KR102665943B1 - 전기 전도성 기판 상에 기능성 재료의 층을 형성하는 방법 - Google Patents

전기 전도성 기판 상에 기능성 재료의 층을 형성하는 방법 Download PDF

Info

Publication number
KR102665943B1
KR102665943B1 KR1020197035384A KR20197035384A KR102665943B1 KR 102665943 B1 KR102665943 B1 KR 102665943B1 KR 1020197035384 A KR1020197035384 A KR 1020197035384A KR 20197035384 A KR20197035384 A KR 20197035384A KR 102665943 B1 KR102665943 B1 KR 102665943B1
Authority
KR
South Korea
Prior art keywords
layer
present disclosure
nano
electrically conductive
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020197035384A
Other languages
English (en)
Korean (ko)
Other versions
KR20200031562A (ko
Inventor
스타니슬라프 피오트르 잔코브스키
필립 엠. 비르켄
Original Assignee
아이엠이씨 브이제트더블유
카톨리에케 유니버시테이트 루벤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아이엠이씨 브이제트더블유, 카톨리에케 유니버시테이트 루벤 filed Critical 아이엠이씨 브이제트더블유
Publication of KR20200031562A publication Critical patent/KR20200031562A/ko
Application granted granted Critical
Publication of KR102665943B1 publication Critical patent/KR102665943B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139Processes of manufacture
    • H01M4/1391Processes of manufacture of electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/006Nanostructures, e.g. using aluminium anodic oxidation templates [AAO]
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/045Anodisation of aluminium or alloys based thereon for forming AAO templates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/20Acidic compositions for etching aluminium or alloys thereof
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/08Perforated or foraminous objects, e.g. sieves
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/022Anodisation on selected surface areas
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/024Anodisation under pulsed or modulated current or potential
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/06Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
    • C25D11/10Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing organic acids
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/12Anodising more than once, e.g. in different baths
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/18After-treatment, e.g. pore-sealing
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/18After-treatment, e.g. pore-sealing
    • C25D11/24Chemical after-treatment
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/34Anodisation of metals or alloys not provided for in groups C25D11/04 - C25D11/32
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D9/00Electrolytic coating other than with metals
    • C25D9/02Electrolytic coating other than with metals with organic materials
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D9/00Electrolytic coating other than with metals
    • C25D9/04Electrolytic coating other than with metals with inorganic materials
    • C25D9/06Electrolytic coating other than with metals with inorganic materials by anodic processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/002Auxiliary arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0404Methods of deposition of the material by coating on electrode collectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0407Methods of deposition of the material by coating on an electrolyte layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0438Processes of manufacture in general by electrochemical processing
    • H01M4/044Activating, forming or electrochemical attack of the supporting material
    • H01M4/0442Anodisation, Oxidation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0438Processes of manufacture in general by electrochemical processing
    • H01M4/045Electrochemical coating; Electrochemical impregnation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0438Processes of manufacture in general by electrochemical processing
    • H01M4/045Electrochemical coating; Electrochemical impregnation
    • H01M4/0452Electrochemical coating; Electrochemical impregnation from solutions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0438Processes of manufacture in general by electrochemical processing
    • H01M4/0459Electrochemical doping, intercalation, occlusion or alloying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0471Processes of manufacture in general involving thermal treatment, e.g. firing, sintering, backing particulate active material, thermal decomposition, pyrolysis
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/049Manufacturing of an active layer by chemical means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139Processes of manufacture
    • H01M4/1397Processes of manufacture of electrodes based on inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/66Selection of materials
    • H01M4/661Metal or alloys, e.g. alloy coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/70Carriers or collectors characterised by shape or form
    • H01M4/72Grids
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/70Carriers or collectors characterised by shape or form
    • H01M4/72Grids
    • H01M4/74Meshes or woven material; Expanded metal
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/70Carriers or collectors characterised by shape or form
    • H01M4/80Porous plates, e.g. sintered carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/02Details
    • H01M8/0202Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/023Porous and characterised by the material
    • H01M8/0232Metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/02Details
    • H01M8/0202Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0247Collectors; Separators, e.g. bipolar separators; Interconnectors characterised by the form
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2222/00Aspects relating to chemical surface treatment of metallic material by reaction of the surface with a reactive medium
    • C23C2222/20Use of solutions containing silanes
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/28Acidic compositions for etching iron group metals
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/12Electroplating: Baths therefor from solutions of nickel or cobalt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/86Inert electrodes with catalytic activity, e.g. for fuel cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/86Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/8605Porous electrodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Inorganic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Cell Electrode Carriers And Collectors (AREA)
  • Inert Electrodes (AREA)
  • Secondary Cells (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Electric Double-Layer Capacitors Or The Like (AREA)
  • Catalysts (AREA)
  • Electrodes For Compound Or Non-Metal Manufacture (AREA)
  • Fuel Cell (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Composite Materials (AREA)
KR1020197035384A 2017-07-18 2018-07-10 전기 전도성 기판 상에 기능성 재료의 층을 형성하는 방법 Active KR102665943B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP17181782 2017-07-18
EP17181782.8 2017-07-18
PCT/EP2018/068674 WO2019016034A1 (en) 2017-07-18 2018-07-10 FORMING A LAYER OF FUNCTIONAL MATERIAL ON AN ELECTROCONDUCTIVE SUBSTRATE

