JP3292774B2 - Copper foil for printed wiring board and method for producing the same - Google Patents

Copper foil for printed wiring board and method for producing the same

Info

Publication number
JP3292774B2
JP3292774B2 JP03931794A JP3931794A JP3292774B2 JP 3292774 B2 JP3292774 B2 JP 3292774B2 JP 03931794 A JP03931794 A JP 03931794A JP 3931794 A JP3931794 A JP 3931794A JP 3292774 B2 JP3292774 B2 JP 3292774B2
Authority
JP
Japan
Prior art keywords
copper foil
zinc
copper
layer
printed wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP03931794A
Other languages
Japanese (ja)
Other versions
JPH07231161A (en
Inventor
裕昭 津吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Mining and Smelting Co Ltd
Original Assignee
Mitsui Mining and Smelting Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Mining and Smelting Co Ltd filed Critical Mitsui Mining and Smelting Co Ltd
Priority to JP03931794A priority Critical patent/JP3292774B2/en
Priority to TW083101482A priority patent/TW231396B/en
Priority to FR9412979A priority patent/FR2716329B1/en
Priority to MYPI94003097A priority patent/MY113830A/en
Publication of JPH07231161A publication Critical patent/JPH07231161A/en
Application granted granted Critical
Publication of JP3292774B2 publication Critical patent/JP3292774B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/389Improvement of the adhesion between the insulating substrate and the metal by the use of a coupling agent, e.g. silane
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0307Providing micro- or nanometer scale roughness on a metal surface, e.g. by plating of nodules or dendrites
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0723Electroplating, e.g. finish plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1105Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Laminated Bodies (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はプリント配線板用銅箔お
よびその製造方法に関し、詳しくはヒ素を用いることな
しに、耐熱性、耐薬品性、プリント配線板用基材との接
着性を向上させたプリント配線板用銅箔およびその製造
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copper foil for a printed wiring board and a method for producing the same, and more particularly, to improving heat resistance, chemical resistance and adhesion to a substrate for a printed wiring board without using arsenic. The present invention relates to a copper foil for a printed wiring board and a method for manufacturing the same.

【0002】[0002]

【従来の技術】プリント配線板を作成する場合、銅箔と
ガラスエポキシ含浸基材等の基材とを加熱圧着等により
接着し、導体回路形成のために不要部分の銅箔を酸また
はアルカリのエッチング液により除去を行なう。
2. Description of the Related Art When a printed wiring board is made, a copper foil and a base material such as a glass epoxy impregnated base material are bonded by heat compression or the like, and an unnecessary portion of the copper foil for forming a conductive circuit is made of acid or alkali. Removal is performed with an etchant.

【0003】従来、銅箔の基材との接着面側は接着強度
を増加させるために、粒状銅層が電着により設けられ、
さらに基材との接着性を増加させるためにヒ素を添加し
た銅メッキ液により、いわゆるヤケメッキが施される。
さらに導体回路を形成した後に起こる種々の問題点の改
善のために、この上に亜鉛または亜鉛合金メッキ、クロ
メート処理、シランカプリング剤処理によって防錆層を
形成させる。これらの防錆処理により改善される特性
は、耐熱性、耐薬品性、耐湿性、基材との接着性といっ
たものが挙げられる。
Conventionally, on the side of the copper foil to be bonded to the substrate, a granular copper layer is provided by electrodeposition in order to increase the bonding strength.
Further, so-called burn plating is performed with a copper plating solution to which arsenic is added in order to increase the adhesion to the base material.
Further, in order to improve various problems occurring after the formation of the conductor circuit, a rust preventive layer is formed thereon by zinc or zinc alloy plating, chromate treatment, and silane coupling agent treatment. The characteristics improved by these rust prevention treatments include heat resistance, chemical resistance, moisture resistance, and adhesion to a substrate.

【0004】特公昭61−52240号公報には、耐熱
性を向上させるための処理として銅箔に亜鉛−錫−銅合
金層を設けることが有効であることが開示されている。
Japanese Patent Publication No. Sho 61-52240 discloses that it is effective to provide a zinc-tin-copper alloy layer on a copper foil as a treatment for improving heat resistance.

【0005】しかし、このときは上述のように、人体に
対し有害なヒ素を含有する処理が不可欠となる。これに
対し、耐塩酸性を向上させた特公昭58−56758号
公報では亜鉛−錫−銅合金層の厚さは充分であるが、ヒ
素が添加されていないので耐熱性は向上しない。
However, at this time, as described above, a treatment containing arsenic harmful to the human body is indispensable. On the other hand, in JP-B-58-56758 in which the hydrochloric acid resistance is improved, the thickness of the zinc-tin-copper alloy layer is sufficient, but the heat resistance is not improved because arsenic is not added.

【0006】このようにプリント配線板の種々の特性を
満たすために多数の処理が提案されているが、これらの
要求される特性の全てを満足するためにはヤケメッキへ
のヒ素の添加が不可欠となっている。
As described above, many processes have been proposed to satisfy various characteristics of a printed wiring board. However, in order to satisfy all of these required characteristics, it is necessary to add arsenic to burnt plating. Has become.

