M321522 八、新型說明： 【新型所屬之技術領域】 ^創作係有關於—種流量感測裝置，係可對流體的流 里值進彳了有效的監測，錢高流體在後續㈣上的穩定性。 【先前技術】 於各種不同的工業製程而言’水係具有清洗及降溫 二=的功效’而在半導體晶圓製程中，水的使用更是不 可或缺的，例如晶圓要進入各個處理 晶圓之清洗程序。又，隨著半導體產業= =線f減少的發展趨勢，半導體晶圓的處理步驟亦隨之 曰加’換吕之’在製程中所使用水量也隨之增多，且，在 S二不僅褐限在清洗的程序，更可使用水來進行相關 、Q πρ。例如.設備泵在晶圓製造時的工作溫度可達 正當’藉！水來降低工作溫度，不僅可穩定設備之 的 ’、可保5蒦使用者之操作安全。因此，在晶圓製作 、4中水之正常及穩定的供應是極為重要的 :::::應不僅可提高製程時的穩定性，並可軸 敎於製財發生水流管線棘阻塞，或供水馬達過 ::無法正常加壓之情形時’將使得水流無法達到正常的 不能提供敎且足夠之水源，將造成晶圓製造時之 二此外’水μ穩定的情形往往無法預先得知 日一產品已製造完成後才發現此一問題，但對產品的良 M321522 率已然造成-定影響，並使得晶圓公司的生產成本增加。 【新型内容】 為此，如何針對一般流體在進行使用時所可能產生的 問題，設計出-種可監控流體流量的感測褒置，不但 楚得^流體的流量，同時亦可對流體的流量進行有效的控 制，藉此將可以提高流體在後續使用上的穩定性，此即為 本創作之創作重點。 、一本:之主要目的’在於提供一種流量感測裝置，在 =之官線迴路發生阻塞時，主控制電路將發出—通知訊 除讓使用者可以即時察覺管線迴路所產生的 中!4C目的，在於提供-種流量感測褒置，其 一曰、，則&的设置，讓使用者可進行額定流量範圍的設 各個晶圓製程或工業製程中所需水流流速之不 二心日周整適當的額定流量範圍，以設定出符合不同水 々IL >巩速之安全範圍。 由通=SC : 2於提t 一種流量感測裝置，藉 使用情形進行^护使用者可在遠端對流體之管線迴路的 盆主要^上目的，本創作提供—種—種流量感測裝置， 二感I !!包括有：一流量感測器’係包括有一扇葉及 測哭將1/,—流體流經扇葉時將會帶動扇葉轉動，而感 'um心—感應電流；-轉換器，連接流量感測器 M321522 以接收感應電流，並將感應電流轉換成為一流量值；及一 主控制電路，連接轉換器，係於流量值超出一額定流量範 圍後產生一通知訊號。 為達成上述另一目的，本創作提供一種一種流量感測 _ 裝置，其主要結構係包括有：一流量感測器，係包括有一 扇葉及一計數器，當一流體流經扇葉時將會帶動扇葉轉 動，而計數器係用以感測扇葉經過的次數；一轉換器，連 接流量感測器，並將扇葉經過的次數轉換成為一流量值； • 及一主控制電路，連接轉換器，係於流量值超出一額定流 量範圍後產生一通知訊號。 【實施方式】 請參閱第1圖及第2圖，係分別為本創作流量感測裝 置一較佳實施例之方塊示意圖及流量感測器之構造示意 圖。如圖所示，流量感測裝置10主要結構包括有一流量感 測器11、一轉換器13及一主控制電路15。其中，流量感 ^ 測器Π係包括有一感測器111及一扇葉119，且流量感測 ‘ 裝置10係可連接一電源供應器17,使得電源供應器17可 • 分別提供工作電壓至流量感測器11、轉換器13及主控制 電路15等裝置。 在使用流量感測裝置10時，係將流量感測器11設置 於一流體12的管線迴路上，以監控流體12在管線迴路中 的流量大小，其中流體12係可為液體、氣體或水流。流量 感測器11係包括有一感測器111、一流入孔11 3、一流出 6 M321522 孔115及一扇葉ι]9〇並Φ，卢拉， 、 、 ^ y ，、甲，扇茱丨l9係由一導電材料所組 成’而感測器⑴則包括有-霍爾感測器Π2及-磁鐵 114，例如’可將磁鐵U4設置於霍爾感測器⑴之後端， 並使#隹爾感測器】〗2及磁鐵U4靠近扇葉】】 、當流體12流經流量感測器、】"夺，將會由流入孔ιΐ3 抓入而攸机出孔115流出，並帶動流量感測器η之扇葉HQ 轉動。由於在本創作實施例中« 119係由導電材料所製 成’因此扇葉119在轉動時將會切割磁鐵ll4所形成的磁 力線’致使扇葉119上的磁通量產生變化’藉此感測器Ul 將會感測到一感應電流。 流！感測H II將會依據扇葉119轉速的不同而感應出 不同大小的感應電流’並將感應電流傳送至與流 1夕1相連接之轉換器13。轉換器13在接收感應電流後^ ^感應電流轉換成-流量值，藉此將可以推算出流體12在 官線迴路中之流量或流速，並將流體12的流量值傳送至主 =制電路15。在本創作另一實施例中，亦可依據感應電流 :大小而推算出扇帛119的轉動頻率’而後再依據扇葉119 的轉動頻率換算出流體12的流量值，如此不僅可得知流體 ^在Β線迴路中之流量或流速，亦可了解扇葉119的轉動 月开y。在貫際應用時，係可以一硬體裝置一々 成轉換器1“酬，並進行感應電流與流量值：;:= 換。 主控制電路15係可用於設定及紀錄一額定流量範 並將頟定流量範圍與轉換器〗3運算出的流量值進行比 M321522 對，以得知流體12之流量值是否在設定的流量範圍内。主 控制電路15尚包括一輸入器151，例如輸入器151係可為 一按鍵輸入器，當使用者欲進行主控制器15之額定流量範 圍的設定時，係可藉由輸入器15 1輸入額定流量範圍，而 .輕易完成額定流量範圍的設定。 在額定流量範圍設定完成後，主控制器15會將額定流 量範圍與所接收之流量值進行比對。假若流量值處於額定 流量範圍内，則主控制器15將不會進行任何動作並持續進 _ 行流量的監控。反之，若流量值係超過額定流量範圍，則 控制器15將會產生一通知訊號，讓使用者得知流體12之 管線迴路出現異常的情形，並可即時排除流體12之管線迴 路所發生的故障，例如，控制器15會將通知訊號傳送至顯 示裝置19,而使用者將可由顯示裝置19得知流體12之管 線迴路的工作情形。 此外，流量感測裝置10係可應用在半導體製程中，並 配合不同晶圓製程中所需之流體12的流量，以調整出適當 ® 的額定流量範圍，藉此將可設定出適用於不同晶圓製程之 • 流體12的流量範圍。又，上述之顯示裝置19不僅可顯示 ♦ 額定流量範圍及通知訊號，尚可進行轉換器13所轉換之流 量值的顯示，如此可讓使用者輕易暸解管線迴路之流速及 流量情況。 請參閱第3圖，係為本創作流量感測器又一實施例之 構造示意圖。如圖所示，本創作所述之流量感測器21係包 括有一霍爾感測器〗12及一扇葉219，其中，扇葉219係 M321522 可运擇由一非導電材料所組成，並於扇葉219上設置有一 磁鐵214，而在霍爾感測器112上則未設置有如第2圖所 示之磁鐵（114)。 如同第2圖所述之實施例，流體12在流過流量感測器 • 21後同樣會帶動扇葉219轉動，同時間扇葉219上的磁鐵 * 214也將跟隨之轉動。藉此，流量感測器21同樣會依據扇 葉219轉速的不同而感應出不同大小的感應電流，並將感 ⑩應電流傳送至與流量感測器21相連接之轉換器13，進一 步推算出扇葉219的轉動速度及流體12的流量值。 明參閱第4圖，係為本創作流量感測器又一實施例之 構造示意圖。如圖所示，流量感測器31主係 數請及-扇葉319。其中，扇葉319=:4 電材料或非導電材料所組成，而計數器312係用以對經過 的扇葉319進行感測計數之動作。相較於以上的實施例， 本創作貫施例中無論在扇葉319或是計數器312上皆未設 φ 至有磁鐵（114/214)。 . 