JP2920083B2 - Copper foil for printed circuit and manufacturing method thereof - Google Patents

Copper foil for printed circuit and manufacturing method thereof

Info

Publication number
JP2920083B2
JP2920083B2 JP7058225A JP5822595A JP2920083B2 JP 2920083 B2 JP2920083 B2 JP 2920083B2 JP 7058225 A JP7058225 A JP 7058225A JP 5822595 A JP5822595 A JP 5822595A JP 2920083 B2 JP2920083 B2 JP 2920083B2
Authority
JP
Japan
Prior art keywords
copper
group
layer
copper foil
zinc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP7058225A
Other languages
Japanese (ja)
Other versions
JPH08236930A (en
Inventor
俊雄 黒澤
英太 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NITSUKO GUURUDO FUOIRU KK
Original Assignee
NITSUKO GUURUDO FUOIRU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NITSUKO GUURUDO FUOIRU KK filed Critical NITSUKO GUURUDO FUOIRU KK
Priority to JP7058225A priority Critical patent/JP2920083B2/en
Publication of JPH08236930A publication Critical patent/JPH08236930A/en
Application granted granted Critical
Publication of JP2920083B2 publication Critical patent/JP2920083B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Manufacturing Of Printed Wiring (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Electroplating Methods And Accessories (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、印刷回路用銅箔及びそ
の製造方法に関するものであり、特には銅箔と樹脂基板
との接着強度を高めるために銅箔の被接着面にクロム及
びタングステンから成る第1群から選ばれた1種或いは
2種である第1群金属と、ニッケル、鉄、コバルト及び
鉛から成る第2群から選ばれた1種或いは2種以上で
ある第2群金属との両者を含有する多数の突起状(粒状
又は節こぶ状、以下単に突起状と記載する)銅電着物か
ら成る粗化処理層を形成した印刷回路用銅箔及びその製
造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copper foil for a printed circuit and a method for manufacturing the same. the first group and the metal is one or two species selected from a first group consisting of, nickel, iron, one or two species selected from cobalt and <br/> second group including zinc or al A copper foil for a printed circuit on which a roughened layer composed of a large number of projecting (granular or knotted, hereinafter simply referred to as projecting) copper electrodeposits containing both of the above second group metals and It relates to the manufacturing method.

【0002】[0002]

【従来の技術】印刷回路用銅箔は一般に、合成樹脂等の
基材に高温高圧下で積層接着され、その後目的とする回
路を形成するべくレジストを用いて所定の回路パターン
をスクリーン印刷した後、不要部を除去するために塩化
第二銅溶液等のエッチング液を使用してエッチング処理
が施される。最終的に、所要の素子が半田付けされて、
エレクトロニクスデバイス用の種々の印刷回路板を形成
する。印刷配線板用銅箔に対する品質要求は、樹脂基材
と接着される被接着面(粗化面)と光沢面とで異なる。
2. Description of the Related Art In general, a copper foil for a printed circuit is laminated and adhered to a base material such as a synthetic resin under a high temperature and a high pressure, and then a predetermined circuit pattern is screen-printed using a resist to form a desired circuit. In order to remove unnecessary portions, an etching process is performed using an etching solution such as a cupric chloride solution. Finally, the required elements are soldered,
Form various printed circuit boards for electronic devices. The quality requirements for the copper foil for printed wiring boards differ between the surface to be bonded (roughened surface) bonded to the resin substrate and the glossy surface.

【0003】本発明が関与する粗化面に対する要求とし
ては、主として、基材との引きはがし強さが高温加
熱、湿式処理、半田付け、薬品処理等の後でも充分なこ
と(剥離強度)、保存時における酸化変色のないこと
(防錆性)、基材との積層、エッチング後に生じる所
謂積層汚点のないこと(耐塩酸性)エッチングに際し
て粉落ちのないこと(粉落ち防止)等が挙げられる。中
でも、充分に高い引きはがし強度を有することは被接着
面の最も重要な基本的事項である。
The requirements for the roughened surface to which the present invention is concerned mainly include that the peel strength with the substrate is sufficient even after high-temperature heating, wet processing, soldering, chemical processing, etc. (peel strength). There is no oxidative discoloration during storage (rust prevention), no lamination with a substrate, no so-called lamination stains generated after etching (hydrochloric acid resistance), no powder fall during etching (dust fall prevention), and the like. Above all, having a sufficiently high peel strength is the most important basic matter of the surface to be bonded.

【0004】銅箔と樹脂基板との接着強度を高めるため
に、銅箔の被接着面には、多数の突起状銅電着物から成
る粗化処理層が形成されている。電解銅箔に粗化処理が
施される場合には、生箔自体がすでに凸部を有してお
り、その凸部の頂上部付近に突起状銅電着物が多数電着
して凸部を更に増強することになる。
[0004] In order to increase the adhesive strength between the copper foil and the resin substrate, a roughening layer made of a large number of projecting copper electrodeposits is formed on the surface to be bonded of the copper foil. When the roughening treatment is performed on the electrolytic copper foil, the raw foil itself has a convex portion, and a large number of projecting copper electrodeposits are electrodeposited near the top of the convex portion to form the convex portion. It will further increase.

【0005】有効な粗化処理として、特公昭54−38
053号、特公昭53−39327号等に砒素、アンチ
モン、ビスマス、セレンまたはテルルを含む酸性銅電解
浴中で限界電流密度前後で電解することが記載されてい
る。実用的には、砒酸が電解浴に添加されることが多
い。これにより生箔の凸部に多数の突起状銅電着物が形
成され、それにより接着強度が高まり、粗化処理方法と
して有効である。
An effective roughening treatment is disclosed in Japanese Patent Publication No. 54-38.
No. 053, JP-B-53-39327 and the like describe electrolysis at around a critical current density in an acidic copper electrolytic bath containing arsenic, antimony, bismuth, selenium or tellurium. Practically, arsenic acid is often added to the electrolytic bath. As a result, a large number of protruding copper electrodeposits are formed on the protruding portions of the raw foil, thereby increasing the adhesive strength, and is effective as a roughening treatment method.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、砒素が
関与する場合、電解時に銅電着物中に砒素が数100p
pm取り込まれるため、銅箔の再生その他の処理時にま
たエッチング時に砒素が溶出したエッチング液の処分時
に存在する砒素が環境上また健康上重大な問題となる。
こうした毒性元素を含まない粗化処理法としてベンゾキ
ノリン類を微量添加した浴を使用する方法(特公昭56
−41196号)、モリブデン、バナジウム或いは両者
を添加した浴での処理(特公昭62−56677号、特
公昭62−56678号)、或いはパルスめっきでの粗
化処理(特開昭63−17597号、特開昭58−16
4797号)等が提唱されているが、剥離強度、粉落ち
その他の面でいまだ必ずしも充分ではない。
However, when arsenic is involved, several hundreds of arsenic is contained in the copper electrodeposit during electrolysis.
Since the arsenic is taken in by pm, arsenic present at the time of copper foil regeneration or other processing and at the time of disposal of an etchant from which arsenic has been eluted during etching poses a serious environmental and health problem.
As a roughening treatment method that does not contain such toxic elements, a method using a bath to which a small amount of benzoquinolines are added (Japanese Patent Publication No.
No. 41196), treatment with a bath containing molybdenum, vanadium or both (Japanese Patent Publication No. Sho 62-56677 and Japanese Patent Publication No. 62-56678), or roughening treatment by pulse plating (Japanese Patent Application Laid-Open No. 63-17597, JP-A-58-16
No. 4797) has been proposed, but the peel strength, powder dropout and other aspects are not always sufficient.

