KR20050008523A - 다관절 로봇 - Google Patents
다관절 로봇 Download PDFInfo
- Publication number
- KR20050008523A KR20050008523A KR1020040054862A KR20040054862A KR20050008523A KR 20050008523 A KR20050008523 A KR 20050008523A KR 1020040054862 A KR1020040054862 A KR 1020040054862A KR 20040054862 A KR20040054862 A KR 20040054862A KR 20050008523 A KR20050008523 A KR 20050008523A
- Authority
- KR
- South Korea
- Prior art keywords
- arm
- pivot
- articulated robot
- base
- around
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
Abstract
Description
Claims (7)
- 예정된 제1선회축을 갖고서 이 제1선회축 주위로 선회할 수 있는 베이스부와;이 베이스부에 연결된 기초단과, 제1선회축에 평행한 제2선회축을 갖는 앞단을 갖춘 제1아암;이 제1아암의 앞단에 연결된 기초단과, 제1선회축에 평행한 제3선회축을 갖는 앞단을 갖추어, 제2선회축 주위로 선회할 수 있는 제2아암;이 제2아암의 앞단에 연결된 기초단을 갖추고서 제3선회축 주위로 선회할 수 있는 제3아암;제2아암과 제3아암을 연동시켜서, 제2아암이 제1아암에 대해 제2선회축 주위로 원주방향 중 한쪽 방향으로 선회하는 각도의 2배의 각도로, 제3아암이 제2아암에 대해 제3선회축 주위로 반대쪽 방향으로 선회되게 하는 연동수단;베이스부를 제1선회축 주위로 선회시키는 베이스부구동수단 및;제2아암을 제2선회축 주위로 선회시키는 아암구동수단;을 구비하고,제1아암과 제2아암의 선회축들 사이의 거리가 제2아암과 제3아암의 선회축들 사이의 거리와 같게 되어 있는 다관절 로봇.
- 제1항에 있어서, 상기 제2아암과 제3아암의 기초단에서부터 앞단쪽으로 뻗은방향이 제1아암의 기초단에서부터 앞단쪽으로 뻗은 방향에 반대가 되도록 제1아암과 제2아암 및 제3아암이 각위치에 놓여 있는 상태에서, 제1아암과 제2아암 및 제3아암이 선회하는 제1선회축상에 중심이 있는 회전반경이 최소가 되도록 제1아암과 제2아암 및 제3아암의 유효길이가 선택적으로 결정되는 다관절 로봇.
- 제1항 또는 제2항에 있어서, 소재와 접촉하여 이 소재를 처리하는 엔드이펙터(end effector)와, 이 엔드이펙터를 선회시키는 엔드이펙터구동수단을 추가로 구비하고,상기 제3아암은 그 앞단에 제3선회축에 평행한 제4선회축을 갖고 있으며, 엔드이펙터구동수단이 이 제4선회축 주위로 엔드이펙터를 선회시키도록 되어 있는 다관절 로봇.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 상기 제1아암은 베이스부와 제2아암으로부터 분리가능하고, 제2아암의 기초단이 베이스부에 연결될 수 있어 제2아암이 베이스부에 연결된 상태에서 제2아암이 제1선회축 주위로 선회될 수 있으며,상기 연동수단은 제2아암이 베이스부에 대해 제1선회축 주위로 원주방향 중 한쪽 방향으로 선회하는 각도의 2배의 각도로, 제3아암을 제2아암에 대해 제3선회축 주위로 반대쪽 방향으로 선회되게 하는 다관절 로봇.
- 제1항 내지 제4항 중 어느 한 항에 있어서, 상기 연동수단은 아암구동수단의 구동력을 제2아암 및 제3아암으로 전달할 수 있는 기어기구를 구비하는 다관절 로봇.
- 제1항 내지 제5항 중 어느 한 항에 있어서, 한정된 협소한 공간에 설치될 수 있는 다관절 로봇.
