KR20020054848A - 액정표시장치의 제조방법 - Google Patents
액정표시장치의 제조방법 Download PDFInfo
- Publication number
- KR20020054848A KR20020054848A KR1020000084088A KR20000084088A KR20020054848A KR 20020054848 A KR20020054848 A KR 20020054848A KR 1020000084088 A KR1020000084088 A KR 1020000084088A KR 20000084088 A KR20000084088 A KR 20000084088A KR 20020054848 A KR20020054848 A KR 20020054848A
- Authority
- KR
- South Korea
- Prior art keywords
- transparent conductive
- liquid crystal
- film
- crystal display
- amorphous
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
Abstract
Description
Claims (7)
- 박막트랜지스터의 드레인 전극과 게이트 및 데이터패드와 연결된 투명도전막을 포함하는 액정표시장치의 제조에 있어서,상기 투명도전막이 비정질 투명전도막으로 형성하는 것을 특징으로 하는 액정표시장치의 제조방법
- 제 1항에 있어서, 상기 비정질 투명전도막은 H2O 첨가-ITO로 형성하는 것을 특징으로 하는 액정표시장치의 제조방법
- 제 1항에 있어서, 상기 비정질 투명전도막은 H2첨가-ITO로 형성하는 것을 특징으로 하는 액정표시장치의 제조방법
- 제 1항에 있어서, 상기 비정질 투명전도막은 상온성막 ITO로 형성하는 것을 특징으로 하는 액정표시장치의 제조방법
- 제 1항에 있어서, 상기 비정질 투명전도막은 비정질 IZO, 비정질 ITZO 중 어느하나로 형성하는 것을 특징으로 하는 액정표시장치의 제조방법
- 제 1 항에 있어서, 상기 비정질 투명전도막은 섭씨 150~350도 범위에서 열처리하는 공정을 더 포함하여 이루어지는 것을 특징으로 하는 액정표시장치의 제조방법.
- 박막트랜지스터의 드레인 전극과 게이트 및 데이터패드와 연결된 도전성 물질을 포함하는 액정표시장치의 제조에 있어서,상기 투명도전막의 물질을 두께가 500Å~2000Å인 다결정질 ITO로 형성하는 것을 특징으로 하는 액정표시장치의 제조방법
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020000084088A KR100778835B1 (ko) | 2000-12-28 | 2000-12-28 | 액정표시장치의 제조방법 |
CNB011369345A CN1196018C (zh) | 2000-12-28 | 2001-12-25 | 液晶显示装置及其制造方法 |
US10/029,145 US7116389B2 (en) | 2000-12-28 | 2001-12-28 | Liquid crystal display device and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020000084088A KR100778835B1 (ko) | 2000-12-28 | 2000-12-28 | 액정표시장치의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020054848A true KR20020054848A (ko) | 2002-07-08 |
KR100778835B1 KR100778835B1 (ko) | 2007-11-22 |
Family
ID=19703775
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020000084088A KR100778835B1 (ko) | 2000-12-28 | 2000-12-28 | 액정표시장치의 제조방법 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7116389B2 (ko) |
KR (1) | KR100778835B1 (ko) |
CN (1) | CN1196018C (ko) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100909421B1 (ko) * | 2002-12-28 | 2009-07-28 | 엘지디스플레이 주식회사 | 액정표시장치 |
KR101029409B1 (ko) * | 2004-05-28 | 2011-04-14 | 엘지디스플레이 주식회사 | 액정표시장치 및 그 제조방법 |
KR101282397B1 (ko) * | 2004-12-07 | 2013-07-04 | 삼성디스플레이 주식회사 | 표시 장치용 배선, 상기 배선을 포함하는 박막 트랜지스터표시판 및 그 제조 방법 |
KR101290018B1 (ko) * | 2006-05-24 | 2013-08-07 | 엘지디스플레이 주식회사 | 액정표시장치 및 이의 제조방법 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100776505B1 (ko) * | 2000-12-30 | 2007-11-16 | 엘지.필립스 엘시디 주식회사 | 액정표시장치의 화소전극 제조 방법 |
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JPH04303825A (ja) | 1991-04-01 | 1992-10-27 | Matsushita Electron Corp | 液晶表示装置とその製造方法 |
US5135581A (en) * | 1991-04-08 | 1992-08-04 | Minnesota Mining And Manufacturing Company | Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas |
TW214603B (en) * | 1992-05-13 | 1993-10-11 | Seiko Electron Co Ltd | Semiconductor device |
EP0677593B1 (en) * | 1992-12-15 | 2000-03-22 | Idemitsu Kosan Company Limited | Transparent conductive film, transparent conductive base material, and conductive material |