【0007】本発明の課題は、印刷回路用銅箔の被接着
面について、環境問題を呈さず、しかも樹脂基板との間
で充分な接着強度を発現しそしてエッチングに際して粉
落ちを生じない粗化処理技術を確立することである。
An object of the present invention is to provide a roughened surface which does not present an environmental problem on the surface to be bonded of a copper foil for a printed circuit, exhibits sufficient adhesive strength with a resin substrate, and does not cause powder to fall off during etching. Establish processing technology.

【0008】[0008]

【課題を解決するための手段】本発明者等は、課題解決
に向けての検討の結果、(a)クロム及びタングステン
から成る第1群から選ばれた1種或いは2種である第1
群金属と(b)ニッケル、鉄、コバルト及び鉛から成
る第2群から選ばれたる1種或いは2種以上である第2
群金属との両者を含有する銅電解浴を用いて銅箔の被接
着面に多数の突起状銅電着物から成る粗化処理層を形成
すると、デンドライト(樹枝状の結晶)の発生を抑制し
そして丸みを帯びた突起が良好に電着し、銅箔と樹脂基
板との接着強度を向上しそして粉落ちを回避するのに有
用であることを見出すに至った。この知見に基づいて、
本発明は、銅箔の被接着面に、(a)クロム及びタング
ステンから成る第1群から選ばれた1種或いは2種であ
る第1群金属と(b)ニッケル、鉄、コバルト及び
ら成る第2群から選ばれた1種或いは2種以上である
第2群金属との両者を含有する多数の突起状銅電着物か
ら成る粗化処理層を有することを特徴とする印刷回路用
銅箔を提供する。
As a result of the study for solving the problems, the present inventors have found that (a) one or two of the first group selected from the first group consisting of chromium and tungsten.
Group metal and (b) nickel, iron, second is cobalt and zinc or we made one upcoming selected from the second group, or two or more
When a roughened layer composed of a large number of projecting copper electrodeposits is formed on the surface to be bonded of a copper foil using a copper electrolytic bath containing both the group metals, the generation of dendrites (dendritic crystals) is suppressed. Then, it has been found that the rounded protrusions are well electrodeposited, which is useful for improving the adhesive strength between the copper foil and the resin substrate and for avoiding powder falling. Based on this finding,
The present invention, in the bonding surface of the copper foil, (a) chromium and the first metal group and is one or two species selected from a first group consisting of tungsten (b) nickel, iron, cobalt and nitrous lead
Printed circuit, characterized in that it comprises a roughened layer consisting of a number of protruding copper electrodeposits containing both with one or the second metal group is two or more species selected from a second group consisting pressurized et al Provide copper foil for

【0009】この粗化処理層の上に従来通り更にトリー
ト層及び防錆層を形成することができ、この観点から、
本発明は更に、銅箔の被接着面に、(a)クロム及びタ
ングステンから成る第1群から選ばれた1種或いは2種
である第1群金属と(b)ニッケル、鉄、コバルト及び
鉛から成る第2群から選ばれたる1種或いは2種以上
である第2群金属との両者を含有する多数の突起状銅電
着物から成る粗化処理層と、前記粗化処理層を被覆す
る、銅、クロム、ニッケル、鉄、コバルト及び亜鉛から
成る群から選択された1種乃至2種以上の金属又は合金
から成るトリート層と、該トリート層を被覆する防錆層
とを有することを特徴とする印刷回路用銅箔を提供す
る。突起状銅電着物の脱落を防止する薄い銅めっき層を
前記粗化処理層とトリート層との間に形成するのが有益
である。
[0009] A treat layer and a rust-preventive layer can be further formed on the roughened layer in the conventional manner.
The present invention further relates to the bonding surface of the copper foil, (a) chromium and the first metal group and is one or two species selected from a first group consisting of tungsten (b) nickel, iron, cobalt, and a roughened layer consisting of a number of protruding copper electrodeposits containing both a second metal group <br/> is zinc or we made one upcoming selected from the second group, or two or more, the A treat layer comprising one or more metals or alloys selected from the group consisting of copper, chromium, nickel, iron, cobalt and zinc, which covers the roughening treatment layer, and rust prevention covering the treat layer A copper foil for a printed circuit, comprising: It is advantageous to form a thin copper plating layer between the roughened layer and the treat layer to prevent the protruding copper electrodeposit from falling off.

【0010】更に、印刷回路用銅箔を製造する方法とし
て、本発明は、酸性銅電解浴において銅箔を陰極として
限界電流密度付近で電解して銅箔の被接着面に多数の突
起状銅電着物から成る粗化処理層を形成する印刷回路用
銅箔及びその製造方法において、電解浴中に(a)クロ
ム及びタングステンから成る第1群から選ばれた1種或
いは2種である第1群金属:0.0001〜5g/l
と、(b)ニッケル、鉄、コバルト及び鉛から成る第
2群から選ばれたる1種或いは2種以上である第2群金
属:0.001〜50g/l の両者を存在せしめること
を特徴とする印刷回路用銅箔の製造方法を提供する。更
に、粗化処理層上に、好ましくは形成された粗化処理層
上に突起状銅電着物の脱落を防止する薄い銅めっき層を
電解により形成した後、銅、クロム、ニッケル、鉄、コ
バルト及び亜鉛から成る群から選択される1種乃至2種
以上の金属又は合金から成るトリート層を電解により形
成し、更に防錆処理することを特徴とする上記の印刷回
路用銅箔の製造方法が提供される。
Further, as a method of manufacturing a copper foil for a printed circuit, the present invention relates to a method for producing a copper foil in an acidic copper electrolytic bath using a copper foil as a cathode near the critical current density to form a large number of projecting copper on the surface to be bonded of the copper foil. A copper foil for a printed circuit forming a roughened layer made of an electrodeposit and a method of manufacturing the same, wherein (a) a first or two kinds selected from the first group consisting of chromium and tungsten in an electrolytic bath. Group metal: 0.0001 to 5 g / l
If, (b) nickel, iron, cobalt and zinc or we made one upcoming selected from the second group or at two or more Group 2 metal: it made present both 0.001 to 50 g / l The present invention provides a method for producing a copper foil for a printed circuit characterized by the following. Further, on the roughened layer, preferably after forming a thin copper plating layer on the formed roughened layer by electrolysis to prevent the protruding copper electrodeposits from falling off, copper, chromium, nickel, iron, cobalt And a method of producing a copper foil for a printed circuit as described above, wherein a treat layer made of one or more metals or alloys selected from the group consisting of zinc and zinc is formed by electrolysis and further subjected to rust prevention treatment. Provided.

