JP2006028635A - Method for manufacturing surface treated copper foil for microfabrication circuit substrate - Google Patents
Method for manufacturing surface treated copper foil for microfabrication circuit substrate Download PDFInfo
- Publication number
- JP2006028635A JP2006028635A JP2004236952A JP2004236952A JP2006028635A JP 2006028635 A JP2006028635 A JP 2006028635A JP 2004236952 A JP2004236952 A JP 2004236952A JP 2004236952 A JP2004236952 A JP 2004236952A JP 2006028635 A JP2006028635 A JP 2006028635A
- Authority
- JP
- Japan
- Prior art keywords
- copper foil
- layer
- forming
- microfabrication
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 62
- 239000011889 copper foil Substances 0.000 title claims abstract description 55
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 title abstract description 14
- 238000000034 method Methods 0.000 title abstract description 9
- 239000010410 layer Substances 0.000 claims abstract description 62
- 238000011282 treatment Methods 0.000 claims abstract description 45
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000007788 roughening Methods 0.000 claims abstract description 29
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000011247 coating layer Substances 0.000 claims abstract description 15
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 14
- 150000003863 ammonium salts Chemical class 0.000 claims abstract description 13
- 238000009713 electroplating Methods 0.000 claims abstract description 11
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 11
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 8
- 239000000956 alloy Substances 0.000 claims abstract description 8
- 229910001297 Zn alloy Inorganic materials 0.000 claims abstract description 5
- 229910020630 Co Ni Inorganic materials 0.000 claims abstract description 4
- 229910002440 Co–Ni Inorganic materials 0.000 claims abstract description 4
- 230000003746 surface roughness Effects 0.000 claims abstract description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 8
- 229910000077 silane Inorganic materials 0.000 claims description 8
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 6
- 229910052748 manganese Inorganic materials 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 229910052720 vanadium Inorganic materials 0.000 claims description 5
- PYRZPBDTPRQYKG-UHFFFAOYSA-N cyclopentene-1-carboxylic acid Chemical compound OC(=O)C1=CCCC1 PYRZPBDTPRQYKG-UHFFFAOYSA-N 0.000 claims description 2
- 238000005530 etching Methods 0.000 abstract description 19
- 239000000126 substance Substances 0.000 abstract description 11
- 239000006087 Silane Coupling Agent Substances 0.000 abstract description 6
- 230000001376 precipitating effect Effects 0.000 abstract 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 27
- 239000000853 adhesive Substances 0.000 description 20
- 230000001070 adhesive effect Effects 0.000 description 20
- 229910021645 metal ion Inorganic materials 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 16
- 239000011701 zinc Substances 0.000 description 16
- 238000007747 plating Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 10
- 239000010949 copper Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 239000001509 sodium citrate Substances 0.000 description 8
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 8
- 238000004381 surface treatment Methods 0.000 description 8
- 239000003513 alkali Substances 0.000 description 7
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 7
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 7
- 235000011130 ammonium sulphate Nutrition 0.000 description 7
- 239000002585 base Substances 0.000 description 7
- 229910017052 cobalt Inorganic materials 0.000 description 7
- 239000010941 cobalt Substances 0.000 description 7
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 239000003792 electrolyte Substances 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 6
- 239000011734 sodium Substances 0.000 description 6
- 241000080590 Niso Species 0.000 description 5
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 238000005238 degreasing Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 4
- 238000005554 pickling Methods 0.000 description 4
- NNFCIKHAZHQZJG-UHFFFAOYSA-N potassium cyanide Chemical compound [K+].N#[C-] NNFCIKHAZHQZJG-UHFFFAOYSA-N 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 229910000531 Co alloy Inorganic materials 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- YXVFQADLFFNVDS-UHFFFAOYSA-N diammonium citrate Chemical compound [NH4+].[NH4+].[O-]C(=O)CC(O)(C(=O)O)CC([O-])=O YXVFQADLFFNVDS-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- USFZMSVCRYTOJT-UHFFFAOYSA-N Ammonium acetate Chemical compound N.CC(O)=O USFZMSVCRYTOJT-UHFFFAOYSA-N 0.000 description 1
- 229910002482 Cu–Ni Inorganic materials 0.000 description 1
- 229910017816 Cu—Co Inorganic materials 0.000 description 1
- 229910017709 Ni Co Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003296 Ni-Mo Inorganic materials 0.000 description 1
- 229910003262 Ni‐Co Inorganic materials 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910007567 Zn-Ni Inorganic materials 0.000 description 1
- 229910007564 Zn—Co Inorganic materials 0.000 description 1
- 229910007614 Zn—Ni Inorganic materials 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- VQWFNAGFNGABOH-UHFFFAOYSA-K chromium(iii) hydroxide Chemical compound [OH-].[OH-].[OH-].[Cr+3] VQWFNAGFNGABOH-UHFFFAOYSA-K 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000001508 potassium citrate Substances 0.000 description 1
- 229960002635 potassium citrate Drugs 0.000 description 1
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 description 1
- 235000011082 potassium citrates Nutrition 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0355—Metal foils
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroplating Methods And Accessories (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Laminated Bodies (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
この発明は、印刷回路基板用表面処理銅箔に関し、特に、回路幅が20μm以下である微細回路パターンを有する基板の製造に適する微細回路基板用表面処理銅箔の製造方法に関する。 The present invention relates to a surface-treated copper foil for a printed circuit board, and more particularly to a method for producing a surface-treated copper foil for a fine circuit board suitable for producing a board having a fine circuit pattern having a circuit width of 20 μm or less.
従来から、表面処理銅箔は、電気、電子産業の分野で使用される印刷回路基板の基礎材料として広く使用されて来た。一般的に、上記表面処理銅箔は熱間プレス成形でガラス−エポキシ基材、フエノール基材、ポリイミド等の高分子絶縁基材と継ぎ合せ、銅クラッド積層板にして、印刷回路基板の製造に使用される。
このような銅箔に要求される最も基本的な特性として、銅箔と絶縁基材基板間の接着強度が優れていることが要求される。特に、銅箔は、絶縁基材と加熱加圧し、積層した直後ばかりでなく、以後の後処理工程における多様な処理を経た後にも、接着強度を要求特性以上に維持しなければならない。そのためには、酸やアルカリ等に対する耐薬品性、耐熱性等が優秀でなければならない。さらに、銅回路パターンを形成してプリント配線板にするためのエッチング過程において、エッチング残留物質が非パターン部分に残留しない等エッチング性も優れていることが要求される。
Conventionally, surface-treated copper foil has been widely used as a basic material for printed circuit boards used in the fields of the electrical and electronic industries. In general, the surface-treated copper foil is hot press-molded and joined with a polymer insulating base material such as a glass-epoxy base material, a phenol base material, or polyimide, and is used as a copper clad laminate to produce a printed circuit board. used.