Publications (2)

Publication Number Publication Date
KR20200031562A KR20200031562A (ko) 2020-03-24
KR102665943B1 true KR102665943B1 (ko) 2024-05-20

Family

ID=59366291

Family Applications (4)

Application Number Title Priority Date Filing Date
KR1020197035384A Active KR102665943B1 (ko) 2017-07-18 2018-07-10 전기 전도성 기판 상에 기능성 재료의 층을 형성하는 방법
KR1020207002233A Active KR102486135B1 (ko) 2017-07-18 2018-07-10 다공성 고체 물질 및 이의 제조방법
KR1020197035387A Active KR102462639B1 (ko) 2017-07-18 2018-07-10 복수의 이격된 (나노)채널을 포함하는 템플릿으로 밸브 금속층을 변형시키는 방법 및 복수의 이격된 (나노)채널 내부에 이격된 구조체를 형성하는 방법
KR1020197035922A Active KR102611012B1 (ko) 2017-07-18 2018-07-13 고체 배터리 셀 및 고체 배터리의 제조방법

Family Applications After (3)

Application Number Title Priority Date Filing Date
KR1020207002233A Active KR102486135B1 (ko) 2017-07-18 2018-07-10 다공성 고체 물질 및 이의 제조방법
KR1020197035387A Active KR102462639B1 (ko) 2017-07-18 2018-07-10 복수의 이격된 (나노)채널을 포함하는 템플릿으로 밸브 금속층을 변형시키는 방법 및 복수의 이격된 (나노)채널 내부에 이격된 구조체를 형성하는 방법
KR1020197035922A Active KR102611012B1 (ko) 2017-07-18 2018-07-13 고체 배터리 셀 및 고체 배터리의 제조방법

Country Status (6)

