KR102637165B1 - 유량 측정 장치 및 처리 장치 - Google Patents

유량 측정 장치 및 처리 장치 Download PDF

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Publication number
KR102637165B1
KR102637165B1 KR1020160075721A KR20160075721A KR102637165B1 KR 102637165 B1 KR102637165 B1 KR 102637165B1 KR 1020160075721 A KR1020160075721 A KR 1020160075721A KR 20160075721 A KR20160075721 A KR 20160075721A KR 102637165 B1 KR102637165 B1 KR 102637165B1
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KR
South Korea
Prior art keywords
flow rate
unit
water wind
temperature
gas
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KR1020160075721A
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English (en)
Korean (ko)
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KR20160150047A (ko
Inventor
마사유키 카지와라
마사토 하야시
료지 안도
히로이치 이나다
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도쿄엘렉트론가부시키가이샤
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Publication of KR20160150047A publication Critical patent/KR20160150047A/ko
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F3/00Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow
    • G01F3/02Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement
    • G01F3/20Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having flexible movable walls, e.g. diaphragms, bellows
    • G01F3/22Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having flexible movable walls, e.g. diaphragms, bellows for gases
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
KR1020160075721A 2015-06-19 2016-06-17 유량 측정 장치 및 처리 장치 KR102637165B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2015-123949 2015-06-19
JP2015123949A JP6369398B2 (ja) 2015-06-19 2015-06-19 流量測定装置、及び処理装置

Publications (2)

Publication Number Publication Date
KR20160150047A KR20160150047A (ko) 2016-12-28
KR102637165B1 true KR102637165B1 (ko) 2024-02-16

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KR1020160075721A KR102637165B1 (ko) 2015-06-19 2016-06-17 유량 측정 장치 및 처리 장치

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JP (1) JP6369398B2 (zh)
KR (1) KR102637165B1 (zh)
TW (1) TWI647428B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019214827A1 (en) * 2018-05-10 2019-11-14 Kostov Mihail Apparatus and method for estimating fluid parameters
JP2020118476A (ja) * 2019-01-21 2020-08-06 Tdk株式会社 風速測定方法および風速計
CN110567537A (zh) * 2019-09-10 2019-12-13 贵阳学院 一种重力杆式光纤流量传感器及其流量检测方法
CN110658355A (zh) * 2019-11-01 2020-01-07 烟台龙源电力技术股份有限公司 一种管道气流流速测量装置
CN111604324A (zh) * 2020-05-15 2020-09-01 北京北方华创微电子装备有限公司 晶片清洗机的控制方法及晶片清洗机
KR102246720B1 (ko) * 2020-06-23 2021-04-30 (주)발맥스기술 초음파 유량 측정 장치
TWI764654B (zh) * 2021-03-30 2022-05-11 明泰科技股份有限公司 用以檢測出風路徑暢通或阻塞的風量檢測裝置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013057543A (ja) * 2011-09-07 2013-03-28 Denso Corp 空気流量測定装置
JP2014048064A (ja) * 2012-08-29 2014-03-17 Andex Co Ltd 風速計、及びこれを備えた塗装ブース

Family Cites Families (8)

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Publication number Priority date Publication date Assignee Title
JPS56172723U (zh) * 1980-05-23 1981-12-19
JPS5977024U (ja) * 1982-11-15 1984-05-24 東京瓦斯株式会社 ベ−ン式流量検出装置
US4599907A (en) * 1985-04-19 1986-07-15 Kraus Robert A Mass-flow sensing transducer
US5041009A (en) 1987-08-31 1991-08-20 Amp Incorporated Daisy chain connector and method
JPH02223822A (ja) * 1989-02-23 1990-09-06 Maezawa Ind Inc 流速または流量の測定方法及び測定装置
JPH05280735A (ja) * 1992-03-30 1993-10-26 Ubukata Seisakusho:Kk 風量計及びそれを用いた装置
US7024945B2 (en) * 2002-02-22 2006-04-11 Compumedics Limited Flow sensing apparatus
TWM321522U (en) * 2007-04-19 2007-11-01 Tong Dean Tech Co Ltd Flow sensing device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013057543A (ja) * 2011-09-07 2013-03-28 Denso Corp 空気流量測定装置
JP2014048064A (ja) * 2012-08-29 2014-03-17 Andex Co Ltd 風速計、及びこれを備えた塗装ブース

Also Published As

Publication number Publication date
KR20160150047A (ko) 2016-12-28
JP2017009380A (ja) 2017-01-12
TW201704721A (zh) 2017-02-01
JP6369398B2 (ja) 2018-08-08
TWI647428B (zh) 2019-01-11

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