【0007】プリント配線板の耐熱性規格としてUL規
格では177℃、10日間の加熱処理後の引き剥し強度
が0.36kgf/cm以上を要求している。この規格
を満足させるためには粗面化処理による接着強化だけで
は不充分で防錆層の厚み効果を付加させて達成させるこ
とができる。しかし、前述の亜鉛−錫−銅合金層を形成
させた場合において、UL規格をクリアするため相当量
以上を電着させた場合、下地であるヒ素を含む層が重要
な役割を持つ。ヒ素を含まない場合には、防錆層の厚み
が厚いほど耐塩酸性が悪くなる。プリント配線板の作成
時のエッチングや酸洗においてアンダーカットを起こ
し、回路の剥離を引き起こす原因となる。しかし、ヒ素
の有害性については公知のもので、製造工程における取
扱い時の安定性、または処理液、エッチング液の排水等
による環境問題がある。
[0007] As the heat resistance standard of the printed wiring board, the UL standard requires that the peel strength after heat treatment at 177 ° C for 10 days is 0.36 kgf / cm or more. In order to satisfy this standard, it is not enough to strengthen the adhesive by roughening treatment alone, and it can be achieved by adding the thickness effect of the rust preventive layer. However, in the case where the zinc-tin-copper alloy layer described above is formed, if a considerable amount or more is electrodeposited in order to meet UL standards, the layer containing arsenic serving as an underlayer plays an important role. When arsenic is not contained, the thicker the rust preventive layer, the lower the hydrochloric acid resistance. An undercut occurs during etching or pickling during the production of a printed wiring board, causing circuit peeling. However, the harmfulness of arsenic is known, and there is an environmental problem due to the stability at the time of handling in the manufacturing process or the drainage of the processing solution and the etching solution.

【0008】ヒ素を含有させない場合、亜鉛、亜鉛合金
層を薄くすることで耐塩酸性を向上させることはできる
が、その場合は、耐熱性において要求を満たすことはで
きない。
When arsenic is not contained, hydrochloric acid resistance can be improved by reducing the thickness of the zinc or zinc alloy layer, but in such a case, heat resistance cannot be satisfied.

【0009】このように、ヒ素を用いないで、耐熱性、
耐薬品性、特に耐塩酸性やプリント配線板用基材との接
着性といった各特性を満足させるプリント配線板用銅箔
は、従来得られていなかった。
Thus, without using arsenic, heat resistance,
A copper foil for a printed wiring board satisfying each property such as chemical resistance, especially hydrochloric acid resistance and adhesion to a printed wiring board base material has not been obtained.

【0010】[0010]

【発明が解決しようとする課題】本発明は、これら従来
技術の課題を解決し、ヒ素を含有しないで耐熱性、耐塩
酸性、基材との接着性に著しく優れたプリント配線板用
銅箔およびその製造方法を提供することにある。
DISCLOSURE OF THE INVENTION The present invention solves the above-mentioned problems of the prior art and provides a copper foil for a printed wiring board which does not contain arsenic and has remarkably excellent heat resistance, hydrochloric acid resistance and adhesion to a substrate. It is to provide a manufacturing method thereof.

【0011】[0011]

【課題を解決するための手段】本発明の上記目的は、次
に示す銅箔によって達成される。
The above object of the present invention is achieved by the following copper foil.

【0012】すなわち、本発明のプリント配線板用銅箔
は、銅箔のプリント配線板用基材との接着面側に設けら
れた粒状銅層の上に、ヒ素を含まない銅−亜鉛−錫ある
いは銅−亜鉛−ニッケルの三元合金層を有し、また該合
金層上にクロメート防錆層を有し、さらに該クロメート
層上にシランカップリング剤と六価クロム化合物とを含
む防錆層が設けられていることを特徴とする。
That is, the copper foil for a printed wiring board according to the present invention comprises an arsenic-free copper-zinc-tin layer on a granular copper layer provided on the side of the copper foil bonded to the printed wiring board base material. Alternatively, it has a ternary alloy layer of copper-zinc-nickel, has a chromate rust preventive layer on the alloy layer, and further has a rust preventive layer containing a silane coupling agent and a hexavalent chromium compound on the chromate layer. Is provided.

【0013】図1に、本発明のプリント配線板用銅箔の
構成を示す概略断面図を示す。同図において、1は銅
箔、2は銅−亜鉛−錫合金層(銅−亜鉛−ニッケル
層)、3はクロメート層、4はシランカップリング剤と
六価クロムの防錆層をそれぞれ示す。
FIG. 1 is a schematic sectional view showing the structure of a copper foil for a printed wiring board according to the present invention. In the figure, 1 is a copper foil, 2 is a copper-zinc-tin alloy layer (copper-zinc-nickel layer), 3 is a chromate layer, and 4 is a silane coupling agent and a rust-preventive layer of hexavalent chromium.