Country Link
US (5) US20200181789A1 (enExample)
EP (5) EP3431637A1 (enExample)
JP (4) JP7142649B2 (enExample)
KR (4) KR102665943B1 (enExample)
CN (4) CN110997988B (enExample)
WO (4) WO2019016036A1 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3431637A1 (en) 2017-07-18 2019-01-23 IMEC vzw Porous solid materials and methods for fabrication
US11569499B2 (en) * 2019-01-23 2023-01-31 StoreDot Ltd. Aerogel-based electrodes
CN114008813B (zh) 2019-04-01 2025-05-09 丰田自动车株式会社 金属-空气电池的3d有序纳米网
JP2023507160A (ja) 2019-12-20 2023-02-21 シオン・パワー・コーポレーション リチウム金属電極
WO2021184035A1 (en) * 2020-03-09 2021-09-16 Novelis Inc. Aluminum anode current collectors for lithium ion batteries
EP3904561A1 (de) * 2020-04-27 2021-11-03 RENA Technologies Austria GmbH Verfahren zur herstellung von mikro- und nanostrukturen
CN111834637B (zh) * 2020-07-24 2022-03-22 江西理工大学 一种具有多通道柔性集流体结构降内阻的柔性锂离子电池及其制备方法
JP7526800B2 (ja) * 2020-08-25 2024-08-01 富士フイルム株式会社 集電体用アルミニウム部材、ならびに、リチウムイオンキャパシタ、電気二重層キャパシタ、半固体電池、固体電池、および、非水電解液を使用する二次電池
EP3974562A1 (en) 2020-09-28 2022-03-30 Imec VZW Electrochemical process for forming a solid electrolyte
KR102404887B1 (ko) * 2020-09-28 2022-06-07 재단법인대구경북과학기술원 전도성 고분자를 이용한 나노 섬유 메쉬 생체 전극 및 이의 제조방법
FR3114514A1 (fr) * 2020-09-29 2022-04-01 Commissariat A L Energie Atomique Et Aux Energies Alternatives Utilisation d’aérogel à base de nanofils métalliques en tant que matériau filtrant pour le traitement de l’air, Cartouche à électrodes associée, Système de traitement de l’air associé.
KR20220069617A (ko) 2020-11-20 2022-05-27 삼성전자주식회사 이차전지
US12463210B2 (en) * 2021-03-03 2025-11-04 The United States Of America As Represented By The Secretary Of The Army Electrolyte and electrode materials for rechargeable lithium batteries
KR102685065B1 (ko) * 2021-12-31 2024-07-15 엘티메탈 주식회사 수전해셀의 다공성 이송층을 형성하는 다공성 이송막 제조방법
EP4504648A1 (en) * 2022-04-07 2025-02-12 Board of Regents, The University of Texas System Tool and processes for electrochemical etching
WO2023201063A1 (en) * 2022-04-15 2023-10-19 University Of Maryland, College Park Conformal solid-state batteries and methods for producing and using the same
CN115020689B (zh) * 2022-08-08 2022-10-25 溧阳天目先导电池材料科技有限公司 用于二次锂电池的纳米硅碳复合材料及其制备方法和应用
WO2025038410A2 (en) * 2023-08-14 2025-02-20 Carnegie Mellon University Nanowire structured electrode for batteries
US20250208092A1 (en) 2023-12-22 2025-06-26 Imec Vzw Capturing a target molecule
WO2025153367A1 (en) 2024-01-16 2025-07-24 Scires Battery Technologies Gmbh Electrode assembly for an energy storage cell

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160032475A1 (en) * 2014-07-31 2016-02-04 Imec Vzw Method for Nanowire Cluster Formation
US20170125789A1 (en) * 2015-11-02 2017-05-04 Imec Vzw Methods for Forming Lithium Manganese Oxide Layers