當流體12流過流量感測器31時將會帶動扇葉319轉 動，此時扇葉319上的凹部與凸部將反覆通過計數器312: 而计數器312將會感測扇葉319凹部或凸部經過的次數， 進而推算出扇葉319的轉動頻率，例如轉換器13係可依據 計數器312所感測之次數，而推算出扇# 319的轉動頻率。 由於本實施例之流量感測器31所感測出的訊號係為肩葉 319之轉動次數，與第2圖及第3圖之流量感測器⑵/川 所感測出之感應電流不同，因此在本實施例中，流量感測 9 M321522 裝置10係透過轉換器13將計數器312所感測的扇葉319 轉動次數轉換成流體12的流量值，即可得知流體12在管 線迴路中之流量值。 又’本實施例與上述第2圖及第3圖之實施例，其流 量感測器11/21/31之流入孔113及流出孔115皆可配合各 個晶圓製造流程中所需流體流速之不同而調整孔徑之大 小。當晶圓製造流程中需採用較快之流體流速，則係可將M321522 VIII. New description: [New technical field] The authoring department has a kind of flow sensing device, which can effectively monitor the flow value of the fluid, and the stability of the Qiangao fluid in the subsequent (four) . [Prior Art] In the various industrial processes, 'the water system has the effect of cleaning and cooling two='. In the semiconductor wafer process, the use of water is indispensable, for example, the wafer has to enter each processing crystal. Round cleaning procedure. Moreover, with the development trend of the semiconductor industry == line f reduction, the processing steps of the semiconductor wafers will also increase, and the amount of water used in the process will also increase, and in S 2, not only the brown limit In the cleaning process, water can be used to correlate, Q πρ. For example, the operating temperature of the equipment pump during wafer fabrication can be justified. Water to lower the working temperature not only stabilizes the equipment, but also protects the user's operation safety. Therefore, it is extremely important to have a normal and stable supply of water in wafer fabrication, 4::::: It should not only improve the stability during the process, but also cause the water flow pipeline to block or block the water supply. Motor over: When the pressure is not normal, 'will make the water flow unable to reach normal and can not provide enough water source, which will cause the second time of wafer manufacturing. 'Water μ stability is often not known in advance. This problem was discovered only after the manufacturing was completed, but the product's good M321522 rate has already had a certain impact and increased the wafer company's production costs. [New content] To this end, how to design a sensing device that can monitor the flow of fluids for the problems that may occur when the general fluid is used, not only the flow rate of the fluid, but also the flow of the fluid. Effective control, which will improve the stability of the fluid in subsequent use, is the focus of this creation. One: The main purpose of 'is to provide a flow sensing device. When the official line circuit of the = is blocked, the main control circuit will send out a notification message to let the user immediately detect the middle of the pipeline circuit! 4C purpose In the case of providing a flow sensing device, the setting of one, and the setting allows the user to perform the rated flow range of each wafer process or the flow rate required for the industrial process. Set the appropriate rated flow range to set a safe range for different water 々 IL > By the flow = SC: 2 in the mention of a flow sensing device, the use of the situation to protect the user can be at the distal end of the pipeline circuit of the fluid main purpose, the creation of a kind of flow sensing