【0014】図1における銅箔1のプリント配線板用基
材との接着面側には、粒状銅層(図示せず)が設けられ
ている。このような粒状銅層を設けるのは、銅箔と基材
の接着性の向上を図るためである。ここに用いられる銅
箔は、電解銅箔でも圧延銅箔のいずれでもよい。また、
プリント配線板用基材との接着面は電解銅箔の粗面でも
光沢面でもよい。
A granular copper layer (not shown) is provided on the side of the copper foil 1 shown in FIG. The reason for providing such a granular copper layer is to improve the adhesion between the copper foil and the base material. The copper foil used here may be either an electrolytic copper foil or a rolled copper foil. Also,
The surface to be adhered to the printed wiring board substrate may be a rough surface or a glossy surface of the electrolytic copper foil.

【0015】そして、この粒状銅層の上には、銅−亜鉛
−錫合金あるいは銅−亜鉛−ニッケルからなる三元合金
層2を有する。このような三元合金層2を設けることに
よって、銅箔の耐熱性と耐塩酸性を併せて向上させるた
めである。
A ternary alloy layer 2 made of a copper-zinc-tin alloy or copper-zinc-nickel is provided on the granular copper layer. This is because the provision of such a ternary alloy layer 2 improves both the heat resistance and the hydrochloric acid resistance of the copper foil.

【0016】この三元合金層2の上には、クロメート層
3が設けられている。さらに、このクロメート層の上に
は、シランカップリング剤と六価クロムの防錆層4を有
し、この防錆層4において、プリント配線板用基材と接
合される。
On this ternary alloy layer 2, a chromate layer 3 is provided. Further, on the chromate layer, there is provided a rust-preventive layer 4 of a silane coupling agent and hexavalent chromium, and the rust-preventive layer 4 is joined to a substrate for a printed wiring board.

【0017】このようなプリント配線板用銅箔は、次に
示す製造方法によって得られる。すなわち、本発明のプ
リント配線板用銅箔の製造方法は、銅箔のプリント配線
板用基材との接着面側に、ヒ素を含まない粒状銅を電着
して粗面化処理し、次いで亜鉛−錫メッキまたは亜鉛−
ニッケルメッキを施し、さらにクロメート処理、0.5
〜10g/lのシランカップリング剤と0.1〜2g/
lの六価クロムを含む混合溶液防錆処理を行なった
後、180〜260℃で加熱処理を行なうことを特徴と
する。
Such a copper foil for a printed wiring board can be obtained by the following manufacturing method. That is, the method for producing a copper foil for a printed wiring board of the present invention comprises the steps of: electrodepositing granular copper containing no arsenic on the adhesive surface side of the copper foil with the substrate for a printed wiring board; Zinc-tin plating or zinc-
Nickel plating, chromate treatment, 0.5
Silane coupling agent of 0.1 to 10 g / l and 0.1 to 2 g / l
After performing the rust-proof treatment with a mixed solution containing a hexavalent chromium l, and performing heat treatment at 180 to 260 ° C..

【0018】本発明では、銅箔のプリント配線板用基材
との接着面側に、粒状銅を電着して粗面化処理し、銅箔
と基材の接着性の向上を図る。銅箔への粒状銅の電着
は、通常2段メッキ処理で行なわれ、第1段メッキで銅
箔に微細構造の粒状銅を電着し、第2段で微細構造の粒
状銅の脱落を防ぐためにカブセ平滑メッキを行なう。こ
こにおいては、従来のようにヒ素を含有するヤケメッキ
は施さない。
In the present invention, granular copper is electrodeposited on the side of the surface of the copper foil to be bonded to the substrate for a printed wiring board, and the surface is roughened to improve the adhesion between the copper foil and the substrate. Electrodeposition of granular copper on copper foil is usually performed by a two-stage plating process. In the first stage plating, fine-structured granular copper is electrodeposited on the copper foil, and in the second stage, the fine-structured granular copper is dropped off. To prevent this, Kabuse smooth plating is performed. Here, the burnt plating containing arsenic is not performed as in the conventional case.

【0019】次に、本発明では、この粒状銅の電着によ
って粗面化処理された上に、亜鉛−錫メッキまたは亜鉛
−ニッケルメッキを施し、亜鉛−錫合金層または亜鉛−
ニッケル合金層を形成する。この合金層における錫また
はニッケルの含有量は1〜15重量%とすることが望ま
しい。
Next, according to the present invention, the granular copper is roughened by electrodeposition and then subjected to zinc-tin plating or zinc-nickel plating to form a zinc-tin alloy layer or a zinc-tin alloy layer.
A nickel alloy layer is formed. It is desirable that the content of tin or nickel in this alloy layer be 1 to 15% by weight.

