KR20010032991A - 금속 필터 - Google Patents
금속 필터 Download PDFInfo
- Publication number
- KR20010032991A KR20010032991A KR1020007006340A KR20007006340A KR20010032991A KR 20010032991 A KR20010032991 A KR 20010032991A KR 1020007006340 A KR1020007006340 A KR 1020007006340A KR 20007006340 A KR20007006340 A KR 20007006340A KR 20010032991 A KR20010032991 A KR 20010032991A
- Authority
- KR
- South Korea
- Prior art keywords
- filtration
- layer
- support
- microfiltration layer
- filter
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/54—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
- B01D39/2027—Metallic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
- B01D39/2027—Metallic material
- B01D39/2041—Metallic material the material being filamentary or fibrous
- B01D39/2044—Metallic material the material being filamentary or fibrous sintered or bonded by inorganic agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/52—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material
- B01D46/521—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material
- B01D46/522—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material with specific folds, e.g. having different lengths
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
- B22F7/002—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of porous nature
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2265/00—Casings, housings or mounting for filters specially adapted for separating dispersed particles from gases or vapours
- B01D2265/06—Details of supporting structures for filtering material, e.g. cores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Composite Materials (AREA)
- Engineering & Computer Science (AREA)
- Filtering Materials (AREA)
- Powder Metallurgy (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Filtration Of Liquid (AREA)
Abstract
Description
Claims (4)
- 단일체로는 여과압에 대하여 형상을 유지할 수 없는 두께의 미세여과층과, 이 여과층을 적층일체화하여 형상을 유지시키는 피복면을 갖는 소결다공성의 지지체로 이루어지는 금속필터로서,상기 미세여과층 구멍의 평균기공지름을 상기 지지체 구멍의 평균기공지름 보다 작게하고, 또 상기 지지체는 상기 피복면이 산부를 갖는 요철로 형성됨으로써 미세여과층의 여과면을, 그 실제여과면적 S1과, 요철로 형성하지 않은 경우의 기준여과면적 S0과의 면적비 S1/S0가 1.3이상인 기복여과면으로 함과 동시에,상기 산부간의 곡부에서의 상기 미세여과층의 평균두께를 산부에서의 평균두께보다 두껍게 하고, 또 상기 미세여과층의 여과면을 매끄러운 곡면상으로 형성하는 것을 특징으로 하는 금속필터.
- 제 1 항에 있어서, 상기 지지체는 상기 산부가 둘레방향으로 인접하고 또 축방향으로 뻗는 통상체로 이루어지고, 또 산부의 그 둘레방향 피치를 상기 곡부로부터 그 산부의 상기 산부까지의 융기높이의 2∼4배로 한 것을 특징으로 하는 금속필터.
- 제 1 항 또는 제 2 항에 있어서, 상기 미세여과층은 평균직경(d)이 3μm 이하이고, 또 길이(L)와 직경(d)의 비 L/d인 애스펙트비의 평균치가 2∼20인 금속단섬유를 포함하는 분상체의 소결체로 이루어지는 것을 특징으로 하는 금속필터.
- 제 1 항 내지 제 3 항중 어느 한 항에 있어서, 기체를 실질적으로 0.01μm이상 크기의 입자가 10-10개 이하가 되게 여과함과 동시에, 상기 기체가 반도체 제조용의 가스인 것을 특징으로 하는 금속필터.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP98-289611 | 1998-10-12 | ||
JP28961198 | 1998-10-12 | ||
JP99-279899 | 1999-09-30 | ||
JP27989999A JP3177512B2 (ja) | 1998-10-12 | 1999-09-30 | 金属フィルタ |
PCT/JP1999/005628 WO2000021641A1 (fr) | 1998-10-12 | 1999-10-12 | Filtre metallique |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010032991A true KR20010032991A (ko) | 2001-04-25 |
KR100614420B1 KR100614420B1 (ko) | 2006-08-21 |
Family
ID=26553532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020007006340A KR100614420B1 (ko) | 1998-10-12 | 1999-10-12 | 금속 필터 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6355082B1 (ko) |
EP (1) | EP1040860B1 (ko) |
JP (1) | JP3177512B2 (ko) |
KR (1) | KR100614420B1 (ko) |
DE (1) | DE69937730T2 (ko) |
TW (1) | TW422723B (ko) |
WO (1) | WO2000021641A1 (ko) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4936585B2 (ja) * | 2000-08-21 | 2012-05-23 | 富士フィルター工業株式会社 | 逆洗可能な気体濾過装置 |
US20020179523A1 (en) * | 2001-05-29 | 2002-12-05 | Quackenbush Mark S. | Burping filter |
JP4315641B2 (ja) * | 2002-05-16 | 2009-08-19 | 日本精線株式会社 | フィルター装置 |
CN1705501A (zh) * | 2002-10-17 | 2005-12-07 | 贝克特股份有限公司 | 包括短金属纤维的分层过滤结构 |
JP5129926B2 (ja) * | 2002-12-12 | 2013-01-30 | インテグリス・インコーポレーテッド | 多孔質焼結コンポジット材料 |
US20040206691A1 (en) * | 2003-04-21 | 2004-10-21 | Charin Brandon Paul | Pleated support tubes for polymer filters |
US7361300B2 (en) * | 2003-08-12 | 2008-04-22 | Mott Corporation | Method of making extended area filter |