Family Cites Families (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5176137A (ja) 1974-12-27 1976-07-01 Mitsubishi Electric Corp Yokyokusankashorihoho
JPS5314114A (en) 1976-07-26 1978-02-08 Hitachi Ltd Porous material
US4189357A (en) 1978-10-10 1980-02-19 Kerr-Mcgee Corporation Method of treating a substrate material to form an electrode
US5069763A (en) * 1990-01-02 1991-12-03 Rudolf Hradcovsky Method of coating aluminum with vanadium oxides
US5277788A (en) 1990-10-01 1994-01-11 Aluminum Company Of America Twice-anodized aluminum article having an organo-phosphorus monolayer and process for making the article
IL99216A (en) 1991-08-18 1995-12-31 Yahalom Joseph Protective coating for metal parts to be used at high temperatures
US6139713A (en) * 1996-08-26 2000-10-31 Nippon Telegraph And Telephone Corporation Method of manufacturing porous anodized alumina film
JP4146978B2 (ja) * 1999-01-06 2008-09-10 キヤノン株式会社 細孔を有する構造体の製造方法、該製造方法により製造された構造体
US6540900B1 (en) 2001-10-16 2003-04-01 Kemet Electronics Corporation Method of anodizing aluminum capacitor foil for use in low voltage, surface mount capacitors
US6515368B1 (en) * 2001-12-07 2003-02-04 Advanced Micro Devices, Inc. Semiconductor device with copper-filled via includes a copper-zinc/alloy film for reduced electromigration of copper
US20050276743A1 (en) * 2004-01-13 2005-12-15 Jeff Lacombe Method for fabrication of porous metal templates and growth of carbon nanotubes and utilization thereof
US20060289351A1 (en) * 2004-07-02 2006-12-28 The University Of Chicago Nanostructures synthesized using anodic aluminum oxide
JP5181413B2 (ja) 2005-09-13 2013-04-10 日立電線株式会社 電気化学装置用電極、固体電解質/電極接合体及びその製造方法
US20100219079A1 (en) * 2006-05-07 2010-09-02 Synkera Technologies, Inc. Methods for making membranes based on anodic aluminum oxide structures
JP2008144235A (ja) 2006-12-11 2008-06-26 Nippon Steel Corp ニッケル表面の酸化膜形成方法
KR20090125256A (ko) * 2007-03-26 2009-12-04 사임베트 코퍼레이션 리튬 막박 전지용 기재
JP2008272912A (ja) * 2007-05-07 2008-11-13 Fujifilm Corp 微細構造体及びその製造方法
CN100553761C (zh) * 2007-07-18 2009-10-28 北京交通大学 一种有序碳载质子交换膜燃料电池催化剂及制备方法
JP2009074133A (ja) * 2007-09-20 2009-04-09 Fujifilm Corp 微細構造体
CN101246964B (zh) * 2008-01-31 2011-08-31 上海交通大学 质子交换膜燃料电池不锈钢双极板的表面改性方法
CN104466085B (zh) * 2008-02-22 2018-03-16 科罗拉多州立大学研究基金会 锂‑离子电池
US20090297913A1 (en) * 2008-03-25 2009-12-03 The University Of Georgia Research Foundation, Inc. Nanostructure-Enhanced stereo-electrodes for fuel cells and biosensors
JP4730405B2 (ja) 2008-07-11 2011-07-20 トヨタ自動車株式会社 リチウムイオン電池の正電極板に用いる電池用電極箔、リチウムイオン電池用の正電極板、リチウムイオン電池、車両、電池搭載機器、リチウムイオン電池の正電極板に用いる電池用電極箔の製造方法、及び、リチウムイオン電池用の正電極板の製造方法
KR101550367B1 (ko) * 2008-12-08 2015-09-07 광주과학기술원 전도성 선형 구조체를 포함하는 전극 구조체, 그 제조방법 및 리튬이차전지
WO2010089991A1 (ja) 2009-02-04 2010-08-12 独立行政法人産業技術総合研究所 リチウム二次電池用ファイバー電極及びその製造方法並びにファイバー電極を備えたリチウム二次電池
CN101581879A (zh) * 2009-05-27 2009-11-18 西安交通大学 一种用于纳米压印的软模板的制备方法