As the most basic characteristic required for such a copper foil, it is required that the adhesive strength between the copper foil and the insulating base substrate is excellent. In particular, the copper foil must maintain its adhesive strength beyond the required characteristics not only immediately after being heated and pressed with an insulating base material and laminated, but also after various treatments in the subsequent post-treatment process. For that purpose, the chemical resistance, heat resistance, etc. with respect to an acid, an alkali, etc. must be excellent. Furthermore, in an etching process for forming a copper circuit pattern to form a printed wiring board, it is required to have excellent etching properties such that an etching residual material does not remain in a non-pattern portion.
銅箔の接着強度を改善するためには、銅箔表面に微細銅粒子を析出させる所謂"粗化処理"をすることにより、銅箔面の表面積を増大させる工程が通常使用されている。しかし、単純な粗化処理だけでは、接着強度を改善させることができるといえども、以後の工程において、各種化学薬品や熱によって接着強度が劣化されるのを防ぐことはできない。これを克服するために、上記粗化処理後に、亜鉛層被膜を形成し、電解クロメート層及びシランカップリング剤処理層の防錆処理層を形成させる等、多様な後処理工程が行われている。
一方、最近、電子部品の高密度化、高性能化、小形化により、使用される基板回路も高密度化され、これに従って、回路幅の微細化が要求されている。このため、印刷回路基板用銅箔もこのような微細回路幅パターンを形成するのに適するように微細な粗度を有することが要求される。
In order to improve the adhesive strength of the copper foil, a process of increasing the surface area of the copper foil surface by performing a so-called “roughening treatment” in which fine copper particles are deposited on the surface of the copper foil is usually used. However, even if simple roughening treatment can improve the adhesive strength, it cannot prevent the adhesive strength from being deteriorated by various chemicals or heat in the subsequent steps. In order to overcome this, after the roughening treatment, various post-treatment steps such as forming a zinc layer coating and forming an anti-rust treatment layer of an electrolytic chromate layer and a silane coupling agent treatment layer are performed. .
On the other hand, recently, with the increase in density, performance, and miniaturization of electronic components, the substrate circuit to be used is also increased in density, and accordingly, the circuit width is required to be reduced. For this reason, the copper foil for printed circuit boards is also required to have a fine roughness so as to be suitable for forming such a fine circuit width pattern.
ところが粗化処理層の粗度が微細になれば、銅箔表面の接着強度が劣るばかりでなく、上記銅箔に要求される諸般要求特性も達成することが困難であるという矛盾が生ずる。
従って、微細粗度を有しながらも、銅箔に要求される諸般特性を改善するために、多くの研究が行われている。例えば、Cu−Ni系(特許文献1、2)、Cu−Co系(特許文献3、4)、Cu−Co−Ni系(特許文献5)の合金粗化処理層を形成する技術等が挙げられる。
しかし、上記の開示された従来の技術等においては、微細な粗化処理は可能であるが、Cuを合金主材に使用しているため、印刷回路基板用銅箔として要求される上記のような諸般特性を部分的に改善するのみで、耐酸性及び耐アルカリ性等の耐薬品性、耐熱性及びエッチング性等の要求特性全般を均等に改善することはできなかった。そのため、上記要求特性の全般を改善するためには、別途の追加的なメッキ工程ないしは後処理工程が必要であり、生産性が低下し、製造単価が上昇するという短所があった。
However, if the roughness of the roughened layer becomes fine, not only the adhesive strength of the copper foil surface is inferior, but also a contradiction arises that it is difficult to achieve various required characteristics required for the copper foil.
Therefore, many studies have been conducted to improve various characteristics required for copper foil while having fine roughness. For example, the technique etc. which form the alloy roughening process layer of Cu-Ni system (patent documents 1 and 2), Cu-Co system (patent documents 3 and 4), Cu-Co-Ni system (patent documents 5), etc. are mentioned. It is done.
However, in the above disclosed prior art and the like, a fine roughening treatment is possible, but since Cu is used as an alloy main material, it is required as a copper foil for a printed circuit board as described above. However, it was not possible to improve the required properties such as chemical resistance such as acid resistance and alkali resistance, heat resistance and etching property in a uniform manner by only partially improving the various characteristics. For this reason, in order to improve the overall required characteristics, a separate additional plating step or post-treatment step is required, which has the disadvantages that the productivity is lowered and the manufacturing unit price is increased.
本発明は、微細回路基板用に適する微細な粗度を有しながらも、印刷回路基板に要求される諸般特性を全般的に向上させ得る微細回路基板用表面処理銅箔の製造方法を提供することを目的とする。 The present invention provides a method for producing a surface-treated copper foil for a fine circuit board that can improve overall characteristics required for a printed circuit board while having a fine roughness suitable for a fine circuit board. For the purpose.
上記の課題を解決するために、本発明の微細回路基板用表面処理銅箔の製造方法は、Co、Ni、アンモニウム塩及びクエン酸を含む電解メッキ浴に銅箔を陰極に配置し、表面粗度が0.5μm以下になるように上記銅箔表面上に、Co−Ni合金の粗化処理層を析出形成する段階と;
上記粗化処理層の上に純粋Zn又はZn合金被膜層を形成する段階と;
上記被膜層の上に電解クロメート層を形成する段階と;
上記電解クロメート層の上に、シランカップリング層を形成する段階と;
を含んで構成されることを特徴とする。
上記電解メッキ浴は、Co:1〜40g/l、Ni:0.1〜40g/l、アンモニウム塩:5〜50g/l、クエン酸:5〜100g/lを含むことが好ましい。
さらに、上記電解メッキ浴にFe、Zn、Cr、Mo、W、V、Mn、Ti、Sn中一つ以上の成分が追加的に含まれて、Co、Niを必須的に含み、Fe、Zn、Cr、Mo、W、V、Mn、Ti、Sn中一つ以上の成分が追加的に含まれた粗化処理層が形成されることが好ましい。
In order to solve the above-described problems, a method for producing a surface-treated copper foil for a fine circuit board according to the present invention includes disposing a copper foil at a cathode in an electrolytic plating bath containing Co, Ni, ammonium salt and citric acid, Depositing a Co—Ni alloy roughening layer on the surface of the copper foil to a degree of 0.5 μm or less;
Forming a pure Zn or Zn alloy coating layer on the roughened layer;
Forming an electrolytic chromate layer on the coating layer;
Forming a silane coupling layer on the electrolytic chromate layer;
It is characterized by including.