【0011】[0011]

【作用】本発明に従えば、電解浴中に(a)クロム及び
タングステンから成る第1群から選ばれた1種或いは2
種である第1群金属:0.0001〜5g/l と、
(b)ニッケル、鉄、コバルト及び鉛から成る第2群
から選ばれたる1種或いは2種以上である第2群金属:
0.001〜50g/l の両者を存在せしめて粗化処理
層を構成することにより、突起状銅電着物が微量の第1
群金属と第2群金属とを併有することになる。クロム及
び(又は)タングステンの第1群金属成分が存在するこ
とにより、銅電着時の核発生を抑制してデンドライトの
形成を抑制しまた電着突起状粒子を丸めて、接着強度の
向上に有用となり、またエッチング時の粉落ちを防止す
る。クロム又はタングステンイオンが電解浴に存在しな
いと、限界電流付近で電解すると、銅電着物は樹枝状と
なり、接着強度を改善するよりむしろ損なうことにな
る。粉落ちが生じると、エッチング処理後銅の微粉が残
るため電気的特性を損なう危険がある。また、ッケ
ル、鉄、コバルト及び鉛から成る第2群から選ばれる
1種或いは2種以上の第2群金属成分の存在は、粗化粒
子の異方性成長を促し、接着強度の向上に寄与する。
According to the present invention, (a) one or two selected from the first group consisting of chromium and tungsten are contained in the electrolytic bath.
A first group metal as a seed: 0.0001 to 5 g / l;
(B) nickel, iron, cobalt and zinc or we made a second one upcoming selected from the group or at two or more second metal group:
By forming the roughened layer by allowing both of 0.001 to 50 g / l to be present, a small amount of the first electrodeposited copper is deposited.
It has both the group metal and the second group metal. The presence of the first group metal component of chromium and / or tungsten suppresses nucleation during copper electrodeposition and suppresses the formation of dendrites, and also improves the adhesion strength by rolling the electrodeposited projection particles. It is useful and prevents powder from falling off during etching. If chromium or tungsten ions are not present in the electrolytic bath, electrolysis near the limiting current will cause the copper electrodeposit to become dendritic and impair rather than improve the bond strength. If powder fall occurs, there is a risk that electrical characteristics may be impaired since fine copper powder remains after the etching treatment. Also, two Tsu Ke <br/> Le, iron, the presence of one or more of the second group metal component selected from cobalt and zinc or we made the second group, anisotropic growth of the roughening particles And contribute to the improvement of the adhesive strength.

【0012】[0012]

【発明の具体的な説明】本発明は、圧延銅箔及び電解銅
箔いずれをも対象としうるが、特には電解銅箔が対象と
される。電解銅箔に固有に存在する多数の凸部を個々に
更に増強するのに有用である。従来のように砒素に代表
される有毒元素を含む銅電解浴を使用しての限界電流前
後の電解によりこうした粗化処理層が効果的に形成され
るが、砒素が数100ppm粗化処理層にとり込まれる
ために環境及び健康問題を呈したのである。
DETAILED DESCRIPTION OF THE INVENTION The present invention can be applied to both rolled copper foil and electrolytic copper foil, and particularly to electrolytic copper foil. It is useful to further enhance individual multiple bumps inherent in the electrolytic copper foil. Such a roughened layer is effectively formed by electrolysis before and after the limit current using a copper electrolytic bath containing a toxic element represented by arsenic as in the conventional case. They were exposed to environmental and health problems.

【0013】図1は、電解銅箔の被接着面側の処理層の
例を概略的に示す。生箔1の被接着面には電解銅箔であ
るために、その表面全体にわたって凸部2が分布してい
る。この生箔上に粗化処理が行なわれる。本発明に従う
粗化処理により、凸部2の頂上部付近を主体として
(a)クロム及びタングステンから成る第1群から選ば
れた1種或いは2種である第1群金属と(b)ニッケ
ル、鉄、コバルト及び鉛から成る第2群から選ばれた
る1種或いは2種以上である第2群金属とを同時に含有
する多数の突起状銅電着物から構成される粗化処理層3
が形成され、凸部を増強する。圧延銅箔のような平滑な
銅箔に粗化処理が施された場合には電着物自体が突起部
を構成する。この後、多数の処理態様があるが、例えば
突起状銅電着物の脱落を防止するために薄い銅めっき層
4が形成され、そして後耐熱性その他の特性を付与する
ためにクロム、ニッケル、鉄、コバルト及び亜鉛等の金
属乃至合金、例えば黄銅等のトリートめっき層5が形成
され、最後にクロメート処理等に代表される防錆層6が
形成される。こうして処理された銅箔被接着面が樹脂基
板等に接着される。以下、各工程について詳述する。
FIG. 1 schematically shows an example of a treatment layer on the surface to be bonded of an electrolytic copper foil. Since the surface to be bonded of the raw foil 1 is an electrolytic copper foil, the protrusions 2 are distributed over the entire surface. A roughening treatment is performed on the raw foil. The roughening treatment according to the present invention, the vicinity of the top portion of the convex portion 2 mainly (a) the first group metal and which is one or more of the compounds selected from the first group consisting of chromium and tungsten (b) two Tsu Ke <br/> Le, iron, is composed of a large number of protruding copper electrodeposits containing cobalt and one upcoming selected from zinc or we made the second group, or two or more at which the second metal group simultaneously Roughening layer 3
Are formed, and the convex portions are strengthened. When a roughening treatment is performed on a smooth copper foil such as a rolled copper foil, the electrodeposit itself forms a projection. After this, there are a number of treatment modes, for example, a thin copper plating layer 4 is formed to prevent the protruding copper electrodeposit from falling off, and chromium, nickel, iron is added to impart post heat resistance and other properties. Then, a treat plating layer 5 of a metal or an alloy such as cobalt and zinc, for example, brass or the like is formed, and finally a rust prevention layer 6 represented by chromate treatment or the like is formed. The copper foil adhered surface thus treated is adhered to a resin substrate or the like. Hereinafter, each step will be described in detail.

【0014】本発明に従う粗化処理用銅電解浴のめっき
条件は次の通りである: (粗化処理用銅電解浴めっき条件) Cuイオン:5〜50g/l H2 SO4 :10〜100g/l 第1群金属(Cr、Wの1種又は2種)イオン:0.0
001〜5g/l 第2群金属(Ni、Fe、Co、Znの1種或いは2種
以上)イオン:0.001〜50g/l 温 度:室温〜50℃ Dk :5〜80A/dm2 時間:1〜30秒
The plating conditions of the copper electrolytic bath for roughening treatment according to the present invention are as follows: (Plating conditions for copper electrolytic bath for roughening treatment) Cu ions: 5 to 50 g / l H 2 SO 4 : 10 to 100 g / L First group metal (one or two of Cr and W) ions: 0.0
001~5g / l second metal group (N i, Fe, Co, 1 kind or two or more of Z n) ions: 0.001 to 50 g / l Temperature: room temperature ~50 ℃ D k: 5~80A / dm 2 hours: 1 to 30 seconds

