JP7142649B2 - 多孔質固体材料及び製造方法 - Google Patents

多孔質固体材料及び製造方法 Download PDF

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JP7142649B2
JP7142649B2 JP2019562658A JP2019562658A JP7142649B2 JP 7142649 B2 JP7142649 B2 JP 7142649B2 JP 2019562658 A JP2019562658 A JP 2019562658A JP 2019562658 A JP2019562658 A JP 2019562658A JP 7142649 B2 JP7142649 B2 JP 7142649B2
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average
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solid material
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JP2020528490A (ja
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スタニスラフ・ピョートル・ザンコフスキー
フィリップ・エム・フェレーケン
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Katholieke Universiteit Leuven
Interuniversitair Microelektronica Centrum vzw IMEC
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Katholieke Universiteit Leuven
Interuniversitair Microelektronica Centrum vzw IMEC
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    • BPERFORMING OPERATIONS; TRANSPORTING
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JP2019562658A 2017-07-18 2018-07-10 多孔質固体材料及び製造方法 Active JP7142649B2 (ja)

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EP17181782 2017-07-18
EP17181782.8 2017-07-18
EP18171056.7 2018-05-07
EP18171056.7A EP3431637A1 (en) 2017-07-18 2018-05-07 Porous solid materials and methods for fabrication
PCT/EP2018/068671 WO2019016033A1 (en) 2017-07-18 2018-07-10 POROUS SOLID MATERIALS AND METHODS OF MAKING

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JP7142649B2 true JP7142649B2 (ja) 2022-09-27

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JP2019562658A Active JP7142649B2 (ja) 2017-07-18 2018-07-10 多孔質固体材料及び製造方法
JP2020502147A Active JP7281445B2 (ja) 2017-07-18 2018-07-10 導電性基板における機能材料層の形成
JP2020502127A Active JP7177822B2 (ja) 2017-07-18 2018-07-10 所定間隔を有する複数の(ナノ)チャネルを備えるテンプレートへのバルブ金属層の変換、及びそこにおける所定間隔を有する構造物の形成
JP2020502115A Active JP7212669B2 (ja) 2017-07-18 2018-07-13 ソリッドステートバッテリーセル及びソリッドステートバッテリーの製造

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JP2020502127A Active JP7177822B2 (ja) 2017-07-18 2018-07-10 所定間隔を有する複数の(ナノ)チャネルを備えるテンプレートへのバルブ金属層の変換、及びそこにおける所定間隔を有する構造物の形成
JP2020502115A Active JP7212669B2 (ja) 2017-07-18 2018-07-13 ソリッドステートバッテリーセル及びソリッドステートバッテリーの製造

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US (5) US20200181789A1 (enExample)
EP (5) EP3431637A1 (enExample)
JP (4) JP7142649B2 (enExample)
KR (4) KR102665943B1 (enExample)
CN (4) CN110997988B (enExample)
WO (4) WO2019016036A1 (enExample)