The electrolytic plating bath preferably contains Co: 1 to 40 g / l, Ni: 0.1 to 40 g / l, ammonium salt: 5 to 50 g / l, and citric acid: 5 to 100 g / l.
Further, the electrolytic plating bath additionally includes one or more components among Fe, Zn, Cr, Mo, W, V, Mn, Ti, and Sn, and essentially includes Co and Ni, Fe, Zn It is preferable that a roughening layer containing one or more components of Cr, Mo, W, V, Mn, Ti, and Sn is additionally formed.
本発明の製造方法によって製造された表面処理銅箔は、基板との接着強度及び耐熱接着強度、耐薬品性、エッチング性等の銅箔としての要求特性が全般的に優秀であるので、微細回路基板用銅箔として非常に適している。 The surface-treated copper foil produced by the production method of the present invention is generally excellent in the required properties as a copper foil, such as adhesion strength to a substrate, heat-resistant adhesion strength, chemical resistance, and etching property. It is very suitable as a copper foil for substrates.
以下、本発明について詳しく説明する。
本発明は、電解銅箔又は圧延銅箔等銅箔の種類に関わりなく適用できるし、硬性及び軟性の印刷回路基板にすべて適用することができる。特に、本発明の製造方法によれば、銅箔の要求特性をすべて満足しながらも微細な粗度を達成できるので、微細回路幅が要求される所謂軟性印刷回路基板用銅箔積層フイルム(FCCL)の製造用として好ましく使用することができる。
FCCL用銅箔に使用されるためには、少なくとも、0.5μm以下の粗度を有する粗化処理層が具備されることが要求されるが、このように、粗度が低くなる場合には、接着強度及び耐薬品性、耐熱性、エッチング性等が要求特性が劣化するという問題がある。
本発明の主な特徴は、従来とは異なり、粗化処理層をニッケル−コバルト合金が主剤として必須的に含まれるように構成し、このようなニッケル−コバルト合金の固有特性が、最大限発現されるように電解反応の媒介体としてアンモニウム塩とクエン酸を電解メッキ浴に添加して、電解メッキすることにより、微細粗度を有しながらも銅箔の諸般要求特性も満足する粗化処理層を形成するようにしたことにある。
The present invention will be described in detail below.
The present invention can be applied regardless of the type of copper foil such as electrolytic copper foil or rolled copper foil, and can be applied to all hard and soft printed circuit boards. In particular, according to the manufacturing method of the present invention, a fine roughness can be achieved while satisfying all the required characteristics of the copper foil, so a so-called copper foil laminated film (FCCL for flexible printed circuit board) that requires a fine circuit width is required. ) Can be preferably used.
In order to be used for the copper foil for FCCL, it is required that at least a roughening treatment layer having a roughness of 0.5 μm or less is provided. Further, there is a problem that required properties such as adhesive strength, chemical resistance, heat resistance, and etching property deteriorate.
The main feature of the present invention is that, unlike the prior art, the roughened layer is constituted so that a nickel-cobalt alloy is essentially contained as a main agent, and the inherent characteristics of such a nickel-cobalt alloy are maximized. As described above, the addition of ammonium salt and citric acid to the electrolytic plating bath as a mediator of the electrolytic reaction, and by electroplating, roughening treatment that satisfies the various required characteristics of copper foil while having fine roughness This is because a layer is formed.
ニッケルは耐薬品性及び耐熱性を改善するが、ニッケル単独で粗化処理層を形成する場合には、微細粗度で析出することが困難であり、アルカリエッチング時に残渣が発生するという短所がある。さらに、コバルトはニッケルとは反対に微細粗度で析出し、アルカリエッチング性が良好であるという長所を有するが、コバルト単独で粗化処理層を形成する場合には、耐薬品性が劣化するという問題がある。従って、ニッケルとコバルトを適切な割合で同時に添加すれば、諸般要求特性を同時に満足することができることと予想されるが、後述するように、実際にニッケルとコバルトだけを主剤にして粗化処理層を形成する場合には、望むほどの微細な粗化処理層が形成されないばかりでなく、予想されるほど接着強度が改善されず、且つ耐薬品性やエッチング性等に問題がある。 Nickel improves chemical resistance and heat resistance, but when a roughened layer is formed with nickel alone, it is difficult to deposit with a fine roughness, and there is a disadvantage that a residue is generated during alkali etching. . Furthermore, cobalt has the advantage that it is precipitated with a fine roughness, contrary to nickel, and has good alkali etching properties. However, when a roughened layer is formed with cobalt alone, the chemical resistance is deteriorated. There's a problem. Therefore, if nickel and cobalt are added at an appropriate ratio at the same time, it is expected that various required characteristics can be satisfied at the same time. However, as will be described later, the roughened layer is actually composed mainly of nickel and cobalt. In the case of forming the film, not only a fine roughening layer as fine as desired is formed, but also the adhesive strength is not improved as expected, and there is a problem in chemical resistance, etching property, and the like.
本発明者らは、これらの問題を改善するために鋭意研究した結果、電解メッキ浴にアンモニウム塩とクエン酸を添加することにより、ニッケルとコバルトの効果を最大限発現させて各種諸般特性が顕著に改善された微細粗度の粗化処理層を形成できることを見出した。
アンモニウム塩は、ニッケルとコバルトの電解析出反応経路に関与してニッケル−コバルト合金がより微細なノージユール(nodule)形態に析出されるようにし、さらにノージユールをより均一に析出されるようにする作用をするものと思われる。適用され得るアンモニウム塩の種類としては、特別な制限はなく、例えば、硫酸アンモニウム、 塩化アンモニウム、アセト酸アンモニウム等が使用され得る。
さらに、クエン酸は、アンモニウム塩とニッケルやコバルトのような金属イオンが安定された錯化合物を形成するようにし、耐熱性を向上させる役割をする。錯化剤として、クエン酸は、ニッケル−コバルトとアンモニウム塩の化学反応助剤として特別な適合性を有し、アンモニウム塩によって形成されたニッケル−コバルトのノージユールが銅箔に堅固に付着されるように助ける役割をするものと考えられる。本発明に適するクエン酸としては、クエン酸ナトリウム、クエン酸カリウム、クエン酸アンモニウム、クエン酸二アンモニウム、クエン酸鉄アンモニウム等が挙げられる。
As a result of intensive studies to improve these problems, the present inventors have made various effects remarkable by maximizing the effects of nickel and cobalt by adding ammonium salt and citric acid to the electrolytic plating bath. It was found that a roughened layer having an improved fine roughness can be formed.