【0015】銅電解浴中に存在させるクロム又はタング
ステンの濃度或いは両者の組合せの濃度は0.0001
〜5g/lが適当であり、好ましくは0.0002〜1
g/lである。添加量が0.0001g/l未満では接
着強度を増すのに充分な効果はなく、他方5g/lを超
えても、その効果に顕著な向上はなくまた経済的負担が
増大する。クロム又はタングステンの供給源として、ナ
トリウム塩、カリウム塩、酸化物等の使用が可能であ
る。例えば、無水クロム酸(VI)やタングステン酸ナ
トリウム(2水塩)等が使用される。また、銅電解浴中
に存在させるニッケル、鉄、コバルト、亜鉛から選ばれ
る1種或いは2種以上の組合わせの濃度は、0.001
〜50g/lが適当であり、好ましくは0.01〜20
g/lである。添加量が0.001g/l未満では接着
強度を増すべく粗化粒子の異方性成長を促すのに十分な
効果はなく、他方50g/lを超えてもその効果に顕著
な向上はない。むしろ、表面の処理ムラが目立つように
なる。ニッケル、鉄、コバルト及び亜鉛の供給源として
は、それらの硫酸塩、酸化物、水酸化物等が使用でき
The concentration of chromium or tungsten, or a combination of both, in the copper electrolytic bath is 0.0001.
To 5 g / l, preferably 0.0002 to 1 g / l.
g / l. If the added amount is less than 0.0001 g / l, there is no sufficient effect to increase the adhesive strength, while if it exceeds 5 g / l, the effect is not remarkably improved and the economic burden increases. As a source of chromium or tungsten, a sodium salt, a potassium salt, an oxide or the like can be used. For example, chromic anhydride (VI), sodium tungstate (dihydrate) and the like are used. Further, Runi be present in the electrolytic copper bath nickel, iron, cobalt, the concentration of one or more combinations selected zinc or colleagues, 0.001
5050 g / l is suitable, preferably 0.01-20.
g / l. If the amount is less than 0.001 g / l, there is no sufficient effect to promote the anisotropic growth of the roughened particles to increase the adhesive strength, and if it exceeds 50 g / l, the effect is not significantly improved. Rather, the processing unevenness on the surface becomes conspicuous. As a source of nickel, iron, cobalt, and zinc, sulfates, oxides, hydroxides, and the like thereof can be used .

【0016】上記のような粗化処理後、必要に応じ公知
の処理、例えば薄い銅めっき層を形成し、突起状電着物
の脱落を防止することが好ましい。この薄い銅層の被覆
として、もっとも一般的な、硫酸銅浴を使用した場合の
好ましい銅電解条件は下記の通りである。 (薄い銅めっき層電解条件) Cuイオン:5〜50g/l H2 SO4 :10〜100g/l 温度:室温〜50℃ Dk :5〜80A/dm2 時間:1〜30秒
After the above-described roughening treatment, it is preferable that a known treatment is performed as necessary, for example, a thin copper plating layer is formed to prevent the protruding electrodeposits from falling off. The most common copper electrolysis conditions when a copper sulfate bath is used as the coating of this thin copper layer are as follows. (Thin copper-plated layer electrolysis conditions) Cu ion: 5~50g / l H 2 SO 4 : 10~100g / l Temperature: room temperature ~50 ℃ D k: 5~80A / dm 2 Time: 1-30 seconds

【0017】粗化面に、好ましくは上記の薄い銅めっき
を施した後、銅、クロム、ニッケル、鉄、コバルト及び
亜鉛から成る群から選択される1種乃至2種以上の金属
層または合金層を形成するトリート処理を行うことが好
ましい。例えば、銅、クロム、ニッケル、鉄、コバルト
或いは亜鉛の金属層、或いは銅−ニッケル、銅−コバル
ト、銅−ニッケル−コバルト、銅−亜鉛等に代表され得
る合金層が形成されうる(例えば、特公昭56−902
8号、特開昭54−13971号、特開平2−2928
94号、特開平2−292895号、特公昭51−35
711号、特公昭54−6701号参照)。こうしたト
リート処理層は銅箔の最終性状を決定するものとしてま
た障壁層としての役割を果たす。
After the roughened surface is preferably subjected to the above-described thin copper plating, one or more metal layers or alloy layers selected from the group consisting of copper, chromium, nickel, iron, cobalt and zinc Is preferably performed. For example, a metal layer of copper, chromium, nickel, iron, cobalt or zinc, or an alloy layer typified by copper-nickel, copper-cobalt, copper-nickel-cobalt, copper-zinc, etc. can be formed (for example, Kosho 56-902
8, JP-A-54-13971, JP-A-2-2928
No. 94, JP-A-2-292895, JP-B-51-35
711, JP-B-54-6701). Such a treated layer plays a role in determining the final properties of the copper foil and also as a barrier layer.

【0018】亜鉛被膜を例にとると、亜鉛電気めっきお
よび無電解めっきいずれでも行いうるが、粗化面片面に
のみ被膜を形成するためには亜鉛電解操作による方が便
宜である。また、厚さの精確な制御、厚さの一様性、付
着層の緻密化等の観点からも電解操作が好ましい。亜鉛
電解操作は、硫酸亜鉛めっき浴や塩化亜鉛めっき浴に代
表される酸性亜鉛めっき浴、シアン化亜鉛めっき浴のよ
うなアルカリ性亜鉛めっき浴、あるいはピロリン酸亜鉛
めっき浴が使用しうるが、もっとも一般的に使用される
硫酸亜鉛浴で充分である。硫酸亜鉛浴を使用した場合の
好ましい亜鉛電解条件は下記の通りである。 (亜鉛トリート処理電解条件) ZnSO4 ・7H2 O:50〜350g/l pH(硫酸):2.5〜4.5 浴温度:40〜60℃ 陰極:銅箔 陽極:亜鉛または不溶性陽極 陰極電流密度:0.05〜0.4A/dm2 時間:10〜30秒 亜鉛被覆量は、15〜1500μg/dm2 とすること
が好ましく、特に好ましくは15〜400μg/dm2
である。亜鉛被覆量は、積層時の樹脂基板の種類によっ
て異なる。例えばフェノール樹脂基板用は、15〜60
μg/dm2 とし、ガラスエポキシ樹脂基板用は、60
〜1500μg/dm2 、特に好ましくは60〜400
μg/dm2 とする。
Taking a zinc coating as an example, both zinc electroplating and electroless plating can be performed. However, in order to form a coating on only one surface of the roughened surface, it is more convenient to use a zinc electrolytic operation. The electrolytic operation is also preferable from the viewpoint of precise control of the thickness, uniformity of the thickness, and densification of the adhesion layer. For the zinc electrolysis operation, an acidic zinc plating bath represented by a zinc sulfate plating bath or a zinc chloride plating bath, an alkaline zinc plating bath such as a zinc cyanide plating bath, or a zinc pyrophosphate plating bath can be used. A commonly used zinc sulfate bath is sufficient. Preferred zinc electrolysis conditions when using a zinc sulfate bath are as follows. (Zinc Treat process electrolysis conditions) ZnSO 4 · 7H 2 O: 50~350g / l pH ( sulfate): 2.5-4.5 bath temperature: 40 to 60 ° C. Cathode: copper anode: zinc or insoluble anode Cathode current density: 0.05~0.4A / dm 2 Time: 10-30 seconds zinc coating amount is preferably set to 15~1500μg / dm 2, particularly preferably 15~400μg / dm 2
It is. The amount of zinc coating varies depending on the type of resin substrate at the time of lamination. For example, for a phenolic resin substrate, 15 to 60
μg / dm 2 and 60 for glass epoxy resin substrates
11500 μg / dm 2 , particularly preferably 60-400
μg / dm 2 .