- 제1항 내지 제6항 중 어느 한 항에 있어서, 예정된 분위기의 공간을 형성하는 하우징내에 설치될 수 있는 다관절 로봇.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003274371A JP3999712B2 (ja) | 2003-07-14 | 2003-07-14 | 多関節ロボット |
JPJP-P-2003-00274371 | 2003-07-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050008523A true KR20050008523A (ko) | 2005-01-21 |
KR100592064B1 KR100592064B1 (ko) | 2006-06-21 |
Family
ID=33475550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020040054862A KR100592064B1 (ko) | 2003-07-14 | 2004-07-14 | 다관절 로봇 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7383751B2 (ko) |
EP (1) | EP1498228B1 (ko) |
JP (1) | JP3999712B2 (ko) |
KR (1) | KR100592064B1 (ko) |
AT (1) | ATE372857T1 (ko) |
DE (1) | DE602004008837T2 (ko) |
Cited By (3)
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KR100909727B1 (ko) * | 2006-07-20 | 2009-07-29 | 가와사키 쥬코교 가부시키가이샤 | 웨이퍼 이재 장치 및 기판 이재 장치 |
WO2013022162A1 (ko) * | 2011-08-10 | 2013-02-14 | 금오공과대학교 산학협력단 | 다관절 로봇 |
US9446910B2 (en) | 2013-05-22 | 2016-09-20 | Kabushiki Kaisha Yaskawa Denki | Substrate transfer robot, substrate transfer system, and method for transferring substrate |
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US20070269297A1 (en) * | 2003-11-10 | 2007-11-22 | Meulen Peter V D | Semiconductor wafer handling and transport |
US10086511B2 (en) * | 2003-11-10 | 2018-10-02 | Brooks Automation, Inc. | Semiconductor manufacturing systems |
JP5459817B2 (ja) * | 2004-11-29 | 2014-04-02 | 川崎重工業株式会社 | 多関節型ロボットを備えた自動細胞培養装置 |
US9248568B2 (en) | 2005-07-11 | 2016-02-02 | Brooks Automation, Inc. | Unequal link SCARA arm |
US7531979B2 (en) * | 2006-09-18 | 2009-05-12 | Asm Technology Singapore Pte Ltd. | Direct drive robotic manipulator |
JP4980127B2 (ja) * | 2007-04-24 | 2012-07-18 | 川崎重工業株式会社 | 基板搬送ロボット |
US8777547B2 (en) | 2009-01-11 | 2014-07-15 | Applied Materials, Inc. | Systems, apparatus and methods for transporting substrates |
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JP2011119556A (ja) * | 2009-12-07 | 2011-06-16 | Yaskawa Electric Corp | 水平多関節ロボットおよびそれを備えた搬送装置 |
JP5462064B2 (ja) * | 2010-04-28 | 2014-04-02 | 日本電産サンキョー株式会社 | 産業用ロボット |
DE102011077546A1 (de) * | 2011-06-15 | 2012-12-20 | Technische Universität Berlin | Verfahren zum Betreiben eines Roboters, Roboter und Robotersystem |
US9076829B2 (en) * | 2011-08-08 | 2015-07-07 | Applied Materials, Inc. | Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing |
US8768513B2 (en) * | 2011-08-08 | 2014-07-01 | Applied Materials, Inc. | Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots |
US9076830B2 (en) | 2011-11-03 | 2015-07-07 | Applied Materials, Inc. | Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm |
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WO2014024690A1 (ja) * | 2012-08-09 | 2014-02-13 | 日本電産サンキョー株式会社 | 産業用ロボット |
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WO2015020089A1 (ja) * | 2013-08-09 | 2015-02-12 | 日本電産サンキョー株式会社 | 水平多関節ロボットおよび水平多関節ロボットの製造方法 |