The ammonium salt is involved in the electrolytic deposition reaction path of nickel and cobalt, so that the nickel-cobalt alloy is deposited in a finer nodule form, and further, the nodule is deposited more uniformly. It seems to do. The kind of ammonium salt that can be applied is not particularly limited, and for example, ammonium sulfate, ammonium chloride, ammonium acetoate and the like can be used.
Further, citric acid plays a role of improving heat resistance by forming a complex compound in which an ammonium salt and metal ions such as nickel and cobalt are stabilized. As a complexing agent, citric acid has particular suitability as a chemical reaction aid for nickel-cobalt and ammonium salts so that the nickel-cobalt nodule formed by the ammonium salt is firmly attached to the copper foil. It is thought to play a role to help. Citric acid suitable for the present invention includes sodium citrate, potassium citrate, ammonium citrate, diammonium citrate, ammonium ammonium citrate and the like.
一方、エッチング性及び耐薬品性をさらに向上させる等銅箔に必要な物理的特性又は機械的特性を追加する目的や、透明基材と銅箔との剥離強度を向上させる目的等のために、Co、Niの外に、Fe、Zn,Cr、Mo、W、V,Mn、Ti、Sn中一つ以上の成分をメッキ浴に追加的に添加することもできる。例えば、黒化メッキ層にFeやZnが含まれると、PET基材との接着強度が向上し、エッチング速度も比較的早くなるメリットがある。
本発明による粗化処理層を形成するために使用される好ましい電解メッキ浴の組成は次のとおりであるが、これらに限定されるものではない。
Co金属イオンの濃度:1〜40g/l
Ni金属イオンの濃度:0.1〜40g/l
その他金属イオンの濃度:0.001〜5g/l
アンモニウム塩:5〜50g/l
クエン酸ナトリウム(C6H5Na3O7・2H2O):5〜100g/l
上記組成のメッキ浴を用いて粗化処理層を形成すると、より均一な粗化処理層が形成されるメリットがある。
On the other hand, for the purpose of adding physical properties or mechanical properties necessary for copper foil, such as further improving etching properties and chemical resistance, and for the purpose of improving the peel strength between the transparent substrate and copper foil, In addition to Co and Ni, one or more components among Fe, Zn, Cr, Mo, W, V, Mn, Ti, and Sn can be additionally added to the plating bath. For example, when Fe or Zn is contained in the blackened plating layer, there is an advantage that the adhesive strength with the PET base material is improved and the etching rate is relatively fast.
Although the composition of the preferable electrolytic plating bath used in order to form the roughening process layer by this invention is as follows, it is not limited to these.
Co metal ion concentration: 1 to 40 g / l
Ni metal ion concentration: 0.1 to 40 g / l
Other metal ion concentrations: 0.001 to 5 g / l
Ammonium salt: 5-50 g / l
Sodium citrate (C 6 H 5 Na 3 O 7 · 2H 2 O): 5~100g / l
Forming a roughened layer using a plating bath having the above composition has an advantage of forming a more uniform roughened layer.
さらに、電解条件は粗化層の形成が可能にメッキ浴の限界電流密度近くで電解するが、均一な粗化処理層を形成するという観点から次のような条件を選択することが好ましい。
pH:2〜6
メッキ液温度:20〜60℃
電流密度:1〜50A/dm2
処理時間:1〜20秒
Furthermore, the electrolytic conditions are such that the roughened layer can be formed and electrolysis is performed near the limit current density of the plating bath. From the viewpoint of forming a uniform roughened layer, the following conditions are preferably selected.
pH: 2-6
Plating solution temperature: 20-60 ° C
Current density: 1 to 50 A / dm 2
Processing time: 1-20 seconds
一方、加熱変色を防ぐために、上記粗化処理層の上に純粋Zn又はZn合金被膜層を析出形成させる。可溶なZn合金としては、Zn−Ni、Zn−Mo、Zn−Cr、Zn−Co、Zn−Ni−Co、Zn−Ni−Mo、Zn−Co−Mo等が挙げられる。被膜層形成条件は通常使用される条件から選んで使用することができるが、これらに限定されるものではないが、例えば、以下のような条件ですればより好ましき効果を得ることができる。
電解浴組成:
Zn金属イオン:0.5〜15g/l、他の金属イオン:10g/l以下
pH:3.0〜4.0
温度:常温
電流密度:0.1〜3A/dm2
処理時間:1〜4秒
On the other hand, in order to prevent heat discoloration, a pure Zn or Zn alloy coating layer is deposited on the roughening layer. Examples of the soluble Zn alloy include Zn—Ni, Zn—Mo, Zn—Cr, Zn—Co, Zn—Ni—Co, Zn—Ni—Mo, Zn—Co—Mo, and the like. The coating layer formation conditions can be selected and used from the conditions normally used, but are not limited to these conditions. For example, the following conditions can provide a more favorable effect. .
Electrolytic bath composition:
Zn metal ions: 0.5 to 15 g / l, other metal ions: 10 g / l or less pH: 3.0 to 4.0
Temperature: Room temperature Current density: 0.1-3 A / dm 2
Processing time: 1-4 seconds
さらに、Zn被膜層形成後、電解クロメート層及びシランカップリング剤処理層等の通常の防錆処理層を形成すると、本発明による微細回路基板用表面処理銅箔が完成される。
クロメート処理条件は、通常の処理条件から選んで使用することができ、特に限定されるものではないが、例えば、以下のような条件ですれば、より好ましき効果を得ることができる。
電解浴のCrO3濃度:0.1〜10g/l、
電解液のpH:4.0〜5.0
電解液温度:常温
電流密度:0.2〜2A/dm2
処理時間:2〜5秒
クロメート処理を行なうと、クロム水酸化物及びクロム酸化物からなる防錆層が薄く形成される。
シランカップリング剤処理は、例えば、0.005〜2wt%のシランカップリング剤を水に希釈してクロメート層の上に塗布し乾燥させることにより行われる。
以下、実施例にて本発明を例証するが本発明を限定することを意図するものではない。
Furthermore, after forming the Zn coating layer, when a normal rust-proofing layer such as an electrolytic chromate layer and a silane coupling agent-treated layer is formed, the surface-treated copper foil for a fine circuit board according to the present invention is completed.
