KR20010040064A - 압전 세라믹 재료, 이를 이용한 전자부품 - Google Patents
압전 세라믹 재료, 이를 이용한 전자부품 Download PDFInfo
- Publication number
- KR20010040064A KR20010040064A KR1020000059988A KR20000059988A KR20010040064A KR 20010040064 A KR20010040064 A KR 20010040064A KR 1020000059988 A KR1020000059988 A KR 1020000059988A KR 20000059988 A KR20000059988 A KR 20000059988A KR 20010040064 A KR20010040064 A KR 20010040064A
- Authority
- KR
- South Korea
- Prior art keywords
- piezoelectric ceramic
- ceramic material
- piezoelectric
- oxide
- ceramic
- Prior art date
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 43
- 229910010293 ceramic material Inorganic materials 0.000 title claims description 51
- 239000011521 glass Substances 0.000 claims abstract description 33
- 239000013078 crystal Substances 0.000 claims abstract description 18
- 229910000464 lead oxide Inorganic materials 0.000 claims abstract description 7
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000002245 particle Substances 0.000 claims description 20
- 230000005540 biological transmission Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 abstract description 14
- 239000012071 phase Substances 0.000 description 24
- 150000001875 compounds Chemical class 0.000 description 18
- 239000010936 titanium Substances 0.000 description 10
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 229910052745 lead Inorganic materials 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 238000004627 transmission electron microscopy Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 6
- 238000010304 firing Methods 0.000 description 6
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 3
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 3
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 3
- 150000001342 alkaline earth metals Chemical class 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 229910052791 calcium Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 229910052761 rare earth metal Inorganic materials 0.000 description 3
- 229910052712 strontium Inorganic materials 0.000 description 3
- 238000010897 surface acoustic wave method Methods 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- 229910000314 transition metal oxide Inorganic materials 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 238000003917 TEM image Methods 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000007496 glass forming Methods 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000012856 weighed raw material Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical group [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 150000002611 lead compounds Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- -1 two-component Chemical class 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
- C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Composite Materials (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
샘플 번호 | 네트워크 형성용 산화물의 총량(ppm) | 굽힘강도(Kgf/㎠) | 내화학성(%) | 내습성(%) | 입자 경계에서의 유리상 |
*1 | 20 | 1002 | -28 | -53 | 관찰됨 |
*2 | 50 | 1150 | -10 | -30 | 관찰됨 |
3 | 100 | 1473 | -3 | -8 | 관찰 안됨 |
4 | 150 | 1650 | -1 | -1 | 관찰 안됨 |
5 | 200 | 1751 | -1 | 0 | 관찰 안됨 |
6 | 250 | 1723 | -3 | -1 | 관찰 안됨 |
7 | 300 | 1799 | -1 | -2 | 관찰 안됨 |
8 | 500 | 1715 | -4 | -4 | 관찰 안됨 |
9 | 700 | 1524 | -7 | -11 | 관찰 안됨 |
*10 | 800 | 1401 | -10 | -13 | 관찰됨 |
*11 | 1000 | 1266 | -11 | -13 | 관찰됨 |
*12 | 1200 | 1150 | -19 | -45 | 관찰됨 |
샘플 번호 | 네트워크 형성용 산화물의 총량(ppm) | 하소 온도(℃) | 소성 온도(℃) | 기계적 강도(Kgf/㎠) | 내화학성 | 내습성 | 입자 경계에서 유리상 |
2 | 230 | 970 | 1210 | 1463 | -3 | -5 | 없음 |
3 | 190 | 950 | 1170 | 1444 | -5 | -8 | 없음 |
4 | 630 | 810 | 1100 | 1559 | -1 | -6 | 없음 |
5 | 460 | 1000 | 1280 | 1695 | -1 | 0 | 없음 |
6 | 400 | 840 | 1210 | 1396 | -8 | -8 | 없음 |
7 | 320 | 850 | 1230 | 2039 | 0 | 0 | 없음 |
Claims (3)
- 납 산화물을 포함하는 압전 세라믹 재료에 있어서, 투과 전자현미경 하에서 관찰되고, 압전 세라믹 소결 재료를 구성하는 복수의 결정 입자가 서로 인접하여 형성하는 닫힌 영역을 가지되, 상기 닫힌 영역은 네트워크 형성 산화물을 함유하는 유리상을 주로 포함하며, 투과 전자현미경 하에서 상기 닫힌 영역 바깥의 입자 경계에서는 어떠한 유라상도 관찰되지 않는 것을 특징으로 하는 납 산화물을 포함하는 압전 세라믹 재료.
