DE602004008837D1 - Gelenkarmroboter - Google Patents

Gelenkarmroboter

Info

Publication number
DE602004008837D1
DE602004008837D1 DE602004008837T DE602004008837T DE602004008837D1 DE 602004008837 D1 DE602004008837 D1 DE 602004008837D1 DE 602004008837 T DE602004008837 T DE 602004008837T DE 602004008837 T DE602004008837 T DE 602004008837T DE 602004008837 D1 DE602004008837 D1 DE 602004008837D1
Authority
DE
Germany
Prior art keywords
arm
pivotal axis
reference line
articulated robot
axis relative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004008837T
Other languages
English (en)
Other versions
DE602004008837T2 (de
Inventor
Yasuhiko Hashimoto
Eiichi Yamaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Heavy Industries Ltd
Kawasaki Motors Ltd
Original Assignee
Kawasaki Heavy Industries Ltd
Kawasaki Jukogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Heavy Industries Ltd, Kawasaki Jukogyo KK filed Critical Kawasaki Heavy Industries Ltd
Publication of DE602004008837D1 publication Critical patent/DE602004008837D1/de
Application granted granted Critical
Publication of DE602004008837T2 publication Critical patent/DE602004008837T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
DE602004008837T 2003-07-14 2004-07-13 Gelenkarmroboter Active DE602004008837T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003274371 2003-07-14
JP2003274371A JP3999712B2 (ja) 2003-07-14 2003-07-14 多関節ロボット

Publications (2)

Publication Number Publication Date
DE602004008837D1 true DE602004008837D1 (de) 2007-10-25
DE602004008837T2 DE602004008837T2 (de) 2008-06-12

Family

ID=33475550

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004008837T Active DE602004008837T2 (de) 2003-07-14 2004-07-13 Gelenkarmroboter

Country Status (6)

Country Link
US (1) US7383751B2 (de)
EP (1) EP1498228B1 (de)
JP (1) JP3999712B2 (de)
KR (1) KR100592064B1 (de)
AT (1) ATE372857T1 (de)
DE (1) DE602004008837T2 (de)

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US10086511B2 (en) * 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
JP5459817B2 (ja) * 2004-11-29 2014-04-02 川崎重工業株式会社 多関節型ロボットを備えた自動細胞培養装置
US9248568B2 (en) 2005-07-11 2016-02-02 Brooks Automation, Inc. Unequal link SCARA arm
JP4098338B2 (ja) 2006-07-20 2008-06-11 川崎重工業株式会社 ウェハ移載装置および基板移載装置
US7531979B2 (en) * 2006-09-18 2009-05-12 Asm Technology Singapore Pte Ltd. Direct drive robotic manipulator
JP4980127B2 (ja) * 2007-04-24 2012-07-18 川崎重工業株式会社 基板搬送ロボット
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
JP5504641B2 (ja) * 2009-02-13 2014-05-28 株式会社安川電機 基板搬送用ロボット及びそれを備えた基板搬送装置、半導体製造装置
JP2011119556A (ja) * 2009-12-07 2011-06-16 Yaskawa Electric Corp 水平多関節ロボットおよびそれを備えた搬送装置
JP5462064B2 (ja) * 2010-04-28 2014-04-02 日本電産サンキョー株式会社 産業用ロボット
DE102011077546A1 (de) * 2011-06-15 2012-12-20 Technische Universität Berlin Verfahren zum Betreiben eines Roboters, Roboter und Robotersystem
US9076829B2 (en) * 2011-08-08 2015-07-07 Applied Materials, Inc. Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
US8768513B2 (en) * 2011-08-08 2014-07-01 Applied Materials, Inc. Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots
KR20130017379A (ko) * 2011-08-10 2013-02-20 금오공과대학교 산학협력단 다관절 로봇
US9076830B2 (en) 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
KR20130096072A (ko) * 2012-02-21 2013-08-29 삼성전자주식회사 기판 반송 장치
WO2014024690A1 (ja) * 2012-08-09 2014-02-13 日本電産サンキョー株式会社 産業用ロボット
JP6173677B2 (ja) * 2012-08-09 2017-08-02 日本電産サンキョー株式会社 産業用ロボットの原点位置復帰方法
JP5853991B2 (ja) * 2013-05-22 2016-02-09 株式会社安川電機 基板搬送ロボット、基板搬送システムおよび基板搬送方法
JP6235881B2 (ja) * 2013-08-09 2017-11-22 日本電産サンキョー株式会社 産業用ロボット
WO2015020089A1 (ja) * 2013-08-09 2015-02-12 日本電産サンキョー株式会社 水平多関節ロボットおよび水平多関節ロボットの製造方法
US10780586B2 (en) 2013-08-09 2020-09-22 Nidec Sankyo Corporation Horizontal articulated robot with bevel gears
JP6468804B2 (ja) 2014-10-30 2019-02-13 ライフロボティクス株式会社 ロボットアーム機構
JP6374295B2 (ja) * 2014-10-30 2018-08-15 日本電産サンキョー株式会社 産業用ロボット
EP3238885B1 (de) * 2014-12-26 2022-05-04 Kawasaki Jukogyo Kabushiki Kaisha Zweiarmiger roboter
JP6027661B2 (ja) * 2015-09-30 2016-11-16 川崎重工業株式会社 基板搬送ロボット
CN108369919B (zh) * 2015-11-27 2022-10-25 株式会社国际电气 衬底处理装置
JP6492271B2 (ja) 2016-04-08 2019-04-03 株式会社安川電機 搬送システムおよびロボット
EP3251806B1 (de) * 2016-05-30 2021-03-10 Seiko Epson Corporation Motoreinheit und roboter
JP2018019471A (ja) * 2016-07-26 2018-02-01 セイコーエプソン株式会社 ロボット及びモーター
JP1619125S (de) * 2018-03-29 2018-11-26
JP1612908S (de) * 2018-03-29 2018-09-03
JP1612766S (de) * 2018-03-29 2018-09-03
USD892881S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit and power receiving unit of an industrial robot arm
JP1612912S (de) * 2018-03-29 2018-09-03
US11535460B2 (en) * 2018-05-31 2022-12-27 Brooks Automation Us, Llc Substrate processing apparatus
JP6649995B2 (ja) * 2018-06-22 2020-02-19 川崎重工業株式会社 基板搬送ロボット
JP7078479B2 (ja) 2018-07-13 2022-05-31 株式会社安川電機 搬送ロボットおよびロボットシステム
JP2020074440A (ja) * 2020-01-17 2020-05-14 川崎重工業株式会社 基板搬送ロボット
KR102394121B1 (ko) 2021-10-08 2022-05-04 (주) 티로보틱스 기판 이송 로봇을 챔버 내에서 주행하기 위한 주행 로봇
WO2023188177A1 (ja) * 2022-03-30 2023-10-05 平田機工株式会社 基板搬送システム及び移載ロボット制御装置