The chromate treatment conditions can be selected and used from normal treatment conditions and are not particularly limited. For example, if the conditions are as follows, a more preferable effect can be obtained.
CrO 3 concentration in the electrolytic bath: 0.1 to 10 g / l,
Electrolyte pH: 4.0-5.0
Electrolyte temperature: normal temperature current density: 0.2-2 A / dm 2
Treatment time: 2 to 5 seconds When the chromate treatment is performed, a rust preventive layer composed of chromium hydroxide and chromium oxide is thinly formed.
The silane coupling agent treatment is performed, for example, by diluting 0.005 to 2 wt% of a silane coupling agent in water, applying the silane coupling agent on the chromate layer, and drying.
The following examples illustrate the invention but are not intended to limit the invention.
銅箔として、表面粗度(Rz)が1.0μm以下で厚さが18μmの圧延銅箔を使用した。この銅箔の表面に対して電解アルカリ脱脂を行い、100g/l硫酸で10秒間浸漬を行い、純水で洗浄した後、下記の条件で粗化処理層を形成した。その後、粗化処理層面に、下記の条件でZn被膜層の形成、Cr防錆処理、シランカップリング処理を順次に行なった。 As the copper foil, a rolled copper foil having a surface roughness (Rz) of 1.0 μm or less and a thickness of 18 μm was used. The surface of the copper foil was subjected to electrolytic alkaline degreasing, immersed in 100 g / l sulfuric acid for 10 seconds, washed with pure water, and then a roughened layer was formed under the following conditions. Thereafter, formation of a Zn coating layer, Cr anticorrosion treatment, and silane coupling treatment were sequentially performed on the roughened layer surface under the following conditions.
<粗化処理層形成条件>
電解浴組成:
Co金属イオン(CoSO4・7H2O)の濃度:5g/l、Ni金属イオン(NiSO4・6H2O)の濃度:2g/l、クエン酸ナトリウム(C6H5Na3O7・2H2O):25g/l、硫酸アンモニウム((NH4)2SO4):15g/l
pH:5.4
電解液の温度:25℃
電流密度:25A/dm2
メッキ時間:8秒
<Roughening layer formation conditions>
Electrolytic bath composition:
The concentration of Co metal ions (CoSO 4 · 7H 2 O) : 5g / l, the concentration of Ni metal ions (NiSO 4 · 6H 2 O) : 2g / l, sodium citrate (C 6 H 5 Na 3 O 7 · 2H 2 O): 25 g / l, ammonium sulfate ((NH 4 ) 2 SO 4 ): 15 g / l
pH: 5.4
Electrolyte temperature: 25 ° C
Current density: 25 A / dm 2
Plating time: 8 seconds
<Zn被膜層形成条件>
ZnSO4・H2O:5g/l
pH:3.0
温度:常温
電流密度:1A/dm2
処理時間:4秒
<Zn coating layer formation conditions>
ZnSO 4 · H 2 O: 5 g / l
pH: 3.0
Temperature: normal temperature current density: 1 A / dm 2
Processing time: 4 seconds
<クロメート防錆処理条件>
CrO3濃度:5g/l
pH:5.0
温度:常温
電流密度:0.5A/dm2
処理時間:4秒
<シランカップリング処理条件>
クロメート防錆処理を行なった後、3−グリシドキシプロピルトリメトキシシラン0.1wt%水溶液をスプレーによって塗布した後、150℃の乾燥炉で30秒間乾燥した。
<Chromate rust prevention treatment conditions>
CrO 3 concentration: 5 g / l
pH: 5.0
Temperature: Normal temperature Current density: 0.5 A / dm 2
Processing time: 4 seconds
<Silane coupling treatment conditions>
After the chromate rust prevention treatment, a 0.1 wt% aqueous solution of 3-glycidoxypropyltrimethoxysilane was applied by spraying and then dried in a drying oven at 150 ° C. for 30 seconds.
下記の粗化処理層形成条件以外は、実施例1と同様の銅箔の種類、脱脂、酸洗及び水洗等の前処理条件及びその他表面処理条件(Zn被膜層形成、クロメート処理及びシランカップリング剤処理条件)を用いて、実施例1と同様の処理を行った。
<粗化処理層形成条件>
電解浴組成:
Co金属イオン(CoSO4・7H2O)の濃度:6g/l、Ni金属イオン(NiSO4・6H2O)の濃度:0.5g/l、クエン酸ナトリウム(C6H5Na3O7)・2H2O):25g/l、硫酸アンモニウム((NH4)2SO4):15g/l
pH:5.4
電解液の温度:25℃
電流密度:20A/dm2
メッキ時間:10秒
Except for the following roughening treatment layer formation conditions, the same copper foil type as in Example 1, pretreatment conditions such as degreasing, pickling and washing, and other surface treatment conditions (Zn coating layer formation, chromate treatment and silane coupling) The same treatment as in Example 1 was performed using the agent treatment conditions.
<Roughening layer formation conditions>
Electrolytic bath composition:
Co metal ion (CoSO 4 .7H 2 O) concentration: 6 g / l, Ni metal ion (NiSO 4 .6H 2 O) concentration: 0.5 g / l, sodium citrate (C 6 H 5 Na 3 O 7 ) · 2H 2 O): 25 g / l, ammonium sulfate ((NH 4 ) 2 SO 4 ): 15 g / l
pH: 5.4
Electrolyte temperature: 25 ° C
Current density: 20 A / dm 2
Plating time: 10 seconds
下記の粗化処理層形成条件以外は、実施例1と同様の銅箔の種類、脱脂、酸洗及び水洗等の前処理条件及びその他表面処理条件(Zn被膜層形成、クロメート処理及びシランカップリング剤処理条件)を用いて、実施例1と同様の処理を行った。
<粗化処理層形成条件>
電解浴組成:
Co金属イオン(CoSO4・7H2O)の濃度:6g/l、Ni金属イオン(NiSO4・6H2O)の濃度:1g/l、クエン酸ナトリウム(C6H5Na3O7)・2H2O):25g/l、硫酸アンモニウム((NH4)2SO4):15g/l
pH:5.4
電解液の温度:25℃
電流密度:22A/dm2
メッキ時間:10秒
Except for the following roughening treatment layer formation conditions, the same copper foil type as in Example 1, pretreatment conditions such as degreasing, pickling and washing, and other surface treatment conditions (Zn coating layer formation, chromate treatment and silane coupling) The same treatment as in Example 1 was performed using the agent treatment conditions.