device The second sense I!! includes: a flow sensor 'includes a blade and the test will cry 1 /, - fluid will flow through the blade will drive the blade to rotate, and sense 'um heart - induced current; a converter connected to the flow sensor M321522 to receive the induced current and convert the induced current into a flow value; and a main control circuit connected to the converter to generate a notification signal after the flow value exceeds a rated flow range. In order to achieve the above other object, the present invention provides a flow sensing device, the main structure of which includes: a flow sensor comprising a blade and a counter, when a fluid flows through the blade Drive the fan blade to rotate, and the counter is used to sense the number of times the blade passes; a converter that connects the flow sensor and converts the number of times the blade passes through into a flow value; • and a main control circuit, connection conversion The device generates a notification signal after the flow value exceeds a rated flow range. [Embodiment] Please refer to FIG. 1 and FIG. 2, which are block diagrams of a preferred embodiment of the flow sensing device and a schematic diagram of the flow sensor. As shown, the main structure of the flow sensing device 10 includes a flow sensor 11, a converter 13, and a main control circuit 15. The flow sensor includes a sensor 111 and a blade 119, and the flow sensing device 10 is connectable to a power supply 17, so that the power supply 17 can provide the working voltage to the flow respectively. Devices such as the sensor 11, the converter 13, and the main control circuit 15. When the flow sensing device 10 is used, the flow sensor 11 is placed on a line circuit of a fluid 12 to monitor the flow of fluid 12 in the line circuit, wherein the fluid 12 can be a liquid, gas or water stream. The flow sensor 11 includes a sensor 111, an inflow hole 11 3, a first-class 6 M321522 hole 115, and a fan leaf ]9〇 and Φ, Lula, , , ^ y , A, fan 茱丨The l9 is composed of a conductive material' and the sensor (1) includes a -Hall sensor Π2 and a magnet 114, for example, 'the magnet U4 can be placed at the rear end of the Hall sensor (1), and #隹Sensor] 〗 2 and magnet U4 close to the fan blade]], when the fluid 12 flows through the flow sensor, "," will be caught by the inflow hole ιΐ3 and the outflow hole 115 will flow out and drive the flow The blade HQ of the sensor η rotates. Since the «119 is made of a conductive material" in the present embodiment, the magnetic field line formed by the cutting of the magnet 11 when the blade 119 is rotated causes the magnetic flux on the blade 119 to change, thereby the sensor U1. An induced current will be sensed. flow! The sensing H II will induce different magnitudes of induced currents depending on the rotational speed of the blade 119 and transmit the induced current to the converter 13 connected to the current. The converter 13 converts the induced current into a flow value after receiving the induced current, whereby the flow or flow rate of the fluid 12 in the official circuit can be derived, and the flow value of the fluid 12 is transmitted to the main = circuit 