【0019】合金層の一例としてCu−Znトリート処
理の電解液組成及び条件例を挙げておく: (Cu−Znトリート処理電解条件) NaCN:10〜30g/l NaOH:40〜100g/l CuCN:60〜120g/l Zn(CN)2 :1〜10g/l pH:10〜13 温度:60〜80℃ Dk :1〜10A/dm2
As an example of the alloy layer, the composition and conditions of the electrolytic solution for Cu-Zn treatment are as follows: (Cu-Zn treatment electrolytic conditions) NaCN: 10 to 30 g / l NaOH: 40 to 100 g / l CuCN: 60~120g / l Zn (CN) 2 : 1~10g / l pH: 10~13 temperature: 60~80 ℃ D k: 1~10A / dm 2

【0020】更に、好ましくは、このトリート処理層表
面上に防錆層が形成される。公知の防錆処理の任意のも
のが適用可能である。クロメート処理液は現在使用され
ている様々の処理液いずれも使用しうるが、好ましいク
ロメート処理条件例を以下に示す: (クロメート処理条件電解条件) K2 Cr27(或いはNa2 Cr27 、CrO3):
0.2〜20g/l 酸:りん酸あるいは硫酸、有機酸 pH:1.0〜3.5 浴温度:20〜40℃ 電流密度:0.1〜0.5A/dm2 時間:10〜60秒 陽極:鉛板、Pt−Ti板、ステンレス鋼板 クロム酸化物付着量はクロム量として50μg/dm2
以下で充分であり、好ましくは15〜30μg/dm2
とされる。クロム量が30μg/dm2 を超えると防錆
力は向上するがエッチング性が低下する。
Further, preferably, a rust preventive layer is formed on the surface of the treated layer. Any known rust prevention treatment can be applied. As the chromate treatment liquid, any of various treatment liquids currently used can be used. Preferred examples of the chromate treatment conditions are as follows: (Chromate treatment conditions and electrolytic conditions) K 2 Cr 2 O 7 (or Na 2 Cr 2 O) 7 , CrO 3 ):
0.2 to 20 g / l Acid: phosphoric acid or sulfuric acid, organic acid pH: 1.0 to 3.5 Bath temperature: 20 to 40 ° C Current density: 0.1 to 0.5 A / dm 2 hours: 10 to 60 Second anode: Lead plate, Pt-Ti plate, stainless steel plate The amount of chromium oxide attached is 50 μg / dm 2 as the amount of chromium.
The following is sufficient, and preferably 15 to 30 μg / dm 2.
It is said. If the amount of chromium exceeds 30 μg / dm 2 , the rust-preventing power is improved, but the etching property is lowered.

【0021】有用な防錆方法として、本件出願人は、電
解亜鉛・クロム処理による亜鉛及び/又は酸化亜鉛とク
ロム酸化物との混合皮膜処理を提唱し(特公昭58−7
077号)、多くの成果を挙げてきた。更に、特開平2
−294490号は、長期間高温多湿条件下での黒点発
生を防止することを目的として、浸漬クロメート処理に
よりクロム酸化物皮膜を形成し、続いて電解亜鉛・クロ
ム処理により亜鉛及び/又は酸化亜鉛とクロム酸化物と
の混合皮膜を形成することを開示する。
As a useful rust prevention method, the present applicant has proposed a mixed film treatment of zinc and / or zinc oxide and chromium oxide by electrolytic zinc / chromium treatment (Japanese Patent Publication No. 58-7).
No. 077), and many achievements have been made. Further, Japanese Patent Application Laid-Open
No. 294490 discloses a method of forming a chromium oxide film by immersion chromate treatment for the purpose of preventing the generation of black spots under a high-temperature and high-humidity condition for a long time, followed by electrolytic zinc / chromium treatment to form zinc and / or zinc oxide. A method for forming a mixed film with chromium oxide is disclosed.

【0022】最後に、必要に応じ、銅箔と樹脂基板との
接着力の改善を主目的として、防錆層上にシランカップ
リング剤を塗布するシラン処理が施される。塗布方法
は、シランカップリング剤溶液のスプレーによる吹付
け、コーターでの塗布、浸漬、流しかけ等いずれでもよ
い。例えば、特公昭60−15654号は、銅箔の粗面
側にクロメート処理を施した後シランカップリング剤処
理を行なうことによって銅箔と樹脂基板との接着力を改
善することを記載している。詳細はこれを参照された
い。
Finally, if necessary, a silane treatment for applying a silane coupling agent on the rust-preventing layer is performed mainly for the purpose of improving the adhesion between the copper foil and the resin substrate. The application method may be any of spraying of a silane coupling agent solution, application with a coater, immersion, and pouring. For example, Japanese Patent Publication No. 60-15654 describes that the adhesive strength between a copper foil and a resin substrate is improved by performing a silane coupling agent treatment after performing a chromate treatment on a rough surface side of the copper foil. . Please refer to this for details.

【0023】こうして粗化面を被膜処理された銅箔は、
光沢面を必要に応じ処理した後、粗化面に接着剤を塗布
して樹脂基板に加熱圧着することにより印刷回路用銅張
り積層板とされ、所定の加工操作を経た後、印刷回路板
として使用に供される。光沢面の処理方法としては、ク
ロメート処理を含む各種化成処理、銅とのキレート化反
応を利用した有機剤処理、銅より卑な金属ないし合金の
被覆処理等その面において要求される特定水準に応じて
適当なものが選ばれる。
The copper foil whose surface has been roughened in this way is
After processing the glossy surface as necessary, apply an adhesive to the roughened surface and heat and press it on the resin substrate to make a copper-clad laminate for printed circuits, and after a predetermined processing operation, as a printed circuit board Served for use. Depending on the specific level required for the surface, such as various chemical conversion treatments including chromate treatment, organic agent treatment using chelation reaction with copper, and coating treatment of metals or alloys lower than copper, etc. And an appropriate one is selected.

【0024】この後、必要に応じて、銅箔の延性を改善
する目的で焼鈍処理を施すこともある。
Thereafter, if necessary, an annealing treatment may be performed for the purpose of improving the ductility of the copper foil.

【0025】本発明による第1群金属としてクロム又は
タングステンイオン或いはその組合せそして第2群金属
としてニッケル、鉄、コバルト及び鉛から選ばれる1
種或いは2種以上のイオンを含有する銅電解浴で粗化し
た銅箔は、その処理は均一であり、ムラもなく優秀な基
板特性を示した。即ち、銅箔とガラス布基材エポキシ樹
脂で積層板を作製した場合、良好な接着性及び耐熱性を
示し、デンドライトの発達を抑えた丸みのある銅電着物
が形成されるので、接着強度は高くまたエッチング後の
基板の電気的特性や粉落ちの問題がなく良好な性状を示
した。
[0025] 1 this chromium or tungsten ions or a combination thereof as a first group metal by the invention and the second metal group <br/> and to nickel, iron, selected cobalt and zinc or al
The copper foil roughened with a copper electrolytic bath containing one or more kinds of ions was treated uniformly, and showed excellent substrate characteristics without unevenness. That is, when a laminate is made of a copper foil and a glass cloth base epoxy resin, it shows good adhesiveness and heat resistance, and a rounded copper electrodeposit with suppressed dendrite development is formed. It was high and showed good properties without problems of electrical characteristics and powder drop of the substrate after etching.

【0026】[0026]

【実施例】以下、実施例及び比較例を示す。EXAMPLES Examples and comparative examples will be described below.