<Roughening layer formation conditions>
Electrolytic bath composition:
Co metal ion (CoSO 4 .7H 2 O) concentration: 6 g / l, Ni metal ion (NiSO 4 .6H 2 O) concentration: 1 g / l, sodium citrate (C 6 H 5 Na 3 O 7 ). 2H 2 O): 25 g / l, ammonium sulfate ((NH 4 ) 2 SO 4 ): 15 g / l
pH: 5.4
Electrolyte temperature: 25 ° C
Current density: 22 A / dm 2
Plating time: 10 seconds
下記の粗化処理層形成条件以外は、実施例1と同様の銅箔の種類、脱脂、酸洗及び水洗等の前処理条件及びその他表面処理条件(Zn被膜層形成、クロメート処理及びシランカップリング剤処理条件)を用いて、実施例1と同様の処理を行った。
<粗化処理層形成条件>
電解浴組成:
Co金属イオン(CoSO4・7H2O)の濃度:5g/l、Ni金属イオン(NiSO4・6H2O)の濃度:2g/l、Fe金属イオン(FeSO4・7H5O)の濃度:1g/l、クエン酸ナトリウム(C6H5Na3O7・2H2O):25g/l、硫酸アンモニウム((NH4)2SO4):15g/l
pH:5.4
電解液の温度:25℃
電流密度:25A/dm2
メッキ時間:8秒
Except for the following roughening treatment layer formation conditions, the same copper foil type as in Example 1, pretreatment conditions such as degreasing, pickling and washing, and other surface treatment conditions (Zn coating layer formation, chromate treatment and silane coupling) The same treatment as in Example 1 was performed using the agent treatment conditions.
<Roughening layer formation conditions>
Electrolytic bath composition:
Co metal ion (CoSO 4 .7H 2 O) concentration: 5 g / l, Ni metal ion (NiSO 4 .6H 2 O) concentration: 2 g / l, Fe metal ion (FeSO 4 .7H 5 O) concentration: 1 g / l, sodium citrate (C 6 H 5 Na 3 O 7 · 2H 2 O): 25g / l, ammonium sulfate ((NH 4) 2 SO 4 ): 15g / l
pH: 5.4
Electrolyte temperature: 25 ° C
Current density: 25 A / dm 2
Plating time: 8 seconds
下記の粗化処理層形成条件以外は、実施例1と同様の銅箔の種類、脱脂、酸洗及び水洗等の前処理条件及びその他表面処理条件(Zn被膜層形成、クロメート処理及びシランカップリング剤処理条件)を用いて、実施例1と同様の処理を行った。
<粗化処理層形成条件>
電解浴組成:
Co金属イオン(CoSO4・7H2O)の濃度:5g/l、Ni金属イオン(NiSO4・6H2O)の濃度:2g/l、Zn金属イオン(ZnSO4・H2O)の濃度:1g/l、クエン酸ナトリウム(C6H5Na3O7・2H2O):25g/l、硫酸アンモニウム((NH4)2SO4):15g/l
pH:5.4
電解液の温度:25℃
電流密度:25A/dm2
メッキ時間:8秒
Except for the following roughening treatment layer formation conditions, the same copper foil type as in Example 1, pretreatment conditions such as degreasing, pickling and washing, and other surface treatment conditions (Zn coating layer formation, chromate treatment and silane coupling) The same treatment as in Example 1 was performed using the agent treatment conditions.
<Roughening layer formation conditions>
Electrolytic bath composition:
Co metal ion (CoSO 4 .7H 2 O) concentration: 5 g / l, Ni metal ion (NiSO 4 .6H 2 O) concentration: 2 g / l, Zn metal ion (ZnSO 4 .H 2 O) concentration: 1 g / l, sodium citrate (C 6 H 5 Na 3 O 7 · 2H 2 O): 25g / l, ammonium sulfate ((NH 4) 2 SO 4 ): 15g / l
pH: 5.4
Electrolyte temperature: 25 ° C
Current density: 25 A / dm 2
Plating time: 8 seconds
比較例1
実施例1の粗化処理層形成条件中、メッキ浴に硫酸アンモニウムが含まれないこと以外は、実施例1と同様に表面処理を行なった。
Comparative Example 1
The surface treatment was performed in the same manner as in Example 1 except that ammonium sulfate was not included in the plating bath in the conditions for forming the roughened layer in Example 1.
比較例2
実施例1の粗化処理層形成条件中、メッキ浴にクエン酸ナトリウムが含まれないこと以外は、実施例1と同様に表面処理を行なった。
Comparative Example 2
Surface treatment was performed in the same manner as in Example 1 except that sodium citrate was not included in the plating bath in the conditions for forming the roughened layer in Example 1.
比較例3
実施例1の粗化処理層形成条件中、メッキ浴にNiが含まれないこと以外は、実施例1と同様に表面処理を行なった。
Comparative Example 3
Surface treatment was performed in the same manner as in Example 1 except that the plating bath contained no Ni in the roughening treatment layer forming conditions of Example 1.
比較例4
実施例1の粗化処理層形成条件中、メッキ浴にCoが含まれないこと以外は、実施例1と同様に表面処理を行なった。
Comparative Example 4
The surface treatment was performed in the same manner as in Example 1 except that Co was not contained in the plating bath in the roughening treatment layer forming conditions of Example 1.
表1に、各実施例及び各比較例における、各種要求特性の測定結果を示す。
試験条件及び評価基準を下記に示す。
接着強度:エポキシ樹脂含浸基材と銅箔の非平滑面を積層して積層板にし、試験片を幅10mmにして、接着強度測定機(Universal Test Machine:UTM)を用いて測定した。
耐熱接着強度:177℃のDry ovenで240時間焼いた後、接着強度を測定した。
Test conditions and evaluation criteria are shown below.
Adhesive strength: An epoxy resin-impregnated base material and a non-smooth surface of a copper foil were laminated to form a laminate, and the test piece was measured to have a width of 10 mm and measured using an adhesive strength measuring machine (Universal Test Machine: UTM).
Heat-resistant adhesive strength: After baking for 240 hours with Dry oven at 177 ° C., the adhesive strength was measured.
耐HCl性:18%−KClに1時間沈積後、接着強度劣化率を測定した。
耐KCN性:10%−KCNに30分沈積後、接着強度劣化率を測定した。
耐煮沸性(Loss in after boiling in water):100℃のH2Oに2時間沈積後、接着強度劣化率を測定した。
<耐HCl性、耐KCN性、耐煮沸性評価基準>
○:浸漬前後の劣化率が5%以下
△:浸漬前後の劣化率が5%〜25%以下
×:浸漬前後の劣化率が25%以上
HCl resistance: After being deposited in 18% -KCl for 1 hour, the adhesive strength deterioration rate was measured.