KR101175232B1 (ko) * 2009-06-29 2012-08-21 경상대학교산학협력단 집전체-전극 일체형 소자 및 그의 제조 방법
CN101603193A (zh) * 2009-07-10 2009-12-16 中国科学院电工研究所 一种剥离阳极氧化铝膜的方法
US20140342236A1 (en) * 2009-08-04 2014-11-20 Ut-Battelle, Llc Scalable fabrication of one-dimensional and three-dimensional, conducting, nanostructured templates for diverse applications such as battery electrodes for next generation batteries
WO2011017392A1 (en) * 2009-08-04 2011-02-10 Ut-Battelle, Llc Vertically-aligned nanopillar array on biaxially-textured substrates for nanoelectronics and energy conversion applications
CN102021628A (zh) * 2009-09-11 2011-04-20 中国科学院兰州化学物理研究所 一种金属钛或钛合金超疏油表面的制备方法
CN101660187B (zh) * 2009-09-15 2011-08-10 中山大学 基于预成型阳极氧化铝的亚微米图形衬底制作方法
KR20120102680A (ko) * 2009-11-11 2012-09-18 암프리우스, 인코포레이티드 전극용 중간 층 제조하기
GB0922308D0 (en) * 2009-12-22 2010-02-03 Rolls Royce Plc Hydrophobic surface
JP5611618B2 (ja) * 2010-03-04 2014-10-22 学校法人 工学院大学 多孔質材料の製造方法
CN101838835A (zh) * 2010-03-30 2010-09-22 同济大学 可直接用于电化学沉积的有序多孔氧化铝模板及制备方法
US9057144B2 (en) * 2010-07-30 2015-06-16 University Of Utah Research Foundation Nanostructured films and related methods
JP2012117144A (ja) * 2010-11-30 2012-06-21 Imec 正確に制御されたマスク陽極酸化のための方法
JP2012241224A (ja) 2011-05-18 2012-12-10 Kogakuin Univ 多孔質材料及びその製造方法
JP5970978B2 (ja) 2011-07-04 2016-08-17 日産自動車株式会社 電気デバイス用正極活物質、電気デバイス用正極及び電気デバイス
EP2562851A1 (en) * 2011-08-23 2013-02-27 Mustafa K. Ürgen Method for producing an electrode material comprising nanowires
KR101456963B1 (ko) * 2012-02-06 2014-11-04 주식회사 엘지화학 양극 활물질의 제조방법
US9420713B2 (en) * 2012-05-29 2016-08-16 Apple Inc. Double anodizing processes
CN102677129B (zh) 2012-06-13 2014-07-02 西北有色金属研究院 一种Ni基NiO纳米片阵列薄膜电极及其制备方法
FR3002219B1 (fr) * 2013-02-19 2015-04-10 Commissariat Energie Atomique Procede de fabrication d'une structure micromecanique et/ou nanomecanique comportant une surface poreuse
JP6030241B2 (ja) 2013-07-22 2016-11-24 富士フイルム株式会社 異方導電性部材の製造方法
JP6029764B2 (ja) * 2013-08-30 2016-11-24 富士フイルム株式会社 金属充填微細構造体の製造方法
CN104370298B (zh) * 2013-12-20 2015-09-16 东北大学 一种纳米锂离子导体铝酸锂粉体的制备方法
US20150325477A1 (en) 2014-05-09 2015-11-12 Applied Materials, Inc. Super conformal metal plating from complexed electrolytes
CN104726920A (zh) * 2015-03-06 2015-06-24 西安电子科技大学 超薄通孔阳极氧化铝模板制备及其转移方法
JP2016195202A (ja) 2015-04-01 2016-11-17 住友電気工業株式会社 ヒートシンク及び電子機器
KR20160131226A (ko) * 2015-05-06 2016-11-16 숭실대학교산학협력단 다양한 범위의 소수성을 갖는 하이드로콜로이드의 제조방법
JP2016219171A (ja) 2015-05-18 2016-12-22 セイコーエプソン株式会社 電極体、電極体の製造方法、電極複合体および電池
CN104947167B (zh) 2015-06-04 2017-05-10 电子科技大学 两面一致多孔阳极氧化铝纳米模板的制备方法
CN204825084U (zh) * 2015-06-24 2015-12-02 广州鹏辉能源科技股份有限公司 一种高安全性锂离子电池铝集流体的连续表面处理装置
KR101701314B1 (ko) * 2015-07-02 2017-02-02 고려대학교 산학협력단 양극산화된 금속산화물 나노다공성 템플레이트 제작방법
CN105316743B (zh) * 2015-12-08 2017-10-27 深圳拓扑精膜科技有限公司 一种大面积超薄阳极氧化铝多孔膜的制备方法
EP3431637A1 (en) 2017-07-18 2019-01-23 IMEC vzw Porous solid materials and methods for fabrication