【0020】このような亜鉛−錫メッキまたは亜鉛−ニ
ッケルメッキを施す際の電解液の基本組成の一例を錫の
場合を例に次に示す。 (Zn−Sn合金メッキ) ピロリン酸亜鉛 12〜25 g/l 錫酸カリウム 1〜10 g/l ピロリン酸カリウム 50〜300g/l pH 9〜12 液温 室温
An example of the basic composition of the electrolytic solution when applying such zinc-tin plating or zinc-nickel plating is shown below, taking tin as an example. (Zn-Sn alloy plating) Zinc pyrophosphate 12-25 g / l Potassium stannate 1-10 g / l Potassium pyrophosphate 50-300 g / l pH 9-12 Liquid temperature Room temperature

【0021】合金組成は、錫と亜鉛の濃度比によって変
えることができる。錫の電着比を1〜15重量%となる
ように濃度で調整する必要があり、高くなりすぎるとア
ルカリエッチングにおいてブラックニングを起こしてし
まう。また、電流密度によっても組成を調整でき、3〜
10A/dm2で高電流密度ほど亜鉛の量と亜鉛の比が
高くなる。電解時間を1〜8秒とし、亜鉛−錫の合計電
着量を調整し、耐熱性を要求される水準に向上させる。
すなわちこの合金層の厚さに比例して耐熱性を引き上げ
ることができる。しかし、亜鉛量が増加することによ
り、合金層の脱亜鉛による腐食が起こり易くなり、耐塩
酸性が低下する。従って、この2つの特性を考慮に入
れ、合金層の厚さを選択しなければならない。本発明に
おいてUL規格をクリアーし、耐塩酸性においても効果
のある範囲は亜鉛−錫合金または亜鉛−ニッケル合金が
150〜700mg/m2の範囲である。
The alloy composition can be changed depending on the tin / zinc concentration ratio. It is necessary to adjust the concentration of tin so that the electrodeposition ratio becomes 1 to 15% by weight, and if it is too high, blackening occurs in alkali etching. Further, the composition can be adjusted depending on the current density.
At 10 A / dm 2 , the higher the current density, the higher the ratio of zinc to zinc. The electrolysis time is set to 1 to 8 seconds, and the total electrodeposition amount of zinc-tin is adjusted to improve the heat resistance to a required level.
That is, the heat resistance can be increased in proportion to the thickness of the alloy layer. However, when the amount of zinc increases, corrosion due to dezincification of the alloy layer easily occurs, and the hydrochloric acid resistance decreases. Therefore, the thickness of the alloy layer must be selected in consideration of these two characteristics. In the present invention, the range that satisfies the UL standard and is effective in hydrochloric acid resistance is a zinc-tin alloy or a zinc-nickel alloy in the range of 150 to 700 mg / m 2 .

【0022】本発明では、このようにして形成された亜
鉛−錫合金層または亜鉛−ニッケル合金層の上に、この
合金層の防錆効果を充分に得るためにクロメート処理を
施す。
In the present invention, the zinc-tin alloy layer or the zinc-nickel alloy layer thus formed is subjected to a chromate treatment in order to obtain a sufficient rust-preventive effect.

【0023】このクロメート処理は、電解クロメートに
よって行われる。処理条件の一例を次に示す。 クロム酸 0.2〜5g/l pH 9〜13 電流密度 0.1〜3 A/dm2
This chromate treatment is performed by electrolytic chromate. An example of the processing conditions is shown below. Chromic acid 0.2-5 g / l pH 9-13 Current density 0.1-3 A / dm 2

【0024】なお、この場合、pHについてはアルカリ
条件に調整して処理しているが、酸性条件として処理を
行っても同様の効果が得られる。電解時間は1〜8秒で
あるが、効果に対する時間の影響は小さい。しかし、亜
鉛合金に対するクロメート処理は、一般に亜鉛単独層上
のクロメート処理に比べ、有効クロメート層(被膜)が
完全に形成されにくい。そこで、このクロメート層(被
膜)の上に、シランカップリング剤と六価クロムを含む
混合溶液を塗布して防錆層を形成する。
In this case, the pH is adjusted to an alkaline condition for the treatment, but the same effect can be obtained even if the treatment is performed under an acidic condition. The electrolysis time is 1 to 8 seconds, but the effect of time on the effect is small. However, the chromate treatment of a zinc alloy generally makes it difficult to completely form an effective chromate layer (coating) as compared to the chromate treatment on a zinc-only layer. Therefore, a mixed solution containing a silane coupling agent and hexavalent chromium is applied on this chromate layer (coating) to form a rust preventive layer.

【0025】本発明に用いられるシランカップリング剤
としては、アミノアルキルシラン、エポキシアルキルシ
ラン、メタクリロキシアルキルシラン、メルカプトアル
キルシラン等の化合物を用いることができる。
As the silane coupling agent used in the present invention, compounds such as aminoalkylsilane, epoxyalkylsilane, methacryloxyalkylsilane, and mercaptoalkylsilane can be used.

【0026】本発明において耐塩酸性に効果を有する液
組成の一例を次に示す。 シランカップリング剤 0.5〜10g/l クロム酸 0.1〜2g/l pH 2〜12
An example of a liquid composition having an effect on hydrochloric acid resistance in the present invention is shown below. Silane coupling agent 0.5 to 10 g / l Chromic acid 0.1 to 2 g / l pH 2 to 12

【0027】このような組成の混合液をスプレーにより
塗布する。これにより形成される防錆層(被膜)中の六
価クロムが前処理の不完全なクロメート層(被膜)の欠
陥を補強し、さらにこの六価クロムと化学結合したシラ
ンカップリング剤が、基材との接着性を強め、エッチン
グや酸洗に用いられる塩酸によるアンダーカットを減少
させる。
The mixed solution having such a composition is applied by spraying. The hexavalent chromium in the rust preventive layer (coating) formed thereby reinforces the defects of the incompletely pretreated chromate layer (coating), and the silane coupling agent chemically bonded to the hexavalent chromium forms a base. Strengthens adhesion to materials and reduces undercuts caused by hydrochloric acid used for etching and pickling.