【0027】 (実施例1) 硫酸銅(5水塩)100g/l、硫酸100g/l、無
水クロム酸(VI)1g/l、硫酸ニッケル6水和物1
3g/l、及び硫酸コバルト7水和物14g/lを含む
水溶液を30℃で電解浴として使用し、厚さ70μmの
電解銅箔の被接着面に電流密度20A/dm2 で10秒
間めっきして突起状銅電着物を形成した後、銅イオン4
5g/l及び硫酸100g/lを含む銅電解液(40
℃)を用いて、30A/dm2 で4秒間銅めっきした。
このようにして得られた銅箔を分析したところ、箔全体
に対するクロム、ニッケル及びコバルトの含有量は、ク
ロム:約1ppm、ニッケル:約2ppmそしてコバル
ト:0.5ppm(突起状銅電着物中のCr、Ni及び
Coの含有量は、Cr:約0.01wt%、Ni:約
0.02wt%そしてCo:約0.005wt%)であ
った。得られた銅箔をガラス布基材エポキシ樹脂に加熱
・加圧して銅張り積層板を作製し、引きはがし強さ及び
粉落ち特性を測定した。結果を表1に示す。更に、粗化
処理層上に亜鉛によるトリート処理層及び防錆層を形成
した銅箔は一層良好な耐熱性と耐酸化性を示した。
Example 1 Copper sulfate (pentahydrate) 100 g / l, sulfuric acid 100 g / l, chromic anhydride (VI) 1 g / l, nickel sulfate hexahydrate 1
An aqueous solution containing 3 g / l and 14 g / l of cobalt sulfate heptahydrate was used as an electrolytic bath at 30 ° C., and the surface to be bonded of a 70 μm-thick electrolytic copper foil was plated at a current density of 20 A / dm 2 for 10 seconds. After the formation of the protruding copper electrodeposit, the copper ions 4
Copper electrolyte containing 5 g / l and 100 g / l sulfuric acid (40
C) at 30 A / dm 2 for 4 seconds.
When the copper foil thus obtained was analyzed, the contents of chromium, nickel and cobalt with respect to the entire foil were as follows: chromium: about 1 ppm, nickel: about 2 ppm, and cobalt: 0.5 ppm (in the protruding copper electrodeposit). The contents of Cr, Ni and Co were: Cr: about 0.01 wt%, Ni: about 0.02 wt%, and Co: about 0.005 wt%). The obtained copper foil was heated and pressed on a glass cloth base epoxy resin to prepare a copper-clad laminate, and the peeling strength and the powder falling property were measured. Table 1 shows the results. Furthermore, the copper foil in which the zinc-treated layer and the rust-preventive layer were formed on the roughened layer exhibited better heat resistance and oxidation resistance.

【0028】 (実施例2) 硫酸銅(5水塩)100g/l、硫酸100g/l、タ
ングステン酸ナトリウム(2水塩)0.02g/l、硫
酸ニッケル6水和物13g/l、硫酸コバルト7水和物
14g/lを含む水溶液を30℃で電解浴として使用
し、厚さ70μmの電解銅箔の被接着面に電流密度10
A/dm2 で20秒間めっきして突起状銅電着物を形成
した後、銅イオン45g/l、硫酸100g/lを含む
電解液(40℃)を用い、30A/dm2 で4秒間めっ
きした。このようにして得られた銅箔を分析したとこ
ろ、箔全体に対するタングステン、ニッケル及びコバル
トの含有量はそれぞれ約1ppm、約2ppmそして約
0.6ppm(突起状銅電着物中のW、Ni及びCoの
含有量は、それぞれ約0.01wt%、約0.02wt
%そして約0.006wt%)であった。得られた銅箔
をガラス布基材エポキシ樹脂に加熱・加圧して銅張り積
層板を作製し、引きはがし強さ及び粉落ち特性を測定し
た。結果を表1に示す。更に、粗化処理層上に亜鉛によ
るトリート処理層及び防錆層を形成した銅箔は一層良好
な耐熱性と耐酸化性を示した。
Example 2 Copper sulfate (pentahydrate) 100 g / l, sulfuric acid 100 g / l, sodium tungstate (dihydrate) 0.02 g / l, nickel sulfate hexahydrate 13 g / l, cobalt sulfate An aqueous solution containing 14 g / l of heptahydrate was used as an electrolytic bath at 30 ° C., and a current density of 10 μm was applied to the surface to be adhered of a 70 μm-thick electrolytic copper foil.
After forming a protruding copper electrodeposit by plating with A / dm 2 for 20 seconds, plating was performed at 30 A / dm 2 for 4 seconds using an electrolytic solution (40 ° C.) containing 45 g / l of copper ions and 100 g / l of sulfuric acid. . When the copper foil thus obtained was analyzed, the contents of tungsten, nickel and cobalt relative to the entire foil were about 1 ppm, about 2 ppm and about 0.6 ppm, respectively (W, Ni and Co in the protruding copper electrodeposit). Are about 0.01 wt% and about 0.02 wt%, respectively.
% And about 0.006 wt%). The obtained copper foil was heated and pressed on a glass cloth base epoxy resin to prepare a copper-clad laminate, and the peeling strength and the powder falling property were measured. Table 1 shows the results. Furthermore, the copper foil in which the zinc-treated layer and the rust-preventive layer were formed on the roughened layer exhibited better heat resistance and oxidation resistance.

【0029】 (実施例3) 硫酸銅(5水塩)100g/l、硫酸100g/l、無
水クロム酸(VI)0.1g/l、タングステン酸ナト
リウム(2水塩)0.01g/l、硫酸ニッケル6水和
物13g/l、及び硫酸コバルト7水和物14g/lを
含む水溶液を30℃で電解浴として使用し、厚さ70μ
mの電解銅箔の被接着面に電流密度20A/dm2 で1
0秒間めっきして突起状銅電着物を形成した後、銅イオ
ン45g/l、硫酸100g/lを含む電解液(40
℃)を用い、30A/dm2 で4秒間めっきした。この
ようにして得られた銅箔を分析したところ、箔全体に対
するクロム及びタングステン、ニッケル及びコバルトの
含有量は、クロム:約0.1ppm、タングステン:約
0.7ppm、ニッケル:約2ppmそしてコバルト:
約0.6ppm(突起状銅電着物中の含有量は、Cr:
約0.001wt%、W:約0.007wt%、Ni:
約0.02wt%そしてCo:約0.006wt%)で
あった。得られた銅箔をガラス布基材エポキシ樹脂に加
熱・加圧して銅張り積層板を作製し、引きはがし強さ及
び粉落ち特性を測定した。結果を表1に示す。更に、粗
化処理層上に亜鉛によるトリート処理層及び防錆層を形
成した銅箔は一層良好な耐熱性と耐酸化性を示した。
(Example 3) Copper sulfate (pentahydrate) 100 g / l, sulfuric acid 100 g / l, chromic anhydride (VI) 0.1 g / l, sodium tungstate (dihydrate) 0.01 g / l, An aqueous solution containing 13 g / l of nickel sulfate hexahydrate and 14 g / l of cobalt sulfate heptahydrate was used as an electrolytic bath at 30 ° C. and had a thickness of 70 μm.
1 m at the current density of 20 A / dm 2
After plating for 0 second to form a protruding copper electrodeposit, an electrolytic solution (40 g / l containing 45 g / l of copper ions and 100 g / l of sulfuric acid) was used.
C.) and plated at 30 A / dm 2 for 4 seconds. When the copper foil thus obtained was analyzed, the contents of chromium and tungsten, nickel and cobalt relative to the entire foil were as follows: chromium: about 0.1 ppm, tungsten: about 0.7 ppm, nickel: about 2 ppm, and cobalt:
About 0.6 ppm (the content in the protruding copper electrodeposit is Cr:
About 0.001 wt%, W: about 0.007 wt%, Ni:
About 0.02 wt% and Co: about 0.006 wt%). The obtained copper foil was heated and pressed on a glass cloth base epoxy resin to prepare a copper-clad laminate, and the peeling strength and the powder falling property were measured. Table 1 shows the results. Furthermore, the copper foil in which the zinc-treated layer and the rust-preventive layer were formed on the roughened layer exhibited better heat resistance and oxidation resistance.