- 제 1항에 있어서, 상기 네트워크 형성용 산화물의 총 중량은 상기 입자의 총 중량에 대하여 100 내지 700 ppm 인 것을 특징으로 하는 납 산화물을 포함하는 압전 세라믹 재료.
- 제 1항 또는 제 2항에 따른 압전 세라믹을 함유하는 압전 세라믹; 및상기 압전 세라믹과 접촉하고 있는 전극;을 포함하는 압전 세라믹 재료.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11-289901 | 1999-10-12 | ||
JP28990199 | 1999-10-12 | ||
JP2000-309565 | 2000-10-10 | ||
JP2000309565A JP3861582B2 (ja) | 1999-10-12 | 2000-10-10 | 圧電セラミック、圧電セラミック電子部品、および圧電セラミックの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010040064A true KR20010040064A (ko) | 2001-05-15 |
KR100567233B1 KR100567233B1 (ko) | 2006-04-04 |
Family
ID=26557795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR20000059988A KR100567233B1 (ko) | 1999-10-12 | 2000-10-12 | 압전 세라믹 재료, 이를 이용한 전자부품 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6511763B1 (ko) |
EP (1) | EP1092695B1 (ko) |
JP (1) | JP3861582B2 (ko) |
KR (1) | KR100567233B1 (ko) |
CN (1) | CN1194355C (ko) |
DE (1) | DE60007595T2 (ko) |
TW (1) | TW471191B (ko) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1988586B1 (en) * | 2003-09-25 | 2010-11-10 | Kyocera Corporation | Multi-layer piezoelectric device |
JP4554232B2 (ja) * | 2004-02-17 | 2010-09-29 | 株式会社デンソー | 圧電スタック及び圧電スタックの製造方法 |
JP4424516B2 (ja) * | 2004-03-26 | 2010-03-03 | Tdk株式会社 | 圧電磁器組成物 |
US20060043329A1 (en) * | 2004-08-27 | 2006-03-02 | Tdk Corporation | Piezoelectric ceramic composition |
JP5745852B2 (ja) * | 2007-10-18 | 2015-07-08 | セラムテック ゲゼルシャフト ミット ベシュレンクテル ハフツングCeramTec GmbH | 圧電セラミック多層エレメント |
JP2010021512A (ja) | 2008-01-30 | 2010-01-28 | Ngk Insulators Ltd | 圧電/電歪膜型素子及びその製造方法 |
JP5475272B2 (ja) * | 2008-03-21 | 2014-04-16 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
EP2437322B1 (en) * | 2009-05-26 | 2017-02-08 | Kyocera Corporation | Laminated piezoelectric element, injection device using same, and fuel injection system |
JP5550403B2 (ja) * | 2010-03-19 | 2014-07-16 | 京セラ株式会社 | 圧電体およびそれを用いた圧電素子 |
JP5928675B2 (ja) * | 2011-01-21 | 2016-06-01 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外線センサー |
CN103025043A (zh) * | 2012-12-13 | 2013-04-03 | 江苏达胜加速器制造有限公司 | 一种瓷环的处理工艺 |
WO2021157151A1 (ja) * | 2020-02-07 | 2021-08-12 | 株式会社村田製作所 | 積層セラミックコンデンサ及び積層セラミックコンデンサの製造方法 |
CN112552047A (zh) * | 2020-11-25 | 2021-03-26 | 海鹰企业集团有限责任公司 | 高居里温度“收发”两用型pzt三元系压电陶瓷材料及其制备方法 |
CN112573916A (zh) * | 2020-12-21 | 2021-03-30 | 西安交通大学 | 一种PbHfO3基陶瓷材料及其制备方法 |
CN115894021B (zh) * | 2022-12-26 | 2024-01-16 | 西安创研电子科技有限公司 | 一种高机械品质因数硬性压电陶瓷材料及其制备方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04305057A (ja) * | 1991-03-30 | 1992-10-28 | Aisin Seiki Co Ltd | 圧電セラミツクスの強化方法 |
JP3119139B2 (ja) * | 1995-10-06 | 2000-12-18 | 株式会社村田製作所 | 圧電磁器及びその製造方法 |
JP3311924B2 (ja) * | 1996-02-29 | 2002-08-05 | 京セラ株式会社 | 磁器組成物および磁器の製造方法 |
JPH1126703A (ja) * | 1997-07-01 | 1999-01-29 | Toshiba Corp | 強誘電体メモリ |
-
2000
- 2000-10-10 JP JP2000309565A patent/JP3861582B2/ja not_active Expired - Fee Related