US7081938B1 (en) * | 1993-12-03 | 2006-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and method for manufacturing the same |
KR100204071B1 (ko) * | 1995-08-29 | 1999-06-15 | 구자홍 | 박막트랜지스터-액정표시장치 및 제조방법 |
EP0782039A3 (en) * | 1995-12-27 | 1998-06-17 | Canon Kabushiki Kaisha | Display device and process for producing same |
US6337520B1 (en) * | 1997-02-26 | 2002-01-08 | Samsung Electronics Co., Ltd. | Composition for a wiring, a wiring using the composition, manufacturing method thereof, a display using the wiring and manufacturing method thereof |
US6445004B1 (en) * | 1998-02-26 | 2002-09-03 | Samsung Electronics Co., Ltd. | Composition for a wiring, a wiring using the composition, manufacturing method thereof, a display using the wiring and a manufacturing method thereof |
JP3785767B2 (ja) | 1997-11-21 | 2006-06-14 | ソニー株式会社 | 液晶表示素子 |
FR2772615B1 (fr) * | 1997-12-23 | 2002-06-14 | Lipha | Comprime multicouche pour la liberation instantanee puis prolongee de substances actives |
US6528357B2 (en) * | 1998-03-13 | 2003-03-04 | Kabushiki Kaisha Toshiba | Method of manufacturing array substrate |
TW418539B (en) * | 1998-05-29 | 2001-01-11 | Samsung Electronics Co Ltd | A method for forming TFT in liquid crystal display |
US6297519B1 (en) * | 1998-08-28 | 2001-10-02 | Fujitsu Limited | TFT substrate with low contact resistance and damage resistant terminals |
KR100282233B1 (ko) * | 1998-12-09 | 2001-02-15 | 구본준 | 박막트랜지스터 및 그 제조방법 |
TWI255957B (en) * | 1999-03-26 | 2006-06-01 | Hitachi Ltd | Liquid crystal display device and method of manufacturing the same |
KR100348996B1 (ko) * | 1999-04-12 | 2002-08-17 | 엘지.필립스 엘시디 주식회사 | 액정표시장치의 제조방법 |
KR100381054B1 (ko) * | 1999-12-28 | 2003-04-18 | 엘지.필립스 엘시디 주식회사 | 인듐-징크-옥사이드로 적용된 투명전극과 이를 에칭하기위한 에천트 |
JP2001194676A (ja) * | 2000-01-07 | 2001-07-19 | Hitachi Ltd | 液晶表示装置 |
JP2001281698A (ja) * | 2000-03-30 | 2001-10-10 | Advanced Display Inc | 電気光学素子の製法 |
KR20010108832A (ko) * | 2000-05-31 | 2001-12-08 | 주식회사 현대 디스플레이 테크놀로지 | 박막 트랜지스터 액정표시장치의 제조방법 |
KR100776505B1 (ko) * | 2000-12-30 | 2007-11-16 | 엘지.필립스 엘시디 주식회사 | 액정표시장치의 화소전극 제조 방법 |
-
2000
- 2000-12-28 KR KR1020000084088A patent/KR100778835B1/ko active IP Right Grant
-
2001
- 2001-12-25 CN CNB011369345A patent/CN1196018C/zh not_active Expired - Lifetime
- 2001-12-28 US US10/029,145 patent/US7116389B2/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100909421B1 (ko) * | 2002-12-28 | 2009-07-28 | 엘지디스플레이 주식회사 | 액정표시장치 |
KR101029409B1 (ko) * | 2004-05-28 | 2011-04-14 | 엘지디스플레이 주식회사 | 액정표시장치 및 그 제조방법 |
KR101282397B1 (ko) * | 2004-12-07 | 2013-07-04 | 삼성디스플레이 주식회사 | 표시 장치용 배선, 상기 배선을 포함하는 박막 트랜지스터표시판 및 그 제조 방법 |
US8507303B2 (en) | 2004-12-07 | 2013-08-13 | Samsung Display Co., Ltd. | Thin film transistor array panel and method for manufacturing the same |
KR101290018B1 (ko) * | 2006-05-24 | 2013-08-07 | 엘지디스플레이 주식회사 | 액정표시장치 및 이의 제조방법 |
Also Published As
Publication number | Publication date |
---|---|
US20020085142A1 (en) | 2002-07-04 |
CN1362637A (zh) | 2002-08-07 |
KR100778835B1 (ko) | 2007-11-22 |
US7116389B2 (en) | 2006-10-03 |
CN1196018C (zh) | 2005-04-06 |
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