TWI267560B - Method of manufacturing surface-treated copper foil for PCB having fine-circuit pattern and surface-treated copper foil thereof - Google Patents

Method of manufacturing surface-treated copper foil for PCB having fine-circuit pattern and surface-treated copper foil thereof Download PDF

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TWI267560B
TWI267560B TW093128534A TW93128534A TWI267560B TW I267560 B TWI267560 B TW I267560B TW 093128534 A TW093128534 A TW 093128534A TW 93128534 A TW93128534 A TW 93128534A TW I267560 B TWI267560 B TW I267560B
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Taiwan
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copper foil
layer
treated copper
strength
substrate
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TW093128534A
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Chinese (zh)
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TW200604356A (en
Inventor
Jong-Ho Ryu
Seung-Ryang Jeong
Sang-Beom Kim
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Iljin Copper Foil Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Laminated Bodies (AREA)

Abstract

To provide a method for manufacturing copper foil having excellent strength of adhesion to a substrate and heat resistance strength. The method for manufacturing the surface treated copper foil for a microfabrication circuit substrate suitable for production of the substrate having a microfabrication circuit pattern comprises steps of; arranging the copper foil as a cathode in an electroplating bath including Co, Ni, ammonium salt, and citric acid and precipitating and forming a roughening treatment layer of a Co-Ni alloy on the copper foil surface in such a manner that its surface roughness attains <= 0.5 mum; forming a pure Zn or Zn alloy coating layer on the roughening treatment layer; forming an electrolytic chromate layer on the coating layer; and forming a silane coupling agent treatment layer on the electrolytic chromate layer. The manufactured surface treated copper foil is excellent overall in the requirement characteristics as the copper foil, such as the strength of adhesion to the substrate, heat resistant strength of adhesion, chemical resistance, and etching, and is particularly suitable as the copper foil for the microfabrication circuit substrate.