【0030】 (実施例4) 硫酸銅(5水塩)100g/l、硫酸100g/l、タ
ングステン酸ナトリウム(2水塩)0.01g/l、及
び硫酸コバルト7水和物14g/lを含む水溶液を30
℃で電解浴として使用し、厚さ70μmの電解銅箔の被
接着面に電流密度20A/dm2 で10秒間めっきして
突起状銅電着物を形成した後、銅イオン45g/l、硫
酸100g/lを含む電解液(40℃)を用い、30A
/dm2で4秒間めっきした。このようにして得られた
銅箔を分析したところ、箔全体に対するタングステン及
びコバルトの含有量は、タングステン:約0.7ppm
そしてコバルト:約1ppm(突起状銅電着物中の含有
量は、W:約0.007wt%そしてCo:約0.01
wt%)であった。得られた銅箔をガラス布基材エポキ
シ樹脂に加熱・加圧して銅張り積層板を作製し、引きは
がし強さ及び粉落ち特性を測定した。結果を表1に示
す。更に、粗化処理層上に亜鉛によるトリート処理層及
び防錆層を形成した銅箔は一層良好な耐熱性と耐酸化性
を示した。
Example 4 Contains 100 g / l of copper sulfate (pentahydrate), 100 g / l of sulfuric acid, 0.01 g / l of sodium tungstate (dihydrate), and 14 g / l of cobalt sulfate heptahydrate 30 aqueous solutions
The electrodeposited surface of a 70 μm-thick electrolytic copper foil was plated at a current density of 20 A / dm 2 for 10 seconds to form a protruding copper electrodeposit at 45 ° C., and then 45 g / l of copper ions and 100 g of sulfuric acid. / L using an electrolyte solution (40 ° C) containing
/ Dm 2 for 4 seconds. When the copper foil thus obtained was analyzed, the content of tungsten and cobalt with respect to the whole foil was about 0.7 ppm of tungsten.
Cobalt: about 1 ppm (the content in the protruding copper electrodeposit is W: about 0.007 wt% and Co: about 0.01
wt%). The obtained copper foil was heated and pressed on a glass cloth base epoxy resin to prepare a copper-clad laminate, and the peeling strength and the powder falling property were measured. Table 1 shows the results. Furthermore, the copper foil in which the zinc-treated layer and the rust-preventive layer were formed on the roughened layer exhibited better heat resistance and oxidation resistance.

【0031】 (比較例1) 添加物を含まない例として、硫酸銅(5水塩)100g
/l及び硫酸100g/lを含む水溶液を30℃で電解
浴として使用し、厚さ70μmの電解銅箔の被接着面に
電流密度20A/dm2 で10秒間めっきした後、銅イ
オン45g/l、硫酸100g/lを含む電解液(40
℃)を用い、30A/dm2 で4秒間めっきした。得ら
れた銅箔をガラス布基材エポキシ樹脂に加熱・加圧して
銅張り積層板を作製し、引きはがし強さ及び粉落ち特性
を測定した。結果を表1に示す。
Comparative Example 1 As an example containing no additive, 100 g of copper sulfate (pentahydrate)
/ L and an aqueous solution containing 100 g / l of sulfuric acid were used as an electrolytic bath at 30 ° C, and the surface to be bonded of an electrolytic copper foil having a thickness of 70 µm was plated at a current density of 20 A / dm 2 for 10 seconds, and then copper ions of 45 g / l , An electrolyte containing sulfuric acid 100 g / l (40
C.) and plated at 30 A / dm 2 for 4 seconds. The obtained copper foil was heated and pressed on a glass cloth base epoxy resin to prepare a copper-clad laminate, and the peeling strength and the powder falling property were measured. Table 1 shows the results.

【0032】 (比較例2) 従来からの砒素を含む例として、硫酸銅(5水塩)10
0g/l、硫酸100g/l及び砒酸3g/lを含む水
溶液を30℃で電解浴として使用し、厚さ70μmの電
解銅箔の被接着面に電流密度20A/dm2 で10秒間
めっきした後、銅イオン45g/l、硫酸100g/l
を含む電解液(40℃)を用い、30A/dm2 で4秒
間めっきした。このようにして得られた銅箔を分析した
ところ、箔全体に対する砒素の含有量は約200ppm
(突起状銅電着物中のAsの含有量は、約1.2wt
%)であった。得られた銅箔をガラス布基材エポキシ樹
脂に加熱・加圧して銅張り積層板を作製し、引きはがし
強さ及び粉落ち特性を測定した。結果を表1に示す。
Comparative Example 2 As a conventional example containing arsenic, copper sulfate (pentahydrate) 10
An aqueous solution containing 0 g / l, sulfuric acid 100 g / l and arsenic acid 3 g / l was used as an electrolytic bath at 30 ° C., and after plating on a surface to be bonded of a 70 μm-thick electrolytic copper foil at a current density of 20 A / dm 2 for 10 seconds. , Copper ion 45g / l, sulfuric acid 100g / l
Was plated at 30 A / dm 2 for 4 seconds using an electrolyte solution (40 ° C.) containing. When the copper foil thus obtained was analyzed, the content of arsenic in the entire foil was about 200 ppm.
(The content of As in the protruding copper electrodeposit is about 1.2 wt.
%)Met. The obtained copper foil was heated and pressed on a glass cloth base epoxy resin to prepare a copper-clad laminate, and the peeling strength and the powder falling property were measured. Table 1 shows the results.

【0033】[0033]

【表1】 [Table 1]

【0034】[0034]

【発明の効果】本発明によるクロム又はタングステン或
いは両者から成る第1群金属成分と、ニッケル、鉄、コ
バルト及び亜鉛から選ばれる1種或いは2種以上から成
る第2群金属成分とを含有する銅電解浴で粗化した銅箔
は、その処理は均一であり、ムラもなく優秀な基板特性
を示す。銅箔とガラス布基材エポキシ樹脂で積層板を作
製した場合、良好な接着性及び耐熱性を示し、デンドラ
イトの発達を抑えた丸みのある電着物が形成されるの
で、接着強度は向上しまたエッチング後の基板の電気的
特性や粉落ちの問題がない。
Containing a first group metal component made of chromium or tungsten or both according to the present invention, nickel, iron, and one or of two or more second group metal component selected from cobalt and zinc The copper foil roughened by the copper electrolytic bath is uniformly treated, and exhibits excellent substrate characteristics without unevenness. When a laminate is made of a copper foil and a glass cloth base epoxy resin, a good adhesion and heat resistance are exhibited, and a rounded electrodeposit with suppressed dendrite development is formed. There is no problem of electrical characteristics and powder drop of the substrate after etching.