15 . In another embodiment of the present invention, the rotational frequency of the fan 119 can also be calculated according to the induced current: the size, and then the flow rate of the fluid 12 can be converted according to the rotational frequency of the blade 119, so that not only the fluid can be known. The flow or flow rate in the twist line circuit can also be understood as the rotational opening y of the blade 119. In the case of continuous application, the system can be converted into a converter 1 and the induced current and flow value:;:= change. The main control circuit 15 can be used to set and record a rated flow rate and will be The constant flow range is compared with the flow value calculated by the converter 3 by M321522 to know whether the flow value of the fluid 12 is within the set flow range. The main control circuit 15 further includes an input 151, such as an input 151 It can be a button input device. When the user wants to set the rated flow range of the main controller 15, the rated flow range can be input through the input device 15 1 , and the rated flow range can be easily set. After the range setting is completed, the main controller 15 compares the rated flow range with the received flow value. If the flow value is within the rated flow range, the main controller 15 will not perform any action and continue to flow. In contrast, if the flow value exceeds the rated flow range, the controller 15 will generate a notification signal to let the user know that the pipeline 12 of the fluid 12 is abnormal. The failure of the pipeline circuit of the fluid 12 can be immediately removed. For example, the controller 15 transmits a notification signal to the display device 19, and the user will be informed by the display device 19 of the operation of the pipeline circuit of the fluid 12. The flow sensing device 10 can be applied in a semiconductor process and matched with the flow rate of the fluid 12 required in different wafer processes to adjust the rated flow range of the appropriate ®, thereby being configurable for different wafers. Process • The flow range of the fluid 12. In addition, the display device 19 can display not only the ♦ rated flow range and the notification signal, but also the display of the flow value converted by the converter 13, so that the user can easily understand the pipeline circuit. Flow rate and flow rate. Please refer to Fig. 3, which is a schematic diagram of another embodiment of the present flow sensor. As shown, the flow sensor 21 of the present invention includes a Hall sensing. 12 and a leaf 219, wherein the blade 219 is M321522, which is composed of a non-conductive material, and a magnet 214 is disposed on the blade 219, and The sensor 112 is not provided with a magnet (114) as shown in Fig. 2. As in the embodiment of Fig. 2, the fluid 12 also drives the fan blade 219 to rotate after flowing through the flow sensor 21. At the same time, the magnet * 214 on the fan blade 219 will also follow the rotation. Thereby, the flow sensor 21 will also induce different magnitudes of induced current according to the rotation speed of the blade 219, and transmit the sense 10 current to The