Description

1267560 九、發明說明: 【發明所屬之技術領域】 本發明係關於一種印刷電路基板用表面處理銅箔,尤 其是關於一種適合於製造具有線寬為20//m以下之微細電 路圖案的基板之微細電路基板用表面處理銅箔之製造方 法0 【先前技術】 以往’表面處理銅箔廣為使用於電機、電子產業方面 作為印刷電路基板之基礎材料。通常,上述表面處理銅箔, 係以熱壓成形來和玻璃-環氧樹脂基材、酚醛樹脂基材、聚 醯亞胺等之高分子絕緣基材接合作成銅覆層積層板,使用 於印刷電路基板之製造中。 作為如此的銅箔所要求之最基本的特性乃為銅箔與絕 緣基材基板間須有優異的接著強度。尤其,銅箔不僅在與 絶緣基材基板進行加熱加壓、積層剛完成後,即使於經過 後續的後處理製程中之各種處理之後,其接著強度也必須 維持於所需特性以上。因此,必須對於酸與鹼等具有優異 ^耐化學藥品性、耐熱性等。再者,⑨用以形成銅電路圖 本再作成配線板的姓刻過程中,亦須要求蝕刻殘留物質不 會殘留於非圖案部份等之優異的蝕刻性。 、 〜為改善銅箔的接著強度,通常係進行使微細銅粒子析 方、鋼V自表面之所謂的粗化處理以使銅箔面的表 的萝r。缺 m ^ &quot; 、而’只有單純的粗化處理,即使說是可改善接 1267560 者:1 ’無法防止於後續的製程中因各種化學藥品與熱 王/ θ而使接著強度變差。為克服此問題,於上述粗化處 後々^仃形成鋅層被膜、形成電解鉻酸鹽層及石夕烧偶 口剑處理層的防鏽處理層等之多樣的後處理製程。 另方面,有繁於最近電子元件的高密度化、高性能 、J :化’使用的基板電路也高密度化,因應於此,須 ,求線寬度之微ϋ。因此’印刷電路基㈣銅猪亦須要 有適合於如此之微細線寬度的圖案之微細粗度。 而粗化處理層的粗度若較微細,不僅銅箔表面的 接者強度會變差’上述銅箔所需之各種特性之達成亦有困 難,而有兩難的情形。 因而,為能夠一方面具有微細之粗度、一方面又可政 善銅落所需的各種特性,有各種研究進行著。例如有:cu_n 系(日本/專利特開昭52·145769號及特開昭㈣逝號)、 系(日本專利4寸開昭58_028893號、特開平2-2似9&lt; 號)、Cu-c〇-Ni系(日本專利特開平02_292894號)的合金粗 化處理層之形成的技術等。 然而’上述揭示之習知技術’雖可做微細的粗化處理, 但由於係使用C “乍為合金之主材,故只對作為印刷電路 基板用mi所要求之上述諸特性做部份性改善,而未能對 耐酸性及耐驗性等之耐化學藥品性、耐熱性及姓刻性等之 特性均衡而全面地改善。而i,為全面地改善上述所需特 性,必須額外追加鍍敷製程乃至於後處理製程,故有生產 性降低致單價增高的缺點。 1267560 【發明内容】 本發明之目的在於,提供具有適合於微細電路基板用 之微細的粗度、並可全面性地提升作為印刷電路基板所要 求之諸特性的微細電路基板用表面處理銅箔之製造方法。 為達成上述目的,本發明之微細電路基板用表面處理 鋼4之製造方法,其特徵在於,係含有下述步驟: 於含有Co、Ni、銨鹽及檸檬酸鹽的電鍍浴中將銅箔配 置於陰極’以使表面粗度成為〇·5 # m以下的方式在該銅 /白表面上析出形成C〇-Ni合金之粗化處理層; 於該粗化處理層上形成純Zn或Zn合金被膜層; 於該被膜層上形成電解鉻酸鹽層;及 於該鉻酸鹽層上形成矽烷偶合劑處理層。 上述電鍍浴中,以含有C〇 : 1〜4〇g/i、Ni : 〇·1〜40g/l、 錢鹽5〜5 0g/l、擰檬酸5〜1〇〇g/:1為佳。 再者,上述該電鍍浴中進一步含有擇自Fe、Zn、Cr、[Technical Field] The present invention relates to a surface-treated copper foil for a printed circuit board, and more particularly to a substrate suitable for manufacturing a fine circuit pattern having a line width of 20//m or less. Method for producing surface-treated copper foil for fine circuit board 0 [Prior Art] Conventionally, the surface-treated copper foil is widely used as a base material for printed circuit boards in the motor and electronics industries. Usually, the surface-treated copper foil is formed into a copper-clad laminate by hot press forming and a polymer-insulating substrate such as a glass-epoxy base material, a phenol resin substrate, or a polyimide, and is used for printing. In the manufacture of circuit boards. The most basic characteristic required for such a copper foil is that it has an excellent bonding strength between the copper foil and the insulating substrate. In particular, the copper foil is not only heated and pressurized with the insulating base substrate, but immediately after the completion of the lamination, the subsequent strength must be maintained above the desired characteristics even after various treatments in the subsequent post-treatment process. Therefore, it is necessary to have excellent chemical resistance, heat resistance, and the like for an acid, a base, or the like. Further, in the process of forming a copper circuit pattern and forming a wiring board, it is necessary to require an excellent etching property such that the etching residue does not remain in the non-pattern portion. In order to improve the adhesion strength of the copper foil, it is usually carried out by depositing fine copper particles and so-called roughening treatment of the steel V from the surface to make the surface of the copper foil surface. There is no m ^ &quot; , and 'only simple roughening treatment, even if it can improve the connection 1267560: 1 ' can not prevent the subsequent strength deterioration due to various chemicals and heat king / θ in the subsequent process. In order to overcome this problem, various post-treatment processes such as forming a zinc layer coating, forming an electrolytic chromate layer, and a rust-preventing treatment layer of the Shih-Shou Oo-Sword processing layer are formed in the above-mentioned roughening. On the other hand, there is a recent increase in the density and high performance of electronic components, and the use of a substrate circuit is also high. Therefore, it is necessary to obtain a slight line width. Therefore, the printed circuit base (4) copper pigs also need to have a fineness of a pattern suitable for such a fine line width. When the thickness of the roughened layer is fine, not only the strength of the surface of the copper foil is deteriorated, but the various characteristics required for the copper foil are also difficult to achieve, and there are dilemmas. Therefore, various studies have been conducted in order to have various characteristics required for fine grain thickness on the one hand and copper drop on the other hand. For example, there are: cu_n system (Japanese/patent special opening 52.145769 and special opening (four) death number), system (Japanese patent 4 inch open Zhao 58_028893, special Kaiping 2-2 like 9&lt; number), Cu-c A technique for forming an alloy roughening layer of a bismuth-Ni system (Japanese Patent Laid-Open Publication No. 02-292894). However, although the conventional technique disclosed above can be subjected to fine roughening treatment, since C is used as the main material of the alloy, only the above-mentioned characteristics required for mi as a printed circuit board are partially made. Improvements have not been made to improve the characteristics of chemical resistance, heat resistance and surnames such as acid resistance and durability, etc., and i, in order to comprehensively improve the above-mentioned required characteristics, additional plating is required. The present invention is intended to provide a fine thickness suitable for a fine circuit substrate and can be comprehensively improved. A method of producing a surface-treated copper foil for a fine circuit board which is a characteristic of a printed circuit board. The method for producing a surface-treated steel 4 for a fine circuit board according to the present invention is characterized by comprising the following Step: Disposing a copper foil on a cathode in an electroplating bath containing Co, Ni, an ammonium salt, and a citrate to reduce the surface roughness to 〇·5 # m or less Forming a roughened layer of a C〇-Ni alloy on the copper/white surface; forming a pure Zn or Zn alloy coating layer on the roughened layer; forming an electrolytic chromate layer on the film layer; Forming a decane coupling agent treatment layer on the chromate layer. The above electroplating bath contains C〇: 1~4〇g/i, Ni: 〇·1~40g/l, and money salt 5~5 0g/l, screwed 5. The citric acid is preferably 5 to 1 〇〇 g /: 1. Further, the electroplating bath further contains Fe, Zn, Cr,

Mo、W、V、Mn、Ti、Sn中之一個以上之成分,以形成含 有必々成为之Co、Ni並含有追加成分之擇自Fe、Zn、Cr、One or more of Mo, W, V, Mn, Ti, and Sn are formed to form Co, Ni, and additional components, which are selected from Fe, Zn, and Cr.

