KR102708442B1 - 광 검출 장치 - Google Patents

광 검출 장치 Download PDF

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Publication number
KR102708442B1
KR102708442B1 KR1020177026042A KR20177026042A KR102708442B1 KR 102708442 B1 KR102708442 B1 KR 102708442B1 KR 1020177026042 A KR1020177026042 A KR 1020177026042A KR 20177026042 A KR20177026042 A KR 20177026042A KR 102708442 B1 KR102708442 B1 KR 102708442B1
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KR
South Korea
Prior art keywords
fabry
interference filter
perot interference
light
adhesive member
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KR1020177026042A
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Korean (ko)
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KR20170140170A (ko
Inventor
마사키 히로세
가츠미 시바야마
다카시 가사하라
도시미츠 가와이
다케히코 야시로
미츠시 미네노
시게루 스즈키
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하마마츠 포토닉스 가부시키가이샤
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Priority to KR1020247024604A priority Critical patent/KR20240118188A/ko
Publication of KR20170140170A publication Critical patent/KR20170140170A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/064—Ambient temperature sensor; Housing temperature sensor; Constructional details thereof

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Gyroscopes (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
KR1020177026042A 2015-04-28 2016-04-19 광 검출 장치 Active KR102708442B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020247024604A KR20240118188A (ko) 2015-04-28 2016-04-19 광 검출 장치

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2015-092360 2015-04-28
JP2015092360A JP6671860B2 (ja) 2015-04-28 2015-04-28 光検出装置
PCT/JP2016/062414 WO2016175089A1 (ja) 2015-04-28 2016-04-19 光検出装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020247024604A Division KR20240118188A (ko) 2015-04-28 2016-04-19 광 검출 장치

Publications (2)

Publication Number Publication Date
KR20170140170A KR20170140170A (ko) 2017-12-20
KR102708442B1 true KR102708442B1 (ko) 2024-09-24

Family

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KR1020177026042A Active KR102708442B1 (ko) 2015-04-28 2016-04-19 광 검출 장치
KR1020247024604A Pending KR20240118188A (ko) 2015-04-28 2016-04-19 광 검출 장치

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KR1020247024604A Pending KR20240118188A (ko) 2015-04-28 2016-04-19 광 검출 장치

Country Status (7)

Country Link
US (2) US11118972B2 (enExample)
EP (3) EP4467943A1 (enExample)
JP (1) JP6671860B2 (enExample)
KR (2) KR102708442B1 (enExample)
CN (2) CN107532941B (enExample)
TW (4) TWI840809B (enExample)
WO (1) WO2016175089A1 (enExample)

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JP2018137284A (ja) * 2017-02-20 2018-08-30 ソニーセミコンダクタソリューションズ株式会社 センサ、固体撮像装置及び電子装置
JP6862216B2 (ja) * 2017-02-28 2021-04-21 浜松ホトニクス株式会社 光検出装置
JP7155498B2 (ja) * 2017-03-29 2022-10-19 セイコーエプソン株式会社 光学フィルターデバイス
JP6517309B1 (ja) 2017-11-24 2019-05-22 浜松ホトニクス株式会社 異物除去方法、及び光検出装置の製造方法
JP6526771B1 (ja) 2017-11-24 2019-06-05 浜松ホトニクス株式会社 ウェハ
JP6902571B2 (ja) * 2017-11-24 2021-07-14 浜松ホトニクス株式会社 ウェハ
JP7313115B2 (ja) * 2017-11-24 2023-07-24 浜松ホトニクス株式会社 光検査装置及び光検査方法
JP7043885B2 (ja) * 2018-02-26 2022-03-30 セイコーエプソン株式会社 分光装置、温度特性導出装置、分光システム、分光方法、及び温度特性導出方法
US11101896B2 (en) * 2018-04-12 2021-08-24 Raytheon Company Integrated optical resonant detector
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JP7351610B2 (ja) * 2018-10-30 2023-09-27 浜松ホトニクス株式会社 光検出装置
JP7388815B2 (ja) * 2018-10-31 2023-11-29 浜松ホトニクス株式会社 分光ユニット及び分光モジュール
JP2020098258A (ja) * 2018-12-18 2020-06-25 セイコーエプソン株式会社 光学モジュール及び電子機器
JP7181784B2 (ja) 2018-12-18 2022-12-01 浜松ホトニクス株式会社 モニタ装置、光学フィルタシステム、モニタ方法、電流発生装置
JP7051746B2 (ja) * 2019-04-17 2022-04-11 浜松ホトニクス株式会社 光学装置の製造方法
JP7345404B2 (ja) * 2020-01-22 2023-09-15 京セラ株式会社 Ｍｅｍｓ装置
CN111474618A (zh) * 2020-05-20 2020-07-31 腾景科技股份有限公司 一种空气隙标准具结构的宽波段温度调谐滤波器
JP7114766B2 (ja) * 2021-02-19 2022-08-08 浜松ホトニクス株式会社 光検出装置
JP7647403B2 (ja) * 2021-07-12 2025-03-18 セイコーエプソン株式会社 分光デバイス、及び分光カメラ
CN113703119B (zh) * 2021-09-02 2022-06-07 中国科学院长春光学精密机械与物理研究所 一种光学探测器滤光片精密封装机构
JP2024080068A (ja) * 2022-12-01 2024-06-13 浜松ホトニクス株式会社 フィルタユニット
JP2024080070A (ja) * 2022-12-01 2024-06-13 浜松ホトニクス株式会社 フィルタユニット
JP2024080082A (ja) * 2022-12-01 2024-06-13 浜松ホトニクス株式会社 フィルタユニット
JP2024107867A (ja) * 2023-01-30 2024-08-09 浜松ホトニクス株式会社 蛍光計測装置

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JP2002286934A (ja) * 2001-03-28 2002-10-03 Kyocera Corp 光学フィルタとこれを用いた撮像装置およびこれを用いた撮像機器
JP2010238821A (ja) * 2009-03-30 2010-10-21 Sony Corp 多層配線基板、スタック構造センサパッケージおよびその製造方法
JP2015068887A (ja) * 2013-09-27 2015-04-13 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、電子機器、及びｍｅｍｓデバイス

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Publication number Publication date
EP4212836A1 (en) 2023-07-19
US11118972B2 (en) 2021-09-14
CN107532941A (zh) 2018-01-02
US11555741B2 (en) 2023-01-17
EP3290880A1 (en) 2018-03-07
KR20170140170A (ko) 2017-12-20
EP3290880A4 (en) 2018-12-19
US20180113024A1 (en) 2018-04-26
TWI769594B (zh) 2022-07-01
WO2016175089A1 (ja) 2016-11-03
TW201643390A (zh) 2016-12-16
TWI840809B (zh) 2024-05-01
CN113049100B (zh) 2023-11-28
TWI714577B (zh) 2021-01-01
KR20240118188A (ko) 2024-08-02
EP4467943A1 (en) 2024-11-27
EP3290880B1 (en) 2023-04-12
CN113049100A (zh) 2021-06-29
US20210372854A1 (en) 2021-12-02
TW202433020A (zh) 2024-08-16
JP2016211860A (ja) 2016-12-15
TW202111295A (zh) 2021-03-16
TW202234030A (zh) 2022-09-01
CN107532941B (zh) 2021-05-25
TWI885832B (zh) 2025-06-01
JP6671860B2 (ja) 2020-03-25

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