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160032475A1 (en) * 2014-07-31 2016-02-04 Imec Vzw Method for Nanowire Cluster Formation
US20170125789A1 (en) * 2015-11-02 2017-05-04 Imec Vzw Methods for Forming Lithium Manganese Oxide Layers

Also Published As

Publication number Publication date
CN110997988A (zh) 2020-04-10
EP3655571B1 (en) 2023-10-25
CN110997986B (zh) 2022-11-15
US11028496B2 (en) 2021-06-08
KR20200031563A (ko) 2020-03-24
EP3655571A1 (en) 2020-05-27
JP2020527194A (ja) 2020-09-03
US20200194773A1 (en) 2020-06-18
KR102462639B1 (ko) 2022-11-04
CN110997986A (zh) 2020-04-10
US11827992B2 (en) 2023-11-28
EP3655570A1 (en) 2020-05-27
US20200181792A1 (en) 2020-06-11
EP3655568B1 (en) 2023-05-24
CN110997988B (zh) 2023-06-16
JP2020528490A (ja) 2020-09-24
CN110914481A (zh) 2020-03-24
KR102611012B1 (ko) 2023-12-08
KR102486135B1 (ko) 2023-01-10
CN110914481B (zh) 2022-05-13
US11618966B2 (en) 2023-04-04
WO2019016033A1 (en) 2019-01-24
EP3655568A1 (en) 2020-05-27
KR20200031624A (ko) 2020-03-24
EP3431637A1 (en) 2019-01-23
JP7212669B2 (ja) 2023-01-25
CN110997987A (zh) 2020-04-10
WO2019016036A1 (en) 2019-01-24
EP3655569B1 (en) 2023-11-01
KR20200031564A (ko) 2020-03-24
JP2020527837A (ja) 2020-09-10
US20210174982A1 (en) 2021-06-10
EP3655569A1 (en) 2020-05-27
JP7177822B2 (ja) 2022-11-24
WO2019016101A1 (en) 2019-01-24
JP7142649B2 (ja) 2022-09-27
JP2020527649A (ja) 2020-09-10
CN110997987B (zh) 2022-05-13
US20200181789A1 (en) 2020-06-11
US20230144037A1 (en) 2023-05-11
JP7281445B2 (ja) 2023-05-25
WO2019016034A1 (en) 2019-01-24
KR20200031562A (ko) 2020-03-24

Similar Documents

Publication Publication Date Title
KR102665943B1 (ko) 전기 전도성 기판 상에 기능성 재료의 층을 형성하는 방법
CN107710473B (zh) 制造高纵横比结构的装置和方法
JP6625059B2 (ja) 高アスペクト比構造を製造するデバイスおよび方法
Kim et al. Controlled synthesis of aligned Ni-NiO core-shell nanowire arrays on glass substrates as a new supercapacitor electrode
US11858816B2 (en) Dendritic materials with hierarchical porosity
CN116888789A (zh) 人造固体电解质界面层材料及其用途
US9972827B2 (en) Method for producing 3D-structured thin films
US10374218B2 (en) Methods for forming lithium manganese oxide layers
KR101710421B1 (ko) 산화구리 나노막대/산화아연 나노가지로 구성된 광전극과 그 형성방법

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20191129

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20210616

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20240116

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20240429

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20240509

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20240510

End annual number: 3

Start annual number: 1

PG1601 Publication of registration