converter 13 connected to the flow sensor 21 further estimates the rotational speed of the blade 219 and the flow rate of the fluid 12. Referring to Figure 4, it is a schematic diagram of another embodiment of the present flow sensor. As shown, the flow sensor 31 has a main coefficient of - the blade 319. wherein the blade 319 =: 4 is composed of a non-conductive material or a non-conductive material, and the counter 312 is used to pass the passing blade 319. The action of sensing the count. Compared with the above embodiment, in the present embodiment, no φ to magnet (114/214) is provided on the blade 319 or the counter 312. When the fluid 12 flows through the flow sensor 31, the blade 319 will be rotated, at which time the recesses and projections on the blade 319 will repeatedly pass through the counter 312: and the counter 312 will sense the recess of the blade 319 Or the number of times the convex portion passes, and then the rotational frequency of the blade 319 is derived. For example, the converter 13 can calculate the rotational frequency of the fan #319 according to the number of times the counter 312 senses. Since the signal sensed by the flow sensor 31 of the present embodiment is the number of rotations of the shoulder blade 319, it is different from the sense current sensed by the flow sensor (2)/Chuan of FIGS. 2 and 3, and thus In this embodiment, the flow sensing 9 M321522 device 10 converts the number of rotations of the blade 319 sensed by the counter 312 into the flow rate of the fluid 12 through the converter 13, so that the flow value of the fluid 12 in the pipeline circuit can be known. In the embodiment and the embodiments of the second and third embodiments, the inflow hole 113 and the outflow hole 115 of the flow sensor 11/21/31 can match the required fluid flow rate in each wafer manufacturing process. Adjust the size of the aperture differently. When a faster fluid flow rate is required in the wafer fabrication process,
流入孔113及流出孔115之孔徑設計較小，如此流體12將 會集中而增快流體12之流速，將使得流量感測器n感測 得到較大之感應電流或較快之扇葉轉動頻率；相反的，當 晶圓製造流程中需要採用較慢之流體流速，則可將流入孔 113及流出孔115之孔徑設計較大點，如此流體12將會分 散而減慢流體12之流速，將使得流量感測器11/21/31感測The apertures of the inflow hole 113 and the outflow hole 115 are designed to be small, so that the fluid 12 will concentrate and increase the flow rate of the fluid 12, which will cause the flow sensor n to sense a larger induced current or a faster blade rotation frequency. Conversely, when a slower fluid flow rate is required in the wafer fabrication process, the apertures of the inflow hole 113 and the outflow hole 115 can be designed to be larger, so that the fluid 12 will disperse and slow down the flow rate of the fluid 12, Make the flow sensor 11/21/31 sense
4于到較小之感應電流或較慢之扇葉轉動頻率。 —最後，請參閱第5圖，係為本創作流量感測裝置又一 貫施例之構造示意圖。如圖所示，相較於第工圖所示之實 施例’本創作所述之流量感測裝置4〇尚包括有一通訊裝置 44及/或一皆不裒置46，例如主控制電路Μ係與警示裝置 46及通騎置44才目連接。當管線迴路内之流體12的流速 發生異常的情形時，例如流體12之流量值超出額定流量範 圍時，主控制電路15將會發出—通知訊號至顯示裝置19、 通說I置44及/或聲示努晉^ '。丁衣置46，錯此，不僅可於顯示裝置 1 9上顯示流體！ 2的流量、$ — 里領疋流夏範圍及通知訊號，以 利於使用者對流量的大小進^ J逗仃監控，同時亦可以通訊裝置 M321522 44及/或含二气置46告知使用者管線迴路 的狀況，以提高使用上的即時性。 疋出現不正常 警禾裝置46係可選擇為一發 體）及/或一琴響元件（例如··蜂鳴器 例如·發光二極 •現不正常的情形時產生警示光源或u於管線迴路出 係可為—RS-485通訊模組，並可同通訊裝置44 用者的通訊裝置（例如：PDa 專迗矾號至複數個使 可以遠端監控管線迴路之運作情Y電^等裝置），藉此將 •亦可與個人電腦相連接，並透過網：二’通訊裝置44 情形。 