Mo W、V、Mil、Ti、Sii中之一個以上成分所組成的粗化 處理層為佳。 以下’就本發明詳細地加以說明。 本發明不管是電解銅箔或軋製銅箔等銅箔之種類皆可 適用,對硬性及軟性之印刷電路基板全部皆玎適用。尤其, 依據本發明之製造方法,可滿足鋼箱之所需特性之全部且 1267560 可達成微細的粗度,故可較佳地使用於須要求微細線寬度 之所謂軟性印刷電路基板用銅箔積層薄膜(FCCL)之製造 用0 為使用於FCCL用銅箔,至少須要求具有〇·5 # m以下 的粗度之粗化處理層,但粗度較低的場合,接著強度及耐 化學品性、耐熱性、蝕刻性等之所需特性會變差,是其問 題。 乂 + ¾月之主要的特性,與習知者不同者為,粗化處理 層係作成為必須含有鎳-鈷合金作為主劑,為使如此之鎳 始合金之时特性可發揮至最大的限度,將作為電解反應 之媒介物的錄鹽及檸檬酸添加入電鑛浴中,進行電鐘,夢 此,可形成具有微細粗度並可滿足驻^ 粗化處理層。 白之各種所需特性的 鎳可改善耐化學品性及耐熱性’惟,於以鋅單獨地形 成粗化處理層的場合,欲析出微細粗度之=獨料 於驗钱刻時會發生殘渣是其缺點 =θ困難’ 點在於能以微細粗度析出、驗姓刻性良好=錄相反,優 獨形成粗化處理層的場合,耐 以始單 因而,若將錄與钻以適當的比例同時添力=是其問題。 時滿足各種所需特性,,准,吾人發現二預期其可同 僅以鎳與鈷作為主_成粗化處_ ” =般’實際上 成所要之微細的粗化處理声,益 °不僅無法形 度,且耐化學品性與钱刻性曰等亦'有^預期般改善接著強 本發明者等’針對此等 背力研究之結果,發現: 1267560 若對電鍍浴添加銨鹽及擰檬酸鹽,可使鎳與鈷的效果發揮 到最大限度’能形成各種特性顯著地改善的微細粗度之粗 化處理層。 吾人認為,銨鹽會參與鎳與鈷之電解析出反應路徑而 毛揮使鎳-鈷合金以更微細的結球(n〇dule)形態析出,並進 -步使結球均-地析出的作用。作為可適用的銨鹽之種 類’並無特別限制,可使用例如,硫酸銨、氯化銨、 銨等。 再者’檸檬酸係發揮用以使銨鹽與鎳與鈷類的金屬離 子形成安疋的錯合物以提高耐熱性的作用。吾人認為,在 6刎方面#核酸作為鎳-姑與銨鹽的反應助劑有特佳的 適,,有助於發揮使藉由銨鹽所形成的鎳_鈷之結球牢固地 附者於銅箔上之作用。作為本發明中適合之檸檬酸為··稗 ,酸鈉、擰檬酸鉀、檸檬酸銨、擰檬酸二銨、檸檬酸鐵錢 〜叫 巫π珂仗付蝕刻性及耐化學品性進一步 升等之銅箱所需之物理特性或機械特性做追加,或提昇 明基材與銅箔的剝離強度等之目的,可於Co、Ni之外 額外地將 Fe、Zn、Cr、Mo、W、V、Mn、Ti、Sn 中之 们以上之成分添加至電鍍浴中。例如,於黑化鍍敷層中 各有Fe、Zn,則與PET基材之接著強度可提高,蝕刻 度較快,是其優點。 币依據本發明之用以形成粗化處理層所可使用之較佳 電鍍浴之組成如下述者,惟,並非特別限定於此。其為·· 1267560A roughening layer composed of one or more of Mo W, V, Mil, Ti, and Sii is preferred. The present invention will be described in detail below. The present invention can be applied to any type of copper foil such as electrolytic copper foil or rolled copper foil, and is applicable to all rigid and flexible printed circuit boards. In particular, according to the manufacturing method of the present invention, all of the required characteristics of the steel box can be satisfied, and 1267560 can achieve fineness, so that it can be preferably used for copper foil lamination of a so-called flexible printed circuit board which requires a fine line width. For the production of film (FCCL), 0 is a copper foil for FCCL, and at least a roughening layer having a thickness of 〇·5 # m or less is required. However, when the thickness is low, the strength and chemical resistance are followed. The required characteristics such as heat resistance and etching property are deteriorated, which is a problem. The main characteristics of 乂+3⁄4 months are different from those of the conventional ones. The roughening treatment layer is required to contain a nickel-cobalt alloy as a main component, so that the characteristics of such a nickel-based alloy can be maximized. The salt and citric acid, which are the vehicles of the electrolysis reaction, are added to the electric ore bath to carry out the electric clock. In this case, the fineness can be formed and the coarsening treatment layer can be satisfied. Nickel, which has various properties required for white, can improve chemical resistance and heat resistance. However, in the case where zinc is used to form a roughened layer separately, it is necessary to precipitate fineness = the residue will occur when the money is examined. Is the disadvantage = θ is difficult' point is that it can be precipitated in fine thickness, and the surname is good. If the recording is reversed, the roughening treatment layer is formed, and the order is to be resistant. At the same time add force = is its problem. When we meet all the required characteristics, we can see that it is expected that it can be the same as nickel and cobalt as the main _ _ _ _ _ _ _ 'actually into the desired fine roughening sound, not only can not Shape, chemical resistance and money, etc. also have 'expected improvement, and then the inventors, etc.' For the results of these back-force studies, found: 1267560 If adding ammonium salt and lemon The acid salt can maximize the effect of nickel and cobalt. It can form a roughened layer with fineness which is significantly improved in various characteristics. I believe that the ammonium salt will participate in the electrolysis of the reaction path between nickel and cobalt. The nickel-cobalt alloy is precipitated in the form of a finer ball, and the ball is uniformly precipitated in the form of a ball. The type of the applicable ammonium salt is not particularly limited, and for example, sulfuric acid can be used. Ammonium, ammonium chloride, ammonium, etc. Further, the 'citric acid system functions as a complex to form an ampoule with an ammonium salt and a metal ion of nickel and cobalt to improve heat resistance. # nucleic acid as a reaction between nickel-gu and ammonium salts The agent has a particularly good function, and contributes to the action of firmly binding the nickel-cobalt ball formed by the ammonium salt to the copper foil. As a suitable citric acid in the present invention, the acid is Sodium, potassium citrate, ammonium citrate, diammonium citrate, citrate iron ~ 巫 珂仗 珂仗 蚀刻 etch and chemical resistance further increase the physical properties or mechanical properties of the copper box For the purpose of adding or improving the peeling strength of the bright substrate and the copper foil, it is possible to additionally add components other than Fe, Zn, Cr, Mo, W, V, Mn, Ti, and Sn to the surface of Co and Ni. In the electroplating bath, for example, if Fe and Zn are contained in the blackened plating layer, the adhesion strength to the PET substrate can be improved, and the etching degree is faster, which is an advantage. The coin is used to form the roughening according to the present invention. The composition of the preferred plating bath that can be used for the treatment layer is as follows, but is not particularly limited thereto. It is 1267560