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JPS63272474A (ja) * 1987-04-30 1988-11-09 日本電子株式会社 試料搬送ア−ム
US5064340A (en) * 1989-01-20 1991-11-12 Genmark Automation Precision arm mechanism
JPH0492446A (ja) * 1990-08-07 1992-03-25 Plasma Syst:Kk 基板搬送ロボット
IT1251017B (it) * 1991-05-21 1995-04-28 Ugo Crippa Meccanismo per compiere traiettorie prefissate assimilabili ad ellittiche
JP3098809B2 (ja) * 1991-07-25 2000-10-16 東京応化工業株式会社 ウェハ処理方法
JPH08172121A (ja) * 1994-12-20 1996-07-02 Hitachi Ltd 基板搬送装置
US5765444A (en) * 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
JPH09102526A (ja) * 1995-10-05 1997-04-15 Kokusai Electric Co Ltd 真空内基板搬送装置
US6121743A (en) * 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
US6059517A (en) * 1996-09-17 2000-05-09 Begin; Robert George End effector assembly for inclusion in a system for producing uniform deposits on a wafer
JPH10329062A (ja) * 1997-06-03 1998-12-15 Tokico Ltd 工業用ロボット
US5993142A (en) * 1997-07-10 1999-11-30 Genmark Automation, Inc. Robot having multiple degrees of freedom in an isolated environment
US6491491B1 (en) * 1997-10-30 2002-12-10 Sankyo Seiki Mfg. Co., Ltd. Articulated robot
JPH11138472A (ja) 1997-11-07 1999-05-25 Yaskawa Electric Corp 水平多関節ロボット
JP3725355B2 (ja) * 1999-02-17 2005-12-07 三菱電機株式会社 ロボット装置のアーム駆動機構
JP2001137181A (ja) 1999-11-16 2001-05-22 Olympus Optical Co Ltd 内視鏡
JP2001310287A (ja) * 2000-04-28 2001-11-06 Shinko Electric Co Ltd ロボット用アーム装置
JP2002066966A (ja) * 2000-08-25 2002-03-05 Ishii Hyoki Corp 搬送ロボット
JP2003220586A (ja) * 2002-01-22 2003-08-05 Nissin Electric Co Ltd 物品搬送ロボット及び真空処理装置
JP2004235538A (ja) * 2003-01-31 2004-08-19 Tokyo Electron Ltd 搬送装置，真空処理装置およびｏリング

Also Published As

Publication number Publication date
US7383751B2 (en) 2008-06-10
KR100592064B1 (ko) 2006-06-21
DE602004008837T2 (de) 2008-06-12
JP3999712B2 (ja) 2007-10-31
JP2005039047A (ja) 2005-02-10
EP1498228B1 (de) 2007-09-12
ATE372857T1 (de) 2007-09-15
US20050011294A1 (en) 2005-01-20
EP1498228A1 (de) 2005-01-19
KR20050008523A (ko) 2005-01-21

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