KCN resistance: 10% -After being deposited in KCN for 30 minutes, the adhesive strength deterioration rate was measured.
Boil resistance (Loss in after boiling in water): After depositing in H 2 O at 100 ° C. for 2 hours, the adhesive strength deterioration rate was measured.
<Evaluation criteria for HCl resistance, KCN resistance, and boiling resistance>
○: Deterioration rate before and after immersion is 5% or less Δ: Deterioration rate before and after immersion is 5% to 25% or less ×: Deterioration rate before and after immersion is 25% or more
アルカリエッチング性:pH9.7〜10.2、比重1.19〜1.21のエッチング液に、温度50℃条件で8分間沈積後、10dm2範囲内の基材に残っている残留銅を光学顕微鏡を利用して観察した。
<アルカリエッチング性評価基準>
○:エッチング後、基材に残存する残留銅又は合金層がない。
△:エッチング後、基材に残存する残留銅又は合金層が若干ある。
×:エッチング後、基材に残存する銅又合金層が多い。
Alkali etching property: After depositing in an etching solution having a pH of 9.7 to 10.2 and a specific gravity of 1.19 to 1.21 at a temperature of 50 ° C. for 8 minutes, the remaining copper remaining on the base material within the range of 10 dm 2 is optical. Observation was performed using a microscope.
<Alkali etching property evaluation criteria>
○: There is no residual copper or alloy layer remaining on the substrate after etching.
Δ: After etching, there is some residual copper or alloy layer remaining on the substrate.
X: Many copper or alloy layers remain on the substrate after etching.
表1に示すように、本発明の実施例の場合、接着強度、耐熱性(耐熱接着強度)、耐塩酸性、耐シアン化カリウム性等の耐薬品性、耐煮沸性及びアルカリエッチング性が均一に優秀なことを分かる。
これに対して、本発明の製造方法による粗化処理層の必須構成要件中の一つ以上が抜けた比較例の場合、上記特性中の一つ以上が本発明の実施例に比べて劣っており。例えば、接着強度及び耐熱接着強度において、本発明の実施例は比較例に比べて概ね各々9.6%以上及び21.9%以上向上している。
As shown in Table 1, in the case of the examples of the present invention, the chemical strength such as adhesive strength, heat resistance (heat resistant adhesive strength), hydrochloric acid resistance, potassium cyanide resistance, boiling resistance and alkali etching property are uniformly excellent. I understand that.
On the other hand, in the case of a comparative example in which one or more of the essential constituent requirements of the roughening treatment layer according to the production method of the present invention have been omitted, one or more of the above characteristics are inferior to the examples of the present invention. The cage. For example, in the adhesive strength and heat-resistant adhesive strength, the examples of the present invention are generally improved by 9.6% or more and 21.9% or more, respectively, as compared with the comparative example.
Claims (4)
The surface-treated copper foil for fine circuit boards manufactured by the manufacturing method as described in any one of Claims 1-3.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040055382A KR100654737B1 (en) | 2004-07-16 | 2004-07-16 | Method of manufacturing Surface-treated Copper Foil for PCB having fine-circuit pattern and Surface-treated Copper Foil thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006028635A true JP2006028635A (en) | 2006-02-02 |
Family
ID=35895336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004236952A Pending JP2006028635A (en) | 2004-07-16 | 2004-08-17 | Method for manufacturing surface treated copper foil for microfabrication circuit substrate |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2006028635A (en) |
KR (1) | KR100654737B1 (en) |
TW (1) | TWI267560B (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007119902A (en) * | 2005-09-27 | 2007-05-17 | Hitachi Cable Ltd | Nickel plating solution and its preparation method, nickel plating method, and printed wiring board copper foil |
KR100974373B1 (en) * | 2008-02-28 | 2010-08-05 | 엘에스엠트론 주식회사 | Surface treatment method of copper foil for printed circuit, copper foil and electroplater thereof |
KR100983682B1 (en) | 2008-03-31 | 2010-09-24 | 엘에스엠트론 주식회사 | Surface treatment method of copper foil for printed circuit, copper foil and electroplater thereof |
CN104962965A (en) * | 2015-05-29 | 2015-10-07 | 灵宝金源朝辉铜业有限公司 | Environmental protection ashing treatment process of calendaring copper foil |
EP2896723A4 (en) * | 2012-09-12 | 2016-06-15 | Doosan Corp | Method for surface-treating copper foil and copper foil surface-treated thereby |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100942547B1 (en) * | 2006-08-11 | 2010-02-16 | 일진소재산업주식회사 | The resin composition for copper clad laminate, copper clad comprising the same and method for manufacturing the same |
KR100857311B1 (en) * | 2007-06-18 | 2008-09-05 | 엘에스엠트론 주식회사 | Copper foil and surface treatment thereof |
KR101475839B1 (en) * | 2008-07-18 | 2014-12-23 | 일진머티리얼즈 주식회사 | Copper foil for flexible printed circuit board, method for preparing the same, and flexible copper clad laminate using polyamic acid precursor and copper foil |
KR101427388B1 (en) | 2013-06-21 | 2014-08-08 | 이을규 | Reinforcing Substrate for Supporting Printed Circuit Board and Method for Processing for the Same |
KR102481411B1 (en) | 2016-01-25 | 2022-12-23 | 에스케이넥실리스 주식회사 | Electrolytic copper foil and method for producing the same, and copper clad laminate and printed circuit board having the same |
KR102230999B1 (en) * | 2016-02-10 | 2021-03-22 | 후루카와 덴키 고교 가부시키가이샤 | Surface-treated copper foil and copper clad laminate manufactured using the same |
JP7014884B1 (en) * | 2020-12-23 | 2022-02-01 | Jx金属株式会社 | Surface-treated copper foil, copper-clad laminate and printed wiring board |
CN115044947B (en) * | 2022-06-17 | 2023-09-29 | 山东金宝电子有限公司 | Surface treatment method for improving adhesion of copper foil and resin |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1060680A (en) * | 1996-08-14 | 1998-03-03 | C Uyemura & Co Ltd | Plating bath of nickel, cobalt or nickel-cobalt alloy and phosphorus and plating method |
JPH10212591A (en) * | 1997-01-29 | 1998-08-11 | Shinko Electric Ind Co Ltd | Nickel electroplating bath or nickel alloy electroplating bath and plating method using the bath |
JPH1110794A (en) * | 1997-06-27 | 1999-01-19 | Nippon Denkai Kk | Copper foil for copper-clad laminate and copperclad laminate employing the same |
JP2001288595A (en) * | 2000-04-05 | 2001-10-19 | Nikko Materials Co Ltd | Copper foil for laser hole opening |
