해액의 온도 : 25 ℃Temperature of electrolyte: 25 ℃

전류밀도 : 25 A/dm2 Current density: 25 A / dm 2

도금시간 : 8초Plating time: 8 seconds

[비교예 1]Comparative Example 1

실시예 1의 조화처리층 형성조건 중 도금욕에 황산암모늄이 포함되지 않은 것을 제외하고는, 나머지 조건은 실시예 1과 동일하게 표면처리를 시행하였다.Except that ammonium sulfate was not included in the plating bath among the roughening layer forming conditions of Example 1, the remaining conditions were the same as in Example 1.

[비교예 2]Comparative Example 2

실시예 1의 조화처리층 형성조건 중 도금욕에 구연산나트륨이 포함되지 않은 것을 제외하고는, 나머지 조건은 실시예 1과 동일하게 표면처리를 시행하였다.Except that sodium citrate was not included in the plating bath among the roughening layer forming conditions of Example 1, the remaining conditions were the same as in Example 1.

[비교예 3]Comparative Example 3

실시예 1의 조화처리층 형성조건 중 도금욕에 Ni이 포함되지 않은 것을 제외하고는, 나머지 조건은 실시예 1과 동일하게 표면처리를 시행하였다.Except that Ni was not included in the plating bath among the roughening layer forming conditions of Example 1, the remaining conditions were the same as in Example 1.

[비교예 4][Comparative Example 4]

실시예 1의 조화처리층 형성조건 중 도금욕에 Co가 포함되지 않은 것을 제외하고는, 나머지 조건은 실시예 1과 동일하게 표면처리를 시행하였다.Except that Co was not included in the plating bath among the roughening layer forming conditions of Example 1, the remaining conditions were the same as in Example 1.

표1은, 실시예와 비교예에 대하여 하기와 같은 시험조건으로 각종 요구특성을 측정하여 비교한 결과를 나타낸 것이다.Table 1 shows the result of measuring and comparing various required characteristics with the following test conditions with respect to an Example and a comparative example.

구분division 특성시험결과Characteristic test result 접착강도 (kgf/cm)Adhesion Strength (kgf / cm) 내열접착강도 (kgf/cm)Heat resistance adhesive strength (kgf / cm) 내HCl성HCl resistance 내KCN성KCN resistance 내자비성Self-resistance 알칼리에칭성Alkali etching 실시 예Example 1One 0.950.95 0.730.73 22 0.940.94 0.750.75 33 0.960.96 0.740.74 44 1.011.01 0.740.74 55 1.041.04 0.760.76 비교예Comparative example 1One 0.680.68 0.490.49 XX XX 22 0.850.85 0.570.57 XX 33 0.850.85 0.520.52 XX XX 44 0.760.76 0.510.51 XX

*특성시험조건* Characteristic test condition

o접착강도 : 에폭시수지 함침기재와 동박의 비평활면을 적층하여 적층판으로 하고 시험편을 폭 10 mm로 하여 접착강도 측정기(Universal Test Machine : UTM)를 이용하여 측정함.oAdhesive strength: Epoxy resin impregnated base material and copper foil non-smooth surface are laminated to laminate and test piece is 10mm wide and measured by using adhesive tester (Universal Test Machine: UTM).

o내열접착강도 : 177 ℃ Dry oven에 240시간 구운 후 접착강도를 측정함.o Heat-resistant adhesive strength: Measure the adhesive strength after baking for 240 hours in 177 ℃ Dry oven.

o 내 HCl성 : 18 % - HCl에 1시간 침적 후 접착강도 열화율을 측정함. o HCl resistance: 18%-Degradation rate of adhesion strength after 1 hour immersion in HCl.

o 내 KCN성 : 10 % - KCN에 30분 침적후 접착강도 열화율을 측정함.o KCN resistance: 10%-Determination of adhesive strength deterioration rate after immersion in KCN for 30 minutes.

o 내 자비성 (耐 煮沸性; Loss in after boiling in water) : 100℃의 H2O에 2시간 침적후 접착강도 열화율을 측정함o Loss in after boiling in water: Adhesion strength deterioration rate is measured after 2 hours immersion in H 2 O at 100 ℃

<내 HCl성, 내 KCN성, 내 자비성 평가기준><HCl resistance, KCN resistance, self-resistance evaluation criteria>

○ : 침지전후의 열화율이 5 %이하 ○: degradation rate before and after immersion is 5% or less

△ : 침지전후의 열화율이 5 ~ 25 %이하△: degradation rate before and after immersion is 5 to 25% or less

X : 침지전후의 열화율이 25 % 이상     X: deterioration rate before and after immersion is 25% or more

o알칼리 에칭성 : pH 9.7~10.2, 비중 1.19~1.21의 에칭액에, 온도 50 ℃ 조건에서 8 분간 침적후 10 d㎡ 범위내의 기재에 남아 있는 잔류 구리를 광학현미경을 이용하여 관찰함.Alkali etching property: The residual copper which remained in the base material in the range of 10 dm <2> after 8 minute immersion in the etching liquid of pH 9.7-10.2, specific gravity 1.19-1.21 at 50 degreeC conditions was observed using the optical microscope.

<알카리 에칭성 평가기준><Alkali Etchability Evaluation Criteria>

○ : 에칭후 기재에 잔존하는 잔류 구리 또는 합금층이 없다.○: There is no residual copper or alloy layer remaining on the substrate after etching.

