KR102524838B1 - 슬러리 조성물, 린스 조성물, 기판 연마 방법 및 린스 방법 - Google Patents

슬러리 조성물, 린스 조성물, 기판 연마 방법 및 린스 방법 Download PDF

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Publication number
KR102524838B1
KR102524838B1 KR1020177008862A KR20177008862A KR102524838B1 KR 102524838 B1 KR102524838 B1 KR 102524838B1 KR 1020177008862 A KR1020177008862 A KR 1020177008862A KR 20177008862 A KR20177008862 A KR 20177008862A KR 102524838 B1 KR102524838 B1 KR 102524838B1
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South Korea
Prior art keywords
water
slurry composition
structural unit
polishing
present
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KR1020177008862A
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English (en)
Korean (ko)
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KR20170048513A (ko
Inventor
츠요시 마스다
히로시 키타무라
요시유키 마츠무라
Original Assignee
씨엠씨 마테리알즈 가부시키가이샤
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Publication of KR20170048513A publication Critical patent/KR20170048513A/ko
Application granted granted Critical
Publication of KR102524838B1 publication Critical patent/KR102524838B1/ko
Assigned to 엔테그리스 재팬 가부시키가이샤 reassignment 엔테그리스 재팬 가부시키가이샤 권리의 전부이전등록 Assignors: 씨엠씨 마테리알즈 가부시키가이샤
Assigned to 엔테그리스, 아이엔씨. reassignment 엔테그리스, 아이엔씨. 권리의 전부이전등록 Assignors: 엔테그리스 재팬 가부시키가이샤
Active legal-status Critical Current
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/04—Aqueous dispersions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/37—Polymers
    • C11D3/3746—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • C11D3/3753—Polyvinylalcohol; Ethers or esters thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Materials Engineering (AREA)
KR1020177008862A 2014-09-05 2015-09-04 슬러리 조성물, 린스 조성물, 기판 연마 방법 및 린스 방법 Active KR102524838B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2014-181015 2014-09-05
JP2014181015A JP6559936B2 (ja) 2014-09-05 2014-09-05 スラリー組成物、リンス組成物、基板研磨方法およびリンス方法
PCT/JP2015/004504 WO2016035346A1 (en) 2014-09-05 2015-09-04 Slurry composition, rinse composition, substrate polishing method and rinsing method

Publications (2)

Publication Number Publication Date
KR20170048513A KR20170048513A (ko) 2017-05-08
KR102524838B1 true KR102524838B1 (ko) 2023-04-24

Family

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KR1020177008862A Active KR102524838B1 (ko) 2014-09-05 2015-09-04 슬러리 조성물, 린스 조성물, 기판 연마 방법 및 린스 방법

Country Status (5)

Country Link
JP (1) JP6559936B2 (https=)
KR (1) KR102524838B1 (https=)
CN (1) CN107075309B (https=)
TW (1) TWI633178B (https=)
WO (1) WO2016035346A1 (https=)