【0028】本発明では、次に加熱処理を行なう。この
加熱処理によって、シランカップリング剤とクロメート
層(被膜)の結合、あるいはシランカップリング剤同志
の脱水縮合が充分に進み、適正な防錆層(被膜)を形成
する。
In the present invention, a heat treatment is performed next. By this heat treatment, the bonding between the silane coupling agent and the chromate layer (coating) or the dehydration condensation of the silane coupling agents proceed sufficiently, and an appropriate rust-preventive layer (coating) is formed.

【0029】さらに、この加熱処理により、亜鉛−錫合
金または亜鉛−ニッケル合金が、銅−亜鉛−錫または銅
−亜鉛−ニッケルの三元合金へと変化する。このときの
外観色は、黄銅色へ変化している。
Further, this heat treatment changes the zinc-tin alloy or the zinc-nickel alloy into a ternary alloy of copper-zinc-tin or copper-zinc-nickel. The appearance color at this time has changed to brass.

【0030】加熱温度は三元合金形成と、防錆層(被
膜)の結合強化との兼ね合いから適正な温度範囲が必要
となる。銅箔の防錆面の表面温度が180〜260℃と
なる加熱範囲の温度と時間が有効である。この範囲をは
ずれる場合、例えば温度が低い場合には、三元合金が形
成されず、脱亜鉛に対する効果が十分に得られないと共
に、クロメート層やシランカップリング剤と六価クロム
を含む防錆層も有効な被膜が形成されない。逆に高温の
場合、クロメート層や防錆層も分解してしまい防錆効果
を失ってしまい耐塩酸性に対する効果が得られない。
The heating temperature needs to be in an appropriate temperature range in view of the balance between the formation of the ternary alloy and the strengthening of the bonding of the rust preventive layer (coating). The temperature and time in the heating range where the surface temperature of the rustproof surface of the copper foil is 180 to 260 ° C are effective. When the temperature is out of this range, for example, when the temperature is low, a ternary alloy is not formed, the effect on dezincification is not sufficiently obtained, and a rust prevention layer containing a chromate layer or a silane coupling agent and hexavalent chromium. However, no effective coating is formed. Conversely, when the temperature is high, the chromate layer and the rust-preventive layer are also decomposed, losing the rust-preventive effect and failing to provide an effect on hydrochloric acid resistance.

【0031】[0031]

【実施例】以下、実施例等に基づき本発明を具体的に説
明する。
EXAMPLES Hereinafter, the present invention will be specifically described based on examples and the like.

【0032】実施例1 35μm厚さの電解銅箔のプリント配線板用基材との接
着面側に、接着強度増加のための粗面化処理(粒状銅層
の形成)を行った。粗面化処理は、以下に示す1段処理
と2段処理によって行なった。
Example 1 A surface roughening treatment (formation of a granular copper layer) for increasing the adhesion strength was performed on the side of the surface of the 35 μm-thick electrolytic copper foil to be bonded to the substrate for a printed wiring board. The surface roughening treatment was performed by the following one-step processing and two-step processing.

【0033】(1段処理条件) Cu 12g/l H2SO4 180g/l 液温 30℃ 電流密度 30A/dm2 電解時間 4秒(Single-step processing conditions) Cu 12 g / l H 2 SO 4 180 g / l Liquid temperature 30 ° C. Current density 30 A / dm 2 Electrolysis time 4 seconds

【0034】1段処理により形成された微細構造の電着
銅の脱落を防ぐためにカブセ平滑めっきとして2段処理
を行った。
In order to prevent the electrodeposited copper of the fine structure formed by the one-step treatment from falling off, a two-step treatment was performed as a flattened plating.

【0035】(2段処理条件) Cu 70g/l H2SO4 180g/l 液温 48℃ 電流密度 32A/dm2 電解時間 4秒(Two-step treatment conditions) Cu 70 g / l H 2 SO 4 180 g / l Liquid temperature 48 ° C. Current density 32 A / dm 2 Electrolysis time 4 seconds

【0036】1段と2段処理により、施された電着銅
(コブ処理面)の上に順次下記の条件で防錆処理を行っ
た。
Rust prevention treatment was sequentially performed on the electrodeposited copper (cob-treated surface) by the first and second steps under the following conditions.

【0037】(亜鉛−錫メッキ浴組成) 亜鉛 6g/l 錫 1g/l ピロリン酸カリ 100g/l pH 10.5(Zinc-tin plating bath composition) Zinc 6 g / l Tin 1 g / l Potassium pyrophosphate 100 g / l pH 10.5

【0038】(メッキ条件) 液温 25℃ 電流密度 6A/dm2 電解時間 2秒(Plating conditions) Solution temperature 25 ° C. Current density 6 A / dm 2 Electrolysis time 2 seconds

【0039】この条件で亜鉛−錫合金メッキを行い直ち
に水洗し、この面に次の条件でクロメート処理を行っ
た。
Under these conditions, zinc-tin alloy plating was carried out, and immediately after washing with water, the surface was subjected to a chromate treatment under the following conditions.