△ : 에칭후 기재에 잔존하는 잔류 구리 또는 합금층이 약간 있다(Triangle | delta): There exists some residual copper or an alloy layer which remain | survives in a base material after an etching.

X : 에칭후 기재에 잔존하는 잔류 구리 또는 합금층이 많다.X: There are many residual copper or alloy layers which remain in a base material after an etching.

상기 표에 나타난 바와 같이, 본 발명 실시예의 경우, 접착강도, 내열성(내열접착강도), 내염산성, 내시안화칼륨성 등의 내약품성, 내자비성 및 알칼리에칭성이 골고루 우수한 것을 알 수 있다.As shown in the table, in the embodiment of the present invention, it can be seen that the chemical resistance, heat resistance and alkali etching resistance, such as adhesive strength, heat resistance (heat resistance strength), hydrochloric acid resistance, potassium cyanide resistance and the like evenly.

이에 대하여, 본 발명 제조방법에 따른 조화처리층의 필수구성요건 중 하나 이상이 빠진 비교예의 경우, 상기 특성 중 하나 이상이 본 발명 실시예에 비하여 떨어지는 것을 알 수 있다. 예컨대, 접착강도 및 내열접착강도의 면에서, 본 발명 실시예는 비교예에 비하여 대략 각각 9.6% 이상, 21.9% 이상 향상되었다.On the other hand, in the case of a comparative example in which at least one of the essential constituents of the roughening layer according to the manufacturing method of the present invention is omitted, it can be seen that at least one of the above characteristics is inferior to the embodiment of the present invention. For example, in terms of adhesive strength and heat-resistant adhesive strength, the inventive examples were improved by at least 9.6% and 21.9%, respectively, compared to the comparative examples.

이상에서 설명한 바와 같이, 본 발명의 제조방법에 의하여 제조된 표면처리동박은, 기판과의 접착강도 및 내열접착강도, 내약품성, 에칭성 등의 동박으로서의 요구특성이 전반적으로 우수하여, 미세회로기판용 동박으로서 아주 적합하다.As described above, the surface-treated copper foil manufactured by the manufacturing method of the present invention has excellent overall characteristics required as the copper foil such as adhesive strength with the substrate, heat-resistant adhesive strength, chemical resistance, and etching resistance, and thus, fine circuit boards. It is very suitable as a copper foil.

Claims (4)

Co, Ni과, 암모늄염 및 구연산을 포함하는 전해도금욕에 동박을 음극으로 배치하고, 표면조도가 0.5㎛ 이하가 되도록 상기 동박 표면상에 Co-Ni합금의 조화처리층을 석출형성하는 단계와;Placing copper foil as a cathode in an electroplating bath containing Co, Ni, ammonium salt and citric acid, and depositing a roughened layer of Co—Ni alloy on the surface of the copper foil so that the surface roughness is 0.5 μm or less; 상기 조화처리층 위에 순수 Zn 또는 Zn합금 피막층을 형성하는 단계와;Forming a pure Zn or Zn alloy coating layer on the roughened layer; 상기 피막층 위에 전해 크로메이트층을 형성하는 단계와;Forming an electrolytic chromate layer on the coating layer; 상기 전해 크로메이트층 위에 실란커플링제처리층을 형성하는 단계와;Forming a silane coupling agent treatment layer on the electrolytic chromate layer; 를 포함하여 구성되는 것을 특징으로 하는 미세회로기판용 표면처리동박의 제조방법.Method for producing a surface-treated copper foil for a fine circuit board, characterized in that comprising a. 제1항에 있어서,The method of claim 1, 전해도금욕은, Co : 1~40 g/l, Ni : 0.1~40 g/l, 암모늄염 : 5~50 g/l, 구연산 : 5~100g/l 을 포함하는 것을 특징으로 하는 미세회로기판용 표면처리동박의 제조방법.Electrolytic plating bath, Co: 1 ~ 40 g / l, Ni: 0.1 ~ 40 g / l, ammonium salt: 5 ~ 50 g / l, citric acid: 5 ~ 100 g / l for a microcircuit board Method for producing surface treated copper foil. 제1항에 있어서,The method of claim 1, 상기 전해도금욕에 Fe, Zn, Cr, Mo, W, V, Mn, Ti, Sn 중 하나 이상의 성분이 추가적으로 포함되어, Co, Ni을 필수적으로 포함하며 Fe, Zn, Cr, Mo, W, V, Mn, Ti, Sn 중 하나 이상의 성분이 추가적으로 포함된 조화처리층이 형성되는 것을 특징으로 하는 미세회로기판용 표면처리동박의 제조방법.One or more components of Fe, Zn, Cr, Mo, W, V, Mn, Ti, and Sn are additionally included in the electroplating bath, and essentially include Co, Ni, and Fe, Zn, Cr, Mo, W, V. A method for producing a surface-treated copper foil for a microcircuit board, characterized in that a roughened layer further comprising at least one component of Mn, Ti, Sn is formed. 제1항 내지 제3항 중 어느 한 항의 방법에 의하여 제조되는 것을 특징으로 하는 미세회로기판용 표면처리동박.A surface-treated copper foil for a microcircuit board, which is produced by the method of any one of claims 1 to 3.
KR1020040055382A 2004-07-16 2004-07-16 Method of manufacturing Surface-treated Copper Foil for PCB having fine-circuit pattern and Surface-treated Copper Foil thereof KR100654737B1 (en)

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