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* Cited by examiner, † Cited by third party
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JP6801964B2 (ja) * 2016-01-19 2020-12-16 株式会社フジミインコーポレーテッド 研磨用組成物及びシリコン基板の研磨方法
JP6971676B2 (ja) * 2016-08-29 2021-11-24 株式会社荏原製作所 基板処理装置および基板処理方法
KR20190045249A (ko) 2016-08-31 2019-05-02 가부시키가이샤 후지미인코퍼레이티드 연마용 조성물 및 연마용 조성물 세트
JP6495230B2 (ja) * 2016-12-22 2019-04-03 花王株式会社 シリコンウェーハ用リンス剤組成物
WO2018124226A1 (ja) * 2016-12-28 2018-07-05 ニッタ・ハース株式会社 研磨用組成物及び研磨方法
JP7077236B2 (ja) * 2016-12-28 2022-05-30 ニッタ・デュポン株式会社 研磨用組成物
WO2019187969A1 (ja) * 2018-03-30 2019-10-03 株式会社フジミインコーポレーテッド 研磨用組成物
JP7361467B2 (ja) * 2018-12-25 2023-10-16 ニッタ・デュポン株式会社 研磨用組成物
JP2020203980A (ja) * 2019-06-17 2020-12-24 日本キャボット・マイクロエレクトロニクス株式会社 化学機械研磨組成物、リンス組成物、化学機械研磨方法及びリンス方法
JP7495283B2 (ja) * 2019-09-06 2024-06-04 株式会社フジミインコーポレーテッド 表面処理組成物、表面処理組成物の製造方法、表面処理方法、および半導体基板の製造方法
CN112457930A (zh) * 2019-09-06 2021-03-09 福吉米株式会社 表面处理组合物、表面处理组合物的制造方法、表面处理方法和半导体基板的制造方法
JP7477964B2 (ja) * 2019-12-13 2024-05-02 インテグリス・インコーポレーテッド 化学機械研磨組成物及びそれを用いた化学機械研磨方法
JP6884898B1 (ja) * 2020-01-22 2021-06-09 日本酢ビ・ポバール株式会社 研磨用組成物
JP7495317B2 (ja) * 2020-09-25 2024-06-04 株式会社フジミインコーポレーテッド 表面処理組成物、表面処理組成物の製造方法、表面処理方法、および半導体基板の製造方法
JP7645682B2 (ja) * 2021-03-31 2025-03-14 株式会社フジミインコーポレーテッド 表面処理組成物、表面処理組成物の製造方法、表面処理方法、及び半導体基板の製造方法
KR102728251B1 (ko) * 2021-12-31 2024-11-11 주식회사 케이씨텍 컨택 공정용 금속막 슬러리 조성물
KR20230106938A (ko) * 2022-01-07 2023-07-14 삼성에스디아이 주식회사 텅스텐 패턴 웨이퍼 연마용 ｃｍｐ 슬러리 조성물 및 이를 이용한 텅스텐 패턴 웨이퍼의 연마 방법
CN115873508A (zh) * 2022-12-26 2023-03-31 博力思(天津)电子科技有限公司 去除速率高且表面粗糙度低的SiC衬底抛光液及抛光工艺

Citations (2)

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JP2014038906A (ja) * 2012-08-13 2014-02-27 Fujimi Inc 研磨用組成物、当該研磨用組成物の製造方法、及び当該研磨用組成物を用いた半導体基板の製造方法
WO2015060293A1 (ja) 2013-10-25 2015-04-30 花王株式会社 シリコンウェーハ用研磨液組成物

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JPH11140427A (ja) * 1997-11-13 1999-05-25 Kobe Steel Ltd 研磨液および研磨方法
US6503418B2 (en) * 1999-11-04 2003-01-07 Advanced Micro Devices, Inc. Ta barrier slurry containing an organic additive
JP4668528B2 (ja) * 2003-09-05 2011-04-13 株式会社フジミインコーポレーテッド 研磨用組成物
JP2006005246A (ja) * 2004-06-18 2006-01-05 Fujimi Inc リンス用組成物及びそれを用いたリンス方法
KR20130041084A (ko) * 2010-06-18 2013-04-24 히타치가세이가부시끼가이샤 반도체 기판용 연마액 및 반도체 웨이퍼의 제조 방법
KR101970858B1 (ko) * 2012-03-14 2019-04-19 가부시키가이샤 후지미인코퍼레이티드 연마용 조성물 및 반도체 기판의 제조 방법
US9133366B2 (en) * 2012-05-25 2015-09-15 Nissan Chemical Industries, Ltd. Polishing liquid composition for wafers

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014038906A (ja) * 2012-08-13 2014-02-27 Fujimi Inc 研磨用組成物、当該研磨用組成物の製造方法、及び当該研磨用組成物を用いた半導体基板の製造方法
WO2015060293A1 (ja) 2013-10-25 2015-04-30 花王株式会社 シリコンウェーハ用研磨液組成物

Also Published As

Publication number Publication date
KR20170048513A (ko) 2017-05-08
WO2016035346A1 (en) 2016-03-10
JP6559936B2 (ja) 2019-08-14
CN107075309B (zh) 2020-09-01
TW201615797A (zh) 2016-05-01
TWI633178B (zh) 2018-08-21
JP2016056220A (ja) 2016-04-21
CN107075309A (zh) 2017-08-18

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