Co金屬離子濃度··Co metal ion concentration··

Ni金屬離子濃度·· 0.1〜40g/l 其他金屬離子濃度·· 0.001〜5g/l 銨鹽·· 5〜50g/lNi metal ion concentration··0.1~40g/l Other metal ion concentration··0.001~5g/l Ammonium salt·· 5~50g/l

檸檬酸納(C6H5Na3〇7· 2h2〇): 5〜1〇〇g/I 若用上述組成之電鍍浴形成粗化處理層, 一的粗化處理層,是其優點。 更: 之電錢浴的臨 的粗化處理層 。其為:Sodium citrate (C6H5Na3〇7·2h2〇): 5~1〇〇g/I If the roughening layer is formed by the plating bath of the above composition, the roughened layer is an advantage. More: The roughening treatment layer of the electric money bath. It is:

再者,電解條件固然可在能形成粗化層 界電流密度附近進行電解,,淮,就形成均—Furthermore, the electrolysis conditions can be electrolyzed near the current density at which the rough layer boundary can be formed.

之觀點考量,大较L |V A致上以遠擇下述的範圍為佳 pH ·· 2〜6 電鍍液溫度:20〜60°C 黾流您度·· 1〜5 0A/dm2 處理時間:1〜2〇秒 刀 形成純Ζη或211合全被❹μ理/ 金被膜層。作為可溶的Ζη合金有:From the point of view of the consideration, the ratio is much better than L | VA. The following range is good pH ·· 2~6 Plating solution temperature: 20~60°C 黾流度度··1~5 0A/dm2 Processing time: 1 The ~2 〇 second knife forms a pure Ζ or 211 ❹ ❹ 理 理 / gold coating layer. As a soluble Ζη alloy, there are:

:、Z—n-Cr、Zn-C〇、Zn_Ni、^^^ 寺。被膜層形成條件可由通常使㈣條件中選擇使用 如,使用下这般的條件可得到較佳的效果 限定於此。 i 其他金屬離子:l〇g/l以下 電解浴組成: Zn金屬離子: PH : 3.0〜4.0 溫度:常溫 10 1267560 電流密度·· 0.1〜3A/dm2 處理時間:1〜4秒 焓俚入十丨老μ 形成電解鉻酸鹽層及号 烷偶合劑處理層等之通常的防 電路基板用銅_可得以完成。1層’則本發明之微細 ㈣鹽處理條件’可由通常的處理條件選擇使用,例 如,右使用下述般的條件,可得 特別限定於此。 ㈣較佳的效果,惟,並非 電解浴之Cr〇3濃度·· 〇1〜1〇g/1 電解液之pH : 4.0〜5«〇 電解液溫度··常溫 電流密度:0.2〜2A/dm2 處理時間:2〜5秒 可形成薄的由鉻的氫氧化物及鉻 重量%的砍烧 加以乾燥而得:, Z-n-Cr, Zn-C〇, Zn_Ni, ^^^ Temple. The film formation condition can be selected by generally using (4) conditions. For example, a preferred effect can be obtained by using the following conditions. i Other metal ions: l〇g/l or less electrolytic bath composition: Zn metal ion: PH: 3.0~4.0 Temperature: normal temperature 10 1267560 Current density · · 0.1~3A/dm2 Processing time: 1~4 seconds into the tenth The old μ can be formed by forming a common copper plate for preventing circuit boards, such as an electrolytic chromate layer and an alkane coupling agent treatment layer. In the first layer, the fine (tetra) salt treatment condition 'is according to the present invention can be selected and used in accordance with usual processing conditions. For example, the following conditions can be used as the right, and it is particularly limited thereto. (4) The best effect, however, is not the Cr〇3 concentration of the electrolytic bath··1~1〇g/1 pH of the electrolyte: 4.0~5«〇 electrolyte temperature·normal temperature current density: 0.2~2A/dm2 Processing time: 2~5 seconds can be formed by drying thin chrome hydroxide and chromium by weight chopping