【0040】(クロメート処理条件) CrO3 1g/l pH 12.0 電流密度 1.5A/dm2 電解時間 4秒(Chromate treatment conditions) CrO 3 1 g / l pH 12.0 Current density 1.5 A / dm 2 Electrolysis time 4 seconds

【0041】クロメート処理後、直ちに水洗し、シラン
カップリング剤とクロム酸混合液をシャワーにより塗布
した。この処理液の組成は下記の条件である。
Immediately after the chromate treatment, the mixture was washed with water, and a mixed solution of a silane coupling agent and chromic acid was applied by a shower. The composition of this treatment liquid is as follows.

【0042】(シランカップリング剤ークロム酸液組
成) シランカップリング剤 5g/l CrO3 0.6g/l pH 5.0
(Silane Coupling Agent-Chromic Acid Solution Composition) Silane Coupling Agent 5 g / l CrO 3 0.6 g / l pH 5.0

【0043】この処理液で塗布された銅箔を、水洗せず
に加熱三元合金化を行った。加熱時間は4秒で、このと
きの銅箔表面の温度が220℃となるように加熱ゾーン
温度を調整した。銅箔表面の温度は、不可逆性の変色示
温テープを用いて測定を行った。
The copper foil coated with this treatment solution was heated and ternary alloyed without washing. The heating time was 4 seconds, and the heating zone temperature was adjusted so that the temperature of the copper foil surface at this time was 220 ° C. The temperature of the copper foil surface was measured using an irreversible discoloration indicating tape.

【0044】得られた銅箔についてガラスエポキシ含浸
基材(FR−4基材)に接着し、耐塩酸性(劣化率)、
UL耐熱性を測定した。その結果を表1に示す。
The obtained copper foil was adhered to a glass epoxy-impregnated base material (FR-4 base material), and was subjected to hydrochloric acid resistance (deterioration rate).
UL heat resistance was measured. Table 1 shows the results.

【0045】なお、評価は下記の通り行なった。 耐塩酸性:0.2mm幅回路を18%塩酸に1時間浸漬
し、引き剥し強度を測定し、劣化率を求めた。 耐熱性:10mm幅回路を177℃で10日間加熱した
後の引き剥し強度を測定した。
The evaluation was performed as follows. Hydrochloric acid resistance: A 0.2 mm wide circuit was immersed in 18% hydrochloric acid for 1 hour, the peeling strength was measured, and the deterioration rate was determined. Heat resistance: The peel strength after heating a 10 mm wide circuit at 177 ° C. for 10 days was measured.

【0046】実施例2 亜鉛−錫合金の電解時間を4秒とし、合金層の厚みを厚
くし、その他の条件は実施例1と同様にして銅箔を作製
した。その評価結果を表1に示す。
Example 2 A copper foil was produced in the same manner as in Example 1 except that the electrolysis time of the zinc-tin alloy was 4 seconds, the thickness of the alloy layer was increased, and the other conditions were the same as in Example 1. Table 1 shows the evaluation results.

【0047】実施例3 亜鉛−錫合金の電解時間を6秒とし、合金層の厚みをさ
らに厚くし、その他の条件は実施例1と同様にして銅箔
を作製した。その評価結果を表1に示す。
Example 3 A copper foil was produced in the same manner as in Example 1 except that the electrolysis time of the zinc-tin alloy was 6 seconds, the thickness of the alloy layer was further increased, and the other conditions were the same as in Example 1. Table 1 shows the evaluation results.

【0048】実施例4 錫の代わりにニッケルを用いて亜鉛−ニッケル合金メッ
キを行った。メッキ液組成は実施例1でスズ酸カリを硫
酸ニッケルに置き代えたもので、他の処理条件も実施例
1と同様にして銅箔を作製した。その評価結果を表1に
示す。
Example 4 Zinc-nickel alloy plating was performed using nickel instead of tin. The composition of the plating solution was the same as that of Example 1 except that potassium stannate was replaced with nickel sulfate, and other processing conditions were the same as in Example 1 to produce a copper foil. Table 1 shows the evaluation results.

【0049】比較例1 亜鉛−錫合金メッキ液から錫を抜き、亜鉛メッキとした
以外は実施例2と同条件で銅箔を作製した。このときの
評価結果を表1に示す。
Comparative Example 1 A copper foil was produced under the same conditions as in Example 2 except that tin was removed from the zinc-tin alloy plating solution and zinc plating was performed. Table 1 shows the evaluation results at this time.

【0050】比較例2 シランカップリング剤とクロム酸混合液による処理をシ
ランカップリング剤のみによる処理に代えた以外は実施
例2と同条件で銅箔を作製した。この評価結果を表1に
示す。
Comparative Example 2 A copper foil was produced under the same conditions as in Example 2 except that the treatment with the silane coupling agent and the chromic acid mixed solution was changed to the treatment with only the silane coupling agent. Table 1 shows the evaluation results.