US10780586B2 (en) | 2013-08-09 | 2020-09-22 | Nidec Sankyo Corporation | Horizontal articulated robot with bevel gears |
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JP6649995B2 (ja) * | 2018-06-22 | 2020-02-19 | 川崎重工業株式会社 | 基板搬送ロボット |
JP7078479B2 (ja) | 2018-07-13 | 2022-05-31 | 株式会社安川電機 | 搬送ロボットおよびロボットシステム |
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KR102394121B1 (ko) | 2021-10-08 | 2022-05-04 | (주) 티로보틱스 | 기판 이송 로봇을 챔버 내에서 주행하기 위한 주행 로봇 |
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-
2003
- 2003-07-14 JP JP2003274371A patent/JP3999712B2/ja not_active Expired - Lifetime
-
2004
- 2004-07-13 US US10/889,079 patent/US7383751B2/en active Active
- 2004-07-13 DE DE602004008837T patent/DE602004008837T2/de active Active
- 2004-07-13 AT AT04016447T patent/ATE372857T1/de not_active IP Right Cessation
- 2004-07-13 EP EP04016447A patent/EP1498228B1/en active Active
- 2004-07-14 KR KR1020040054862A patent/KR100592064B1/ko active IP Right Grant
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100909727B1 (ko) * | 2006-07-20 | 2009-07-29 | 가와사키 쥬코교 가부시키가이샤 | 웨이퍼 이재 장치 및 기판 이재 장치 |
US7874782B2 (en) | 2006-07-20 | 2011-01-25 | Kawasaki Jukogyo Kabushiki Kaisha | Wafer transfer apparatus and substrate transfer apparatus |
USRE45772E1 (en) | 2006-07-20 | 2015-10-20 | Kawasaki Jukogyo Kabushiki Kaisha | Wafer transfer apparatus and substrate transfer apparatus |
USRE46465E1 (en) | 2006-07-20 | 2017-07-04 | Kawasaki Jukogyo Kabushiki Kaisha | Wafer transfer apparatus and substrate transfer apparatus |
USRE47145E1 (en) | 2006-07-20 | 2018-11-27 | Kawasaki Jukogyo Kabushiki Kaisha | Wafer transfer apparatus and substrate transfer apparatus |
USRE47909E1 (en) | 2006-07-20 | 2020-03-17 | Kawasaki Jukogyo Kabushiki Kaisha | Wafer transfer apparatus and substrate transfer apparatus |
USRE48031E1 (en) | 2006-07-20 | 2020-06-02 | Kawasaki Jukogyo Kabushiki Kaisha | Wafer transfer apparatus and substrate transfer apparatus |
USRE48792E1 (en) | 2006-07-20 | 2021-10-26 | Kawasaki Jukogyo Kabushiki Kaisha | Wafer transfer apparatus and substrate transfer apparatus |
USRE49671E1 (en) | 2006-07-20 | 2023-09-26 | Kawasaki Jukogyo Kabushiki Kaisha | Wafer transfer apparatus and substrate transfer apparatus |
WO2013022162A1 (ko) * | 2011-08-10 | 2013-02-14 | 금오공과대학교 산학협력단 | 다관절 로봇 |
US9446910B2 (en) | 2013-05-22 | 2016-09-20 | Kabushiki Kaisha Yaskawa Denki | Substrate transfer robot, substrate transfer system, and method for transferring substrate |
Also Published As
Publication number | Publication date |
---|---|
US7383751B2 (en) | 2008-06-10 |
KR100592064B1 (ko) | 2006-06-21 |
DE602004008837T2 (de) | 2008-06-12 |
JP3999712B2 (ja) | 2007-10-31 |
DE602004008837D1 (de) | 2007-10-25 |
JP2005039047A (ja) | 2005-02-10 |
EP1498228B1 (en) | 2007-09-12 |
ATE372857T1 (de) | 2007-09-15 |
US20050011294A1 (en) | 2005-01-20 |
EP1498228A1 (en) | 2005-01-19 |
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