ITMI20040070A1 (it) * | 2004-01-21 | 2004-04-21 | Alessandro Bassoli | Modulo con supporto indeformabile per setti filtranti ed elementi a membrana |
US9672947B2 (en) * | 2004-11-15 | 2017-06-06 | Atomic Energy Of Canada Limited | Finned strainer |
KR100562043B1 (ko) * | 2005-07-27 | 2006-03-17 | 한국화학연구원 | 금속 분리막의 제조방법 |
JP5243690B2 (ja) * | 2005-09-30 | 2013-07-24 | 日本精線株式会社 | 水素分離用部材 |
JP4917787B2 (ja) * | 2005-09-30 | 2012-04-18 | 日本精線株式会社 | 水素分離用部材、及びその製造方法 |
JP4917786B2 (ja) * | 2005-09-30 | 2012-04-18 | 日本精線株式会社 | 水素分離部材及びその水素分離部材を用いた水素分離モジュール |
JP5148851B2 (ja) * | 2006-08-08 | 2013-02-20 | 大陽日酸株式会社 | ホウ素系ガス中の金属不純物の除去方法 |
CN102802758B (zh) * | 2009-06-23 | 2018-02-16 | 加拿大原子能有限公司 | 翼片式过滤元件 |
TWI587905B (zh) * | 2009-06-23 | 2017-06-21 | 加拿大原子能有限公司 | 葉片式過濾元件 |
US20110088662A1 (en) * | 2009-10-20 | 2011-04-21 | Eaton Corporation | Method of packaging a membrane for use in a venting valve |
US20120174787A1 (en) * | 2011-01-12 | 2012-07-12 | General Electric Company | Filter having flow control features |
JPWO2012105208A1 (ja) * | 2011-01-31 | 2014-07-03 | パナソニック株式会社 | 集塵フィルターユニット、投写型画像表示装置、及び空気清浄機 |
US20140076749A1 (en) * | 2012-09-14 | 2014-03-20 | Raytheon Company | Variable density desiccator housing and method of manufacturing |
JP2015009235A (ja) * | 2013-06-28 | 2015-01-19 | 日本精線株式会社 | 精密積層フィルター |
US10060632B2 (en) | 2013-10-02 | 2018-08-28 | Samsung Electronics Co., Ltd. | Cooking apparatus and method of controlling the same |
KR101746627B1 (ko) * | 2015-09-01 | 2017-06-13 | 전광수 | 금속 필터 및 이의 제조방법 그리고 이를 이용한 압착 여과기 |
FR3050772B1 (fr) * | 2016-04-28 | 2018-05-11 | Electricite De France | Gestion d'un pompage d'alimentation en eau d'un circuit d'une installation de production electrique |
JP2020157236A (ja) | 2019-03-27 | 2020-10-01 | 三菱日立パワーシステムズ株式会社 | 金属フィルタ及びその製造方法 |
JP2022047049A (ja) * | 2020-09-11 | 2022-03-24 | 日鉄鉱業株式会社 | 異方性無機微粒子を用いた粉塵捕集層を有するフィルタエレメント、該フィルタエレメントを備えた集塵機 |
CN112588022B (zh) * | 2020-11-19 | 2022-05-13 | 厦门保瑞达环保科技有限公司 | 一种金属褶皱滤袋的制作方法 |
CN113058342B (zh) * | 2021-04-13 | 2022-10-28 | 西安航空制动科技有限公司 | 一种便于在线实时清理的cvd炉过滤装置 |
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US2267918A (en) * | 1940-03-27 | 1941-12-30 | Gen Motors Corp | Porous article and method of making same |
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DE2536271C3 (de) * | 1975-08-14 | 1984-08-23 | Sintermetallwerk Krebsöge GmbH, 5608 Radevormwald | Filterpatrone |
DE3024324A1 (de) * | 1980-06-27 | 1982-01-21 | Herding GmbH Entstaubungsanlagen, 8450 Amberg | Filterkoerper zum abscheiden von fest- und/oder schwebstoffen und verfahren zu dessen herstellung |
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US5772738A (en) * | 1993-11-30 | 1998-06-30 | Purex Co., Ltd. | Multifunctional air filter and air-circulating clean unit with the same incorporated therein |
US5782942A (en) * | 1996-01-11 | 1998-07-21 | Vanguard International Semiconductor Corporation | Filter system for semiconductor furnace |
JP3365617B2 (ja) * | 1998-06-11 | 2003-01-14 | 日東電工株式会社 | エアフィルタ用濾材の製造方法 |
-
1999
- 1999-09-30 JP JP27989999A patent/JP3177512B2/ja not_active Expired - Fee Related
- 1999-10-08 TW TW088117382A patent/TW422723B/zh not_active IP Right Cessation
- 1999-10-12 US US09/554,658 patent/US6355082B1/en not_active Expired - Lifetime
- 1999-10-12 EP EP99970339A patent/EP1040860B1/en not_active Expired - Lifetime
- 1999-10-12 WO PCT/JP1999/005628 patent/WO2000021641A1/ja active IP Right Grant
- 1999-10-12 DE DE69937730T patent/DE69937730T2/de not_active Expired - Lifetime
- 1999-10-12 KR KR1020007006340A patent/KR100614420B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR100614420B1 (ko) | 2006-08-21 |
EP1040860B1 (en) | 2007-12-12 |
DE69937730T2 (de) | 2008-04-10 |
TW422723B (en) | 2001-02-21 |
US6355082B1 (en) | 2002-03-12 |
EP1040860A4 (en) | 2003-03-05 |
EP1040860A1 (en) | 2000-10-04 |
DE69937730D1 (de) | 2008-01-24 |
WO2000021641A1 (fr) | 2000-04-20 |
JP3177512B2 (ja) | 2001-06-18 |
JP2000185209A (ja) | 2000-07-04 |
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