若施行鉻酸鹽處理, 的氧化物所構成的防鏽層 矽烷偶合劑處理,例如,可將〇 〇〇5〜2 偶合劑稀釋到水中,再塗佈於鉻酸鹽層上 到。 【實施方式】 (實施例1) 使用表面粗度(RZ)為U…下,厚度為心m的 軋製銅羯。對銅结的表面進行電解鹼性脫脂,以—硫 酸浸潰H)秒,再以純水洗淨後,以下述的條件形成粗化 11 I267560If the chromate treatment is carried out, the anti-rust layer composed of the oxide is treated with a decane coupling agent. For example, the 〇 5 5 coupling agent can be diluted into water and applied to the chromate layer. [Embodiment] (Example 1) A rolled copper crucible having a surface roughness (RZ) of U... and a thickness of m was used. The surface of the copper junction was subjected to electrolytic alkaline degreasing, and was immersed in sulfuric acid for H), and then washed with pure water to form a roughened condition under the following conditions. 11 I267560

〈粗化處理層形成條件&gt; 以下述揭示的條件依序 【、發燒偶合劑處理。 電解浴組成:<Colding treatment layer formation conditions> The conditions disclosed below were followed by [the sensation coupling agent treatment. Electrolytic bath composition:

Co金屬離子(C〇s〇4 · 7H20)濃度:5g/l、Ni金屬離子 (NiS〇4 · 6H2〇)濃度:2g/卜檸檬酸鈉(C6H5Na307 · 2h2〇): 25g/卜硫酸銨((NH4)2S04) : 15g/l PH : 5.4 電解液的溫度:25°C 電流密度:25A/dm2 鍍敷時間:8秒 &lt;Ζη被膜層形成條件〉Co metal ion (C〇s〇4 · 7H20) concentration: 5g / l, Ni metal ion (NiS 〇 4 · 6H2 〇) concentration: 2g / sodium citrate (C6H5Na307 · 2h2 〇): 25g / b ammonium sulfate ( (NH4)2S04) : 15g/l PH : 5.4 Electrolyte temperature: 25°C Current density: 25A/dm2 Plating time: 8 seconds &lt;Ζη Film formation conditions〉

ZnS04 . h2〇 : 5g/l PH : 3.0 溫度:常溫 電流密度:1 A/dm2 處理時間4秒 &lt;鉻酸鹽防鏽處理條件&gt;ZnS04 . h2〇 : 5g/l PH : 3.0 Temperature: normal temperature Current density: 1 A/dm2 Treatment time 4 seconds &lt;Chromate anti-rust treatment conditions&gt;

Cr03 濃度:5g/i pH : 5.0 溫度:常溫 電流密度:0.5A/dm2 處理時間:4秒 &lt;矽烧偶合劑處理條件〉 12 1267560 於施行鉻酸鹽防鏽處理之後,以3 —環氧丙氧基丙基 三甲氧基矽烷0.1重量%之水溶液藉由喷霧而塗佈後,於150 °C之乾燥爐中乾燥30秒。 (貫施例2) 除了下述所揭示之粗化處理層形成條件之外,使用之 鋼箔的種類、脫脂、酸洗及水洗等之前處理條件及其他表 面處理條件(Zn被膜層形成、鉻酸鹽處理及矽烷偶合劑處 理條件)係與實施例1相同。 &lt;粗化處理層形成條件&gt; 電解浴組成:Cr03 concentration: 5g/i pH : 5.0 Temperature: normal temperature current density: 0.5A/dm2 treatment time: 4 seconds &lt; simmering coupling agent treatment conditions > 12 1267560 After performing chromate rust treatment, 3-epoxy An aqueous solution of propoxypropyltrimethoxydecane 0.1% by weight was applied by spraying, and then dried in a drying oven at 150 ° C for 30 seconds. (Example 2) In addition to the conditions for forming the roughened layer disclosed below, the type of steel foil to be used, the pretreatment conditions such as degreasing, pickling, and water washing, and other surface treatment conditions (formation of Zn film layer, chromium) The acid salt treatment and the decane coupling agent treatment conditions were the same as in Example 1. &lt;Roughening treatment layer formation conditions&gt; Electrolysis bath composition:

Co金屬#子(CoS04 · 7H20)濃度:6g/l、Ni金屬離子 (NiS〇4· 6H20)濃度:〇.5g/;l、檸檬酸鈉(C6H5Na3〇7· 2H2〇): 25g/l、硫酸銨((NH4)2S04) : 15g/l PH : 5.4 電解液的溫度:25°C 電流密度·· 20A/dm2 鍍敷時間:10秒 (貫施例3) 除了下述所揭示之粗化處理層形成條件之外,使 ^的種m 及纟洗等之前處理條件及其 面處理條件(Zn被膜層形成、鉻酸鹽處理及矽 二 理條件)係與實施例1相同。 13 1267560 &lt;粗化處理層形成條件〉 電解浴組成:Co metal #子(CoS04 · 7H20) concentration: 6g / l, Ni metal ion (NiS 〇 4 · 6H20) concentration: 〇. 5g /; l, sodium citrate (C6H5Na3 〇 7 · 2H2 〇): 25g / l, Ammonium sulphate ((NH4)2S04): 15g/l PH : 5.4 Temperature of electrolyte: 25 ° C Current density · 20 A/dm 2 Plating time: 10 seconds (Example 3) In addition to the coarsening disclosed below In addition to the treatment layer formation conditions, the pretreatment conditions such as the seed m and the rinsing, and the surface treatment conditions (the Zn coating layer formation, the chromate treatment, and the bismuth treatment conditions) were the same as in the first embodiment. 13 1267560 &lt;Roughening treatment layer formation conditions> Electrolytic bath composition:

Co金屬離子(CoS04 · 7H2〇)濃度:6g/l、Ni金屬離子 (NlS04 · 6H20)濃度:lg/;l、檸檬酸鈉(C6H5Na307 · 2H2〇): 25g/l、硫酸銨((NH4)2S04) ·· I5g/1 PH : 5.4 電解液的溫度:25°C 電流密度:22A/dm2 鍍敷時間:10秒 (實施例4) 除了下述所揭示之粗化處理層形成條件之外,使用之 銅箔的種類、脫脂、酸洗及水洗等之前處理條件及其他表 面處理條件(Zn被膜層形成、鉻酸鹽處理及矽烷偶合劑處 理條件)係與實施例1相同。 &lt;粗化處理層形成條件〉 電解浴組成:Co metal ion (CoS04 · 7H2 〇) concentration: 6g / l, Ni metal ion (NlS04 · 6H20) concentration: lg /; l, sodium citrate (C6H5Na307 · 2H2 〇): 25g / l, ammonium sulfate ((NH4) 2S04) ·· I5g/1 PH : 5.4 Temperature of electrolyte: 25 ° C Current density: 22 A/dm 2 Plating time: 10 seconds (Example 4) In addition to the conditions for forming the roughened layer disclosed below, The type of copper foil to be used, the pretreatment conditions such as degreasing, pickling, and water washing, and other surface treatment conditions (formation of Zn coating layer, chromate treatment, and treatment conditions of decane coupling agent) are the same as in the first embodiment. &lt;Roughening treatment layer formation conditions> Electrolysis bath composition:

Co金屬離子(C0SO4 · 71^0)濃度:5g/卜沁金屬離子 (NiS〇4 . 6H20)濃度.2g/l、Fe 金屬離子(FeS〇4 · 7H2〇)浪 度· lg/1、檸檬酸鈉(C6H5Na307 · 2H2〇) : 25g/l、硫酸銨 ((NH4)2S〇4) : 15g/l PH : 5.4 電解液的溫度:25°C 電流密度:25A/dm2 14 1267560 鍍敷時間:8秒 (貫施例5 ) 除了下述所揭示之粗化處理層形成條件之外,使用之 銅v|的種類、脫脂、酸洗及水洗等之前處理條件及其他表 面處理條件(Ζιι被膜層形成、鉻酸鹽處理及矽烷偶合劑處 理條件)係與實施例1相同。 &lt;粗化處理層形成條件&gt; 電解浴組成:Co metal ion (C0SO4 · 71^0) concentration: 5g / dip metal ion (NiS 〇 4. 6H20) concentration. 2g / l, Fe metal ion (FeS 〇 4 · 7H2 〇) wave · lg / 1, lemon Sodium (C6H5Na307 · 2H2〇): 25g/l, ammonium sulfate ((NH4)2S〇4): 15g/l PH : 5.4 Temperature of electrolyte: 25°C Current density: 25A/dm2 14 1267560 Plating time: 8 seconds (Example 5) In addition to the conditions for forming the roughened layer disclosed below, the type of copper v| used, the pretreatment conditions such as degreasing, pickling, and water washing, and other surface treatment conditions (Ζιι film layer) The formation, chromate treatment, and decane coupling agent treatment conditions were the same as in Example 1. &lt;Roughening treatment layer formation conditions&gt; Electrolysis bath composition:

Co金屬離子(C〇S04 · 7H20)濃度:5g/;l、Ni金屬離子 (NiS04 · 6H20)濃度:2g/l、Zn 金屬離子(ZnS〇4 · h2〇)濃 度:lg/1、檸檬酸鈉(C6H5Na307 · 2H2〇) : 25g/l、硫酸銨 ((NH4)2S04) : 15g/l PH : 5.4 電解液的溫度:25°C 電流密度:25A/dm2 鍍敷時間:8秒 (比較例1) 除了實施例1的粗化處理層形成條件中,於電鍍浴中 不含硫酸銨之外,其餘的條件,係與實施例1同樣地施行 表面處理。 (比較例2) 15 1267560 除了實施例!的粗化處理層形 不冬这供私κ 丨丨 々、电趟浴中 彳 =納之外’其餘的‘係與實施…樣地施 (比較例3) 人除了實施例丨的粗化處理層形成條件中,於電鍍浴中 不3 N!之外’其餘的條件,係與實施例丨同樣地施行表 面處理。 (比較例4) 除了實施例1的粗化處理層形成條件中,於電錄浴中 不含Co之外,其餘的條件,係與實施例丨同樣地施行表 表1為對實施例與比較例以下述般的試驗條件測定各 種所需特性加以比較的結果。 [表1]Co metal ion (C〇S04 · 7H20) concentration: 5g /; l, Ni metal ion (NiS04 · 6H20) concentration: 2g / l, Zn metal ion (ZnS 〇 4 · h2 〇) concentration: lg / 1, citric acid Sodium (C6H5Na307 · 2H2〇): 25g/l, ammonium sulfate ((NH4)2S04): 15g/l PH : 5.4 Electrolyte temperature: 25°C Current density: 25A/dm2 Plating time: 8 seconds (Comparative example) 1) The surface treatment was carried out in the same manner as in Example 1 except that the ammonium sulfate was not contained in the plating bath in the conditions for forming the roughened layer of Example 1. (Comparative Example 2) 15 1267560 In addition to the examples! The roughening treatment layer is not winter. This is for the private κ 丨丨々, electric 趟 bath, 彳 = ' 纳 纳 纳 纳 纳 纳 纳 纳 纳 纳 纳 纳 纳 纳 纳 纳 纳 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( In the layer formation conditions, the surface treatment was carried out in the same manner as in Example ' except for the conditions other than 3 N in the plating bath. (Comparative Example 4) Except that the conditions for forming the roughened layer of Example 1 were such that Co was not contained in the electrocalation bath, the other conditions were carried out in the same manner as in Example 表, and the examples and comparisons were carried out. EXAMPLES The results of comparison of various desired characteristics were measured under the following test conditions. [Table 1]