【0051】比較例3 加熱温度を銅箔表面で150℃とした以外の条件は実施
例2と同様にして銅箔を作製した。この評価結果を表1
に示す。
Comparative Example 3 A copper foil was produced in the same manner as in Example 2 except that the heating temperature was 150 ° C. on the surface of the copper foil. Table 1 shows the evaluation results.
Shown in

【0052】比較例4 加熱温度を銅箔表面で280℃とした以外の条件は実施
例2と同様にして銅箔を作製した。この評価結果を表1
に示す。
Comparative Example 4 A copper foil was produced in the same manner as in Example 2 except that the heating temperature was 280 ° C. on the surface of the copper foil. Table 1 shows the evaluation results.
Shown in

【0053】[0053]

【表1】 [Table 1]

【0054】表1に示されるように、実施例1〜4は耐
塩酸性に優れており、耐熱性においてもUL規格を十分
に満足している。
As shown in Table 1, Examples 1 to 4 are excellent in hydrochloric acid resistance and sufficiently satisfy the UL standard in heat resistance.

【0055】また、実施例1〜3が示すようにUL耐熱
性は亜鉛−錫合金層を厚くすることにより向上させるこ
とができる。
As shown in Examples 1 to 3, UL heat resistance can be improved by increasing the thickness of the zinc-tin alloy layer.

【0056】一方、比較例1〜4に示されるように、耐
塩酸性を向上させる要因として、亜鉛−錫合金メッキ、
シランカップリング剤とクロム酸の混合液防錆処理、加
熱三元合金化がそれぞれ効果を持つが、これら単独では
十分な特性は得られず、実施例1〜4のように、これら
の処理を複合することにより相乗効果を発揮し、非常に
優れた性能を有するプリント配線板用銅箔を得ることが
できる。
On the other hand, as shown in Comparative Examples 1 to 4, zinc-tin alloy plating,
The rust preventive treatment of the mixed solution of the silane coupling agent and the chromic acid and the heating ternary alloying have the respective effects, but sufficient properties cannot be obtained by themselves, and these treatments are performed as in Examples 1 to 4. The composite exhibits a synergistic effect and can provide a copper foil for a printed wiring board having extremely excellent performance.

【0057】比較例5 ヒ素を含む場合の効果を比較するために次のような銅箔
を作製した。すなわち、実施例1で用いた粗面化処理
(粒状銅層の形成)された銅箔に以下に示す条件でヒ素
含有銅メッキを行った。
Comparative Example 5 In order to compare the effects when arsenic was contained, the following copper foil was prepared. That is, arsenic-containing copper plating was performed on the copper foil subjected to the surface roughening treatment (formation of the granular copper layer) used in Example 1 under the following conditions.

【0058】 Cu 8g/l ヒ素 1g/l H2SO4 80g/l 液温 25℃ 電流密度 8A/dm2 電解時間 4秒Cu 8 g / l Arsenic 1 g / l H 2 SO 4 80 g / l Liquid temperature 25 ° C. Current density 8 A / dm 2 Electrolysis time 4 seconds

【0059】さらにこのヒ素含有銅層の上に、亜鉛メッ
キ、クロメート処理、シランカップリング剤処理と順次
行い、乾燥温度を銅箔表面温度で130℃として、ヒ素
含有銅箔を作製した。この銅箔の評価結果を表2に示
す。なお、参考として実施例2の評価結果も併せて表2
に示す。
Further, zinc plating, chromate treatment, and silane coupling agent treatment were sequentially performed on the arsenic-containing copper layer, and the drying temperature was set to 130 ° C. at the copper foil surface temperature to produce an arsenic-containing copper foil. Table 2 shows the evaluation results of the copper foil. Table 2 also shows the evaluation results of Example 2 for reference.
Shown in

【0060】比較例6 比較例5のヒ素含有銅メッキを行わず、他の処理は比較
例5と同様にしてヒ素無含有銅箔を作製した。この銅箔
の評価結果を表2に示す。
Comparative Example 6 An arsenic-free copper foil was produced in the same manner as in Comparative Example 5 except that the arsenic-containing copper plating of Comparative Example 5 was not performed. Table 2 shows the evaluation results of the copper foil.

【0061】[0061]

【表2】 [Table 2]

【0062】表2の結果から、比較例5のようにヒ素を
含有する場合は、他の条件が耐塩酸性に効果を有しない
条件でも、比較例6のヒ素を含有しない場合に比べ、耐
塩酸性が20%程度向上し、引き剥し強度においても向
上している。なお、ヒ素が人体に対して有害なことは上
述の通りである。
From the results shown in Table 2, it can be seen that when arsenic is contained as in Comparative Example 5, even when other conditions have no effect on hydrochloric acid resistance, the resistance to hydrochloric acid is higher than that when Comparative Example 6 does not contain arsenic. Is improved by about 20%, and the peel strength is also improved. As described above, arsenic is harmful to the human body.