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EP3431637A1 (en) 2017-07-18 2019-01-23 IMEC vzw Porous solid materials and methods for fabrication
US11569499B2 (en) * 2019-01-23 2023-01-31 StoreDot Ltd. Aerogel-based electrodes
CN114008813B (zh) 2019-04-01 2025-05-09 丰田自动车株式会社 金属-空气电池的3d有序纳米网
JP2023507160A (ja) 2019-12-20 2023-02-21 シオン・パワー・コーポレーション リチウム金属電極
WO2021184035A1 (en) * 2020-03-09 2021-09-16 Novelis Inc. Aluminum anode current collectors for lithium ion batteries
EP3904561A1 (de) * 2020-04-27 2021-11-03 RENA Technologies Austria GmbH Verfahren zur herstellung von mikro- und nanostrukturen
CN111834637B (zh) * 2020-07-24 2022-03-22 江西理工大学 一种具有多通道柔性集流体结构降内阻的柔性锂离子电池及其制备方法
JP7526800B2 (ja) * 2020-08-25 2024-08-01 富士フイルム株式会社 集電体用アルミニウム部材、ならびに、リチウムイオンキャパシタ、電気二重層キャパシタ、半固体電池、固体電池、および、非水電解液を使用する二次電池
EP3974562A1 (en) 2020-09-28 2022-03-30 Imec VZW Electrochemical process for forming a solid electrolyte
KR102404887B1 (ko) * 2020-09-28 2022-06-07 재단법인대구경북과학기술원 전도성 고분자를 이용한 나노 섬유 메쉬 생체 전극 및 이의 제조방법
FR3114514A1 (fr) * 2020-09-29 2022-04-01 Commissariat A L Energie Atomique Et Aux Energies Alternatives Utilisation d’aérogel à base de nanofils métalliques en tant que matériau filtrant pour le traitement de l’air, Cartouche à électrodes associée, Système de traitement de l’air associé.
KR20220069617A (ko) 2020-11-20 2022-05-27 삼성전자주식회사 이차전지
US12463210B2 (en) * 2021-03-03 2025-11-04 The United States Of America As Represented By The Secretary Of The Army Electrolyte and electrode materials for rechargeable lithium batteries
KR102685065B1 (ko) * 2021-12-31 2024-07-15 엘티메탈 주식회사 수전해셀의 다공성 이송층을 형성하는 다공성 이송막 제조방법
EP4504648A1 (en) * 2022-04-07 2025-02-12 Board of Regents, The University of Texas System Tool and processes for electrochemical etching
WO2023201063A1 (en) * 2022-04-15 2023-10-19 University Of Maryland, College Park Conformal solid-state batteries and methods for producing and using the same
CN115020689B (zh) * 2022-08-08 2022-10-25 溧阳天目先导电池材料科技有限公司 用于二次锂电池的纳米硅碳复合材料及其制备方法和应用
WO2025038410A2 (en) * 2023-08-14 2025-02-20 Carnegie Mellon University Nanowire structured electrode for batteries
US20250208092A1 (en) 2023-12-22 2025-06-26 Imec Vzw Capturing a target molecule
WO2025153367A1 (en) 2024-01-16 2025-07-24 Scires Battery Technologies Gmbh Electrode assembly for an energy storage cell

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050276743A1 (en) 2004-01-13 2005-12-15 Jeff Lacombe Method for fabrication of porous metal templates and growth of carbon nanotubes and utilization thereof
JP2012241224A (ja) 2011-05-18 2012-12-10 Kogakuin Univ 多孔質材料及びその製造方法
WO2015029881A1 (ja) 2013-08-30 2015-03-05 富士フイルム株式会社 金属充填微細構造体の製造方法
JP2016053212A (ja) 2014-07-31 2016-04-14 アイメック・ヴェーゼットウェーImec Vzw ナノワイヤクラスタの製造方法
JP2016195202A (ja) 2015-04-01 2016-11-17 住友電気工業株式会社 ヒートシンク及び電子機器

