KR102860491B1 - 복합 재료 및 반도체 패키지 - Google Patents

복합 재료 및 반도체 패키지

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Publication number
KR102860491B1
KR102860491B1 KR1020237021003A KR20237021003A KR102860491B1 KR 102860491 B1 KR102860491 B1 KR 102860491B1 KR 1020237021003 A KR1020237021003 A KR 1020237021003A KR 20237021003 A KR20237021003 A KR 20237021003A KR 102860491 B1 KR102860491 B1 KR 102860491B1
Authority
KR
South Korea
Prior art keywords
composite material
layer
thickness
percent
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020237021003A
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English (en)
Korean (ko)
Other versions
KR20230122028A (ko
Inventor
토루 마에다
미키 미야나가
다이스케 곤도
케이 히라이
마사유키 이토
신이치 야마가타
Original Assignee
스미토모덴키고교가부시키가이샤
가부시끼가이샤 아라이도 마테리아루
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Application filed by 스미토모덴키고교가부시키가이샤, 가부시끼가이샤 아라이도 마테리아루 filed Critical 스미토모덴키고교가부시키가이샤
Publication of KR20230122028A publication Critical patent/KR20230122028A/ko
Application granted granted Critical
Publication of KR102860491B1 publication Critical patent/KR102860491B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/25—Arrangements for cooling characterised by their materials
    • H01L23/373—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B3/00—Rolling materials of special alloys so far as the composition of the alloy requires or permits special rolling methods or sequences ; Rolling of aluminium, copper, zinc or other non-ferrous metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/02—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers
    • B22F7/04—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers with one or more layers not made from powder, e.g. made from solid metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • H01L23/367—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/22—Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/25—Arrangements for cooling characterised by their materials
    • H10W40/255—Arrangements for cooling characterised by their materials having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/25—Arrangements for cooling characterised by their materials
    • H10W40/258—Metallic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/02—Manufacture or treatment of conductive package substrates serving as an interconnection, e.g. of metal plates

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Laminated Bodies (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Ceramic Engineering (AREA)
KR1020237021003A 2020-12-24 2021-12-22 복합 재료 및 반도체 패키지 Active KR102860491B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020214612 2020-12-24
JPJP-P-2020-214612 2020-12-24
PCT/JP2021/047541 WO2022138711A1 (ja) 2020-12-24 2021-12-22 複合材料、半導体パッケージ及び複合材料の製造方法

Publications (2)

Publication Number Publication Date
KR20230122028A KR20230122028A (ko) 2023-08-22
KR102860491B1 true KR102860491B1 (ko) 2025-09-16

Family

ID=82159785

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237021003A Active KR102860491B1 (ko) 2020-12-24 2021-12-22 복합 재료 및 반도체 패키지

Country Status (6)

Country Link
US (1) US12451407B2 (https=)
JP (1) JP7658992B2 (https=)
KR (1) KR102860491B1 (https=)
CN (1) CN116648315A (https=)
DE (1) DE112021006684T5 (https=)
WO (1) WO2022138711A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117531833B (zh) * 2024-01-10 2024-04-02 太原理工大学 一种大厚比镁/钛复合板脉冲电流辅助轧制复合方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007142126A (ja) 2005-11-18 2007-06-07 Allied Material Corp 複合材料及び半導体搭載用放熱基板、及びそれを用いたセラミックパッケージ
WO2015182385A1 (ja) 2014-05-29 2015-12-03 株式会社アライドマテリアル ヒートスプレッダとその製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06268117A (ja) * 1993-03-15 1994-09-22 Sumitomo Electric Ind Ltd 半導体装置用放熱基板およびその製造方法
JP2005340560A (ja) * 2004-05-28 2005-12-08 Kyocera Corp 電子部品収納用パッケージおよび電子装置
JP4227610B2 (ja) * 2005-10-03 2009-02-18 京セラ株式会社 放熱基体の製造方法
JP3862737B1 (ja) * 2005-10-18 2006-12-27 栄樹 津島 クラッド材およびその製造方法、クラッド材の成型方法、クラッド材を用いた放熱基板
US10347559B2 (en) * 2011-03-16 2019-07-09 Momentive Performance Materials Inc. High thermal conductivity/low coefficient of thermal expansion composites
JP6455896B1 (ja) 2017-11-18 2019-01-23 Jfe精密株式会社 放熱板及びその製造方法
JP6732395B1 (ja) * 2019-08-29 2020-07-29 Jfe精密株式会社 放熱板

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007142126A (ja) 2005-11-18 2007-06-07 Allied Material Corp 複合材料及び半導体搭載用放熱基板、及びそれを用いたセラミックパッケージ
WO2015182385A1 (ja) 2014-05-29 2015-12-03 株式会社アライドマテリアル ヒートスプレッダとその製造方法

Also Published As

Publication number Publication date
DE112021006684T5 (de) 2023-10-26
US12451407B2 (en) 2025-10-21
CN116648315A (zh) 2023-08-25
KR20230122028A (ko) 2023-08-22
WO2022138711A1 (ja) 2022-06-30
JP7658992B2 (ja) 2025-04-08
US20240304514A1 (en) 2024-09-12
JPWO2022138711A1 (https=) 2022-06-30

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