特性試驗結果 接著強度 (Kgf/cm) 耐熱接著強 度(Kgf/cm) 耐HC1性 耐KCN性 耐煮沸性 鹼蝕刻性 實施例 5 9 0. % 6 9 0. 1 73 0. 75 0. 1.74 οCharacteristic test results Next strength (Kgf/cm) Heat resistance strength (Kgf/cm) HC1 resistance KCN resistance Boiling resistance Alkali etching property Example 5 9 0. % 6 9 0. 1 73 0. 75 0. 1.74 ο

74 0.I 76 0.i 〇 〇 〇 〇 〇 〇 〇 〇74 0.I 76 0.i 〇 〇 〇 〇 〇 〇 〇 〇

PP

P 比較例 8 6 0. 5 8 a 5 8 0. 76 0. 9 0.41 0.57 2 5 0. 0. 〇P Comparative Example 8 6 0. 5 8 a 5 8 0. 76 0. 9 0.41 0.57 2 5 0. 0. 〇

X 〇 〇 〇 〇 〇0〇X 〇 〇 〇 〇 〇0〇

XX

000〇〇/X D000〇〇/X D

X XX X

Xi 16 1267560 生特彳I質驗條件 接著強度:將環氧樹脂含浸基材與銅箔的非平滑面進 打積層作成積層板,將試驗片作成為寬10mm,利用接著 強度測定機(Universal Test Macliine:UTM)進行測定。 耐熱接著強度:於177。(:之乾烤箱(Dry〇ven)中烘烤24〇 小時後,測定接著強度。 耐Ηα性:於18%之KC1中浸潰i小時後,測定接著 強度惡化率。 耐煮沸性(Loss in after boling in water):於 1〇〇它的 H 〇 中浸潰2小時後,測定接著強度惡化率。 〈耐HC1性、耐KCN性、耐煮沸性評價基準&gt; 〇:浸潰前後的惡化率為5 %以下 △ ··浸潰前後的惡化率為5%〜25%以下 x ··浸潰前後的惡化率為2 5 〇/〇以上 驗餘刻性··於ρΗ9·7〜10·2、比重119〜121的餘刻液 中,於溫度50°C條件下浸潰8分鐘後,就1〇dm2範圍内的 基材上所殘留之殘留銅,利用光學顯微鏡進行觀察。 &lt;鹼蝕刻性評價基準&gt; 〇·蝕刻後,於基材上無殘留的殘留銅或合金層。 △ •蝕刻後,於基材上有若干殘留的殘留銅或合金層。 X :蝕刻後,於基材上殘留銅或合金層多。 如上表所不般,可知:於本發明之實施例的場合,接 著強度、耐熱性(耐熱接著強度)、耐氰化鉀性等之耐化學 品性、财煮沸性及鹼蝕刻性均為優異。 17 1267560 相對於此,於去除依據本發明之制4 〜表w方法之粗化處理 層的必須構成要件中之一以上的比較例 于乂w之%合,上述特性 中之至少1種會較本發明之實施例差 J差例如,於接著強度 及对熱接著強度方面,本發明之實旆 一 知a(只轭例相較於比較例大致 各提高9 · 6 %以上、21 · 9 %以上。 發明之效旲 如上述說明般,藉由本發明之製造方法所製造之表面Xi 16 1267560 Quality test conditions Next strength: The epoxy resin impregnated substrate and the non-smooth surface of the copper foil are laminated to form a laminate, and the test piece is made to have a width of 10 mm, and the strength tester (Universal Test) is used. Macliine: UTM) was measured. Heat resistant strength: at 177. (: Dry baking oven (Dry〇ven) was baked for 24 hours, and the subsequent strength was measured. Resistance to Ηα: After immersion in 18% KC1 for 1 hour, the subsequent strength deterioration rate was measured. Boiling resistance (Loss in After boling in water): After immersing in H 〇 for 2 hours, the rate of deterioration of the strength was measured. <Evaluation criteria for HC1 resistance, KCN resistance, and boiling resistance> 〇: Deterioration before and after immersion The rate is 5 % or less △ ·· The deterioration rate before and after immersion is 5% to 25% or less x · The deterioration rate before and after immersion is 2 5 〇 / 〇 or more. · 于 · · · · · · 2. In the residual liquid of the specific gravity of 119 to 121, after being immersed for 8 minutes at a temperature of 50 ° C, the residual copper remaining on the substrate in the range of 1 〇 dm 2 was observed by an optical microscope. Etching evaluation standard> After etching, there is no residual copper or alloy layer remaining on the substrate. △ • After etching, there are some residual residual copper or alloy layers on the substrate. X: After etching, at the base There are many copper or alloy layers remaining on the material. As shown in the above table, it can be seen that in the case of the embodiment of the present invention, the strength and resistance are followed. It is excellent in chemical resistance, boilability, and alkali etching property, such as heat (heat-resistance strength) and potassium cyanide resistance. 17 1267560 In contrast, the method of removing the method according to the present invention from 4 to W is used. The comparative example of one or more of the necessary constituent elements of the chemical treatment layer is combined with 乂w, and at least one of the above characteristics is inferior to the embodiment of the present invention, for example, in terms of adhesion strength and thermal strength. According to the present invention, the yoke example is substantially increased by 9.6 % or more and 21 9% or more as compared with the comparative example. The effect of the invention is as described above, and is produced by the production method of the present invention. surface