- 2000-10-12 KR KR20000059988A patent/KR100567233B1/ko active IP Right Grant
- 2000-10-12 DE DE2000607595 patent/DE60007595T2/de not_active Expired - Lifetime
- 2000-10-12 US US09/689,029 patent/US6511763B1/en not_active Expired - Lifetime
- 2000-10-12 CN CNB001317644A patent/CN1194355C/zh not_active Expired - Lifetime
- 2000-10-12 EP EP20000122175 patent/EP1092695B1/en not_active Expired - Lifetime
- 2000-10-12 TW TW89121266A patent/TW471191B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1292555A (zh) | 2001-04-25 |
JP3861582B2 (ja) | 2006-12-20 |
KR100567233B1 (ko) | 2006-04-04 |
TW471191B (en) | 2002-01-01 |
EP1092695A1 (en) | 2001-04-18 |
EP1092695B1 (en) | 2004-01-07 |
CN1194355C (zh) | 2005-03-23 |
DE60007595D1 (de) | 2004-02-12 |
DE60007595T2 (de) | 2004-09-23 |
US6511763B1 (en) | 2003-01-28 |
JP2001181041A (ja) | 2001-07-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100567233B1 (ko) | 압전 세라믹 재료, 이를 이용한 전자부품 | |
EP2113952A2 (en) | Piezoelectric ceramic and piezoelectric element employing it | |
US5945030A (en) | Piezoelectric ceramic composition | |
JP3228175B2 (ja) | 圧電磁器組成物 | |
EP0767151B1 (en) | Piezoelectric ceramics and manufacturing method thereof | |
KR100296933B1 (ko) | 압전 세라믹 조성물 | |
KR100200181B1 (ko) | 압전 세라믹 및 그의 제조 방법 | |
EP0780350B1 (en) | Piezoelectric ceramic composition | |
JPH0566896B2 (ko) | ||
KR0185029B1 (ko) | 압전 세라믹 | |
US3998748A (en) | Piezoelectric ceramic compositions | |
US3640866A (en) | Piezoelectric ceramic compositions | |
US4392970A (en) | Piezoelectric ceramics | |
JP4003920B2 (ja) | 圧電磁器組成物、圧電磁器焼結体および電子部品 | |
JP2567913B2 (ja) | 強誘電性セラミックス | |
JPH0524917A (ja) | 圧電磁器組成物 | |
JP3266483B2 (ja) | 圧電磁器組成物 | |
JP2001158662A (ja) | 圧電体磁器組成物 | |
JP3215013B2 (ja) | 圧電磁器組成物 | |
US3652412A (en) | Piezoelectric ceramic compositions | |
JPH03137056A (ja) | 圧電材料 | |
JP2580257B2 (ja) | 強誘電性セラミックス | |
JPH04122081A (ja) | 圧電材料 | |
JPH02137771A (ja) | 圧電材料 | |
JPH03131569A (ja) | 圧電材料 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
AMND | Amendment | ||
E601 | Decision to refuse application | ||
J201 | Request for trial against refusal decision | ||
AMND | Amendment | ||
B601 | Maintenance of original decision after re-examination before a trial | ||
J301 | Trial decision |
Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20031224 Effective date: 20050830 |
|
S901 | Examination by remand of revocation | ||
E902 | Notification of reason for refusal | ||
GRNO | Decision to grant (after opposition) | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20130219 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20140303 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20150302 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20160322 Year of fee payment: 11 |
|
FPAY | Annual fee payment |
Payment date: 20170317 Year of fee payment: 12 |
|
FPAY | Annual fee payment |
Payment date: 20180316 Year of fee payment: 13 |