【0063】また、実施例2では、ヒ素を含有しないに
も拘らず、比較例5に比べて耐塩酸性については格段に
優れている。。
Further, in Example 2, the hydrochloric acid resistance is remarkably superior to that of Comparative Example 5 even though it does not contain arsenic. .

【0064】さらに、実施例2はUL耐熱性、引き剥し
強度についても、比較例5のヒ素含有銅箔よりも高い値
を示し、基材との接着性についても向上している。
Further, in Example 2, the UL heat resistance and the peel strength were higher than those of the arsenic-containing copper foil of Comparative Example 5, and the adhesion to the substrate was also improved.

【0065】[0065]

【発明の効果】以上説明したように、本発明の銅箔は、
耐熱性、耐薬品性、特に耐塩酸性が良好で、またプリン
ト配線板用基材との接着性にも優れる。従って、本発明
の銅箔は、プリント配線板用銅箔として好適に用いられ
る。
As described above, the copper foil of the present invention
It has good heat resistance, chemical resistance, especially hydrochloric acid resistance, and also has excellent adhesiveness to substrates for printed wiring boards. Therefore, the copper foil of the present invention is suitably used as a copper foil for printed wiring boards.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明のプリント配線板用銅箔の構成を示す
概略断面図。
FIG. 1 is a schematic cross-sectional view illustrating a configuration of a copper foil for a printed wiring board of the present invention.

【符号の説明】[Explanation of symbols]

1:銅箔、2:銅−亜鉛−錫合金層(銅−亜鉛−ニッケ
ル層)、3:クロメート層、4:シランカップリング剤
と六価クロムを含む防錆層。
1: Copper foil, 2: Copper-zinc-tin alloy layer (copper-zinc-nickel layer), 3: Chromate layer, 4: Rust prevention layer containing silane coupling agent and hexavalent chromium.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H05K 3/00 - 3/38 C25D 7/06 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) H05K 3/00-3/38 C25D 7/06

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 銅箔のプリント配線板用基材との接着面
側に設けられた粒状銅層の上に、ヒ素を含まない銅−亜
鉛−錫あるいは銅−亜鉛−ニッケルの三元合金層を有
し、また該合金層上にクロメート防錆層を有し、さらに
該クロメート層上にシランカップリング剤と六価クロム
化合物とを含む防錆層が設けられていることを特徴とす
るプリント配線板用銅箔。
An arsenic-free ternary alloy layer of copper-zinc-tin or copper-zinc-nickel is provided on a granular copper layer provided on the side of an adhesive surface of a copper foil to a substrate for a printed wiring board. Having a chromate rust preventive layer on the alloy layer, and further provided with a rust preventive layer containing a silane coupling agent and a hexavalent chromium compound on the chromate layer. Copper foil for wiring boards.
【請求項2】 銅箔のプリント配線板用基材との接着面
側に、ヒ素を含まない粒状銅を電着して粗面化処理し、
次いで亜鉛−錫メッキまたは亜鉛−ニッケルメッキを施
し、さらにクロメート処理、0.5〜10g/lのシラ
ンカップリング剤と0.1〜2g/lの六価クロムを含
む混合溶液防錆処理を行なった後、180〜260℃
で加熱処理を行なうことを特徴とするプリント配線板用
銅箔の製造方法。
2. An arsenic-free granular copper is electrodeposited on a bonding surface side of a copper foil with a substrate for a printed wiring board to perform a roughening treatment.
Zinc then - mixed solution of nickel-plated, comprising further chromate treatment, hexavalent chromium Sila <br/> coupling agent and 0.1-2 g / l of 0.5 to 10 g / l - tin-plated or zinc in after performing the anti-rust treatment, 180~260 ℃
A method for producing a copper foil for a printed wiring board, wherein the heat treatment is performed in step (a).
【請求項3】 前記混合溶液のpHが2〜12の範囲で
あることを特徴とする請求項2に記載のプリント配線板
用銅箔の製造方法。
3. When the pH of the mixed solution is in the range of 2-12.
3. The printed wiring board according to claim 2, wherein
Production method of copper foil for use.
JP03931794A 1994-02-15 1994-02-15 Copper foil for printed wiring board and method for producing the same Expired - Fee Related JP3292774B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP03931794A JP3292774B2 (en) 1994-02-15 1994-02-15 Copper foil for printed wiring board and method for producing the same
TW083101482A TW231396B (en) 1994-02-15 1994-02-22 Copper foil for PCB and its process
FR9412979A FR2716329B1 (en) 1994-02-15 1994-10-28 Copper foil for printed wiring board and its manufacturing process.
MYPI94003097A MY113830A (en) 1994-02-15 1994-11-19 Copper foil for printed wiring board and its production method.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03931794A JP3292774B2 (en) 1994-02-15 1994-02-15 Copper foil for printed wiring board and method for producing the same

Publications (2)

Publication Number Publication Date
JPH07231161A JPH07231161A (en) 1995-08-29
JP3292774B2 true JP3292774B2 (en) 2002-06-17

Family

ID=12549739

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
JP (1) JP3292774B2 (en)
FR (1) FR2716329B1 (en)
MY (1) MY113830A (en)
TW (1) TW231396B (en)

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