處理銅箱,於與基板的接著強度及耐熱接著強度、耐化學 品性、蝕刻性等之銅箔所需特性上均優異,故作為微細電 路基板用銅箔非常適合。 兒 【圖式簡單說明】 無 【主要元件符號說明】The copper can be excellent as a copper foil for a fine circuit substrate, because it is excellent in the properties required for the copper foil, such as the adhesive strength of the substrate, the heat-resistant adhesive strength, the chemical resistance, and the etching property.儿 [Simple diagram description] None [Main component symbol description]

1818

Claims (1)

1267560 公告本 , 十、申請專利範圍: h一種微細電路基板用表面處理銅落之製造方法,其 特徵在於,r人丄 、 係含有下述步驟: 於合有Co、Ni、銨鹽及擰檬酸鹽的電鍍浴中將銅箔配 置於陰極,1 ^ Μ使表面粗度成為0.5// m以下的方式在該銅 羯表面上仏山 啊出形成Co-Ni合金之粗化處理層; 於5亥粗化處理層上形成純Zn或Zn合金被膜層; 於&quot;亥被膜層上形成電解鉻酸鹽層;及 於4絡酸鹽層上形成矽烷偶合劑處理層。 2·如申請專利範圍第1項之微細電路基板用表面處理 銅羯之制、生+ 衣k方法,其中該電鍍浴,係含有C〇 : 1〜4〇g/卜Ni : 〜4〇g/1、銨鹽5〜50g/卜檸檬酸5〜lOOg/卜 户3.如申請專利範圍第1項之微細電路基板用表面處理 銅箔之製造方法,其中,該電鍍浴中進一步含有擇自Fe、 Zn、Cr、Mo、w、V、Μη、Ti、Sri中之一個以上之成分, 以形成含有必須成分之Co、Ni並含有追加成分之擇自Fe、 Zn、Cr、Mo、w、V、Μη、Ti、Sn 中之一個以 μ 士、 ,aa t 扪以上成分所組 成的粗化處理層。 4· 一種微細電路基板用表面處理銅箔,复 r 〜将徵在於, 係猎由申請專利範圍第1至第3項中任一 者。 ,之方法所製造 十一、圖式:1267560 Announcement, X. Patent application scope: h A method for manufacturing a surface-treated copper drop for a fine circuit substrate, characterized in that the R human body comprises the following steps: combining Co, Ni, ammonium salt and lemon In the electroplating bath of the acid salt, the copper foil is disposed on the cathode, and the surface roughness is 0.5//m or less, and the roughened layer of the Co-Ni alloy is formed on the surface of the copper crucible; A pure Zn or Zn alloy coating layer is formed on the roughening treatment layer; an electrolytic chromate layer is formed on the &quot;Hai film layer; and a decane coupling agent treatment layer is formed on the 4 complex acid layer. 2. The method of surface-treating copper enamel, raw + coating k for a fine circuit substrate according to claim 1, wherein the plating bath contains C 〇: 1 to 4 〇 g / 卜 Ni : 〜4 〇 g The method for producing a surface-treated copper foil for a fine circuit substrate according to the first aspect of the invention, wherein the electroplating bath further comprises a method selected from the group consisting of: 5 to 50 g of an ammonium salt; One or more of Fe, Zn, Cr, Mo, w, V, Μη, Ti, and Sri to form Co, Ni containing an essential component and containing additional components selected from Fe, Zn, Cr, Mo, w, One of V, Μη, Ti, and Sn is a roughened layer composed of a composition of μ, and aa t 扪 or more. 4. A surface-treated copper foil for a fine circuit substrate, the complex r~ is to be hunted by any one of the first to third aspects of the patent application. , the method of manufacturing XI, schema:
TW093128534A 2004-07-16 2004-09-21 Method of manufacturing surface-treated copper foil for PCB having fine-circuit pattern and surface-treated copper foil thereof TWI267560B (en)

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KR20140034698A (en) * 2012-09-12 2014-03-20 주식회사 두산 Surface treatment method of a copper foil and the copper foil surface-treated by the method
KR101427388B1 (en) 2013-06-21 2014-08-08 이을규 Reinforcing Substrate for Supporting Printed Circuit Board and Method for Processing for the Same
CN104962965B (en) * 2015-05-29 2017-08-15 灵宝金源朝辉铜业有限公司 The environment-friendly type ashing handling process of rolled copper foil
KR102481411B1 (en) 2016-01-25 2022-12-23 에스케이넥실리스 주식회사 Electrolytic copper foil and method for producing the same, and copper clad laminate and printed circuit board having the same
CN108603303B (en) * 2016-02-10 2020-11-13 古河电气工业株式会社 Surface-treated copper foil and copper-clad laminate produced using same
JP7014884B1 (en) * 2020-12-23 2022-02-01 Jx金属株式会社 Surface-treated copper foil, copper-clad laminate and printed wiring board
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