Family Cites Families (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5176137A (ja) 1974-12-27 1976-07-01 Mitsubishi Electric Corp Yokyokusankashorihoho
JPS5314114A (en) 1976-07-26 1978-02-08 Hitachi Ltd Porous material
US4189357A (en) 1978-10-10 1980-02-19 Kerr-Mcgee Corporation Method of treating a substrate material to form an electrode
US5069763A (en) * 1990-01-02 1991-12-03 Rudolf Hradcovsky Method of coating aluminum with vanadium oxides
US5277788A (en) 1990-10-01 1994-01-11 Aluminum Company Of America Twice-anodized aluminum article having an organo-phosphorus monolayer and process for making the article
IL99216A (en) 1991-08-18 1995-12-31 Yahalom Joseph Protective coating for metal parts to be used at high temperatures
US6139713A (en) * 1996-08-26 2000-10-31 Nippon Telegraph And Telephone Corporation Method of manufacturing porous anodized alumina film
JP4146978B2 (ja) * 1999-01-06 2008-09-10 キヤノン株式会社 細孔を有する構造体の製造方法、該製造方法により製造された構造体
US6540900B1 (en) 2001-10-16 2003-04-01 Kemet Electronics Corporation Method of anodizing aluminum capacitor foil for use in low voltage, surface mount capacitors
US6515368B1 (en) * 2001-12-07 2003-02-04 Advanced Micro Devices, Inc. Semiconductor device with copper-filled via includes a copper-zinc/alloy film for reduced electromigration of copper
US20060289351A1 (en) * 2004-07-02 2006-12-28 The University Of Chicago Nanostructures synthesized using anodic aluminum oxide
JP5181413B2 (ja) 2005-09-13 2013-04-10 日立電線株式会社 電気化学装置用電極、固体電解質/電極接合体及びその製造方法
US20100219079A1 (en) * 2006-05-07 2010-09-02 Synkera Technologies, Inc. Methods for making membranes based on anodic aluminum oxide structures
JP2008144235A (ja) 2006-12-11 2008-06-26 Nippon Steel Corp ニッケル表面の酸化膜形成方法
KR20090125256A (ko) * 2007-03-26 2009-12-04 사임베트 코퍼레이션 리튬 막박 전지용 기재
JP2008272912A (ja) * 2007-05-07 2008-11-13 Fujifilm Corp 微細構造体及びその製造方法
CN100553761C (zh) * 2007-07-18 2009-10-28 北京交通大学 一种有序碳载质子交换膜燃料电池催化剂及制备方法
JP2009074133A (ja) * 2007-09-20 2009-04-09 Fujifilm Corp 微細構造体
CN101246964B (zh) * 2008-01-31 2011-08-31 上海交通大学 质子交换膜燃料电池不锈钢双极板的表面改性方法
CN104466085B (zh) * 2008-02-22 2018-03-16 科罗拉多州立大学研究基金会 锂‑离子电池
US20090297913A1 (en) * 2008-03-25 2009-12-03 The University Of Georgia Research Foundation, Inc. Nanostructure-Enhanced stereo-electrodes for fuel cells and biosensors
JP4730405B2 (ja) 2008-07-11 2011-07-20 トヨタ自動車株式会社 リチウムイオン電池の正電極板に用いる電池用電極箔、リチウムイオン電池用の正電極板、リチウムイオン電池、車両、電池搭載機器、リチウムイオン電池の正電極板に用いる電池用電極箔の製造方法、及び、リチウムイオン電池用の正電極板の製造方法
KR101550367B1 (ko) * 2008-12-08 2015-09-07 광주과학기술원 전도성 선형 구조체를 포함하는 전극 구조체, 그 제조방법 및 리튬이차전지
WO2010089991A1 (ja) 2009-02-04 2010-08-12 独立行政法人産業技術総合研究所 リチウム二次電池用ファイバー電極及びその製造方法並びにファイバー電極を備えたリチウム二次電池
CN101581879A (zh) * 2009-05-27 2009-11-18 西安交通大学 一种用于纳米压印的软模板的制备方法
KR101175232B1 (ko) * 2009-06-29 2012-08-21 경상대학교산학협력단 집전체-전극 일체형 소자 및 그의 제조 방법
CN101603193A (zh) * 2009-07-10 2009-12-16 中国科学院电工研究所 一种剥离阳极氧化铝膜的方法
US20140342236A1 (en) * 2009-08-04 2014-11-20 Ut-Battelle, Llc Scalable fabrication of one-dimensional and three-dimensional, conducting, nanostructured templates for diverse applications such as battery electrodes for next generation batteries