路现L·官線迴路之使用 用來限定本創二-較佳實施例而已，並非 均應包括於本創作之申請專利二内均μ化與修飾’ • 【圖式簡單說明】 •弟1圖·仏為本創作流量感測裝置-較佳實施例之方塊示意 圖。 ‘ 第2圖：係i |力， 、 、彳作流量感測器一較佳實施例之構造示意 圖。 第3圖 第4圖 弟5圖4 to a smaller induced current or a slower blade rotation frequency. — Finally, please refer to Figure 5, which is a schematic diagram of the construction of a further embodiment of the present flow sensing device. As shown in the figure, the flow sensing device 4 described in the present embodiment has a communication device 44 and/or a device 46, such as a main control circuit. It is connected to the warning device 46 and the riding device 44. When the flow rate of the fluid 12 in the pipeline circuit is abnormal, for example, when the flow value of the fluid 12 exceeds the rated flow range, the main control circuit 15 will issue a notification signal to the display device 19, say I set 44, and/or Voices of Nujin ^ '. Ding Yi set 46, the wrong way, not only can display the fluid on the display device 19! 2 traffic, $ 里 疋 夏 夏 范围 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 范围 及 及 范围 范围 范围The condition of the loop to improve the immediacy of use.不The abnormal alarm device 46 can be selected as a hair body) and/or a singer element (for example, a buzzer such as a light-emitting diode). If the current situation is abnormal, a warning light source or u is generated in the pipeline circuit. The output can be -RS-485 communication module, and can be used with the communication device 44 user's communication device (for example: PDa special number to a plurality of devices that can remotely monitor the operation of the pipeline circuit) In this way, it can also be connected to a personal computer and through the network: the second 'communication device 44' situation. The use of the L L official line circuit is used to define the second embodiment - the preferred embodiment, not all of which should be included In the application patent 2 of the present application, the method is simplified and modified. • [Simple description of the drawing] • Figure 1 is a block diagram of the preferred flow sensing device - a preferred embodiment. 'Fig. 2: i A schematic diagram of a configuration of a preferred embodiment of a force sensor, a flow sensor, etc. Figure 3, Figure 4, Figure 5
=為本創作流量感測器又一實施例之構造示意围 、為本創作流量感測器又一實施例之構造示意S 係為本創作流量感測裝置又一實施例之方塊开 圖。 M321522 【主要元件符號說明】 10 流量感測裝置 11 流量感測器 111 感測器 112 霍爾感測器 113 流入孔 114 磁鐵 115 流出子L 119 扇葉 12 流體 13 轉換器 15 主控制器 151 輸入器 17 電源供應器 19 顯不裝置 21 流量感測器 214 磁鐵 219 扇葉 31 流量感測器 312 計數器 319 扇葉 40 流量感測裝置 44 通訊裝置 46 警示裝置= structuring of a further embodiment of the present flow sensor, and a schematic representation of yet another embodiment of the present flow sensor is a block diagram of yet another embodiment of the authored flow sensing device. M321522 [Main component symbol description] 10 Flow sensing device 11 Flow sensor 111 Sensor 112 Hall sensor 113 Inflow hole 114 Magnet 115 Outflow L 119 Fan blade 12 Fluid 13 Converter 15 Main controller 151 Input 17 power supply 19 display device 21 flow sensor 214 magnet 219 blade 31 flow sensor 312 counter 319 blade 40 flow sensing device 44 communication device 46 warning device