【図面の簡単な説明】[Brief description of the drawings]

【図1】電解銅箔の被接着面側の処理層の例を概略的に
示す断面図である。
FIG. 1 is a cross-sectional view schematically showing an example of a treatment layer on a surface to be bonded of an electrolytic copper foil.

【符号の説明】[Explanation of symbols]

1 生箔 2 凸部 3 粗化処理層 4 銅めっき層 5 トリート処理めっき層 6 防錆層 DESCRIPTION OF SYMBOLS 1 Raw foil 2 Convex part 3 Roughening treatment layer 4 Copper plating layer 5 Treating plating layer 6 Rust prevention layer

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平6−169169(JP,A) 特開 平4−96394(JP,A) 特開 平4−96395(JP,A) 特開 平6−169170(JP,A) 特開 平7−202367(JP,A) 特公 昭62−56677(JP,B2) 特公 昭62−56678(JP,B2) 特表 昭63−500250(JP,A) (58)調査した分野(Int.Cl.6,DB名) H05K 3/38 H05K 1/09 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-6-169169 (JP, A) JP-A-4-96394 (JP, A) JP-A-4-96395 (JP, A) JP-A-6-169395 169170 (JP, A) JP-A-7-202367 (JP, A) JP-B 62-56677 (JP, B2) JP-B 62-56678 (JP, B2) JP-B 63-500250 (JP, A) (58) Field surveyed (Int.Cl. 6 , DB name) H05K 3/38 H05K 1/09

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 銅箔の被接着面に、(a)クロム及びタ
ングステンから成る第1群から選ばれた1種或いは2種
である第1群金属と(b)ニッケル、鉄、コバルト及び
鉛から成る第2群から選ばれた1種或いは2種以上で
ある第2群金属との両者を含有する多数の突起状銅電着
物から成る粗化処理層を有することを特徴とする印刷回
路用銅箔。
To 1. A target bonding surface of the copper foil, (a) chromium and the first metal group and is one or two species selected from a first group consisting of tungsten (b) nickel, iron, cobalt, and to have a roughened layer consisting of a number of protruding copper electrodeposits containing both with one or the second metal group is 2 or more kinds <br/> selected from a second group consisting zinc or al A copper foil for printed circuits, characterized by the following.
【請求項2】 銅箔の被接着面に、(a)クロム及びタ
ングステンから成る第1群から選ばれた1種或いは2種
である第1群金属と(b)ニッケル、鉄、コバルト及び
鉛から成る第2群から選ばれた1種或いは2種以上で
ある第2群金属との両者を含有する多数の突起状銅電着
物から成る粗化処理層と、前記粗化処理層を被覆する、
銅、クロム、ニッケル、鉄、コバルト及び亜鉛から成る
群から選択された1種乃至2種以上の金属又は合金から
成るトリート層と、該トリート層を被覆する防錆層とを
有することを特徴とする印刷回路用銅箔。
To 2. A target bonding surface of the copper foil, (a) chromium and the first metal group and is one or two species selected from a first group consisting of tungsten (b) nickel, iron, cobalt, and a roughened layer consisting of a number of protruding copper electrodeposits containing both with one or the second metal group is 2 or more kinds <br/> selected from a second group consisting zinc or et al., supra Coating the roughening layer,
It has a treat layer composed of one or more metals or alloys selected from the group consisting of copper, chromium, nickel, iron, cobalt and zinc, and a rust preventive layer covering the treat layer. Copper foil for printed circuits.
【請求項3】 突起状銅電着物の脱落を防止する薄い銅
めっき層を前記粗化処理層とトリート層との間に形成し
たことを特徴とする請求項2の印刷回路用銅箔。
3. The copper foil for a printed circuit according to claim 2, wherein a thin copper plating layer for preventing the protruding copper electrodeposits from falling off is formed between the roughening layer and the treat layer.
【請求項4】 酸性銅電解浴において銅箔を陰極として
限界電流密度付近で電解して銅箔の被接着面に多数の突
起状銅電着物から成る粗化処理層を形成する印刷回路用
銅箔の製造方法において、電解浴中に(a)クロム及び
タングステンから成る第1群から選ばれた1種或いは2
種である第1群金属:0.0001〜5g/l と、
(b)ニッケル、鉄、コバルト及び鉛から成る第2群
から選ばれた1種或いは2種以上である第2群金属:
0.001〜50g/l の両者を存在せしめることを特
徴とする印刷回路用銅箔の製造方法。
4. A copper for a printed circuit, wherein a copper foil is used as a cathode in an acidic copper electrolytic bath and electrolysis is performed near a critical current density to form a roughened layer composed of a large number of projecting copper electrodeposits on the surface to be bonded of the copper foil. In the method for producing a foil, one or two selected from the first group consisting of (a) chromium and tungsten are contained in an electrolytic bath.
A first group metal as a seed: 0.0001 to 5 g / l;
(B) nickel, iron, cobalt, and one or two or more at a second group of metal selected from zinc or we made the second group:
A method for producing a copper foil for a printed circuit, characterized in that both of 0.001 to 50 g / l are present.
【請求項5】 形成された粗化処理層上に銅、クロム、
ニッケル、鉄、コバルト及び亜鉛から成る群から選択さ
れる1種乃至2種以上の金属又は合金から成るトリート
層を電解により形成し、更に防錆処理することを特徴と
する請求項4の印刷回路用銅箔の製造方法。
5. Copper, chromium,
5. The printed circuit according to claim 4, wherein a treat layer made of one or more metals or alloys selected from the group consisting of nickel, iron, cobalt and zinc is formed by electrolysis and further subjected to rust prevention treatment. Production method of copper foil for use.
【請求項6】 形成された粗化処理層上に突起状銅電着
物の脱落を防止する薄い銅めっき層を電解により形成
し、形成された銅めっき層上に銅、クロム、ニッケル、
鉄、コバルト及び亜鉛から成る群から選択される1種乃
至2種以上の金属または合金から成るトリート層を電解
により形成し、更に防錆処理することを特徴とする請求
項4の印刷回路用銅箔の製造方法。
6. A thin copper plating layer for preventing the protruding copper electrodeposit from falling off is formed on the formed roughened layer by electrolysis, and copper, chromium, nickel, and the like are formed on the formed copper plating layer.
5. The copper for a printed circuit according to claim 4, wherein a treat layer made of one or more metals or alloys selected from the group consisting of iron, cobalt and zinc is formed by electrolysis and further subjected to rust prevention treatment. Method of manufacturing foil.
JP7058225A 1995-02-23 1995-02-23 Copper foil for printed circuit and manufacturing method thereof Expired - Fee Related JP2920083B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7058225A JP2920083B2 (en) 1995-02-23 1995-02-23 Copper foil for printed circuit and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7058225A JP2920083B2 (en) 1995-02-23 1995-02-23 Copper foil for printed circuit and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JPH08236930A JPH08236930A (en) 1996-09-13
JP2920083B2 true JP2920083B2 (en) 1999-07-19

Family

ID=13078148

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2920083B2 (en)

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