WO2011017392A1 (en) * 2009-08-04 2011-02-10 Ut-Battelle, Llc Vertically-aligned nanopillar array on biaxially-textured substrates for nanoelectronics and energy conversion applications
CN102021628A (zh) * 2009-09-11 2011-04-20 中国科学院兰州化学物理研究所 一种金属钛或钛合金超疏油表面的制备方法
CN101660187B (zh) * 2009-09-15 2011-08-10 中山大学 基于预成型阳极氧化铝的亚微米图形衬底制作方法
KR20120102680A (ko) * 2009-11-11 2012-09-18 암프리우스, 인코포레이티드 전극용 중간 층 제조하기
GB0922308D0 (en) * 2009-12-22 2010-02-03 Rolls Royce Plc Hydrophobic surface
JP5611618B2 (ja) * 2010-03-04 2014-10-22 学校法人 工学院大学 多孔質材料の製造方法
CN101838835A (zh) * 2010-03-30 2010-09-22 同济大学 可直接用于电化学沉积的有序多孔氧化铝模板及制备方法
US9057144B2 (en) * 2010-07-30 2015-06-16 University Of Utah Research Foundation Nanostructured films and related methods
JP2012117144A (ja) * 2010-11-30 2012-06-21 Imec 正確に制御されたマスク陽極酸化のための方法
JP5970978B2 (ja) 2011-07-04 2016-08-17 日産自動車株式会社 電気デバイス用正極活物質、電気デバイス用正極及び電気デバイス
EP2562851A1 (en) * 2011-08-23 2013-02-27 Mustafa K. Ürgen Method for producing an electrode material comprising nanowires
KR101456963B1 (ko) * 2012-02-06 2014-11-04 주식회사 엘지화학 양극 활물질의 제조방법
US9420713B2 (en) * 2012-05-29 2016-08-16 Apple Inc. Double anodizing processes
CN102677129B (zh) 2012-06-13 2014-07-02 西北有色金属研究院 一种Ni基NiO纳米片阵列薄膜电极及其制备方法
FR3002219B1 (fr) * 2013-02-19 2015-04-10 Commissariat Energie Atomique Procede de fabrication d'une structure micromecanique et/ou nanomecanique comportant une surface poreuse
JP6030241B2 (ja) 2013-07-22 2016-11-24 富士フイルム株式会社 異方導電性部材の製造方法
CN104370298B (zh) * 2013-12-20 2015-09-16 东北大学 一种纳米锂离子导体铝酸锂粉体的制备方法
US20150325477A1 (en) 2014-05-09 2015-11-12 Applied Materials, Inc. Super conformal metal plating from complexed electrolytes
CN104726920A (zh) * 2015-03-06 2015-06-24 西安电子科技大学 超薄通孔阳极氧化铝模板制备及其转移方法
KR20160131226A (ko) * 2015-05-06 2016-11-16 숭실대학교산학협력단 다양한 범위의 소수성을 갖는 하이드로콜로이드의 제조방법
JP2016219171A (ja) 2015-05-18 2016-12-22 セイコーエプソン株式会社 電極体、電極体の製造方法、電極複合体および電池
CN104947167B (zh) 2015-06-04 2017-05-10 电子科技大学 两面一致多孔阳极氧化铝纳米模板的制备方法
CN204825084U (zh) * 2015-06-24 2015-12-02 广州鹏辉能源科技股份有限公司 一种高安全性锂离子电池铝集流体的连续表面处理装置
KR101701314B1 (ko) * 2015-07-02 2017-02-02 고려대학교 산학협력단 양극산화된 금속산화물 나노다공성 템플레이트 제작방법
EP3162764B1 (en) * 2015-11-02 2018-04-04 IMEC vzw Methods for forming lithium manganese oxide layers
CN105316743B (zh) * 2015-12-08 2017-10-27 深圳拓扑精膜科技有限公司 一种大面积超薄阳极氧化铝多孔膜的制备方法
EP3431637A1 (en) 2017-07-18 2019-01-23 IMEC vzw Porous solid materials and methods for fabrication

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050276743A1 (en) 2004-01-13 2005-12-15 Jeff Lacombe Method for fabrication of porous metal templates and growth of carbon nanotubes and utilization thereof
JP2012241224A (ja) 2011-05-18 2012-12-10 Kogakuin Univ 多孔質材料及びその製造方法
WO2015029881A1 (ja) 2013-08-30 2015-03-05 富士フイルム株式会社 金属充填微細構造体の製造方法
JP2016053212A (ja) 2014-07-31 2016-04-14 アイメック・ヴェーゼットウェーImec Vzw ナノワイヤクラスタの製造方法
JP2016195202A (ja) 2015-04-01 2016-11-17 住友電気工業株式会社 ヒートシンク及び電子機器

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