JP2002212773A (en) * | 2001-01-19 | 2002-07-31 | Fukuda Metal Foil & Powder Co Ltd | Copper foil for printed circuit board and method for manufacturing the same |
JP2003201585A (en) * | 2001-10-30 | 2003-07-18 | Nikko Materials Co Ltd | Surface treated copper foil |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3739929B2 (en) | 1998-03-09 | 2006-01-25 | 古河サーキットフォイル株式会社 | Copper foil for printed wiring board and method for producing the same |
TW200424359A (en) * | 2003-02-04 | 2004-11-16 | Furukawa Circuit Foil | Copper foil for high frequency circuit, method of production and apparatus for production of same, and high frequency circuit using copper foil |
TW200500199A (en) * | 2003-02-12 | 2005-01-01 | Furukawa Circuit Foil | Copper foil for fine patterned printed circuits and method of production of same |
-
2004
- 2004-07-16 KR KR1020040055382A patent/KR100654737B1/en active IP Right Grant
- 2004-08-17 JP JP2004236952A patent/JP2006028635A/en active Pending
- 2004-09-21 TW TW093128534A patent/TWI267560B/en active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1060680A (en) * | 1996-08-14 | 1998-03-03 | C Uyemura & Co Ltd | Plating bath of nickel, cobalt or nickel-cobalt alloy and phosphorus and plating method |
JPH10212591A (en) * | 1997-01-29 | 1998-08-11 | Shinko Electric Ind Co Ltd | Nickel electroplating bath or nickel alloy electroplating bath and plating method using the bath |
JPH1110794A (en) * | 1997-06-27 | 1999-01-19 | Nippon Denkai Kk | Copper foil for copper-clad laminate and copperclad laminate employing the same |
JP2001288595A (en) * | 2000-04-05 | 2001-10-19 | Nikko Materials Co Ltd | Copper foil for laser hole opening |
JP2002212773A (en) * | 2001-01-19 | 2002-07-31 | Fukuda Metal Foil & Powder Co Ltd | Copper foil for printed circuit board and method for manufacturing the same |
JP2003201585A (en) * | 2001-10-30 | 2003-07-18 | Nikko Materials Co Ltd | Surface treated copper foil |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007119902A (en) * | 2005-09-27 | 2007-05-17 | Hitachi Cable Ltd | Nickel plating solution and its preparation method, nickel plating method, and printed wiring board copper foil |
KR100974373B1 (en) * | 2008-02-28 | 2010-08-05 | 엘에스엠트론 주식회사 | Surface treatment method of copper foil for printed circuit, copper foil and electroplater thereof |
KR100983682B1 (en) | 2008-03-31 | 2010-09-24 | 엘에스엠트론 주식회사 | Surface treatment method of copper foil for printed circuit, copper foil and electroplater thereof |
EP2896723A4 (en) * | 2012-09-12 | 2016-06-15 | Doosan Corp | Method for surface-treating copper foil and copper foil surface-treated thereby |
CN104962965A (en) * | 2015-05-29 | 2015-10-07 | 灵宝金源朝辉铜业有限公司 | Environmental protection ashing treatment process of calendaring copper foil |
Also Published As
Publication number | Publication date |
---|---|
TWI267560B (en) | 2006-12-01 |
TW200604356A (en) | 2006-02-01 |
KR100654737B1 (en) | 2006-12-08 |
KR20060006389A (en) | 2006-01-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5634103B2 (en) | A treated copper foil for a copper clad laminate, a copper clad laminate obtained by bonding the treated copper foil to an insulating resin substrate, and a printed wiring board using the copper clad laminate. | |
JP5826303B2 (en) | Copper foil and copper clad laminate for printed circuit | |
CN102884228B (en) | Copper foil for printed circuit | |
JP5885054B2 (en) | A treated copper foil for a copper clad laminate, a copper clad laminate obtained by bonding the treated copper foil to an insulating resin substrate, and a printed wiring board using the copper clad laminate. | |
JP4626390B2 (en) | Copper foil for printed wiring boards in consideration of environmental protection | |
US20100282500A1 (en) | Copper foil attached to the carrier foil, a method for preparing the same and printed circuit board using the same | |
TW201800242A (en) | Surface-treated copper foil and copper-clad laminate produced using same | |
JP2013155415A (en) | Surface-treated copper foil for high frequency transmission, laminated plate for high frequency transmission, and printed wiring board for high frequency transmission | |
JP5406905B2 (en) | A method for producing a copper foil for a printed circuit board comprising a fine granular surface that has high peel strength and is environmentally friendly. | |
JP2620151B2 (en) | Copper foil for printed circuits | |
JP4978456B2 (en) | Copper foil for printed circuit | |
JP2006028635A (en) | Method for manufacturing surface treated copper foil for microfabrication circuit substrate | |
JP2010180454A (en) | Surface-treated copper foil, method for manufacturing the same and copper-clad laminate | |
JP2009206514A (en) | Copper foil for printed circuit and surface treating method thereof, and plating apparatus | |
WO2014042412A1 (en) | Method for surface-treating copper foil and copper foil surface-treated thereby | |
JP2010141227A (en) | Rolled copper foil for printed wiring board | |
JP3564460B2 (en) | Copper foil for printed wiring board and method for producing the same | |
JP6090693B2 (en) | Surface-treated copper foil and printed wiring board using the surface-treated copper foil | |
JP2002030481A (en) | Copper or copper alloy foil and its production method | |
JP2009188369A (en) | Rolled copper foil for printed wiring board, and manufacturing method thereof | |
JP2631061B2 (en) | Copper foil for printed circuit and method of manufacturing the same | |
JP5575320B2 (en) | Copper foil with carrier | |
JP2875186B2 (en) | Processing method of copper foil for printed circuit | |
JP3709142B2 (en) | Copper foil for printed wiring board and method for producing the same | |
JP3833493B2 (en) | Copper foil used for TAB tape carrier, TAB carrier tape and TAB tape carrier using this copper foil |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20061027 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20061114 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070213 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20070213 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20070216 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080811 |